CBRAM by subtractive etching of metals

    公开(公告)号:US10886467B2

    公开(公告)日:2021-01-05

    申请号:US16401693

    申请日:2019-05-02

    IPC分类号: H01L29/02 H01L45/00

    摘要: A method is presented for constructing conductive bridging random access memory (CBRAM) stacks. The method includes forming a plurality of conductive lines within an interlayer dielectric (ILD), forming a CBRAM stack including at least an electrolyte layer, a conductive layer, a metal cap layer, and a top electrode such that a top end of the CBRAM stack has a smaller critical dimension than a bottom end of the CBRAM stack, forming a low-k dielectric layer over the CBRAM stack, and exposing a top surface of the CBRAM stack during a via opening.

    CBRAM BY SUBTRACTIVE ETCHING OF METALS
    2.
    发明申请

    公开(公告)号:US20200350499A1

    公开(公告)日:2020-11-05

    申请号:US16401693

    申请日:2019-05-02

    IPC分类号: H01L45/00

    摘要: A method is presented for constructing conductive bridging random access memory (CBRAM) stacks. The method includes forming a plurality of conductive lines within an interlayer dielectric (ILD), forming a CBRAM stack including at least an electrolyte layer, a conductive layer, a metal cap layer, and a top electrode such that a top end of the CBRAM stack has a smaller critical dimension than a bottom end of the CBRAM stack, forming a low-k dielectric layer over the CBRAM stack, and exposing a top surface of the CBRAM stack during a via opening.

    SCALED NANOTUBE ELECTRODE FOR LOW POWER MULTISTAGE ATOMIC SWITCH

    公开(公告)号:US20200136034A1

    公开(公告)日:2020-04-30

    申请号:US16666471

    申请日:2019-10-29

    IPC分类号: H01L45/00

    摘要: A method of forming a memory device that includes depositing a first dielectric material within a trench of composed of a second dielectric material; positioning a nanotube within the trench using chemical recognition to the first dielectric material; depositing a dielectric for cation transportation within the trench on the nanotube; and forming a second electrode on the dielectric for cation transportation, wherein the second electrode is composed of a metal.

    Secure semiconductor chip by piezoelectricity

    公开(公告)号:US10431557B2

    公开(公告)日:2019-10-01

    申请号:US15911608

    申请日:2018-03-05

    摘要: The subject disclosure relates to techniques for providing semiconductor chip security using piezoelectricity. According to an embodiment, an apparatus is provided that comprises an integrated circuit chip comprising a pass transistor that electrically connects two or more electrical components of the integrated circuit chip. The apparatus further comprises a piezoelectric element electrically connected to a gate electrode of the pass transistor; and a packaging component that is physically connected to the piezoelectric element and applies a mechanical force to the piezoelectric element, wherein the piezoelectric element generates and provides a voltage to the gate electrode as a result of the mechanical force, thereby causing the pass transistor to be in an on-state. In one implementation, the two or more electrical components comprise a circuit and a power source. In another implementation, the two or more electrical components comprise two circuits.