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1.发明申请公开(公告)号：US20110083506A1
公开(公告)日：2011-04-14
申请号：US12924641
申请日：2010-10-01
CPC分类号： B81B3/0072 , B81B2201/0235 , G01P15/0802 , G01P15/125 , G01P2015/0814 , Y10T29/49204
摘要： A micromechanical structure includes: a substrate; a seismic mass movable relative to the substrate along a first direction parallel to a main plane of extension of the substrate; a first electrode structure is connected to the substrate; and a second electrode structure connected to the substrate. The seismic mass includes a counterelectrode structure having finger electrodes situated between first finger electrodes of the first electrode structure and second finger electrodes of the second electrode structure, along the first direction. The first electrode structure is fastened to the substrate by a first anchoring element in a central region of the micromechanical structure, and the second electrode structure is anchored to the substrate by a second anchoring element situated in the central region.
摘要翻译： 微机械结构包括：基板; 沿着平行于所述基板的延伸主平面的第一方向相对于所述基板移动的地震质量块; 第一电极结构连接到基板; 以及与基板连接的第二电极结构。 地震质量包括沿着第一方向具有位于第一电极结构的第一指状电极和第二电极结构的第二指状电极之间的指状电极的反电极结构。 第一电极结构通过微机电结构的中心区域中的第一锚定元件紧固到基板，并且第二电极结构通过位于中心区域中的第二锚定元件锚定到基板。
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2.发明授权Micromechanical structure, method for manufacturing a micromechanical structure, and use of a micromechanical structure 有权微机械结构，微机械结构的制造方法以及微机械结构的使用公开(公告)号：US08530982B2
公开(公告)日：2013-09-10
申请号：US12924160
申请日：2010-09-21
IPC分类号： H01L29/84
CPC分类号： G01C19/5783 , B81B2201/025 , B81C1/00166
摘要： A micromechanical structure which includes a substrate having a main plane of extension, and a seismic mass which is movable relative to the substrate. The micromechanical structure includes a fixed electrode which is connected to the substrate, and a counterelectrode which is connected to the seismic mass. The fixed electrode has a first fixed electrode region and a second fixed electrode region which is connected in an electrically conductive manner to the first fixed electrode region. The counterelectrode is partially situated between the first and the second fixed electrode region, perpendicular to the main plane of extension.
摘要翻译： 一种微机械结构，其包括具有主平面延伸的基板和相对于基板可移动的地震质量。 微机械结构包括连接到基板的固定电极和连接到地震块的反电极。 固定电极具有第一固定电极区域和与导电方式连接到第一固定电极区域的第二固定电极区域。 反电极部分地位于第一和第二固定电极区域之间，垂直于主延伸平面。
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3.发明授权公开(公告)号：US08443671B2
公开(公告)日：2013-05-21
申请号：US12924641
申请日：2010-10-01
IPC分类号： G01P15/125
CPC分类号： B81B3/0072 , B81B2201/0235 , G01P15/0802 , G01P15/125 , G01P2015/0814 , Y10T29/49204
摘要： A micromechanical structure includes: a substrate; a seismic mass movable relative to the substrate along a first direction parallel to a main plane of extension of the substrate; a first electrode structure is connected to the substrate; and a second electrode structure connected to the substrate. The seismic mass includes a counterelectrode structure having finger electrodes situated between first finger electrodes of the first electrode structure and second finger electrodes of the second electrode structure, along the first direction. The first electrode structure is fastened to the substrate by a first anchoring element in a central region of the micromechanical structure, and the second electrode structure is anchored to the substrate by a second anchoring element situated in the central region.
摘要翻译： 微机械结构包括：基板; 沿着平行于所述基板的延伸主平面的第一方向相对于所述基板移动的地震质量块; 第一电极结构连接到基板; 以及与基板连接的第二电极结构。 地震质量包括沿着第一方向具有位于第一电极结构的第一指状电极和第二电极结构的第二指状电极之间的指状电极的反电极结构。 第一电极结构通过微机电结构的中心区域中的第一锚定元件紧固到基板，并且第二电极结构通过位于中心区域中的第二锚定元件锚定到基板。
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4.发明申请Micromechanical structure, method for manufacturing a micromechanical structure, and use of a micromechanical structure 有权微机械结构，微机械结构的制造方法以及微机械结构的使用公开(公告)号：US20110079863A1
公开(公告)日：2011-04-07
申请号：US12924160
申请日：2010-09-21
CPC分类号： G01C19/5783 , B81B2201/025 , B81C1/00166
摘要： A micromechanical structure which includes a substrate having a main plane of extension, and a seismic mass which is movable relative to the substrate. The micromechanical structure includes a fixed electrode which is connected to the substrate, and a counterelectrode which is connected to the seismic mass. The fixed electrode has a first fixed electrode region and a second fixed electrode region which is connected in an electrically conductive manner to the first fixed electrode region. The counterelectrode is partially situated between the first and the second fixed electrode region, perpendicular to the main plane of extension.
