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1.发明授权Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assembly 有权用于将微光刻投影曝光装置的光学元件连接到安装件和组件的方法公开(公告)号：US07551375B2
公开(公告)日：2009-06-23
申请号：US11386236
申请日：2006-03-21
申请人： Johannes Rau , Josef Distl , Armin Schoeppach , Hubert Holderer
发明人： Johannes Rau , Josef Distl , Armin Schoeppach , Hubert Holderer
IPC分类号： G02B7/02
CPC分类号： G03F7/70825 , C03C27/046 , C04B37/04 , C04B2237/12 , Y10T29/49144
摘要： The invention relates to processes for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and also relates to an assembly. A process includes the following steps: forming a substance mixture at a processing temperature from at least a first component, which is solid at the processing temperature, and a second component, which is liquid at the processing temperature, the first component being dispersed in the second component, introducing the substance mixture in the unset state between the optical element and the mount, and setting the substance mixture so as to form a diffusion alloy from the first and second components.
摘要翻译： 本发明涉及用于将微光刻投影曝光装置的光学元件连接到安装件的方法，并且还涉及一种组件。 一种方法包括以下步骤：在加工温度下从处于加工温度下为固体的至少第一组分和在处理温度下为液体的第二组分形成物质混合物，第一组分分散在 将所述物质混合物引入所述光学元件和所述安装件之间的未设定状态，并且将所述物质混合物设定为从所述第一和第二成分形成扩散合金。
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公开(公告)号：US20060243779A1
公开(公告)日：2006-11-02
申请号：US11386236
申请日：2006-03-21
申请人： Johannes Rau , Josef Distl , Armin Schoeppach , Hubert Holderer
发明人： Johannes Rau , Josef Distl , Armin Schoeppach , Hubert Holderer
IPC分类号： B23K31/02
CPC分类号： G03F7/70825 , C03C27/046 , C04B37/04 , C04B2237/12 , Y10T29/49144
摘要： The invention relates to processes for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and also relates to an assembly. A process includes the following steps: forming a substance mixture at a processing temperature from at least a first component, which is solid at the processing temperature, and a second component, which is liquid at the processing temperature, the first component being dispersed in the second component, introducing the substance mixture in the unset state between the optical element and the mount, and setting the substance mixture so as to form a diffusion alloy from the first and second components.
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公开(公告)号：US20080100930A1
公开(公告)日：2008-05-01
申请号：US12002694
申请日：2007-12-17
申请人： Hubert Holderer , Werner Lang , Alexander Kohl , Bernhard Gellrich , Hartmut Brandenburg , Johannes Rau , Armin Schoeppach
发明人： Hubert Holderer , Werner Lang , Alexander Kohl , Bernhard Gellrich , Hartmut Brandenburg , Johannes Rau , Armin Schoeppach
CPC分类号： G03F7/70591 , G02B27/62 , G03F7/70258
摘要： An optical measuring system is provided with a measuring machine that has at least one measuring element for determining locations and at least one measuring element for determining angles. At least one common reference surface is provided for the location-determining measuring element and the angle-determining measuring element.
摘要翻译： 光学测量系统设置有测量机，该测量机具有用于确定位置的至少一个测量元件和用于确定角度的至少一个测量元件。 为位置确定测量元件和角度确定测量元件提供至少一个公共参考表面。
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公开(公告)号：US08508868B2
公开(公告)日：2013-08-13
申请号：US13359341
申请日：2012-01-26
申请人： Ulrich Weber , Armin Schoeppach , Hubert Holderer
发明人： Ulrich Weber , Armin Schoeppach , Hubert Holderer
摘要： A holding arrangement for an optical element, in particular for a cylindrical lens, includes a basic structure surrounding an optical element and a mounting device by which the optical element is supported on the basic structure. The mounting device has two degrees of freedom so that the optical element can be supported by the mounting device in a manner that allows the optical element to rotate about both about an optical axis and an axis perpendicular to the optical axis. If the optical element is a cylindrical lens, the axis perpendicular to the optical axis can be an axis perpendicular to an axial direction of the cylindrical lens. The disclosure further relates to a manipulator unit for an optical system which includes a holding arrangement.
摘要翻译： 用于光学元件的保持装置，特别是用于圆柱形透镜的保持装置包括围绕光学元件的基本结构和安装装置，光学元件通过该安装装置支撑在基本结构上。 安装装置具有两个自由度，使得光学元件可以以允许光学元件围绕光轴和垂直于光轴的轴线旋转的方式由安装装置支撑。 如果光学元件是圆柱形透镜，则垂直于光轴的轴线可以是垂直于柱面透镜轴向的轴线。 本发明还涉及一种用于光学系统的操纵器单元，其包括保持装置。
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公开(公告)号：US08456615B2
公开(公告)日：2013-06-04
申请号：US12838149
申请日：2010-07-16
CPC分类号： G02B7/008 , G02B7/028 , G02B27/0927 , G03F7/70825 , G03F7/70891
摘要： An optical system, such as an illumination system, includes an optical arrangement having at least one optical element and at least one heat dissipation element configured to at least partially dissipate thermal energy generated in the optical element(s) to the outside environment of the optical system. The heat dissipation element(s) is(are) arranged without direct contact with the optical element(s).
