摘要:
An optical pickup includes: a light source that emits first, second and third wavelengths of optical beam; and an objective lens unit including a diffraction element whose one surface includes a first diffraction pattern where the first wavelength is diffracted while the second and third wavelengths pass through and whose other surface includes a second diffraction pattern where the second wavelength is diffracted while the first and third wavelengths pass through; and an objective lens that collects the optical beam from the diffraction element, wherein the second and third wavelengths traveling through the objective lens unit are on the optical axis of the objective lens unit while the first wavelength traveling through the objective lens unit have an angle with respect to the optical axis; and the first diffraction pattern is located at a position so as to minimize aberration of the first wavelength of optical beam.
摘要:
A diffraction element for diffracting a particular wavelength of incident optical beam includes: a base section made from a first resin and provided with a predetermined diffraction pattern; and a cover section made from a second resin and covering the diffraction pattern, wherein a rate of change of refraction index of the first resin is substantially the same as a rate of change of refraction index of the second resin in a temperature range between a first temperature and a second temperature.
摘要:
A diffraction element includes: an injection-molded transparent first member having two optical surfaces; and a second member firmly attached to one of the optical surfaces of the first member and provided with a first diffraction pattern on a surface, wherein the second member is a first ultraviolet curable resin having a refraction index in a range of ±0.013 with respect to a refraction index of the first member.
摘要:
A diffraction element for diffracting a particular wavelength of incident optical beam includes: a base section made from a first resin and provided with a predetermined diffraction pattern; and a cover section made from a second resin and covering the diffraction pattern, wherein a rate of change of refraction index of the first resin is substantially the same as a rate of change of refraction index of the second resin in a temperature range between a first temperature and a second temperature.
摘要:
The first and second materials of the diffraction element are selected such that the first material's refraction indexes n1(λ1), n1(λ2) and n1(λ3) for the first, second and third wavelengths λ1, λ2 and λ3 and the second material's refraction indexes n2(λ1), n2(λ2) and n2(λ3) for the first, second and third wavelengths λ1, λ2 and λ3 satisfy one of the conditions (1) or (2).
摘要:
The first and second materials of the diffraction element are selected such that the first material's refraction indexes n1(λ1), n1(λ2) and n1(λ3) for the first, second and third wavelengths λ1, λ2 and λ3 and the second material's refraction indexes n2(λ1), n2(λ2) and n2(λ3) for the first, second and third wavelengths λ1, λ2 and λ3 satisfy one of the conditions (1) or (2).
摘要:
To produce a wavelength plate that is superior in durability and stability and has a high moisture resistant property. A dielectric material is obliquely vapor deposited on a substrate so as to form a birefringent layer that has columnar portions in each of which fine particles of the dielectric material are stacked in a columnar shape, and interstices that are respectively formed between the columnar portions, and the birefringent layer is subjected to an annealing treatment at a temperature within the range of 100° C. or more to 300° C. or less. Then, a protective film with low moisture permeability is formed on the annealed birefringent layer by forming an inorganic compound on the birefringent layer at high density.
摘要:
A method for manufacturing a polishing pad made from a polyurethane resin foam having very uniform, fine cells therein and a polishing pad obtained by that method provides a polishing pad having better polishing characteristics (especially, in planarization) while providing improved dressability while maintaining the planarization characteristics and polishing speed of a conventional polishing pad. The polyurethane resin foam is a cured product obtained by reacting an isocyanate-terminated prepolymer with an aromatic polyamine chain extender having a melting point of 70° C. or lower, for example.
摘要:
The object of the invention is to provide a polishing pad capable of maintaining high-precision end-point optical detection over a long period from the start of use to the end of use even if polishing is performed with an alkaline or acid slurry, as well as a method of manufacturing a semiconductor device with this polishing pad. The polishing pad of the invention is used in chemical mechanical polishing and has a polishing region and a light-transmitting region, wherein the light-transmitting region satisfies that the difference ΔT (ΔT=T0−T1) (%) between T0 and T1 is within 10(%) over the whole range of measurement wavelengths of from 400 to 700 nm, wherein T1 is the light transmittance (%) of the light-transmitting region measured at the measurement wavelength λ after dipping for 24 hours in a KOH aqueous solution at pH 11 or an H2O2 aqueous solution at pH 4 and T0 is the light-transmittance (%) measured at the measurement wavelength λ before the dipping.
摘要翻译:本发明的目的是提供一种抛光垫,即使在用碱性或酸性浆料进行研磨的同时,也能够在从使用开始到使用结束的长时间内保持高精度的端点光学检测 作为使用该研磨垫的半导体装置的制造方法。 本发明的抛光垫用于化学机械抛光,并具有抛光区域和透光区域,其中透光区域满足以下区别:Dgr; T(&Dgr; T = T0-T1)(%) T0和T1在400〜700nm的测量波长的整个范围内在10(%)以内,其中T1是在浸渍24小时后在测量波长λ测量的透光区域的透光率(%) pH为11的KOH水溶液或pH4的H 2 O 2水溶液,T0为在浸渍前测定的波长λ下测定的透光率(%)。
摘要:
A solid-state far ultraviolet light emitting element is formed by a hexagonal boron nitride single crystal, excited by electron beam irradiation to emit far ultraviolet light having a maximum light emission peak in a far ultraviolet region at a wavelength of 235 nm or shorter.