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1.发明申请公开(公告)号：US20150147890A1
公开(公告)日：2015-05-28
申请号：US14138147
申请日：2013-12-23
发明人： Kung-Liang Lin , Chien-Chih Chen , Fu-Ching Tung , Chih-Yung Chen , Shih-Chin Lin , Kuan-Yu Lin , Chia-Hao Chang , Shieh-Sien Wu
IPC分类号： H01L51/52 , C23C16/505 , C23C16/458 , C23C16/455 , H01L21/02
CPC分类号： C23C16/4583 , C23C16/455 , C23C16/45536 , C23C16/45544 , C23C16/45548 , C23C16/50 , C23C16/505 , H01J37/32091 , H01J37/3244 , H01L21/02274 , H01L21/0228 , H01L51/5253
摘要： A multi-mode thin film deposition apparatus including a reaction chamber, a carrying seat, a showerhead, an inert gas supplying source, a first gas inflow system and a second gas inflow system is provided. The carrying seat is disposed in the reaction chamber. The showerhead has a gas mixing room and gas holes disposed at a side of the gas mixing room. The gas mixing room is connected to the reaction chamber through the plurality of gas holes which faces the carrying seat. The first gas inflow system is connected to the reaction chamber and supplies a first process gas during a first thin film deposition process mode. The inert gas supplying source is connected to the gas mixing room for supplying an inert gas. The second gas inflow system is connected to the gas mixing room to supply a second process gas during a second thin film deposition process mode.
摘要翻译： 提供一种多模式薄膜沉积设备，包括反应室，承载座，喷头，惰性气体供应源，第一气体流入系统和第二气体流入系统。 承载座设置在反应室中。 喷头具有设在气体混合室一侧的气体混合室和气孔。 气体混合室通过面向承载座的多个气孔连接到反应室。 第一气体流入系统连接到反应室，并在第一薄膜沉积工艺模式期间提供第一工艺气体。 惰性气体供给源连接到用于供给惰性气体的气体混合室。 第二气体流入系统连接到气体混合室，以在第二薄膜沉积工艺模式期间提供第二工艺气体。
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2.发明申请公开(公告)号：US20140068923A1
公开(公告)日：2014-03-13
申请号：US14083451
申请日：2013-11-19
发明人： Kuan-Chou Chen , Pei-Shan Wu , Sheng-Lang Lee , Chia-Ming Chen , Fu-Ching Tung , Jyh-Jone Lee , Wan-Sung Lin , Kuan-Han Chen
IPC分类号： H01L21/68
CPC分类号： H01L21/68 , H01L21/68728 , H01L21/68764 , H01L21/68771 , Y10T29/49998
摘要： A rotary positioning apparatus includes a fixing base, a rotation mechanism, two driving modules and a carrier. The rotation mechanism is disposed on the fixing base, the first driving module is disposed on the fixing base and coupled to the rotation mechanism to drive the rotation mechanism rotating around a first rotation axis relatively to the fixing base. The carrier has plural accommodating slots on a circular-arc surface thereof and is pivoted to the rotation mechanism through a second rotation axis passing through the curvature center of the circular-arc surface and perpendicular to the first rotation axis, on which the curvature center is located. The second driving module is disposed on the rotation mechanism and coupled to the carrier to drive the carrier rotating around the second rotation axis relatively to the rotation mechanism. An automatic pick-and-place system and an operation method using the rotary positioning apparatus are also provided.
摘要翻译： 旋转定位装置包括固定基座，旋转机构，两个驱动模块和载体。 旋转机构设置在固定基座上，第一驱动模块设置在固定基座上并且联接到旋转机构，以驱动围绕相对于固定基座的第一旋转轴线旋转的旋转机构。 载体在其圆弧表面上具有多个容纳槽，并且通过穿过圆弧表面的弯曲中心并垂直于第一旋转轴线的第二旋转轴线枢转到旋转机构，曲率中心为 位于。 第二驱动模块设置在旋转机构上并且联接到载体上以相对于旋转机构驱动围绕第二旋转轴线旋转的载体。 还提供了一种使用旋转定位装置的自动拾放系统和操作方法。
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公开(公告)号：US10591216B2
公开(公告)日：2020-03-17
申请号：US15831181
申请日：2017-12-04
发明人： Fu-Ching Tung , Muh-Wang Liang , Jung-Chen Chien , Yi-Jiun Lin
摘要： A solidifying device is for solidifying a substrate which includes a middle and two side portions. The thermostability of the middle portion is greater than that of the side portions. The solidifying device includes a housing, a heating member, a temperature control air-floating member and a conveyor. The housing defines a working space. The heating member is in the working space. The substrate has a heat receiving surface facing the heating member. The temperature control air-floating member is in the working space and below the heating member. The conveyor is for transporting the substrate into the working space and between the temperature control air-floating member and the heating member. The heating member is for providing heat to the substrate. The temperature control air-floating member is for supplying air towards the substrate to allow the substrate to float in the working space and form a high-temperature and two low-temperature areas.
