公开(公告)号：US06658922B2

公开(公告)日：2003-12-09

申请号：US09996552

申请日：2001-11-27

申请人： Joseph Leigh ,  David S. Kuo ,  Li-Ping Wang ,  Nobuo Kurataka

发明人： Joseph Leigh ,  David S. Kuo ,  Li-Ping Wang ,  Nobuo Kurataka

IPC分类号： G01B528

CPC分类号： G11B5/82 ,  B82Y10/00 ,  G11B5/012 ,  G11B2005/001 ,  Y10S977/872

摘要： A method and apparatus for scanning a media is described. More particularly, polarization detector and an atomic force microscope are coupled to a common platform indexed to a spindle. Optionally, an optical microscope may be coupled to the common platform. The polarization detector is used to detect a magnetic image, such as at least a portion of a servo pattern, of the media, and the atomic force microscope, which may be aligned using the magnetic image, is used with a magnetic microscopy module to scan the media. Accordingly, magnetic imagery may be achieved with indexing to a single spindle for positional consistency as between equipment. Moreover, the polarization detector may further be configured to detect scattered light for providing topographic imagery of the media.

公开(公告)号：US20080093336A1

公开(公告)日：2008-04-24

申请号：US11583845

申请日：2006-10-20

申请人： Kim Y. Lee ,  Hong Ying Wang ,  Nobuo Kurataka ,  Christopher Formato ,  David S. Kuo ,  Dieter K. Weller

发明人： Kim Y. Lee ,  Hong Ying Wang ,  Nobuo Kurataka ,  Christopher Formato ,  David S. Kuo ,  Dieter K. Weller

IPC分类号： B44C1/22 ,  C03C25/68

CPC分类号： G11B5/855 ,  G11B5/667 ,  G11B5/732

摘要： A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.

摘要翻译： 一种制造图案化磁记录介质的方法，包括以下步骤：（a）提供包括最上面的非磁性中间层的层堆叠; （b）在所述中间层上形成抗蚀剂层; （c）形成第一图案，其包括延伸穿过抗蚀剂层的第一组凹槽，并暴露出中间层的第一组间隔开的表面部分; （d）用一层硬掩模材料填充第一组凹槽; （e）选择性地去除所述抗蚀剂层以形成第二图案，所述第二图案包括延伸穿过所述硬掩模层并暴露所述中间层的第二组间隔开的表面部分的第二组凹部; 和（f）用形成磁记录层的磁性硬质材料层填充第二组凹部。

公开(公告)号：US20100221581A1

公开(公告)日：2010-09-02

申请号：US12768616

申请日：2010-04-27

申请人： Kim Y. Lee ,  Hong Ying Wang ,  Nobuo Kurataka ,  Christopher Formato ,  David S. Kuo ,  Dieter K. Weller

发明人： Kim Y. Lee ,  Hong Ying Wang ,  Nobuo Kurataka ,  Christopher Formato ,  David S. Kuo ,  Dieter K. Weller

IPC分类号： G03F7/20 ,  G11B5/667

CPC分类号： G11B5/855 ,  G11B5/667 ,  G11B5/732

摘要： A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.

摘要翻译： 一种制造图案化磁记录介质的方法，包括以下步骤：（a）提供包括最上面的非磁性中间层的层堆叠; （b）在所述中间层上形成抗蚀剂层; （c）形成第一图案，其包括延伸穿过抗蚀剂层的第一组凹槽，并暴露出中间层的第一组间隔开的表面部分; （d）用一层硬掩模材料填充第一组凹槽; （e）选择性地去除所述抗蚀剂层以形成第二图案，所述第二图案包括延伸穿过所述硬掩模层并暴露所述中间层的第二组间隔开的表面部分的第二组凹部; 和（f）用形成磁记录层的磁性硬质材料层填充第二组凹部。

公开(公告)号：US07704614B2

公开(公告)日：2010-04-27

申请号：US11583845

申请日：2006-10-20

申请人： Kim Y. Lee ,  Hong Ying Wang ,  Nobuo Kurataka ,  Christopher Formato ,  David S. Kuo ,  Dieter K. Weller

发明人： Kim Y. Lee ,  Hong Ying Wang ,  Nobuo Kurataka ,  Christopher Formato ,  David S. Kuo ,  Dieter K. Weller

IPC分类号： G11B5/66

CPC分类号： G11B5/855 ,  G11B5/667 ,  G11B5/732

摘要： A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.

