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公开(公告)号：US08776605B2
公开(公告)日：2014-07-15
申请号：US13332794
申请日：2011-12-21
IPC分类号： G01N29/00
摘要： An ultrasonic sensor includes: a substrate; an ultrasonic transducer disposed on the substrate, and configured and arranged to transmit ultrasonic waves that propagate as plane waves in a direction orthogonal to a surface of the substrate; an acoustic refracting part contacting the ultrasonic transducer, and configured and arranged to refract the ultrasonic waves transmitted from the ultrasonic transducer; an elastically deformable elastic portion contacting the acoustic refracting part; and an ultrasonic reflecting member disposed within the elastic portion, and configured and arranged to reflect the ultrasonic waves. The acoustic refracting part is configured and arranged to refract, toward the ultrasonic reflecting member, the ultrasonic waves transmitted from the ultrasonic transducer.
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2.发明授权Ultrasonic sensor, tactile sensor, grasping apparatus, and electronic device 有权超声波传感器，触觉传感器，抓取装置和电子装置公开(公告)号：US09127999B2
公开(公告)日：2015-09-08
申请号：US13332794
申请日：2011-12-21
CPC分类号： G01L1/25 , B25J13/083 , B25J19/026 , G01L5/228
摘要： An ultrasonic sensor includes: a substrate; an ultrasonic transducer disposed on the substrate, and configured and arranged to transmit ultrasonic waves that propagate as plane waves in a direction orthogonal to a surface of the substrate; an acoustic refracting part contacting the ultrasonic transducer, and configured and arranged to refract the ultrasonic waves transmitted from the ultrasonic transducer; an elastically deformable elastic portion contacting the acoustic refracting part; and an ultrasonic reflecting member disposed within the elastic portion, and configured and arranged to reflect the ultrasonic waves. The acoustic refracting part is configured and arranged to refract, toward the ultrasonic reflecting member, the ultrasonic waves transmitted from the ultrasonic transducer.
摘要翻译： 超声波传感器包括：基板; 超声波换能器，其设置在所述基板上，并且被构造和布置成发射在与所述基板的表面正交的方向上作为平面波传播的超声波; 与所述超声波换能器接触的声折射部，构成并配置为使从所述超声波换能器发送的超声波折射; 接触声折射部的弹性变形弹性部; 以及设置在所述弹性部内的超声波反射部件，并且被配置为被配置为反射所述超声波。 声折射部被配置并布置成朝向超声波反射部件折射从超声波换能器发送的超声波。
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公开(公告)号：US08826748B2
公开(公告)日：2014-09-09
申请号：US13480000
申请日：2012-05-24
IPC分类号： G01L1/00
摘要： A stress-detecting element includes a support body, a support film, a first piezoelectric element, first and second elastic parts. The support body has an opening part with first and second rectilinear sections extending parallel to each other. The support film blocks off the opening part. The first piezoelectric element straddles the first rectilinear section from an interior area to an exterior area of the opening part as seen in plan view. The first elastic part straddles the first rectilinear section from the interior area to the exterior area of the opening part. The second elastic part straddles the second rectilinear section from the interior area to the exterior area of the opening part. The first and second elastic parts respectively have first and second elastic end sections disposed in the interior area of the opening part and spaced apart from each other.
摘要翻译： 应力检测元件包括支撑体，支撑膜，第一压电元件，第一和第二弹性部件。 支撑体具有开口部分，第一和第二直线部分彼此平行延伸。 支撑膜阻挡开口部分。 如平面图所示，第一压电元件将第一直线段从内部区域跨越到开口部分的外部区域。 第一弹性部分将第一直线部分从内部区域跨越到开口部分的外部区域。 第二弹性部分将第二直线部分从内部区域跨越到开口部分的外部区域。 第一和第二弹性部分分别具有设置在开口部分的内部区域中并且彼此间隔开的第一和第二弹性端部。
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4.发明授权Ultrasonic transducer, ultrasonic sensor, method of manufacturing ultrasonic transducer, and method of manufacturing ultrasonic sensor 有权超声波传感器，超声波传感器，超声波换能器的制造方法以及制造超声波传感器的方法公开(公告)号：US08536763B2
公开(公告)日：2013-09-17
申请号：US12946061
申请日：2010-11-15
IPC分类号： H01L41/09
CPC分类号： H01L41/0926 , G10K9/122 , H01L41/0973 , Y10T29/42
摘要： An ultrasonic transducer includes: a support member having an opening section; a diaphragm adapted to cover the opening section; and a piezoelectric member provided to the diaphragm and at least one of expanding and contracting in an in-plane direction in response to application of a voltage, wherein the diaphragm has a concave groove section formed to have a concave shape on a surface on an opposite side to one side exposed to the opening section, and the piezoelectric member is fixed to the diaphragm in an area outside the concave groove section, and disposed to cover the concave groove section so as to be opposed to a bottom of the concave groove section via a space.