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公开(公告)号：US20190101333A1
公开(公告)日：2019-04-04
申请号：US15831181
申请日：2017-12-04
发明人： Fu-Ching Tung , Muh-Wang Liang , Jung-Chen Chien , Yi-Jiun Lin
CPC分类号： F27D9/00 , F26B17/00 , F27B9/14 , F27B9/3005 , F27B21/06 , F27D11/12 , F27D2009/0081 , F27D2019/0006
摘要： A solidifying device is for solidifying a substrate which includes a middle and two side portions. The thermostability of the middle portion is greater than that of the side portions. The solidifying device includes a housing, a heating member, a temperature control air-floating member and a conveyor. The housing defines a working space. The heating member is in the working space. The substrate has a heat receiving surface facing the heating member. The temperature control air-floating member is in the working space and below the heating member. The conveyor is for transporting the substrate into the working space and between the temperature control air-floating member and the heating member. The heating member is for providing heat to the substrate. The temperature control air-floating member is for supplying air towards the substrate to allow the substrate to float in the working space and form a high-temperature and two low-temperature areas.
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5.发明申请公开(公告)号：US20140059836A1
公开(公告)日：2014-03-06
申请号：US13711631
申请日：2012-12-12
发明人： Pei-Shan Wu , Kuan-Chou Chen , Sheng-Lang Lee , Fu-Ching Tung , Chia-Ming Chen
IPC分类号： H01L21/68
CPC分类号： H01L21/68 , C23C14/505 , H01L21/68764 , H01L21/68771 , Y10T29/49998
摘要： A rotatable locating apparatus including a fixing base, a rotatable rack, a first driving module, a carrier, and a second driving module is provided. The rotatable rack is pivoted on the fixing base through a first rotation axis. The first driving module is coupled to the rotatable rack to drive the rotatable rack rotating with respect to the fixing base along the first rotation axis. The carrier is provided with accommodating slots on an arc surface of the carrier, and the carrier is pivoted on the rotatable rack through a second rotation axis. The second rotation axis passes through a curvature center of the arc surface and is perpendicular to the first rotation axis. The curvature center is located on the first rotation axis. The second driving module is coupled to the carrier to drive the carrier rotating with respect to the rotatable rack along the second rotation axis.
摘要翻译： 提供一种包括固定基座，可旋转齿条，第一驱动模块，载体和第二驱动模块的可旋转定位装置。 旋转齿条通过第一旋转轴线在固定基座上枢转。 第一驱动模块耦合到可旋转的齿条，以驱动相对于固定基座沿着第一旋转轴线旋转的可旋转齿条。 载体在载体的弧形表面上设置有容纳槽，并且载体通过第二旋转轴线枢转在可旋转的齿条上。 第二旋转轴线穿过弧形表面的曲率中心并且垂直于第一旋转轴线。 曲率中心位于第一旋转轴上。 第二驱动模块联接到载体以驱动相对于可旋转齿条沿着第二旋转轴线旋转的载体。
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公开(公告)号：US09957607B2
公开(公告)日：2018-05-01
申请号：US15432426
申请日：2017-02-14
发明人： Fu-Ching Tung , Ching-Chiun Wang , Shih-Hsiang Lai
CPC分类号： C23C14/542 , C23C14/24 , C23C14/28
摘要： An evaporation method in this disclosure is adapted for performing an evaporation process upon a surface of an evaporation target substrate. In an embodiment, an evaporation source plate is arranged to be heated by a heater so as to evaporate an evaporation material to its gaseous state, and then enable the gaseous evaporation material to travel passing through holes of a shutter device and thus spread toward the surface of the evaporation target substrate for depositing a film. Moreover, the evaporation method uses a transmission device for controlling the opening/closing of the holes, and there is a heating area formed at a position between the shutter device and the evaporation source plate for allowing the evaporation source plate, the plural holes, the heating area, the evaporation material and the heater to be arranged parallel to one another from the top to bottom.
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7.发明授权Rotary positioning apparatus with dome carrier, automatic pick-and-place system, and operating method thereof 有权具有圆顶托架的旋转定位装置，自动取放系统及其操作方法公开(公告)号：US09373534B2
公开(公告)日：2016-06-21
申请号：US14083451
申请日：2013-11-19
发明人： Kuan-Chou Chen , Pei-Shan Wu , Sheng-Lang Lee , Chia-Ming Chen , Fu-Ching Tung , Jyh-Jone Lee , Wan-Sung Lin , Kuan-Han Chen
IPC分类号： H01L21/68 , H01L21/683 , H01L21/687
CPC分类号： H01L21/68 , H01L21/68728 , H01L21/68764 , H01L21/68771 , Y10T29/49998
摘要： A rotary positioning apparatus includes a fixing base, a rotation mechanism, two driving modules and a carrier. The rotation mechanism is disposed on the fixing base, the first driving module is disposed on the fixing base and coupled to the rotation mechanism to drive the rotation mechanism rotating around a first rotation axis relatively to the fixing base. The carrier has plural accommodating slots on a circular-arc surface thereof and is pivoted to the rotation mechanism through a second rotation axis passing through the curvature center of the circular-arc surface and perpendicular to the first rotation axis, on which the curvature center is located. The second driving module is disposed on the rotation mechanism and coupled to the carrier to drive the carrier rotating around the second rotation axis relatively to the rotation mechanism. An automatic pick-and-place system and an operation method using the rotary positioning apparatus are also provided.