摘要翻译： 一种制造图案化磁记录介质的方法，包括以下步骤：（a）提供包括最上面的非磁性中间层的层堆叠; （b）在所述中间层上形成抗蚀剂层; （c）形成第一图案，其包括延伸穿过抗蚀剂层的第一组凹槽，并暴露出中间层的第一组间隔开的表面部分; （d）用一层硬掩模材料填充第一组凹槽; （e）选择性地去除所述抗蚀剂层以形成第二图案，所述第二图案包括延伸穿过所述硬掩模层并暴露所述中间层的第二组间隔开的表面部分的第二组凹部; 和（f）用形成磁记录层的磁性硬质材料层填充第二组凹部。

公开(公告)号：US09330885B2

公开(公告)日：2016-05-03

申请号：US13174132

申请日：2011-06-30

申请人： Michael R. Feldbaum ,  Justin Jia-Jen Hwu ,  David S. Kuo ,  Gennady Gauzner ,  Li-Ping Wang

发明人： Michael R. Feldbaum ,  Justin Jia-Jen Hwu ,  David S. Kuo ,  Gennady Gauzner ,  Li-Ping Wang

IPC分类号： B44C1/22 ,  C23F1/00 ,  C03C15/00 ,  C03C25/68 ,  H01L21/302 ,  H01L21/461 ,  H01J37/30 ,  H01J37/305

CPC分类号： H01J37/30 ,  H01J37/3053 ,  H01J37/3056 ,  H01J2237/2007 ,  H01J2237/31749

摘要： The embodiments disclose a method of stack patterning, including loading a stack into a stationary stack stage, rotating one or more ion beam grid assemblies substantially concentrically aligned with the stationary stack stage to etch the stack and controlling the operation of the one or more ion beam grid assemblies to achieve substantial axial uniformity of the etched stack.

摘要翻译： 实施例公开了一种堆叠图案化的方法，包括将堆叠装载到固定堆叠台中，使基本上与固定堆叠台同心对准的一个或多个离子束栅格组件旋转，以蚀刻堆叠并控制一个或多个离子束 栅格组件以实现蚀刻堆叠的显着的轴向均匀性。

公开(公告)号：US08792201B2

公开(公告)日：2014-07-29

申请号：US12629791

申请日：2009-12-02

申请人： Gennady Gauzner ,  David S. Kuo ,  Justin Jia-Jen Hwu ,  Li-Ping Wang ,  Zhaoning Yu ,  Kim Yang Lee

发明人： Gennady Gauzner ,  David S. Kuo ,  Justin Jia-Jen Hwu ,  Li-Ping Wang ,  Zhaoning Yu ,  Kim Yang Lee

IPC分类号： G11B21/02 ,  G11B5/82 ,  B82Y10/00 ,  G11B5/855 ,  G11B5/74 ,  G11B25/04

CPC分类号： G11B25/043 ,  B82Y10/00 ,  G11B5/743 ,  G11B5/746 ,  G11B5/82 ,  G11B5/855 ,  Y10T29/49021

摘要： Processes include aligning a disc with a template at a location so that the pattern from the template is transferred to the disc in a relative orientation. The relative orientation provides that when the disc with the transferred pattern is finally assembled into a hard disc drive, an inner diameter of the spindle hole of the disc may be abutted against an outer diameter of the disc drive spindle, and the data-containing patterns on the discs will be aligned concentrically with a center of the disc drive spindle. While the data-containing patterns are aligned concentrically with the disc drive spindle, the substrate itself is allowed to be non-concentric. Still other aspects include a disc having eccentric formations including PIM and one or more of bit patterns and servo information formed on a disc surface, the eccentricity of the formations is determined based on an expected difference between the radius of the spindle hole of the disc and the radius of the spindle on which the disc will be placed during assembly, with the PIM used to determine the angular alignment of the disc with the spindle.

