ROBOT AND METHOD OF CONTROLLING THE SAME
    1.
    发明申请

    公开(公告)号:US20180215035A1

    公开(公告)日:2018-08-02

    申请号:US15748907

    申请日:2015-07-30

    摘要: The robot includes a first arm having a first hand part provided to a tip end thereof, and at least one joint shaft provided between a pedestal and the first hand part, a first acting part configured to contact a given table-like body on which a plurality of workpieces are able to be placed, while the first acting part is provided to the first hand part, a controller, an imaging unit configured to two-dimensionally image a placement surface of the workpieces in the table-like body in a perpendicular direction to the placement surface, and a recognition part configured to recognize a position of the workpiece by performing a two-dimensional pattern matching based on an image two-dimensionally captured by the imaging unit. The controller vibrates the table-like body by controlling the first arm so that the first acting part acts on the table-like body.

    ROBOT, AND SUBSTRATE TRANSPORTATION SYSTEM COMPRISING THE SAME

    公开(公告)号:US20230084971A1

    公开(公告)日:2023-03-16

    申请号:US17797446

    申请日:2021-02-02

    IPC分类号: B65G47/90

    摘要: A robot 100 includes a base 1 having side portions, an arm 3 rotatably coupled to the base 1, and a hand 8 coupled to the arm 3. A joint between the arm 3 and the base 1 is closest to a first side portion 11a in a plan view. The base 1 houses control components. A second side portion 11b is provided with a maintenance area 12 on which a maintenance component such as a first board 24 is disposed. The maintenance area 12 is used for maintenance of the maintenance component.

    SUBSTRATE TRANSPORT ROBOT, SUBSTRATE TRANSPORT SYSTEM, AND SUBSTRATE TRANSPORT METHOD

    公开(公告)号:US20210057251A1

    公开(公告)日:2021-02-25

    申请号:US16548041

    申请日:2019-08-22

    IPC分类号: H01L21/677 H01L21/67

    摘要: A substrate transport robot includes: a base installed inside a transport chamber; an arm; a first hand and a second hand rotatable about a vertical hand axis and configured to support a substrate; and a controller. The controller performs: a first transfer process of causing the first hand to enter from the transport chamber into a storage chamber, and transferring the substrate between the first hand and a placing portion in the storage chamber; an exit process of causing the first hand to exit the storage chamber into the transport chamber; and a second transfer process of causing the second hand to enter from the transport chamber into the storage chamber. In the exit process, the hand axis moves away from a center line of an opening, such that the hand axis is farther from the center line than a reference position of the first hand is.