摘要翻译： 旋转定位装置包括固定基座，旋转机构，两个驱动模块和载体。 旋转机构设置在固定基座上，第一驱动模块设置在固定基座上并且联接到旋转机构，以驱动围绕相对于固定基座的第一旋转轴线旋转的旋转机构。 载体在其圆弧表面上具有多个容纳槽，并且通过穿过圆弧表面的弯曲中心并垂直于第一旋转轴线的第二旋转轴线枢转到旋转机构，曲率中心为 位于。 第二驱动模块设置在旋转机构上并且联接到载体上以相对于旋转机构驱动围绕第二旋转轴线旋转的载体。 还提供了一种使用旋转定位装置的自动拾放系统和操作方法。
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8.发明授权公开(公告)号：US09082801B2
公开(公告)日：2015-07-14
申请号：US13711631
申请日：2012-12-12
发明人： Pei-Shan Wu , Kuan-Chou Chen , Sheng-Lang Lee , Fu-Ching Tung , Chia-Ming Chen
IPC分类号： H01L21/67 , H01L21/68 , H01L21/687 , C23C14/50
CPC分类号： H01L21/68 , C23C14/505 , H01L21/68764 , H01L21/68771 , Y10T29/49998
摘要： A rotatable locating apparatus including a fixing base, a rotatable rack, a first driving module, a carrier, and a second driving module is provided. The rotatable rack is pivoted on the fixing base through a first rotation axis. The first driving module is coupled to the rotatable rack to drive the rotatable rack rotating with respect to the fixing base along the first rotation axis. The carrier is provided with accommodating slots on an arc surface of the carrier, and the carrier is pivoted on the rotatable rack through a second rotation axis. The second rotation axis passes through a curvature center of the arc surface and is perpendicular to the first rotation axis. The curvature center is located on the first rotation axis. The second driving module is coupled to the carrier to drive the carrier rotating with respect to the rotatable rack along the second rotation axis.
摘要翻译： 提供一种包括固定基座，可旋转齿条，第一驱动模块，载体和第二驱动模块的可旋转定位装置。 旋转齿条通过第一旋转轴线在固定基座上枢转。 第一驱动模块耦合到可旋转的齿条，以驱动相对于固定基座沿着第一旋转轴线旋转的可旋转齿条。 载体在载体的弧形表面上设置有容纳槽，并且载体通过第二旋转轴线枢转在可旋转的齿条上。 第二旋转轴线穿过弧形表面的曲率中心并且垂直于第一旋转轴线。 曲率中心位于第一旋转轴上。 第二驱动模块联接到载体以驱动相对于可旋转齿条沿着第二旋转轴线旋转的载体。
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9.发明授权公开(公告)号：US09023693B1
公开(公告)日：2015-05-05
申请号：US14138147
申请日：2013-12-23
发明人： Kung-Liang Lin , Chien-Chih Chen , Fu-Ching Tung , Chih-Yung Chen , Shih-Chin Lin , Kuan-Yu Lin , Chia-Hao Chang , Shieh-Sien Wu
IPC分类号： H01L21/00 , H01L21/84 , H01L21/31 , H01L21/469 , H01L51/52 , C23C16/455 , H01L21/02 , C23C16/458 , C23C16/505
CPC分类号： C23C16/4583 , C23C16/455 , C23C16/45536 , C23C16/45544 , C23C16/45548 , C23C16/50 , C23C16/505 , H01J37/32091 , H01J37/3244 , H01L21/02274 , H01L21/0228 , H01L51/5253
摘要： A multi-mode thin film deposition apparatus including a reaction chamber, a carrying seat, a showerhead, an inert gas supplying source, a first gas inflow system and a second gas inflow system is provided. The carrying seat is disposed in the reaction chamber. The showerhead has a gas mixing room and gas holes disposed at a side of the gas mixing room. The gas mixing room is connected to the reaction chamber through the plurality of gas holes which faces the carrying seat. The first gas inflow system is connected to the reaction chamber and supplies a first process gas during a first thin film deposition process mode. The inert gas supplying source is connected to the gas mixing room for supplying an inert gas. The second gas inflow system is connected to the gas mixing room to supply a second process gas during a second thin film deposition process mode.
摘要翻译： 提供一种多模式薄膜沉积设备，包括反应室，承载座，喷头，惰性气体供应源，第一气体流入系统和第二气体流入系统。 承载座设置在反应室中。 喷头具有设在气体混合室一侧的气体混合室和气孔。 气体混合室通过面向承载座的多个气孔连接到反应室。 第一气体流入系统连接到反应室，并在第一薄膜沉积工艺模式期间提供第一工艺气体。 惰性气体供给源连接到用于供给惰性气体的气体混合室。 第二气体流入系统连接到气体混合室，以在第二薄膜沉积工艺模式期间提供第二工艺气体。
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