Noncontact position measurement systems using optical sensors
    1.
    发明授权
    Noncontact position measurement systems using optical sensors 失效
    使用光学传感器的非接触式位置测量系统

    公开(公告)号:US5367373A

    公开(公告)日:1994-11-22

    申请号:US978227

    申请日:1992-11-19

    摘要: Optical and computational components are combined to form high precision, six degree-of-freedom, single-sided, noncontact position measurement systems. Reflective optical targets are provided on a target object whose position is to be sensed. Light beams are directed toward the optical targets, producing reflected beams. Electrical signals are produced by movements of reflected beams across position-sensitive detectors, such as lateral-effect photodiodes. The signals are transformed to provide measurements of translation along and rotation around three nonparallel axes which define the space in which the target object moves.

    摘要翻译: 光学和计算部件组合形成高精度,六自由度,单面,非接触式位置测量系统。 反射光学靶被提供在要被感测位置的目标物体上。 光束指向光学目标,产生反射光束。 电信号是通过位于位置敏感检测器(例如横向效应光电二极管)的反射光束的运动产生的。 信号被变换以提供围绕三个非平行轴的平移和围绕旋转的测量,这些轴限定了目标物体移动的空间。

    Noncontact position measurement system using optical sensors
    2.
    发明授权
    Noncontact position measurement system using optical sensors 失效
    非接触式位置测量系统采用光学传感器

    公开(公告)号:US5552883A

    公开(公告)日:1996-09-03

    申请号:US340099

    申请日:1994-11-21

    摘要: Optical and computational components are combined to form a high precision, six degree-of-freedom, single-sided, noncontact position measurement system. Reflective optical targets are provided on a target object whose position is to be sensed. Light beams are directed toward the optical targets, producing reflected beams. Electrical signals are produced indicating the points of intersection of the reflected beams and the position-sensitive detectors. The position sensitive detectors may be lateral-effect photodiodes. The signals are transformed to provide measurements of translation along and rotation around three nonparallel axes which define the space in which the target object moves.

    摘要翻译: 光学和计算部件组合形成高精度,六自由度,单面,非接触式位置测量系统。 反射光学靶被提供在要被感测位置的目标物体上。 光束指向光学目标,产生反射光束。 产生电信号,指示反射光束和位置敏感检测器的交点。 位置敏感检测器可以是侧向光电二极管。 信号被变换以提供围绕三个非平行轴的平移和围绕旋转的测量,这些轴限定了目标物体移动的空间。

    System and method of multi-dimensional force sensing for scanning probe microscopy
    3.
    发明授权
    System and method of multi-dimensional force sensing for scanning probe microscopy 失效
    扫描探针显微镜的多维力感测系统和方法

    公开(公告)号:US06666075B2

    公开(公告)日:2003-12-23

    申请号:US09881650

    申请日:2001-06-13

    IPC分类号: G01B528

    摘要: A scanning probe microscopy tool is provided with a force sensor that simultaneously measures more than one component of a surface force. The tool is comprised of an oscillator, a tip, a mechanical actuator, a sensing system, and a feedback control system. The oscillator has a selected shape, dimensions ratio, and /or material composition such that the oscillator comprises a first resonant mode for a first direction, wherein a first resonance of the first resonance mode can be altered by a surface force interaction between the tip and the sample in the first direction; and a second resonant mode for a second direction, wherein a second resonance of the second resonant mode can be altered by the surface force interaction between the tip and the sample in the second direction. The sensing system is adapted to sense the alterations in the first and second resonances, is adapted to provide a first output based on the alterations in the first resonance, and is adapted to provide a second output based on alterations in the second resonance. The feedback control system is adapted to control the actuator based on the first and second outputs.

    摘要翻译: 扫描探针显微镜工具具有同时测量表面力多于一个部件的力传感器。 该工具由振荡器,尖端,机械致动器,感测系统和反馈控制系统组成。 振荡器具有选定的形状,尺寸比和/或材料组成,使得振荡器包括用于第一方向的第一谐振模式,其中第一谐振模式的第一共振可以通过尖端和 样品在第一个方向; 以及用于第二方向的第二谐振模式,其中所述第二谐振模式的第二谐振可以通过所述尖端和所述样本在所述第二方向上的表面力相互作用而改变。 感测系统适于感测第一和第二谐振中的变化,适于基于第一谐振中的变化提供第一输出,并且适于基于第二谐振中的改变来提供第二输出。 反馈控制系统适于基于第一和第二输出来控制致动器。

    System and method for fabricating logic devices comprising carbon nanotube transistors
    5.
    发明授权
    System and method for fabricating logic devices comprising carbon nanotube transistors 失效
    用于制造包括碳纳米管晶体管的逻辑器件的系统和方法

    公开(公告)号:US07335603B2

    公开(公告)日:2008-02-26

    申请号:US09779374

    申请日:2001-02-07

    IPC分类号: H01L21/31

    摘要: Carbon nanotube devices and methods for fabricating these devices, wherein in one embodiment, the fabrication process consists of the following process steps: (1) generation of a template, (2) catalyst deposition, and (3) nanotube synthesis within the template. In another embodiment, a carbon nanotube transistor comprises a carbon nanotube having two or more defects, wherein the defects divide the carbon nanotube into three regions having differing conductivities. The defects may be introduced by varying the diameter of a template in which the carbon nanotube is fabricated and thereby causing pentagon-heptagon pairs which form the defects.

