公开(公告)号：US11841298B2

公开(公告)日：2023-12-12

申请号：US17127972

申请日：2020-12-18

Applicant: IMEC VZW

Inventor： Ziduo Lin ,  Abdulkadir Yurt ,  Richard Stahl ,  Geert Vanmeerbeeck ,  Andy Lambrechts

IPC: G01N1/22 ,  G01N15/14 ,  G01N15/06 ,  G01N1/28 ,  G01N15/02

CPC classification number: G01N1/22 ,  G01N15/0612 ,  G01N15/1463 ,  G01N2001/2223 ,  G01N2001/2276 ,  G01N2001/2833 ,  G01N2015/0233

Abstract: The inventive concept relates to a collector for collecting particles in air and a device for detecting particles in air comprising said collector. Said collector comprises a substrate, which is adapted to enable imaging of the particles, an adhesive layer arranged on a collector side of the substrate, said adhesive layer being formed by an adhesive material. The collector further comprises a protection element, which is configured to protect the adhesive layer before collection of particles. The collector is configured to allow release of protection of the adhesive layer by the protection element to expose an adhesive surface of the adhesive layer to ambient air for collecting particles on the adhesive surface. The collector is further configured for presenting a particle sample carrier having a smooth top surface and a smooth bottom surface for preventing light from being diffusely scattered by the particle sample carrier.

公开(公告)号：US11619574B2

公开(公告)日：2023-04-04

申请号：US17127800

申请日：2020-12-18

Applicant: IMEC VZW

Inventor： Geert Vanmeerbeeck ,  Ziduo Lin ,  Abdulkadir Yurt ,  Richard Stahl

IPC: G01N15/06 ,  G01N15/02 ,  G03H1/08

Abstract: The inventive concept relates to a device for detecting particles in air, said device comprising a receiver for receiving a flow of air comprising particles, a sample carrier, and a particle capturing arrangement. The particle capturing arrangement is configured to separate the particles from the flow of air for and to collect a set of particles on a surface of the sample carrier. The device further comprises a light source configured to illuminate the particles on the sample carrier, such that an interference pattern is formed by interference between light being scattered by the particles and non-scattered light from the light source. The device further comprises an image sensor configured to detect the interference pattern. The device further comprises a cleaner configured for cleaning the surface of the sample carrier for enabling re-use of the surface for collection of a subsequent set of particles.

公开(公告)号：US10859976B2

公开(公告)日：2020-12-08

申请号：US15936489

申请日：2018-03-27

Applicant: IMEC VZW

Inventor： Ziduo Lin ,  Richard Stahl ,  Abdulkadir Yurt

IPC: G03H1/02 ,  G02B27/09 ,  G03H1/04 ,  G02B30/00 ,  G03H1/26

Abstract: A device in holographic imaging comprises: at least two light sources, wherein each of the at least two light sources is arranged to output light of a unique wavelength; and at least one holographic optical element, wherein the at least two light sources and the at least one holographic optical element are arranged in relation to each other such that light from the at least two light sources incident on the at least one holographic optical element interacts with the at least one holographic optical element to form wavefronts of similar shape for light from the different light sources.

公开(公告)号：US20190310584A1

公开(公告)日：2019-10-10

申请号：US16467612

申请日：2017-12-08

Applicant: IMEC VZW

Inventor： Ziduo Lin ,  Abdulkadir Yurt ,  Richard Stahl ,  Geert Vanmeerbeeck

IPC: G03H1/04 ,  G03H1/00

Abstract: Example embodiments relate to methods and imaging systems for holographic imaging. One embodiment includes a method for holographic imaging of an object. The method includes driving a laser using a current which is below a threshold current of the laser. The method also includes illuminating the object using illumination light output by the laser. Further, the method includes detecting an interference pattern formed by object light, having interacted with the object, and reference light of the illumination light.

公开(公告)号：US20180181062A1

公开(公告)日：2018-06-28

申请号：US15847521

申请日：2017-12-19

Applicant: IMEC vzw

Inventor： Abdulkadir Yurt ,  Geert Vanmeerbeeck ,  Richard Stahl ,  Ziduo Lin

IPC: G03H1/02 ,  G03H1/12

Abstract: An apparatus for in-line holographic imaging is disclosed. In one aspect, the apparatus includes at least a first light source and a second light source arranged for illuminating an object arranged in the apparatus with a light beam. The apparatus also includes an image sensor arranged to detect at least a first and a second interference pattern, wherein the first interference pattern is formed when the object is illuminated by the first light source and the second interference pattern is formed when the object is illuminated by the second light source. The first and second interference patterns are formed by diffracted light, being scattered by the object, and undiffracted light of the light beam. The at least first and second light sources are arranged at different angles in relation to the object, and possibly illuminate the object using different wavelengths.

