Flying height adjustment for air bearing sliders
    4.
    发明授权
    Flying height adjustment for air bearing sliders 失效
    空气轴承滑块的飞行高度调整

    公开(公告)号:US06344949B1

    公开(公告)日:2002-02-05

    申请号:US09352538

    申请日:1999-07-13

    IPC分类号: G11B1732

    摘要: Flying height Adjustment for Air Bearing Sliders An air bearing slider for sliding over a medium surface of a recording medium and having an air bearing surface facing the disk surface, a back surface perpendicular to the air bearing surface and a head at the back surface. During operation the head is maintained at a flying height above the disk surface with the aid of a flying height adjustment mechanism consisting of one or more ducts, each having an inlet at the air bearing surface and an outlet at the back surface. A valve mechanism controls an air flow through the duct or ducts by opening and closing the valve or valves together or independently. Alternatively, a deformable surface feature located on the back surface of the slider is used to alter the air flow to thus control the flying height. The mechanism of the invention allows one to achieve accurate flying height control in a range between 5 and 50 nm and between 0 nm and 15 nm as required for near-field or contact disk drives. By adjusting the flying height the contact can be limited to times of reading or writing data to the disk, thereby lowering the total contact time thereby reducing head/disk interface wear.

    摘要翻译: 空气轴承滑块的飞行高度调整用于在记录介质的介质表面上滑动并具有面向盘表面的空气轴承表面的空气轴承滑块,垂直于空气轴承表面的后表面和在后表面处的头部。 在操作期间,借助于由一个或多个管道组成的飞行高度调节机构,将头部保持在盘表面上方的飞行高度,每个管道在空气轴承表面具有入口和在后表面处的出口。 阀机构通过一起或独立地打开和关闭阀或阀来控制通过管道或管道的空气流。 或者,位于滑块后表面的可变形表面特征用于改变气流,从而控制飞行高度。 本发明的机构允许根据近场或接触盘驱动器的需要,在5至50nm之间和0nm至15nm的范围内实现精确的飞行高度控制。 通过调整飞行高度,可以将触点限制在读取或写入数据的次数,从而降低总接触时间,从而减少磁头/磁盘接口磨损。

    Magnetoresistive sensor having a structure for activating and deactivating electrostatic discharge prevention circuitry
    5.
    发明授权
    Magnetoresistive sensor having a structure for activating and deactivating electrostatic discharge prevention circuitry 有权
    具有用于激活和去激活静电放电防止电路的结构的磁阻传感器

    公开(公告)号:US08634168B2

    公开(公告)日:2014-01-21

    申请号:US13433192

    申请日:2012-03-28

    IPC分类号: G11B5/33 G11B5/127

    CPC分类号: G11B5/40

    摘要: A structure for preventing Electrostatic Discharge (ESD) damage to a magnetoresistive sensor during manufacture. The structure includes a switching element that can be switched off during testing of the sensor and then switched back on to provide ESD shunting to the sensor. The switch can be a thermally activated mechanical relay built onto the slider. The switch could also be a programmable resistor that includes a solid electrolyte sandwiched between first and second electrodes. One of the electrodes functions as an anode. When voltage is applied in a first direction an ion bridge forms across through the electrolyte across electrodes making the resistor conductive. When a voltage is applied in a second direction, the ion bridge recedes and the programmable resistor becomes essentially non-conductive.

    摘要翻译: 用于在制造期间防止静电放电(ESD)损坏磁阻传感器的结构。 该结构包括开关元件,该开关元件可以在测试传感器期间关闭,然后重新接通以向传感器提供ESD分流。 开关可以是内置在滑块上的热激活机械继电器。 开关也可以是可编程电阻器,其包括夹在第一和第二电极之间的固体电解质。 电极之一用作阳极。 当沿第一方向施加电压时,离子桥跨越电解质跨过电极跨过电极,使电阻器导电。 当沿第二个方向施加电压时,离子桥退出,可编程电阻基本上不导电。

    Method and apparatus for controlling a multiple-stage actuator for a
disk drive
    6.
    发明授权
    Method and apparatus for controlling a multiple-stage actuator for a disk drive 失效
    用于控制磁盘驱动器的多级致动器的方法和装置

    公开(公告)号:US6005742A

    公开(公告)日:1999-12-21

    申请号:US116745

    申请日:1998-07-16

    摘要: A method and apparatus for controlling a multiple-stage actuator for a disk drive which does not require an additional sensor for measuring the relative position between adjacent actuator stages. In a two-stage actuator system, a position-type secondary actuator (SA) rides piggyback on a primary actuator (PA). The repeatable runout is measured and used as a feedforward signal to the PA. If the PA is a rotary actuator, the feedforward signal is preferably arc corrected for the arc that the head transverses from the inner radius to the outer radius of the disk. Added to the feedforward signal is the moving average of the drive signal applied to the SA. Because the SA is of the position-type having a neutral position, this moving average is proportional to the time cumulative drift present in the two-stage actuator system, and forces the PA in a direction that minimizes deviation of the SA from its neutral position. This minimizes the range requirement for the SA, the main purpose of which is to reduce non-repeatable runout.