摘要翻译： 超声换能器包括：具有开口部分的支撑构件; 适于覆盖所述开口部的隔膜; 以及压电元件，其设置在所述隔膜上，并且响应于施加电压而在面内方向上膨胀和收缩中的至少一个，其中所述隔膜具有形成为在相对的表面上具有凹形形状的凹槽部分 一侧暴露于开口部的一侧，并且压电构件在凹槽部分的外侧的区域中固定到隔膜，并且设置成覆盖凹槽部分以与凹槽部分的底部相对的通孔 一个空间
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公开(公告)号：US20120026250A1
公开(公告)日：2012-02-02
申请号：US13253896
申请日：2011-10-05
申请人： Shiro Yazaki , Setsuya Iwashita , Eiju Hirai , Tsutomu Nishiwaki
发明人： Shiro Yazaki , Setsuya Iwashita , Eiju Hirai , Tsutomu Nishiwaki
CPC分类号： B41J2/164 , B41J2/04 , B41J2/055 , B41J2/14233 , B41J2/161 , B41J2/1629 , B41J2/1631 , B41J2/1645 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , Y10T29/42 , Y10T29/49401
摘要： A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.
摘要翻译： 制造液体喷射头的方法包括在通道形成基板上沉积下电极膜并将下电极膜图案化成预定图案，在通道形成基板上形成压电层，在导电材料上形成中间膜 所述压电层在所述中间膜上形成保护膜，并且使用所述保护膜作为掩模，通过将所述压电层与所述中间膜一起蚀刻成预定图案，剥离所述保护膜并沉积上电极膜 在通道形成基板上并将上电极膜图案化成预定图案。
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6.发明申请METHOD OF MANUFACTURING AN ACTUATOR APPARATUS, A METHOD OF MANUFACTURING A LIQUID JET HEAD AND A LIQUID JET APPARATUS 审中-公开制造执行器装置的方法，制造液体喷射头和液体喷射装置的方法公开(公告)号：US20090213188A1
公开(公告)日：2009-08-27
申请号：US12370898
申请日：2009-02-13
CPC分类号： B41J2/161 , B41J2/1629 , B41J2/1631 , B41J2/1646 , B41J2002/14241 , B41J2002/14419
摘要： A method of manufacturing an actuator apparatus includes forming, on the base plate, a test pattern that is electrically discontinuous with the electrodes of the piezoelectric element and has the same layer as the lower electrode, the test pattern having the lower electrode with the upper electrode and the piezoelectric material layer removed by etching, and measuring electric resistance of the lower electrode of the test pattern to acquire the etch amount of the lower electrode when the piezoelectric element is formed.
摘要翻译： 一种制造致动器装置的方法包括在基板上形成与压电元件的电极不连续的测试图案，并且具有与下电极相同的层，测试图案具有具有上电极的下电极 并且通过蚀刻去除压电材料层，并且测量测试图案的下电极的电阻以获得当形成压电元件时下电极的蚀刻量。
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7.发明授权Method for manufacturing piezoelectric element, and piezoelectric element, ink-jet recording head and printer 有权制造压电元件的方法，压电元件，喷墨记录头和打印机公开(公告)号：US06639340B1
公开(公告)日：2003-10-28
申请号：US09549209
申请日：2000-04-13
申请人： Hong Qiu , Koji Sumi , Souichi Moriya , Masato Shimada , Tsutomu Nishiwaki
发明人： Hong Qiu , Koji Sumi , Souichi Moriya , Masato Shimada , Tsutomu Nishiwaki
IPC分类号： H01L4108
CPC分类号： H01L41/0805 , H01L41/0973 , H01L41/1875 , H01L41/318
摘要： Provided is a method for manufacturing a piezoelectric element that has excellent piezoelectric characteristics and can be made into a thicker film. A piezoelectric thin film is crystallized by a process in which piezoelectric precursor films 4021 through 4025 containing the metal elements of a piezoelectric ceramic are coated with a material, dried, pyrolyzed, and then heat-treated under prescribed conditions in a diffusion furnace. With this method, a piezoelectric thin film can be made into a thicker film without initiating cracking.
摘要翻译： 提供一种压电元件的制造方法，该压电元件具有优异的压电特性，并且可以制成较厚的膜。 压电薄膜通过将包含压电陶瓷的金属元素的压电前体膜4021至4025涂覆材料干燥，热解，然后在扩散炉中在规定条件下进行热处理的方法结晶化。 利用该方法，可以将压电薄膜制成较厚的膜而不引起开裂。
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8.发明授权Piezoelectric actuator, ink jet printing head, printer, method for manufacturing piezoelectric actuator, and method for manufacturing ink jet printing head 失效压电致动器，喷墨打印头，打印机，压电致动器的制造方法以及喷墨打印头的制造方法公开(公告)号：US06402304B1
公开(公告)日：2002-06-11
申请号：US09372990
申请日：1999-08-12
申请人： Hong Qiu , Koji Sumi , Masato Shimada , Tsutomu Nishiwaki , Masanori Okuyama , Zhi Quiang Wei
发明人： Hong Qiu , Koji Sumi , Masato Shimada , Tsutomu Nishiwaki , Masanori Okuyama , Zhi Quiang Wei
IPC分类号： B41J2045
CPC分类号： B41J2/1646 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1645 , B41J2002/14387 , H01L41/0805 , H01L41/0973 , H01L41/317
摘要： A piezoelectric actuator, made of a substrate and a piezoelectric film layer resistant to erosion is provided. The area of the piezoelectric actuator can be enlarged, and has a flat top surface. The present invention further provides an ink jet printing head, a printer, a method for manufacturing a piezoelectric actuator, and a method for manufacturing an ink jet printing head. The piezoelectric actuator includes a piezoelectric film disposed between a lower electrode and an upper electrode. Columnar crystal grains of piezoelectric ceramic which compose the piezoelectric actuator are random-oriented in a film thickness direction, and have a mean diameter in the range of 100 nm to 15,000 nm. The method for manufacturing the actuator includes the step of forming precursor films, which are composed of metal and oxygen, over a lower electrode, providing a hydrothermal treatment by dipping the precursor films in an alkaline solution, which as 2 M[mol/l] or less, more preferably 0.1 M[mol/l] or less, concentration of a given alkaline solute, and promoting the crystallization under certain conditions.
