Micro-etch solution for producing metal surface topography
    6.
    发明授权
    Micro-etch solution for producing metal surface topography 失效
    用于生产金属表面形貌的微蚀刻溶液

    公开(公告)号:US06444140B2

    公开(公告)日:2002-09-03

    申请号:US09270690

    申请日:1999-03-17

    IPC分类号: B44C122

    摘要: Metal surfaces, particularly copper surfaces, which are oxidatively micro-etched to increase surface area through the use of molybdenum. The micro-etch solutions contain a proton source, e.g., a mineral acid, an oxidizer agent, e.g., hydrogen peroxide, an azole compound, and a molybdenum source. These micro-etched surfaces can further be rendered acid-resistant by exposure to a thiazole compound and/or a thiocarbamide compound. The thiazole compound and/or thiocarbamide compound may be provided either in the oxidative micro-etching solution or provided in a post-micro-etching solution.

    摘要翻译: 金属表面,特别是铜表面,其被氧化微蚀刻以通过使用钼来增加表面积。 微蚀刻溶液含有质子源,例如无机酸,氧化剂,例如过氧化氢,唑类化合物和钼源。这些微蚀刻表面可以进一步通过暴露于 噻唑化合物和/或硫代氨基甲酸酯化合物。 噻唑化合物和/或硫代氨基甲酸酯化合物可以在氧化微蚀刻溶液中提供或提供在后微蚀刻溶液中。