    摘要翻译: 一种用于控制磁盘驱动器的多级致动器的方法和装置,其不需要用于测量相邻致动器级之间的相对位置的附加传感器。 在两级致动器系统中,位置型辅助致动器(SA)骑在主致动器(PA)上。 可重复的跳动被测量并用作PA的前馈信号。 如果PA是旋转致动器,则前馈信号优选地对于磁头从磁盘的内半径到外半径横向旋转的弧线被校正。 添加到前馈信号是施加到SA的驱动信号的移动平均值。 由于SA是具有中立位置的位置型,因此该移动平均值与两级致动器系统中存在的时间累积漂移成比例,并且迫使PA沿使SA偏离其中立位置的偏差最小的方向 。 这最小化了SA的范围要求,其主要目的是减少不可重复的跳动。

    Wobble motor microactuator for fine positioning and disk drive
incorporating the microactuator
    7.
    发明授权
    Wobble motor microactuator for fine positioning and disk drive incorporating the microactuator 失效
    摆动电机微型致动器用于精细定位和磁盘驱动器,并入微致动器

    公开(公告)号:US5805375A

    公开(公告)日:1998-09-08

    申请号:US703111

    申请日:1996-08-22

    摘要: A microfabricated wobble motor with a positioning arm attached to the wobble motor rotor acts as a fine positioner with bidirectional movement. The primary application is a rotary actuator for the read/write head in a very small magnetic recording disk drive. An integrated head-arm assembly is attached at one end to the rotor of the wobble motor. The other end of the head-arm assembly has a head carrier that is maintained in contact with the disk. Head position error information is read from the disk and used to provide control signals to each of the stator elements. The stator elements are sequentially addressed by applying a voltage from a driver circuit. This causes the rotor to be electrostatically attracted to the activated stators, so that the rotor is movable bidirectionally. The read/write head can thus be moved bidirectionally to any of the data tracks on the disk and maintained on a desired data track for reading or writing data. The fine positioner also includes a digital control system where each of the stator elements is represented by an address, and the movement of the rotor is controlled by incrementing or decrementing the stator address in an address register.

    摘要翻译: 具有连接到摆动电动机转子的定位臂的微型摆动电动机作为具有双向运动的精细定位器。 主要应用是在非常小的磁记录磁盘驱动器中用于读/写磁头的旋转致动器。 一体的头臂组件一端连接到摆动马达的转子上。 头臂组件的另一端具有保持与盘接触的头托架。 磁头位置误差信息从磁盘读取并用于向每个定子元件提供控制信号。 通过施加来自驱动器电路的电压来顺序地寻址定子元件。 这导致转子被静电吸引到激活的定子,使得转子可双向移动。 因此,读/写头可以双向移动到磁盘上的任何数据轨道,并保持在用于读取或写入数据的所需数据轨道上。 精细定位器还包括数字控制系统,其中每个定子元件由地址表示,并且通过递增或递减地址寄存器中的定子地址来控制转子的移动。

    Method for making ohmic contact to silicon structures with low thermal loads
    8.
    发明授权
    Method for making ohmic contact to silicon structures with low thermal loads 失效
    与低热负荷对硅结构进行欧姆接触的方法

    公开(公告)号:US07554055B2

    公开(公告)日:2009-06-30

    申请号:US11120820

    申请日:2005-05-03

    IPC分类号: B23K26/00 H01L21/44

    摘要: An ohmic contact for a silicon slider body is disclosed. A scanned laser beam locally heats a metal film on the slider body to interdiffuse the metal and silicon while minimizing the total thermal load on the slider body. This localized heating avoids thermal damage to the sensitive magnetic head region on the slider. The native oxide layer on the slider is removed by a sputter etch, followed by deposition of a diffusion layer. A capping layer is then deposited to reduce oxidation during subsequent processing. The metal layer is then locally annealed by scanning the laser beam over the target area. Contact resistance of less than 100 ohms is achieved while minimizing the thermal load on the slider body.

