利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

10 条记录 (耗时 0.026 秒)

    System and method for laser micro-machining
    3.
    发明授权
    System and method for laser micro-machining 失效
    激光微加工的系统和方法

    公开(公告)号：US06677552B1

    公开(公告)日：2004-01-13

    申请号：US10150822

    申请日：2002-05-15

    申请人： William Michael Tulloch ,  Alan Reilly Fry ,  Jeremy Weston ,  William Eugene White

    发明人： William Michael Tulloch ,  Alan Reilly Fry ,  Jeremy Weston ,  William Eugene White

    IPC分类号： B23K2638

    CPC分类号： H01L21/76898 ,  B23K26/0624 ,  B23K26/3576 ,  B23K26/389 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/50 ,  H01L23/481 ,  H01L2924/0002 ,  H01L2924/00

    摘要： System and method for laser micro-machining of crystalline and polycrystalline materials such as silicon that produces smooth surfaces. The invention is applied to integrated circuit applications including probing or modification of circuit components, electrical connections through silicon substrates, establishing ground plains within integrated circuits, and connections between circuits developed on opposing sides of a single substrate. Methods involve the use of femtosecond light pulses of short wavelength and circular polarization. A specific fluence region is used to obtain machined surfaces with smoothness to within one micron.

    摘要翻译： 用于产生光滑表面的晶体和多晶材料如硅的激光微加工的系统和方法。 本发明应用于集成电路应用，包括电路元件的探测或修改，通过硅衬底的电连接，在集成电路内建立接地平面以及在单个衬底的相对侧上开发的电路之间的连接。 方法涉及使用短波长和圆偏振的飞秒光脉冲。 使用特定的通量区域获得平滑度在一微米内的加工表面。

    Laser pulse stretcher and compressor with single parameter wavelength tunability
    10.
    发明授权
    Laser pulse stretcher and compressor with single parameter wavelength tunability 失效
    激光脉冲担架和压缩机具有单参数波长可调性

    公开(公告)号：US5349591A

    公开(公告)日：1994-09-20

    申请号：US52778

    申请日：1993-04-26

    申请人： Jeremy Weston ,  William E. White

    发明人： Jeremy Weston ,  William E. White

    IPC分类号： H01S3/00 ,  H01S3/105

    CPC分类号： H01S3/0057 ,  H01S3/005

    摘要： A dispersive laser pulse stretcher and compressor comprises a stretcher portion and a compressor portion. A first mirror, a second mirror, a third mirror, a first grating, a first lens, and a first vertical retroreflector block comprise the stretcher portion. A fourth mirror, a second grating, a horizontal retroreflector, and a second vertical retroreflector block preferably comprise the compressor portion. The input beams for the stretcher and compressor are preferably parallel beams. The present invention also positions the first grating of the stretcher in a parallel plane with the second grating of the compressor. The present invention also includes a method for simultaneously aligning the input angles of the stretcher and compressor, the method comprises the steps of: removing the first and second diffraction gratings; aligning the input beam for the stretcher portion; aligning the input beam for the compressor portion; mounting the first and second gratings on a mounting block in parallel planes, and rotating the mounting block until the proper input angle for the laser wavelength is reached.

    摘要翻译： 分散激光脉冲拉伸机和压缩机包括担架部分和压缩机部分。 第一镜，第二镜，第三镜，第一光栅，第一透镜和第一垂直后向反射镜块包括担架部分。 第四反射镜，第二光栅，水平后向反射器和第二垂直后向反射器块优选地包括压缩机部分。 用于担架和压缩机的输入梁优选地是平行梁。 本发明还将担架的第一光栅定位在与压缩机的第二光栅平行的平面中。 本发明还包括一种用于同时对准担架和压缩机的输入角度的方法，该方法包括以下步骤：去除第一和第二衍射光栅; 对准担架部分的输入光束; 对准用于压缩机部分的输入光束; 将第一和第二光栅安装在平行平面上的安装块上，并旋转安装块，直到达到激光波长的适当输入角。