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公开(公告)号:US3266127A
公开(公告)日:1966-08-16
申请号:US34034464
申请日:1964-01-27
Applicant: IBM
Inventor: HARDING WILLIAM E , LANGDON JACK L , PECORARO RAYMOND P
IPC: H01L21/00 , H01L23/485
CPC classification number: H01L21/00 , H01L23/485 , H01L2924/0002 , Y10S148/033 , Y10S428/929 , Y10T29/49149 , Y10T428/12528 , Y10T428/12611 , Y10T428/12736 , H01L2924/00
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2.Method and apparatus for producing articles having arrays of similar patterns 失效
Title translation: 用于生产具有相似图案阵列的制品的方法和装置公开(公告)号:US3288045A
公开(公告)日:1966-11-29
申请号:US46715965
申请日:1965-05-04
Applicant: IBM
Inventor: HARDING WILLIAM E
IPC: G03F7/20
CPC classification number: G03F7/70475
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公开(公告)号:US3889355A
公开(公告)日:1975-06-17
申请号:US32992073
申请日:1973-02-05
Applicant: IBM
Inventor: ARONSTEIN JESSE , HARDING WILLIAM E
IPC: H01L21/30 , B23Q41/06 , H01L21/02 , H01L21/027 , H01L21/50 , H01L21/677 , H01L21/70 , B01J17/00
CPC classification number: B23Q41/06 , Y10T29/41 , Y10T29/5124
Abstract: A manufacturing system utilizing a plurality of satellite functional processing stations or sectors, each capable of standalone operation. The stations are interconnected by a handler or conveyor, which will transport individual ones of work-pieces from one processing station to the next in accordance with a prescribed sequence corresponding to the processing requirements for the workpiece.
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4.High resolution multiple image camera and method of fabricating integrated circuit masks 失效
Title translation: 高分辨率多图像摄像机和整合电路面板的制作方法公开(公告)号:US3449049A
公开(公告)日:1969-06-10
申请号:US3449049D
申请日:1966-01-14
Applicant: IBM
Inventor: HARDING WILLIAM E , PERRI JOHN A , RISEMAN JACOB , RUDER WINFIELD S
CPC classification number: G03F7/70475 , G03B19/023
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公开(公告)号:US3280019A
公开(公告)日:1966-10-18
申请号:US29258663
申请日:1963-07-03
Applicant: IBM
Inventor: HARDING WILLIAM E , SCHWARTZ ROBERT S
IPC: H01L21/288 , H01L21/304 , H01L21/316 , H01L21/56 , H01L21/68 , H01L21/78 , H01L23/29 , H01L23/31
CPC classification number: H01L21/6835 , H01L21/2885 , H01L21/3043 , H01L21/316 , H01L21/56 , H01L21/78 , H01L23/291 , H01L23/3157 , H01L2224/16 , H01L2224/16225 , H01L2224/16227 , H01L2224/32225 , H01L2924/01012 , H01L2924/01014 , H01L2924/01019 , H01L2924/01066 , H01L2924/01078 , Y10T29/49789
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