    摘要翻译: 公开了一种用于硅滑块体的欧姆接触。 扫描的激光束局部加热滑块体上的金属膜以相互扩散金属和硅,同时最小化滑块体上的总热负荷。 这种局部加热避免了滑块上敏感磁头区域的热损伤。 通过溅射蚀刻去除滑块上的自然氧化物层,然后沉积扩散层。 然后沉积覆盖层以在随后的处理期间减少氧化。 然后通过在目标区域上扫描激光束来对金属层进行局部退火。 实现小于100欧姆的接触电阻,同时最小化滑块体上的热负载。

    Bistable micromechanical switches
    9.
    发明授权
    Bistable micromechanical switches 有权
    双稳态微机械开关

    公开(公告)号:US06239685B1

    公开(公告)日:2001-05-29

    申请号:US09418011

    申请日:1999-10-14

    IPC分类号: H01H3746

    摘要: A bistable micromechanical switch that includes a substrate, at least two anchor points formed on the substrate, and a beam structure that includes a two-material beam attached to at least two anchor points. The two-material beam has a first portion, a second portion and a center portion. The first portion of the two-material beam is formed from a first layer of a first material and a second layer of a second material such that the first layer of the first portion is proximate to the surface of the substrate and the second layer of the first portion is remote from the surface of the substrate. The first material has a first coefficient of thermal expansion and the second material has a second coefficient of thermal expansion such that the second coefficient of thermal expansion is greater than the first coefficient of thermal expansion. The second portion of the two-material beam is formed from a first layer of the second material and a second layer of the first material such that the first layer of the second portion is proximate to the surface of the substrate and the second layer of the second portion is remote from the surface of the substrate. The beam structure has a first and a second stable state such that the center portion of the beam structure is deflected toward the surface of the substrate for the first stable state and is deflected away from the surface of the substrate for the second stable state.

    摘要翻译: 一种双稳态微机械开关,其包括基板,形成在基板上的至少两个锚定点以及包括连接到至少两个锚定点的双材料梁的梁结构。 双材料梁具有第一部分,第二部分和中心部分。 双材料束的第一部分由第一材料的第一层和第二材料的第二层形成,使得第一部分的第一层靠近衬底的表面,并且第二层的第二层 第一部分远离基板的表面。 第一材料具有第一热膨胀系数,第二材料具有第二热膨胀系数,使得第二热膨胀系数大于第一热膨胀系数。 双材料束的第二部分由第二材料的第一层和第一材料的第二层形成,使得第二部分的第一层靠近基板的表面,并且第二层的第二层 第二部分远离基板的表面。 梁结构具有第一和第二稳定状态,使得梁结构的中心部分朝向基板的表面偏转第一稳定状态,并且偏转离开基板的表面用于第二稳定状态。

    Method of manufacturing a silicon slider by an alkaline etch
    10.
    发明授权
    Method of manufacturing a silicon slider by an alkaline etch 失效
    通过碱蚀刻制造硅滑块的方法

    公开(公告)号:US07607214B2

    公开(公告)日:2009-10-27

    申请号:US11064659

    申请日:2005-02-22

    IPC分类号: G11B5/127 B44C1/22

    摘要: A slider for use in a magnetic data recording system that is constructed from a Si wafer by a method that saves valuable wafer real estate by minimizing kerf related to the cutting of the wafer into slider rows. The sliders are produced from a (110) oriented Si wafer, and the sliders are parsed into rows by a process that involves forming a mask having a trench or opening between the rows of sliders at the location of the desired cut and parallel to a vertical (111) plane of the wafer. The wafer is then exposed to KOH which removes wafer material in the vertical direction through the wafer without removing wafer material in the horizontal direction. The vertical removal of wafer material is due to the extreme preferential removal of the (110) surface Si over that of the (111) surface Si. This results in a narrow straight trench being formed. The KOH etch removal can form a trench or cut having a width of only 30 to 50 um through a 1 mm thick wafer.

    摘要翻译: 一种用于磁数据记录系统的滑动器,其由Si晶片构成,该方法通过将晶片切割成滑块行来减少切割,从而节省了有价值的晶片的可靠性。 滑块由(110)定向的Si晶片制成,并且滑块通过涉及在期望的切口的位置处形成具有在滑动排之间的沟槽或开口的掩模并且平行于垂直线的方法被解析成行 (111)面。 然后将晶片暴露于KOH,其通过晶片在垂直方向上去除晶片材料,而不在水平方向上移除晶片材料。 晶片材料的垂直去除是由于(110)表面Si超过(111)表面Si的极端优先移除。 这导致形成窄的直槽。 KOH蚀刻去除可以通过1mm厚的晶片形成宽度仅为30至50μm的沟槽或切口。