公开(公告)号：US5943157A

公开(公告)日：1999-08-24

申请号：US73329

申请日：1998-05-06

Applicant: James M. Florence ,  James D. Huffman ,  Rodney D. Miller

Inventor： James M. Florence ,  James D. Huffman ,  Rodney D. Miller

IPC: G02B26/08 ,  G09F9/30 ,  H04N5/74 ,  G02B26/00

CPC classification number: G02B26/0841

Abstract: A spatial light modulator (70) comprised of an array of micromirrors (72) each having support post (74). The support post (74) defines support post edges (76) in the upper surface of the mirrors (72). These support post edges (76) are all oriented at 45 degree angles with respect to an incident beam of light from a light source (80) to minimize diffraction of light from the edges (76) into the darkfield optics when the mirrors are oriented in the off-state. The present invention achieves an increased contrast ratio of about 20% over conventional designs.

公开(公告)号：US06191883B1

公开(公告)日：2001-02-20

申请号：US09470719

申请日：1999-12-23

Applicant: James D. Huffman ,  Rodney D. Miller

Inventor： James D. Huffman ,  Rodney D. Miller

IPC: G02B2600

CPC classification number: G09G3/346 ,  G02B26/0841 ,  G09G2300/0842 ,  G09G2300/0857 ,  G11C11/41

Abstract: An improved memory cell (300) for use in applications, such as micromirror arrays, in which little space is available and a slow read-back cycle is tolerated. The memory (300) comprises a first input/output node (314) connected to the input of a first inverter and to the output of a second inverter. The first inverter is comprised of two transistors (304, 306) and drives a signal to a second input/output node (316). The input of the second inverter is connected to the second input/output node (316). When used to drive a typical micromirror cell, the address electrode of the micromirror cell are electrically connected to the first input/output node (314) and the second input/output node (316).

Abstract translation: 用于诸如微镜阵列的应用中的改进的存储单元（300），其中容纳很少的空间和缓慢的回读周期。 存储器（300）包括连接到第一反相器的输入端和第二反相器的输出端的第一输入/输出节点（314）。 第一反相器由两个晶体管（304,306）组成，并将信号驱动到第二输入/输出节点（316）。 第二反相器的输入连接到第二输入/输出节点（316）。 当用于驱动典型的微镜单元时，微镜单元的寻址电极电连接到第一输入/输出节点（314）和第二输入/输出节点（316）。

公开(公告)号：US6028690A

公开(公告)日：2000-02-22

申请号：US197723

申请日：1998-11-23

Applicant: Duane E. Carter ,  James D. Huffman ,  Rodney D. Miller ,  Brian L. Ray ,  Robert E. Meier

Inventor： Duane E. Carter ,  James D. Huffman ,  Rodney D. Miller ,  Brian L. Ray ,  Robert E. Meier

IPC: G02B26/08 ,  H04N5/74

CPC classification number: G02B26/0841

Abstract: A micromirror array fabricated on a semiconductor substrate 708. The micromirrors in the micromirror array logically divided into an interior active region 704 which selectively modulates light striking the mirrors in the interior active region 704, and an exterior border region 702 for producing a dark border around the image produced by the interior active region 704. A gap between each mirror allows adjacent mirrors to rotate. The gap 712 between mirrors in the interior active region 704 of the array is larger than the gap 710 between at least some of the mirrors in the exterior border region 702. The smaller gap 710 in the exterior region 702 is enabled by restricting mirrors in the exterior region 702 to a single direction of rotation.

Abstract translation: 制造在半导体衬底708上的微镜阵列。微反射镜阵列中的微反射镜在逻辑上被分为内部有源区域704，该有源区域选择性地调制在内部有源区域704中的反射镜的入射光，以及外部边界区域702，用于产生围绕 由内部有源区域704产生的图像。每个反射镜之间的间隙允许相邻的反射镜旋转。 阵列的内部有源区域704中的反射镜之间的间隙712大于外部边界区域702中的至少一些反射镜之间的间隙710.外部区域702中的较小间隙710通过限制外部区域702中的反射镜来实现 外部区域702到单个旋转方向。

公开(公告)号：US06195301B1

公开(公告)日：2001-02-27

申请号：US09468561

申请日：1999-12-21

Applicant: James D. Huffman ,  Rodney D. Miller ,  Eric A. Schmidt

Inventor： James D. Huffman ,  Rodney D. Miller ,  Eric A. Schmidt

IPC: G11C700

CPC classification number: G11C7/20 ,  G11C7/12

Abstract: An auxiliary line driver (514) able to sense data driven on a signal path (502) by a primary line driver (512), and then drive the data on the signal path (502). The auxiliary driver (514) allows a small primary line driver (512) to drive a large load, or a large number of loads (504, 506) without consuming a large area in the region where the primary line driver (512) is fabricated. The auxiliary line driver is particularly useful for driving the memory array of a micromirror device, especially during a block clear operation in which a large number of memory cells (506) are written to simultaneously. When the auxiliary line driver (514) receives an enable signal (518), the auxiliary line driver drives the last input provided to the input of the auxiliary line driver (514).