摘要翻译： 一种微机械结构，其包括具有主平面延伸的基板和相对于基板可移动的地震质量。 微机械结构包括连接到基板的固定电极和连接到地震块的反电极。 固定电极具有第一固定电极区域和与导电方式连接到第一固定电极区域的第二固定电极区域。 反电极部分地位于第一和第二固定电极区域之间，垂直于主延伸平面。
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公开(公告)号：US20120313638A1
公开(公告)日：2012-12-13
申请号：US13514550
申请日：2010-10-22
申请人： Christian Patak , Stefan Weiss , Frederic Njikam Njimonzie , Frank Schaltz , Paul Farber , Christian Bierhoff
发明人： Christian Patak , Stefan Weiss , Frederic Njikam Njimonzie , Frank Schaltz , Paul Farber , Christian Bierhoff
IPC分类号： G01R33/04
摘要： A magnetic field sensor includes a magnetizable core having a curved surface at least sectionally, a magnetization device for magnetizing the core, and a determination device for determining a magnetic field in the core.
摘要翻译： 磁场传感器包括具有至少剖面的弯曲表面的可磁化芯体，用于磁化磁芯的磁化装置，以及用于确定磁芯中的磁场的确定装置。
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公开(公告)号：US09309107B2
公开(公告)日：2016-04-12
申请号：US13434486
申请日：2012-03-29
CPC分类号： B81C1/00039 , B81B2207/07 , G01P15/0802 , Y10T428/24851
摘要： A micromechanical system is described having a substrate; a first micromechanical functional area, which is situated above the substrate; a second micromechanical functional area, which is situated above the first micromechanical functional area and is connected via a first weblike anchoring structure to the first micromechanical functional area; a third micromechanical functional area, which is situated above the second micromechanical functional area, and which has a first subarea and a second subarea; the first subarea being connected via a second weblike anchoring structure to the second micromechanical functional area; and the second subarea being mounted floating over the substrate by the first subarea. The invention also provides a method for manufacturing such a micromechanical system.
摘要翻译： 具有基板的微机械系统被描述; 位于基板上方的第一微机械功能区域; 第二微机械功能区域，其位于第一微机械功能区域上方，并且经由第一网状锚定结构连接到第一微机械功能区域; 第三微机械功能区域，其位于第二微机械功能区域上方，并且具有第一子区域和第二子区域; 所述第一子区域经由第二网状锚定结构连接到所述第二微机械功能区域; 并且第二子区域通过第一子区域浮动在衬底上。 本发明还提供了一种用于制造这种微机械系统的方法。
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公开(公告)号：US20110197678A1
公开(公告)日：2011-08-18
申请号：US13057121
申请日：2009-08-04
申请人： Arnd Kaelberer , Lars Tebje , Christian Bierhoff
发明人： Arnd Kaelberer , Lars Tebje , Christian Bierhoff
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/0802
摘要： A capacitive micromechanical acceleration sensor has a substrate and a micromechanical functional layer situated above the substrate. A seismic mass, a suspension and fixed electrodes are situated in the micromechanical functional layer. The fixed electrodes are electrically connected to one another on a first and second side, respectively, of the suspension using buried conductor tracks. The fixed electrodes are connected to one another between the first and second side of the suspension using first and second conductors in the micromechanical functional layer.
摘要翻译： 电容微机械加速度传感器具有位于衬底上方的衬底和微机械功能层。 地震质量，悬架和固定电极位于微机械功能层。 固定电极分别在使用掩埋导体轨道的悬架的第一和第二侧上彼此电连接。 固定电极使用微机械功能层中的第一和第二导体在悬架的第一和第二侧之间彼此连接。
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公开(公告)号：US08573059B2
公开(公告)日：2013-11-05
申请号：US13057121
申请日：2009-08-04
申请人： Arnd Kaelberer , Lars Tebje , Christian Bierhoff
发明人： Arnd Kaelberer , Lars Tebje , Christian Bierhoff
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/0802
摘要： A capacitive micromechanical acceleration sensor has a substrate and a micromechanical functional layer situated above the substrate. A seismic mass, a suspension and fixed electrodes are situated in the micromechanical functional layer. The fixed electrodes are electrically connected to one another on a first and second side, respectively, of the suspension using buried conductor tracks. The fixed electrodes are connected to one another between the first and second side of the suspension using first and second conductors in the micromechanical functional layer.
摘要翻译： 电容微机械加速度传感器具有位于衬底上方的衬底和微机械功能层。 地震质量，悬架和固定电极位于微机械功能层。 固定电极分别在使用掩埋导体轨道的悬架的第一和第二侧上彼此电连接。 固定电极使用微机械功能层中的第一和第二导体在悬架的第一和第二侧之间彼此连接。
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公开(公告)号：US20110068419A1
公开(公告)日：2011-03-24
申请号：US12873912
申请日：2010-09-01
申请人： Jochen Reinmuth , Jens Frey , Christian Bierhoff
发明人： Jochen Reinmuth , Jens Frey , Christian Bierhoff
CPC分类号： B81C1/00039
摘要： A micromechanical system includes a substrate, a first conductive layer situated above the substrate and a second conductive layer situated above the first conductive layer. The first conductive layer and the second conductive layer are conductively interconnected by a connecting element. The connecting element has a conductive edge surrounding a nonconductive region.
摘要翻译： 微机械系统包括衬底，位于衬底上方的第一导电层和位于第一导电层上方的第二导电层。 第一导电层和第二导电层通过连接元件导电互连。 连接元件具有围绕非导电区域的导电边缘。
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