摘要翻译： 过程包括将光盘与模板在一个位置对齐，使得来自模板的图案以相对方向被传送到光盘。 相对方向规定，当具有转印图案的光盘最终组装成硬盘驱动器时，盘的主轴孔的内径可以抵靠盘驱动主轴的外径，并且包含数据的图案 碟盘将与盘片驱动主轴的中心同心对齐。 当包含数据的图案与盘驱动器心轴同心对准时，衬底本身被允许为非同心的。 其它方面还包括具有包括PIM和形成在盘表面上的位图形和伺服信息中的一种或多种的偏心构造的盘，基于盘的主轴孔的半径和 在组装过程中将放置光盘的主轴的半径，PIM用于确定光盘与主轴的角度对齐。

公开(公告)号：US20080024772A1

公开(公告)日：2008-01-31

申请号：US11492798

申请日：2006-07-26

申请人： Li-Ping Wang ,  David S. Kuo ,  Sophia A. Fujioka ,  Jianmin Wang

发明人： Li-Ping Wang ,  David S. Kuo ,  Sophia A. Fujioka ,  Jianmin Wang

IPC分类号： G01N21/00

CPC分类号： G01N21/9506 ,  G01N21/4738

摘要： An integrated unit comprising a particle detection tool and a particle removal tool combined as one merged tool comprising a disc mounting mechanism having a mount for mounting the disc for both particle detection and particle removal, wherein the particle detection tool is adapted to distinguish between a fixed defect in the disc and a particle on the disc is disclosed herein. Also, the methods of manufacturing the integrated unit and using the integrated unit for detect detection and analysis are disclosed herein.

摘要翻译： 一种集成单元，包括粒子检测工具和作为一个合并工具组合的颗粒去除工具，其包括盘安装机构，所述盘安装机构具有用于安装盘的用于颗粒检测和颗粒去除的安装件，其中所述粒子检测工具适于区分固定 本文公开了盘中的缺陷和盘上的颗粒。 此外，本文公开了制造集成单元的方法和使用用于检测检测和分析的集成单元。

公开(公告)号：US06663938B1

公开(公告)日：2003-12-16

申请号：US09210018

申请日：1998-12-11

申请人： Wei H. Yao ,  Yuh-Jen Cheng ,  Li-Ping Wang ,  David S. Kuo ,  Chiao-Ping Ku ,  Bruno Marchon

发明人： Wei H. Yao ,  Yuh-Jen Cheng ,  Li-Ping Wang ,  David S. Kuo ,  Chiao-Ping Ku ,  Bruno Marchon

IPC分类号： G11B582

CPC分类号： G11B5/82 ,  G11B5/6005 ,  G11B23/0021 ,  Y10T428/24355

摘要： A magnetic data recording medium substrate has a contact zone and a data zone. The contact zone is textured by forming multiple texturing features, each having a bell-shaped profile resembling a Gaussian curve. The features preferably are formed by pulsed laser energy applied to a glass substrate, or to an aluminum nickel-phosphorous substrate coated with a glass layer. As compared to previous laser texturing approaches, the laser beam is less narrowly focused to provide a beam impingement area with a diameter of at least three microns, forming texturing features with diameters of at least three microns. The texturing features preferably are uniform in height and diameter, and may be symmetrical or have asymmetrical aspects, so long as bell-shaped profiles are present in the direction of travel of the recording medium, relative to transducing heads.

摘要翻译： 磁数据记录介质基板具有接触区和数据区。 通过形成多个纹理特征来形成接触区域，每个具有类似于高斯曲线的钟形轮廓。 特征优选通过施加到玻璃基板的脉冲激光能量或涂覆有玻璃层的铝镍磷基板形成。 与以前的激光纹理方法相比，激光束的聚焦较少，以提供直径至少为三微米的光束冲击区域，形成具有至少三微米直径的纹理特征。 纹理特征优选地在高度和直径上是均匀的，并且可以是对称的或具有不对称的方面，只要钟形轮廓相对于换能头在记录介质的行进方向上存在。

公开(公告)号：US20110128647A1

公开(公告)日：2011-06-02

申请号：US12629791

申请日：2009-12-02

申请人： Gennady Gauzner ,  David S. Kuo ,  Justin Jia-Jen Hwu ,  Li-Ping Wang ,  Zhaoning Yu ,  Kim Yang Lee