Abstract translation: 辅助线路驱动器（514），其能够感测由主线驱动器（512）在信号路径（502）上驱动的数据，然后驱动信号路径（502）上的数据。 辅助驱动器（514）允许小的主要线路驱动器（512）驱动大的负载或大量的负载（504,506），而不会在制造主线路驱动器（512）的区域中消耗大的面积 。 辅助线路驱动器特别适用于驱动微镜器件的存储器阵列，特别是在其中大量存储器单元（506）被同时写入的块清除操作期间。 当辅助线路驱动器（514）接收到使能信号（518）时，辅助线路驱动器驱动提供给辅助线路驱动器（514）的输入端的最后输入。

公开(公告)号：US06038056A

公开(公告)日：2000-03-14

申请号：US354838

申请日：1999-07-16

Applicant: James M. Florence ,  James D. Huffman ,  Rodney D. Miller

Inventor： James M. Florence ,  James D. Huffman ,  Rodney D. Miller

IPC: G02B26/08 ,  G09F9/30 ,  H04N5/74 ,  G02B26/00

CPC classification number: G02B26/0841

Abstract: A spatial light modulator (70) comprised of an array of micromirrors (72) each having support post (74). The support post (74) defines support post edges (76) in the upper surface of the mirrors (72). These support post edges (76) are all oriented at 45 degree angles with respect to an incident beam of light from a light source (80) to minimize diffraction of light from the edges (76) into the darkfield optics when the mirrors are oriented in the off-state. The present invention achieves an increased contrast ratio of about 20% over conventional designs.

Abstract translation: 由具有支撑柱（74）的微镜阵列（72）组成的空间光调制器（70）。 支撑柱（74）在反射镜（72）的上表面中限定支撑柱边缘（76）。 这些支撑柱边缘（76）都相对于来自光源（80）的入射光束以45度的角度取向，以使得当镜子被定向到时，来自边缘（76）的光的衍射最小化到暗场光学器件 关闭状态。 与常规设计相比，本发明实现了比20％提高的对比度。

公开(公告)号：US08820883B2

公开(公告)日：2014-09-02

申请号：US13170693

申请日：2011-06-28

Applicant: Yongcai Wang ,  Weibin Zhang ,  John A. Lebens ,  James D. Huffman ,  Robert E. McCovick

Inventor： Yongcai Wang ,  Weibin Zhang ,  John A. Lebens ,  James D. Huffman ,  Robert E. McCovick

IPC: B41J2/15 ,  B41J2/16

CPC classification number: B41J2/1631 ,  B41J2/1603 ,  B41J2/162 ,  B41J2/1623 ,  B41J2/1645

Abstract: A microfluidic device includes a substrate; at least one inorganic layer provided on the substrate; a patterned epoxy layer formed over the at least one inorganic layer, the patterned epoxy layer including a wall that defines a location for a fluid in the microfluidic device; and an alkoxysilane material containing a primary or secondary amine for promoting adhesion between the at least one inorganic layer and the patterned epoxy layer.

Abstract translation: 微流体装置包括：基底; 设置在基板上的至少一个无机层; 形成在所述至少一个无机层上的图案化环氧树脂层，所述图案化环氧树脂层包括限定所述微流体装置中的流体位置的壁; 和含有伯胺或仲胺的烷氧基硅烷材料，用于促进至少一个无机层和图案化的环氧树脂层之间的粘附。

公开(公告)号：US08667846B2

公开(公告)日：2014-03-11

申请号：US13089524

申请日：2011-04-19

Applicant: James D. Huffman ,  Gary A. Kneezel

Inventor： James D. Huffman ,  Gary A. Kneezel

IPC: G01N29/04

CPC classification number: G01N29/2437 ,  B06B1/0622 ,  G01N29/04 ,  G10K9/122 ,  G10K13/00

Abstract: Operating an ultrasonic transmitter and receiver includes providing a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate. Electrical pulses are sent to the first MEMS transducing member which causes the first MEMS transducing member and the compliant membrane to vibrate. The vibrations of the first MEMS transducing member and the compliant membrane are transmitted to an object. Echo signals are received from the object. The received echo signals are converted into electrical signals by the second MEMS transducing member.