摘要翻译： 诸如照明系统的光学系统包括具有至少一个光学元件和至少一个散热元件的光学装置，该至少一个散热元件被配置为至少部分地将在光学元件中产生的热能消耗到光学元件的外部环境 系统。 散热元件被布置成不与光学元件直接接触。
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公开(公告)号：US20050248858A1
公开(公告)日：2005-11-10
申请号：US11109316
申请日：2005-04-19
申请人： Ulrich Weber , Alexander Kohl , Hubert Holderer , Armin Schoeppach , Erwin Gaber , Winfried Kaiser , Reiner Garreis , Toralf Gruner , Chris Reed , Dragos Pariza , Mike Meehan
发明人： Ulrich Weber , Alexander Kohl , Hubert Holderer , Armin Schoeppach , Erwin Gaber , Winfried Kaiser , Reiner Garreis , Toralf Gruner , Chris Reed , Dragos Pariza , Mike Meehan
CPC分类号： G03F7/70825 , G02B7/008 , G02B7/1805 , G03F7/70891
摘要： The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at least one support element that is fastened in the housing of the imaging device. The connection between the beam splitter element and said at least one support element is designed in such a way that the position of the beam splitter layer of the beam splitter element remains nearly constant relative to the housing independently of temperatures and of thermal stresses acting upon the beam splitter element.
摘要翻译： 本发明涉及一种用于在光学成像装置中保持具有光学有源分束器层的分束器元件的装置，所述分束器元件连接到紧固在成像装置的壳体中的至少一个支撑元件。 分束器元件和所述至少一个支撑元件之间的连接被设计成使得分束器元件的分束器层的位置相对于壳体保持几乎恒定，而与温度和作用在 分束器元件
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公开(公告)号：US20120154935A1
公开(公告)日：2012-06-21
申请号：US13359341
申请日：2012-01-26
申请人： Ulrich Weber , Armin Schoeppach , Hubert Holderer
发明人： Ulrich Weber , Armin Schoeppach , Hubert Holderer
IPC分类号： G02B7/02
摘要： A holding arrangement for an optical element, in particular for a cylindrical lens, includes a basic structure surrounding an optical element and a mounting device by which the optical element is supported on the basic structure. The mounting device has two degrees of freedom so that the optical element can be supported by the mounting device in a manner that allows the optical element to rotate about both about an optical axis and an axis perpendicular to the optical axis. If the optical element is a cylindrical lens, the axis perpendicular to the optical axis can be an axis perpendicular to an axial direction of the cylindrical lens. The disclosure further relates to a manipulator unit for an optical system which includes a holding arrangement.
摘要翻译： 用于光学元件的保持装置，特别是用于圆柱形透镜的保持装置包括围绕光学元件的基本结构和安装装置，光学元件通过该安装装置支撑在基本结构上。 安装装置具有两个自由度，使得光学元件可以以允许光学元件围绕光轴和垂直于光轴的轴线旋转的方式由安装装置支撑。 如果光学元件是圆柱形透镜，则垂直于光轴的轴线可以是垂直于柱面透镜轴向的轴线。 本发明还涉及一种用于光学系统的操纵器单元，其包括保持装置。
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公开(公告)号：US07079331B2
公开(公告)日：2006-07-18
申请号：US11109316
申请日：2005-04-19
申请人： Ulrich Weber , Alexander Kohl , Hubert Holderer , Armin Schoeppach , Erwin Gaber , Winfried Kaiser , Reiner Garreis , Toralf Gruner , Chris Reed , Dragos Pariza , Mike Meehan
发明人： Ulrich Weber , Alexander Kohl , Hubert Holderer , Armin Schoeppach , Erwin Gaber , Winfried Kaiser , Reiner Garreis , Toralf Gruner , Chris Reed , Dragos Pariza , Mike Meehan
CPC分类号： G03F7/70825 , G02B7/008 , G02B7/1805 , G03F7/70891
摘要： The invention relates to a device for holding a beam splitter element having an optically active beam splitter layer in an optical imaging device, the beam splitter element being connected to at least one support element that is fastened in the housing of the imaging device. The connection between the beam splitter element and said at least one support element is designed in such a way that the position of the beam splitter layer of the beam splitter element remains nearly constant relative to the housing independently of temperatures and of thermal stresses acting upon the beam splitter element.
摘要翻译： 本发明涉及一种用于在光学成像装置中保持具有光学有源分束器层的分束器元件的装置，所述分束器元件连接到紧固在成像装置的外壳中的至少一个支撑元件。 分束器元件和所述至少一个支撑元件之间的连接被设计成使得分束器元件的分束器层的位置相对于壳体保持几乎恒定，而与温度和作用在 分束器元件
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公开(公告)号：US20110025992A1
公开(公告)日：2011-02-03
申请号：US12838149
申请日：2010-07-16
CPC分类号： G02B7/008 , G02B7/028 , G02B27/0927 , G03F7/70825 , G03F7/70891
摘要： An optical system, such as an illumination system, includes an optical arrangement having at least one optical element and at least one heat dissipation element configured to at least partially dissipate thermal energy generated in the optical element(s) to the outside environment of the optical system. The heat dissipation element(s) is(are) arranged without direct contact with the optical element(s).
摘要翻译： 诸如照明系统的光学系统包括具有至少一个光学元件和至少一个散热元件的光学装置，该至少一个散热元件被配置为至少部分地将在光学元件中产生的热能消耗到光学元件的外部环境 系统。 散热元件被布置成不与光学元件直接接触。
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公开(公告)号：US08705185B2
公开(公告)日：2014-04-22
申请号：US13431378
申请日：2012-03-27
CPC分类号： G02B7/001 , F16F7/01 , F16F7/108 , G02B7/02 , G02B27/646 , G03F7/70825 , G03F7/709
摘要： An optical element has at least one additional element fitted thereon which dissipates the vibrational energy of the optical element by friction.
摘要翻译： 光学元件具有安装在其上的至少一个附加元件，其通过摩擦消散光学元件的振动能。
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