    摘要翻译: 碳纳米管装置和制造这些装置的方法,其中在一个实施方案中,制造方法由以下工艺步骤组成:(1)模板生成,(2)催化剂沉积和(3)模板内的纳米管合成。 在另一个实施例中,碳纳米管晶体管包括具有两个或更多个缺陷的碳纳米管,其中缺陷将碳纳米管分成三个具有不同电导率的区域。 可以通过改变其中制造碳纳米管的模板的直径并由此引起形成缺陷的五边形七边形对来引入缺陷。

    Caliper method, system, and apparatus
    7.
    发明授权
    Caliper method, system, and apparatus 失效
    卡尺法,系统和仪器

    公开(公告)号:US06955078B2

    公开(公告)日:2005-10-18

    申请号:US10115274

    申请日:2002-04-01

    摘要: A caliper atomic force microscope (AFM) comprises two AFM probes (each comprised of an oscillator and an attached tip) that operate on a sample in a coordinated manner. The coordinated operation of the AFM probes may be spatially or temporally coordinated. The result of the coordinated operation may be an image of the sample or a dimensional measurement of an unknown sample. The probes of the caliper AFM may be tilted, or the tips may be tilted at a non-orthogonal angle with respect to the probes, so as to enable the tips to access vertical sample surfaces or to enable the tips to touch each other. The tip shapes may include conical, boot-shaped, cylindrical, or spherical and materials from which the tips are fabricated may include silicon or carbon nanotubes. The oscillators may be beveled to allow the tips to operate in close proximity or in contact without interference of the oscillators. The disclosure of the present invention is discussed in terms of an atomic force (van der Waalls) interaction. Other interaction forces are contemplated, such as electrostatic force, magnetic force, and tunneling current. The caliper AFM may be calibrated with the help of a sample with known dimensions or by touching the probe tips. The tip-to-tip calibration enables absolute measurements without the need for a reference artifact, and it enables in-line calibration that may be performed during the measurement process.

    摘要翻译: 卡尺原子力显微镜(AFM)包括以协调的方式对样品进行操作的两个AFM探针(每个包括振荡器和附接尖端)。 AFM探针的协调操作可以在空间或时间上协调。 协调操作的结果可以是样品的图像或未知样品的尺寸测量。 卡钳AFM的探针可以倾斜,或者尖端可以相对于探针以非正交角度倾斜,以便使尖端能够进入垂直样品表面或使尖端彼此接触。 尖端形状可以包括锥形,靴形,圆柱形或球形,并且制造尖端的材料可以包括硅或碳纳米管。 振荡器可以是斜面的,以允许尖端在接近或接触的情况下操作,而不会受到振荡器的干扰。 根据原子力(范德瓦尔斯)相互作用来讨论本发明的公开内容。 考虑到其它相互作用力,例如静电力,磁力和隧道电流。 可以借助已知尺寸的样品或通过触摸探针尖端校准卡尺AFM。 尖端到尖端校准可以进行绝对测量,而无需参考伪影,并且可以在测量过程中进行在线校准。

    Devices having laterally arranged nanotubes
    9.
    发明申请
    Devices having laterally arranged nanotubes 审中-公开
    具有横向布置的纳米管的装置

    公开(公告)号:US20100045212A1

    公开(公告)日:2010-02-25

    申请号:US12456877

    申请日:2009-06-24

    IPC分类号: H05B43/00 H01J1/02 H05K1/09

    CPC分类号: H05B41/14 H01J1/3044

    摘要: Nanotubes are positioned laterally between posts. These posts can be formed directly on a substrate, or on top of sharp protrusions, which are themselves located on the substrate. Horizontally positioned nanotubes can be used as emitters, either singly or as part of an array. Electron emissions from the sidewalls of the nanotubes can be used to generate X-rays, Microwaves and Terahertz radiation, or other electromagnetic radiation. Arrays of laterally positioned nanotubes can reduce screening effects and other emission irregularities sometimes caused by vertically positioned nanotube emitters that rely on emissions from nanotube ends. Carbon nanotubes can be manually between two posts, or grown in place.

    摘要翻译: 纳米管横向位于柱之间。 这些柱可以直接形成在基板上,或者在它们本身位于基板上的尖锐突起的顶部上。 水平定位的纳米管可以单独使用或作为阵列的一部分使用。 可以使用来自纳米管侧壁的电子发射来产生X射线,微波和太赫兹辐射或其他电磁辐射。 横向定位的纳米管的阵列可以减少有时由依赖于纳米管末端发射的垂直定位的纳米管发射体引起的屏蔽效应和其他发射不规则。 碳纳米管可以手动地在两个柱之间,或生长就位。