Abstract translation: 操作超声波发射器和接收器包括提供MEMS复合传感器。 MEMS复合传感器包括基板。 基板的一部分限定了空腔的外边界。 第一MEMS转换构件包括第一尺寸。 第一MEMS转换构件的第一部分被锚固到基底。 第一MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 第二MEMS转换构件包括小于第一MEMS转换构件的第一尺寸的第二尺寸。 第二MEMS转换构件的第一部分被锚固到基底。 第二MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与第一和第二MEMS转导构件接触。 柔性膜的第一部分覆盖第一和第二MEMS转导构件。 顺应性膜的第二部分锚定到基底。 电脉冲被发送到第一MEMS转换构件，这导致第一MEMS换能构件和柔性膜振动。 第一MEMS转换构件和柔性膜的振动被传送到物体。 从对象接收回波信号。 所接收的回波信号由第二MEMS转换构件转换成电信号。

公开(公告)号：US08631711B2

公开(公告)日：2014-01-21

申请号：US13089541

申请日：2011-04-19

Applicant: James D. Huffman

Inventor： James D. Huffman

IPC: G01B7/16

CPC classification number: G01L1/106 ,  G01L9/0013 ,  G01L9/0022 ,  G01P15/0802 ,  G01P15/09 ,  G01P2015/0837

Abstract: A MEMS composite transducer includes a substrate, a MEMS transducer, and a compliant membrane. Portions of the substrate define an outer boundary of a cavity. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member and a second portion of the compliant membrane is anchored to the substrate.

Abstract translation: MEMS复合换能器包括基板，MEMS换能器和柔性膜。 基板的一部分限定了空腔的外边界。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件，并且柔性膜的第二部分锚定到基底。

公开(公告)号：US08409900B2

公开(公告)日：2013-04-02

申请号：US13089532

申请日：2011-04-19

Applicant: James D. Huffman ,  Maria J. Lehmann

Inventor： James D. Huffman ,  Maria J. Lehmann

IPC: H01L21/02

CPC classification number: B81C1/00182 ,  B81B2201/038 ,  B81B2203/053 ,  G01H11/06 ,  H02N1/002 ,  H04R1/222 ,  H04R17/02 ,  H04R31/00 ,  H04R2201/003

Abstract: A method of fabricating a MEMS composite transducer includes providing a substrate having a first surface and a second surface opposite the first surface. A transducing material is deposited over the first surface of the substrate. The transducing material is patterned by retaining transducing material in a first region and removing transducing material in a second region. A polymer layer is deposited over the first region and the second region. The polymer layer is patterned by retaining polymer in a third region and removing polymer in a fourth region. A first portion of the third region is coincident with a portion of the first region and a second portion of the third region is coincident with a portion of the second region. A cavity is etched from the second surface to the first surface of the substrate. An outer boundary of the cavity at the first surface of the substrate intersects the first region where transducing material is retained, so that a first portion of the transducing material is anchored to the first surface of the substrate and a second portion of the transducing material extends over at least a portion of the cavity.

Abstract translation: 制造MEMS复合换能器的方法包括提供具有第一表面和与第一表面相对的第二表面的基底。 在衬底的第一表面上沉积换能材料。 通过将传感材料保持在第一区域中并且在第二区域中去除换能材料来对转导材料进行图案化。 聚合物层沉积在第一区域和第二区域上。 通过在第三区域中保持聚合物并在第四区域中除去聚合物来对聚合物层进行图案化。 第三区域的第一部分与第一区域的一部分重合，第三区域的第二部分与第二区域的一部分重合。 空腔从第二表面蚀刻到衬底的第一表面。 在基板的第一表面处的空腔的外边界与保持换能材料的第一区域相交，使得转换材料的第一部分锚定到基板的第一表面，并且换能材料的第二部分延伸 在空腔的至少一部分上方。

公开(公告)号：US20120266686A1

公开(公告)日：2012-10-25

申请号：US13089541

申请日：2011-04-19

Applicant: James D. Huffman

Inventor： James D. Huffman

IPC: G01N3/08

CPC classification number: G01L1/106 ,  G01L9/0013 ,  G01L9/0022 ,  G01P15/0802 ,  G01P15/09 ,  G01P2015/0837

Abstract: A MEMS composite transducer includes a substrate, a MEMS transducer, and a compliant membrane. Portions of the substrate define an outer boundary of a cavity. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. The compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member and a second portion of the compliant membrane is anchored to the substrate.

Abstract translation: MEMS复合换能器包括基板，MEMS换能器和柔性膜。 基板的一部分限定了空腔的外边界。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在空腔的至少一部分上延伸并且相对于空腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件，并且柔性膜的第二部分锚定到基底。