发明人： Gennady Gauzner ,  David S. Kuo ,  Justin Jia-Jen Hwu ,  Li-Ping Wang ,  Zhaoning Yu ,  Kim Yang Lee

IPC分类号： G11B21/02 ,  G11B5/82 ,  G11B33/00 ,  G11B33/10

CPC分类号： G11B25/043 ,  B82Y10/00 ,  G11B5/743 ,  G11B5/746 ,  G11B5/82 ,  G11B5/855 ,  Y10T29/49021

摘要： Processes include aligning a disc with a template at a location so that the pattern from the template is transferred to the disc in a relative orientation. The relative orientation provides that when the disc with the transferred pattern is finally assembled into a hard disc drive, an inner diameter of the spindle hole of the disc may be abutted against an outer diameter of the disc drive spindle, and the data-containing patterns on the discs will be aligned concentrically with a center of the disc drive spindle. While the data-containing patterns are aligned concentrically with the disc drive spindle, the substrate itself is allowed to be non-concentric. Still other aspects include a disc having eccentric formations including PIM and one or more of bit patterns and servo information formed on a disc surface, the eccentricity of the formations is determined based on an expected difference between the radius of the spindle hole of the disc and the radius of the spindle on which the disc will be placed during assembly, with the PIM used to determine the angular alignment of the disc with the spindle.

摘要翻译： 过程包括将光盘与模板在一个位置对齐，使得来自模板的图案以相对方向被传送到光盘。 相对方向规定，当具有转印图案的光盘最终组装成硬盘驱动器时，盘的主轴孔的内径可以抵靠盘驱动主轴的外径，并且包含数据的图案 碟盘将与盘片驱动主轴的中心同心对齐。 当包含数据的图案与盘驱动器心轴同心对准时，衬底本身被允许为非同心的。 其它方面还包括具有包括PIM和形成在盘表面上的位图形和伺服信息中的一种或多种的偏心构造的盘，基于盘的主轴孔的半径和 在组装过程中将放置光盘的主轴的半径，PIM用于确定光盘与主轴的角度对齐。

公开(公告)号：US06403170B2

公开(公告)日：2002-06-11

申请号：US09780270

申请日：2001-02-09

申请人： David S. Kuo ,  Li-Ping Wang ,  Wei H. Yao

发明人： David S. Kuo ,  Li-Ping Wang ,  Wei H. Yao

IPC分类号： G11B572

CPC分类号： G11B5/7315 ,  G11B5/74 ,  G11B5/82 ,  G11B23/0021 ,  Y10S428/90 ,  Y10T428/24355 ,  Y10T428/24802

摘要： A magnetic data storage medium includes a dedicated transducing head contact zone for engaging an air bearing slider, primarily when the disk is stationary and also during disk accelerations and decelerations. The contact zone has a dual baseline texture, formed by first creating a recessed region within the transducing head contact zone, and then by forming multiple nodules or other texturing features within the recessed region. The texturing features project upwardly from a recessed surface of the recessed region, and also project above an upper surface of the disk by an amount less than the texturing feature height. Consequently, the texturing features are large enough to counteract stiction due to liquid lubricant meniscus formation, yet also have heights sufficiently low relative to the upper surface to allow reduced transducer flying heights. According to a preferred texturing process, the recessed region consists of multiple individual recesses produced by applying a carbon layer to the disk, then forming cavities by selective laser ablation of the carbon layer.

摘要翻译： 磁数据存储介质包括用于接合空气轴承滑块的专用换能头接触区，主要是当盘静止时以及在盘的加速和减速期间。 接触区域具有双基线纹理，首先在传感头接触区域内形成凹陷区域，然后通过在凹陷区域内形成多个结节或其它纹理特征而形成。 纹理特征从凹陷区域的凹陷表面向上突出，并且还以小于纹理特征高度的量突出在盘的上表面上方。 因此，纹理特征足够大以抵消由于液体润滑剂弯液面形成导致的静摩擦，而且还具有相对于上表面足够低的高度，以允许减小的换能器飞行高度。 根据优选的纹理化工艺，凹陷区域由通过将碳层施加到盘而产生的多个单独凹槽，然后通过碳层的选择性激光烧蚀形成空腔。