摘要翻译： 提供了一种由基片制成的压电致动器和耐腐蚀的压电薄膜层。 压电致动器的面积可以扩大，并且具有平坦的顶表面。 本发明还提供一种喷墨打印头，打印机，压电致动器的制造方法以及喷墨打印头的制造方法。 压电致动器包括设置在下电极和上电极之间的压电膜。 构成压电致动器的压电陶瓷的柱状晶粒在膜厚度方向上是随机取向的，并且具有在100nm至15,000nm范围内的平均直径。 制造致动器的方法包括在下电极上形成由金属和氧构成的前体膜的步骤，通过将前体膜浸入碱溶液中进行水热处理，碱溶液为2M [mol / l] 或更低，更优选0.1M [mol / l]或更低，给定碱性溶质的浓度，并且在某些条件下促进结晶。
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公开(公告)号：US06378996B1
公开(公告)日：2002-04-30
申请号：US09712842
申请日：2000-11-15
IPC分类号： B41J2045
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1645 , B41J2/1646 , B41J2002/14241 , B41J2002/1437 , B41J2002/14419 , B41J2002/14491
摘要： Disclosed are an ink-jet recording head in which rigidity of a compartment wall is improved and pressure generating chambers are arranged in a high density, a manufacturing method and an ink-jet recording apparatus thereof. An ink-jet recording head includes: a passage-forming substrate 10 having at least silicon layer that consists of single crystal silicon and pressure generating chambers 12 defined thereon, which communicate with a nozzle orifice 21; and a piezoelectric element 300 for generating a pressure change in the pressure generating chamber 12, the piezoelectric element 300 being provided in a region opposite the pressure generating chamber 12 via a vibration plate, which constitutes a portion of the pressure generating chamber 12. The ink-jet recording head further includes a joining plate 20 joined to the passage-forming substrate 10 on the surface where the piezoelectric element 300 is formed, and the nozzle orifice 21 is provided on the joining plate 20.
摘要翻译： 公开了一种喷墨记录头，其中室壁的刚性得到改善，并且压力发生室以高密度排列，其制造方法和喷墨记录装置。喷墨记录头包括：通道 至少具有由限定在其上的单晶硅和压力发生室12构成的硅层的衬底10，其与喷嘴孔21连通; 以及用于在压力发生室12中产生压力变化的压电元件300，压电元件300经由构成压力产生室12的一部分的振动板设置在与压力产生室12相对的区域中。油墨 喷墨记录头还包括在形成压电元件300的表面上连接到通道形成基板10的接合板20，并且喷嘴孔21设置在接合板20上。
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10.发明授权公开(公告)号：US06332672B1
公开(公告)日：2001-12-25
申请号：US09069991
申请日：1998-04-30
申请人： Shiro Yazaki , Shinri Sakai , Tsutomu Nishiwaki
发明人： Shiro Yazaki , Shinri Sakai , Tsutomu Nishiwaki
IPC分类号： B41J2045
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/1425 , B41J2002/14387
摘要： An ink jet recording head comprises: a passage form substrate having, a diaphragm forming a part of a pressure generating chamber communicating with a nozzle aperture and at least the upper surface of which acts as a lower electrode, and a piezoelectric vibrator including a piezoelectric material layer formed on the surface of the diaphragm, an upper electrode formed on the surface of the piezoelectric material layer and a piezoelectric active part formed in an area opposite to the pressure generating chamber; a cap member joined to the side of the piezoelectric material layer of the passage formed substrate for sealing space in a state in which space to extent that a movement is not prevented is secured; and a flexible portion for absorbing the change of pressure in the space of the cap member.
摘要翻译： 一种喷墨记录头，包括：通道形式基板，具有形成与喷嘴孔连通并且至少其上表面用作下电极的压力发生室的一部分的隔膜，以及包括压电材料的压电振动器 形成在所述隔膜的表面上的上层电极，形成在所述压电体层的表面上的上电极和与所述压力发生室相反的区域形成的压电有源部; 确保在没有防止移动的空间的状态下连接到通道形成基板的压电材料层侧的密封空间的盖构件; 以及用于吸收盖构件的空间中的压力变化的柔性部分。
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