公开(公告)号：US20180143079A1

公开(公告)日：2018-05-24

申请号：US15821918

申请日：2017-11-24

Applicant: IMEC VZW

Inventor： Abdulkadir YURT ,  Ziduo Lin ,  Richard Stahl ,  Geert Vanmeerbeeck

IPC: G01J9/02

CPC classification number: G01J9/02 ,  G01J9/0215 ,  G01J2009/0223 ,  G03H1/0443 ,  G03H1/0465 ,  G03H2001/0447 ,  G03H2223/12 ,  G03H2223/19

Abstract: According to a first aspect, there is provided a method of holographic wavefront sensing, the method including: receiving a light beam, which has a wavefront to be analyzed, on a transparent, flat substrate, which is provided with a lattice of opaque dots, wherein the substrate is arranged above an image sensor; detecting by the image sensor an interference pattern formed by diffracted light, being scattered by the opaque dots, and undiffracted light of the light beam received by the image sensor; processing the detected interference pattern to digitally reconstruct a representation of a displaced lattice of opaque dots, which would form the interference pattern on the image sensor upon receiving the light with a known wavefront; and comparing the representation of the displaced lattice to a known representation of the lattice of opaque dots on the substrate to determine a representation of the wavefront form of the received light beam.

公开(公告)号：US12196942B2

公开(公告)日：2025-01-14

申请号：US17555792

申请日：2021-12-20

Applicant: IMEC VZW

Inventor： Ziduo Lin ,  Murali Jayapala ,  Geert Vanmeerbeeck ,  Abdulkadir Yurt

IPC: G02B21/36 ,  G02B21/06 ,  H01L27/146 ,  H01L31/0304 ,  H01L31/0352

Abstract: According to an aspect of the present inventive concept there is provided a device for imaging of a microscopic object, the device comprising: an array of light sensitive areas sensitive to detect light spanning a wavelength range of at least 400-1200 nm; at least one light source comprising at least a first point of operation in which the at least one light source is configured to generate visible light, and a second point of operation in which the at least one light source is configured to generate infrared light, and being arranged to illuminate the microscopic object such that light is scattered by the microscopic object; wherein the array of light sensitive areas is configured to detect an interference pattern formed between the scattered light and non-scattered light; the device being configured to be set in a selected point of operation from the at least first and second points of operation, for detecting the interference pattern for imaging the microscopic object at a wavelength defined by the selected point of operation.

公开(公告)号：US12117342B2

公开(公告)日：2024-10-15

申请号：US17555785

申请日：2021-12-20

Applicant: IMEC VZW

Inventor： Geert Vanmeerbeeck ,  Ziduo Lin ,  Murali Jayapala ,  Abdulkadir Yurt

IPC: G01J3/28

CPC classification number: G01J3/2823 ,  G01J3/2803 ,  G01J2003/2826

Abstract: According to an aspect of the present inventive concept there is provided a device for imaging of a microscopic object, the device comprising:



an array of light sensitive areas, each being sensitive to detect light spanning a wavelength range of at least 400-1200 nm;
at least one light source configured to generate light at a plurality of wavelengths within the wavelength range, comprising at least one wavelength in a visible part of the wavelength range and at least one wavelength in a short-wave infrared, SWIR, part of the wavelength range, and arranged to illuminate the microscopic object with the generated light such that at least part of the light is scattered by the microscopic object;
wherein the device is configured to transmit the scattered light and non-scattered light, from the same light source, to the array of light sensitive areas configured to detect an interference pattern formed between the scattered light and the non-scattered light, for each wavelength.

公开(公告)号：US12025567B2

公开(公告)日：2024-07-02

申请号：US17725871

申请日：2022-04-21

Applicant: IMEC VZW

Inventor： Ziduo Lin ,  Abdulkadir Yurt ,  Murali Jayapala ,  Geert Vanmeerbeeck

IPC: G01N21/90 ,  G01N21/88

CPC classification number: G01N21/90 ,  G01N2021/8845

Abstract: An illumination system and method for illumination of a sample in a container is described herein. In some embodiments, the container includes a defined volume for receiving the sample. The illumination system includes, in some embodiments, at least one light source, a mask comprising an opaque portion, preventing light from passing through the mask, and an at least partially transparent portion, allowing light to pass through the mask. The illumination system can be adapted to be positioned such that the light generated by the light source, passing through the mask, illuminates the sample in the container. The light source and the mask are configured such that a shape, a size, and a position of a projection of the light passing through the mask, onto a plane of a bottom surface of the container, match a shape, a size, and a position of the bottom surface.

公开(公告)号：US11946850B2

公开(公告)日：2024-04-02

申请号：US17127980

申请日：2020-12-18

Applicant: IMEC VZW

Inventor： Geert Vanmeerbeeck ,  Ziduo Lin ,  Abdulkadir Yurt ,  Richard Stahl ,  Andy Lambrechts

IPC: G01N15/14 ,  G01N15/1434 ,  G03H1/08 ,  G01N15/06

CPC classification number: G01N15/1434 ,  G03H1/0866 ,  G01N15/06 ,  G01N2015/1454 ,  G01N2015/1486 ,  G03H2001/0883

Abstract: A device for detecting particles in air; said device comprising:



a receiver for receiving a flow of air comprising particles;
a particle capturing arrangement configured to transfer the particles from the flow of air to a liquid for collection of a set of particles in the liquid;
a flow channel configured to pass a flow of the liquid comprising the set of particles through the flow channel;
a light source configured to illuminate the set of particles in the flow channel, such that an interference pattern is formed by interference between light being scattered by the set of particles and non-scattered light from the light source; and
an image sensor comprising a plurality of photo-sensitive elements configured to detect incident light, the image sensor being configured to detect the interference pattern.