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    System and method for laser micro-machining
    5.
    发明授权
    System and method for laser micro-machining 失效
    激光微加工的系统和方法

    公开(公告)号：US06677552B1

    公开(公告)日：2004-01-13

    申请号：US10150822

    申请日：2002-05-15

    申请人： William Michael Tulloch ,  Alan Reilly Fry ,  Jeremy Weston ,  William Eugene White

    发明人： William Michael Tulloch ,  Alan Reilly Fry ,  Jeremy Weston ,  William Eugene White

    IPC分类号： B23K2638

    CPC分类号： H01L21/76898 ,  B23K26/0624 ,  B23K26/3576 ,  B23K26/389 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/50 ,  H01L23/481 ,  H01L2924/0002 ,  H01L2924/00

    摘要： System and method for laser micro-machining of crystalline and polycrystalline materials such as silicon that produces smooth surfaces. The invention is applied to integrated circuit applications including probing or modification of circuit components, electrical connections through silicon substrates, establishing ground plains within integrated circuits, and connections between circuits developed on opposing sides of a single substrate. Methods involve the use of femtosecond light pulses of short wavelength and circular polarization. A specific fluence region is used to obtain machined surfaces with smoothness to within one micron.

    摘要翻译： 用于产生光滑表面的晶体和多晶材料如硅的激光微加工的系统和方法。 本发明应用于集成电路应用，包括电路元件的探测或修改，通过硅衬底的电连接，在集成电路内建立接地平面以及在单个衬底的相对侧上开发的电路之间的连接。 方法涉及使用短波长和圆偏振的飞秒光脉冲。 使用特定的通量区域获得平滑度在一微米内的加工表面。

    Optical pulse duration extender
    8.
    发明授权
    Optical pulse duration extender 有权
    光脉冲持续时间延长器

    公开(公告)号：US07184216B2

    公开(公告)日：2007-02-27

    申请号：US11395737

    申请日：2006-03-31

    申请人： Sergei V. Govorkov ,  Luis A. Spinelli ,  William Eugene White ,  Murray Keith Reed

    发明人： Sergei V. Govorkov ,  Luis A. Spinelli ,  William Eugene White ,  Murray Keith Reed

    IPC分类号： G02B27/10 ,  H01S3/10 ,  H01S3/22 ,  G03B27/52

    CPC分类号： G02B27/106 ,  G02B27/143 ,  H01S3/0057

    摘要： An optical pulse extender includes a delay loop formed by a plurality of mirrors and a graded reflectivity beamsplitter. The mirrors and the beamsplitter are configured and aligned such that a pulse to be broadened makes a predetermined number of round trips in the delay loop and is incident on a different zone of the beamsplitter after each round trip. The different zones of the beamsplitter have different reflection values and different transmission values. These values are selected such that the pulse extender delivers a plurality of temporally and spatially separated replica pulses each thereof having about the same energy. The delivered replica pulses together provide an extended pulse having a longer duration than the input pulse. The replica pulses may be passed through a beam homogenizer to spatially homogenize the temporal characteristics of the extended pulse.

    摘要翻译： 光脉冲延长器包括由多个反射镜和渐变反射分束器形成的延迟环。 反射镜和分束器被配置和对准，使得待扩展的脉冲在延迟环路中进行预定数量的往返，并且在每次往返之后入射到分束器的不同区域。 分束器的不同区域具有不同的反射值和不同的透射值。 这些值被选择为使得脉冲延长器递送多个时间上和空间上分离的复制脉冲，每个复制脉冲具有大约相同的能量。 传送的副本脉冲一起提供具有比输入脉冲更长的持续时间的扩展脉冲。 复制脉冲可以通过光束均化器以空间均匀扩展脉冲的时间特性。

    Optical pulse duration extender
    9.
    发明授权
    Optical pulse duration extender 有权
    光脉冲持续时间延长器

    公开(公告)号：US07035012B2

    公开(公告)日：2006-04-25

    申请号：US10790660

    申请日：2004-03-01

    申请人： Sergei V. Govorkov ,  Luis A. Spinelli ,  William Eugene White ,  Murray Keith Reed

    发明人： Sergei V. Govorkov ,  Luis A. Spinelli ,  William Eugene White ,  Murray Keith Reed

    IPC分类号： G02B27/10 ,  H01S3/10 ,  H01S3/22 ,  G03B27/52

    CPC分类号： G02B27/106 ,  G02B27/143 ,  H01S3/0057

    摘要： An optical pulse extender includes a delay loop formed by a plurality of mirrors and a graded reflectivity beamsplitter. The mirrors and the beamsplitter are configured and aligned such that a pulse to be broadened makes a predetermined number of round trips in the delay loop and is incident on a different zone of the beamsplitter after each round trip. The different zones of the beamsplitter have different reflection values and different transmission values. These values are selected such that the pulse extender delivers a plurality of temporally and spatially separated replica pulses each thereof having about the same energy. The delivered replica pulses together provide an extended pulse having a longer duration than the input pulse. The replica pulses may be passed through a beam homogenizer to spatially homogenize the temporal characteristics of the extended pulse.

    摘要翻译： 光脉冲延长器包括由多个反射镜和渐变反射分束器形成的延迟环。 反射镜和分束器被配置和对准，使得待扩展的脉冲在延迟环路中进行预定数量的往返，并且在每次往返之后入射到分束器的不同区域。 分束器的不同区域具有不同的反射值和不同的透射值。 这些值被选择为使得脉冲延长器递送多个时间上和空间上分离的复制脉冲，每个复制脉冲具有大约相同的能量。 传送的副本脉冲一起提供具有比输入脉冲更长的持续时间的扩展脉冲。 复制脉冲可以通过光束均化器以空间均匀扩展脉冲的时间特性。