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    Methods and systems for calibration of inkjet drop positioning
    1.
    发明申请
    Methods and systems for calibration of inkjet drop positioning 审中-公开
    用于校准喷墨滴定位的方法和系统

    公开(公告)号：US20070070109A1

    公开(公告)日：2007-03-29

    申请号：US11238832

    申请日：2005-09-29

    申请人： John White ,  Emanuel Beer ,  Hongbin Ji ,  Chang Lin ,  Shinichi Kurita

    发明人： John White ,  Emanuel Beer ,  Hongbin Ji ,  Chang Lin ,  Shinichi Kurita

    IPC分类号： B41J29/393

    CPC分类号： B41J29/393

    摘要： Methods and apparatus for inkjet inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.

    摘要翻译： 提供喷墨喷墨滴定位的方法和装置。 第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较 确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。 提供了许多其他方面。

    METHODS AND SYSTEMS FOR CALIBRATION OF INKJET DROP POSITIONING
    4.
    发明申请
    METHODS AND SYSTEMS FOR CALIBRATION OF INKJET DROP POSITIONING 审中-公开
    用于校准喷墨定位的方法和系统

    公开(公告)号：US20090122099A1

    公开(公告)日：2009-05-14

    申请号：US12354759

    申请日：2009-01-15

    申请人： John M. White ,  Emanuel Beer ,  Hongbin Ji ,  Chang-Tsung Lin ,  Shinichi Kurita

    发明人： John M. White ,  Emanuel Beer ,  Hongbin Ji ,  Chang-Tsung Lin ,  Shinichi Kurita

    IPC分类号： B41J29/393

    CPC分类号： B41J29/393

    摘要： Methods and apparatus for inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.

    摘要翻译： 提供了用于喷墨滴定位的方法和装置。 第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较 确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。 提供了许多其他方面。

    METHODS AND APPARATUS FOR INKJET PRINTING WITH MULTIPLE ROWS OF PRINT HEADS
    5.
    发明申请
    METHODS AND APPARATUS FOR INKJET PRINTING WITH MULTIPLE ROWS OF PRINT HEADS 审中-公开
    用于打印头多个打印头的方法和装置

    公开(公告)号：US20080291228A1

    公开(公告)日：2008-11-27

    申请号：US11751231

    申请日：2007-05-21

    申请人： JOHN M. WHITE ,  Fan-Cheung Sze ,  Quanyuan Shang ,  Shinichi Kurita ,  Hongbin Ji ,  Janusz Jozwiak ,  Inchen Huang ,  Emanuel Beer

    发明人： JOHN M. WHITE ,  Fan-Cheung Sze ,  Quanyuan Shang ,  Shinichi Kurita ,  Hongbin Ji ,  Janusz Jozwiak ,  Inchen Huang ,  Emanuel Beer

    IPC分类号： B41J29/38 ,  B41J2/145

    CPC分类号： B41J2/145 ,  B41J2/515 ,  B41J25/003 ,  B41J2202/09 ,  H01L51/0005

    摘要： According to the present invention, multiple rows of nozzles within a print head may be arranged proximal to and offset from each other to facilitate inkjet printing. Print heads may comprise a single row of nozzles or may comprise a plurality of rows of nozzles. Each row of nozzles may be situated such that the immediately adjacent row of nozzles may be offset by a predetermined distance. In some embodiments, adjacent rows of nozzles may each print with the same color. In this way, adjacent offset rows of nozzles may be used in combination to dispense ink drops into sub-pixel wells in improved patterns and with improved ink distribution within the sub-pixel well. These offset print techniques may also enable tighter grouping of ink drops within a sub-pixel well and enable faster printing operations.

    摘要翻译： 根据本发明，打印头内的多排喷嘴可以布置成彼此靠近并且彼此偏离，以便于喷墨打印。 打印头可以包括单排喷嘴，或者可以包括多排喷嘴。 每排喷嘴可以被定位成使得紧邻的喷嘴排可以偏移预定距离。 在一些实施例中，相邻排的喷嘴可以以相同的颜色打印。 以这种方式，相邻的喷嘴排可以组合使用，以将墨滴以改进的图案分配到子像素阱中，并且改进子像素阱内的油墨分布。 这些偏移打印技术还可以使得子像素内的墨滴更紧密地分组并且能够实现更快的打印操作。

    METHODS AND APPARATUS FOR INKJET PRINTING ON NON-PLANAR SUBSTRATES
    6.
    发明申请
    METHODS AND APPARATUS FOR INKJET PRINTING ON NON-PLANAR SUBSTRATES 审中-公开
    用于印刷非平板基板的方法和装置

    公开(公告)号：US20070070099A1

    公开(公告)日：2007-03-29

    申请号：US11536533

    申请日：2006-09-28

    申请人： Emanuel Beer ,  Chang Lin ,  Shinichi Kurita ,  Quanyuan Shang ,  Benjamin Johnston

    发明人： Emanuel Beer ,  Chang Lin ,  Shinichi Kurita ,  Quanyuan Shang ,  Benjamin Johnston

    IPC分类号： B41J25/308

    CPC分类号： B41J2/0456 ,  B41J2/0458 ,  B41J2/04588 ,  B41J3/28 ,  B41J3/4073 ,  B41J11/0035 ,  B41J25/308 ,  G02F1/1303 ,  G02F1/133516

    摘要： A sensor apparatus for an inkjet printing device is provided. The sensor apparatus may include 1) at least one print head adapted to deposit ink on a top surface of a substrate, wherein the substrate is in motion relative to the print head, 2) at least one sensor adapted to detect the distance of the at least one sensor from the top surface of the substrate, and 3) a controller adapted to determine the substrate to nozzle distance based on the distance of the sensor to the top surface of the substrate, and adjust the trajectory of the ink being deposited on the substrate based on the substrate to nozzle distance. Numerous other aspects are provided.

    摘要翻译： 提供了一种用于喷墨打印装置的传感器装置。 所述传感器装置可以包括：1）适于将墨水沉积在基底的顶表面上的至少一个打印头，其中所述基底相对于所述打印头运动; 2）至少一个传感器，适于检测所述at 至少一个传感器，以及3）控制器，其适于基于所述传感器与所述基板顶表面的距离来确定所述基板与喷嘴的距离，并且调整沉积在所述基板上的所述油墨的轨迹 基板基于基板与喷嘴的距离。 提供了许多其他方面。

    CHAMBER ISOLATION VALVE RF GROUNDING
    8.
    发明申请
    CHAMBER ISOLATION VALVE RF GROUNDING 有权
    室隔离阀射频接地

    公开(公告)号：US20090090883A1

    公开(公告)日：2009-04-09

    申请号：US12333043

    申请日：2008-12-11

    申请人： Ke Ling Lee ,  Shinichi Kurita ,  Emanuel Beer

    发明人： Ke Ling Lee ,  Shinichi Kurita ,  Emanuel Beer

    IPC分类号： F16K25/00

    CPC分类号： F16K3/0227 ,  F16K51/02 ,  H01J37/32844 ,  H01J2237/166 ,  H01L21/67126 ,  Y02C20/30 ,  Y02P70/605 ,  Y10S277/919 ,  Y10S277/92 ,  Y10T137/8242

    摘要： Embodiments described herein provide a method and apparatus for grounding a chamber isolation valve. In one embodiment, a grounded chamber isolation valve for a plasma processing system is described. The chamber isolation valve includes a door and a bracing member movably attached to and opposing the door, and at least one electrically conductive member in electrical communication with the door, the at least one electrically conductive member comprising one or more reaction bumpers disposed on the bracing member that are adapted to contact at least one grounded component of the plasma processing system when the door is in the closed position.

    摘要翻译： 本文描述的实施例提供了用于使腔室隔离阀接地的方法和装置。 在一个实施例中，描述了用于等离子体处理系统的接地室隔离阀。 室隔离阀包括门和可移动地附接到门并与其相对的支撑构件，以及至少一个与门电连通的导电构件，所述至少一个导电构件包括设置在支撑上的一个或多个反应缓冲器 当门处于关闭位置时，适于接触等离子体处理系统的至少一个接地部件的构件。

    Integrated substrate transfer module
    9.
    发明授权
    Integrated substrate transfer module 有权
    集成基板传输模块

    公开(公告)号：US07330021B2

    公开(公告)日：2008-02-12

    申请号：US11018236

    申请日：2004-12-21

    申请人： Shinichi Kurita ,  Emanuel Beer ,  Hung T. Nguyen ,  Benjamin Johnston ,  Fayez E. Abboud

    发明人： Shinichi Kurita ,  Emanuel Beer ,  Hung T. Nguyen ,  Benjamin Johnston ,  Fayez E. Abboud

    IPC分类号： G01R13/04

    CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

    摘要： A substrate table and method for supporting and transferring a substrate are provided. The substrate table includes a segmented stage having an upper surface for supporting a substrate, and an end effector. The end effector includes two or more spaced apart fingers and an upper surface for supporting a substrate. The end effector is at least partially disposed and moveable within the segmented stage such that the fingers of the end effector and the segmented stage interdigitate to occupy the same horizontal plane. The segmented stage is adapted to raise and lower about the end effector.

    摘要翻译： 提供了用于支撑和转移衬底的衬底台和方法。 衬底台包括具有用于支撑衬底的上表面的分段段和端部执行器。 末端执行器包括两个或更多间隔开的指状物和用于支撑基底的上表面。 末端执行器至少部分地设置并在分段台内移动，使得末端执行器和分段台阶的指状物相互指向以占据相同的水平面。 分段段适于围绕末端执行器升高和降低。

    Configurable prober for TFT LCD array testing
    10.
    发明申请
    Configurable prober for TFT LCD array testing 有权
    用于TFT LCD阵列测试的可配置探头

    公开(公告)号：US20050179451A1

    公开(公告)日：2005-08-18

    申请号：US10889695

    申请日：2004-07-12

    申请人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Frank Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    发明人： Matthias Brunner ,  Shinichi Kurita ,  Ralf Schmid ,  Fayez Frank Abboud ,  Benjamin Johnston ,  Paul Bocian ,  Emanuel Beer

    IPC分类号： G01R31/302 ,  G01R31/26 ,  G01R31/305 ,  G02F1/13 ,  G09G3/00 ,  H01L21/687

    CPC分类号： G09G3/006 ,  G01R31/2893 ,  G01R31/305

    摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.

    摘要翻译： 提供了一种用于电子设备测试系统的改进的探测器。 探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。 探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点 沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。 在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。 通常，玻璃基板是正方形的，框架也是正方形的。 以这种方式，“x”和“y”轴由框架定义。