公开(公告)号：US10535493B2

公开(公告)日：2020-01-14

申请号：US16150399

申请日：2018-10-03

Applicant: KLA-TENCOR CORPORATION

Inventor： Katerina Ioakeimidi ,  Gildardo R. Delgado ,  Michael E. Romero ,  Frances Hill ,  Rudy F. Garcia

IPC: H01J19/24 ,  H01J37/073 ,  H01J37/26 ,  G02B27/09 ,  H01J40/06 ,  H01J40/18 ,  H01J1/304 ,  H01J37/06 ,  H01J37/28 ,  H01J1/34 ,  H01L21/67

Abstract: A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.

公开(公告)号：US20190108967A1

公开(公告)日：2019-04-11

申请号：US16149260

申请日：2018-10-02

Applicant: KLA-TENCOR CORPORATION

Inventor： Katerina Ioakeimidi ,  Gildardo R. Delgado ,  Frances Hill ,  Michael E. Romero ,  Rudy F. Garcia

IPC: H01J37/073 ,  G02B27/09

Abstract: A flat top laser beam is used to generate an electron beam with a photocathode that can include an alkali halide. The flat top profile can be generated using an optical array. The laser beam can be split into multiple laser beams or beamlets, each of which can have the flat top profile. A phosphor screen can be imaged to determine space charge effects or electron energy of the electron beam.

公开(公告)号：US10714294B2

公开(公告)日：2020-07-14

申请号：US16419184

申请日：2019-05-22

Applicant: KLA-TENCOR CORPORATION

Inventor： Frances Hill ,  Gildardo R. Delgado ,  Rudy F. Garcia ,  Gary V. Lopez Lopez ,  Michael E. Romero ,  Katerina Ioakeimidi ,  Zefram Marks

IPC: H01J1/16 ,  H01J1/304 ,  H01J37/073

Abstract: An emitter with a diameter of 100 nm or less is used with a protective cap layer and a diffusion barrier between the emitter and the protective cap layer. The protective cap layer is disposed on the exterior surface of the emitter. The protective cap layer includes molybdenum or iridium. The emitter can generate an electron beam. The emitter can be pulsed.

公开(公告)号：US10141155B2

公开(公告)日：2018-11-27

申请号：US15588006

申请日：2017-05-05

Applicant: KLA-Tencor Corporation

Inventor： Gildardo R. Delgado ,  Edgardo Garcia Berrios ,  Frances Hill ,  Rudy Garcia

IPC: H01J37/06 ,  H01J37/28

Abstract: An emitter with a protective cap layer on an exterior surface of the emitter is disclosed. The emitter can have a diameter of 100 nm or less. The protective cap layer includes ruthenium. Ruthenium is resistant to oxidation and carbon growth. The protective cap layer also can have relatively low sputter yields to withstand erosion by ions. The emitter may be part of a system with an electron beam source. An electric field can be applied to the emitter and an electron beam can be generated from the emitter. The protective cap layer may be applied to the emitter by sputter deposition, atomic layer deposition (ALD), or ion sputtering.

公开(公告)号：US10607806B2

公开(公告)日：2020-03-31

申请号：US16153103

申请日：2018-10-05

Applicant: KLA-TENCOR CORPORATION

Inventor： Frances Hill ,  Gildardo R. Delgado ,  Rudy F. Garcia ,  Michael E. Romero ,  Katerina Ioakeimidi

IPC: H01J1/304 ,  H01J37/073 ,  H01J37/26 ,  G02B27/09 ,  H01J40/06 ,  H01J40/18 ,  H01J19/24 ,  H01J37/06 ,  H01J37/28 ,  H01J1/34 ,  H01L21/67

Abstract: Electron source designs are disclosed. The emitter structure, which may be silicon, has a layer on it. The layer may be graphene or a photoemissive material, such as an alkali halide. An additional layer between the emitter structure and the layer or a protective layer on the layer can be included. Methods of operation and methods of manufacturing also are disclosed.

公开(公告)号：US20190108966A1

公开(公告)日：2019-04-11

申请号：US16150675

申请日：2018-10-03

Applicant: KLA-TENCOR CORPORATION

Inventor： Gildardo R. Delgado ,  Rudy F. Garcia ,  Katerina Ioakeimidi ,  Frances Hill ,  Michael E. Romero

IPC: H01J37/06 ,  H01J37/28 ,  H01J19/24

CPC classification number: H01J37/073 ,  G02B27/0927 ,  H01J1/3044 ,  H01J1/34 ,  H01J19/24 ,  H01J37/06 ,  H01J37/26 ,  H01J37/28 ,  H01J40/06 ,  H01J40/18 ,  H01J2201/30411 ,  H01J2201/30449 ,  H01J2201/3048 ,  H01J2201/308 ,  H01J2201/3423 ,  H01J2201/3425 ,  H01J2201/3426 ,  H01J2237/06333 ,  H01J2237/24521 ,  H01J2237/24592 ,  H01J2237/2817 ,  H01L21/67288

Abstract: A photocathode structure, which can include an alkali halide, has a protective film on an exterior surface of the photocathode structure. The protective film includes ruthenium. This protective film can be, for example, ruthenium or an alloy of ruthenium and platinum. The protective film can have a thickness from 1 nm to 20 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.

公开(公告)号：US20200111637A1

公开(公告)日：2020-04-09

申请号：US16704061

申请日：2019-12-05

Applicant: KLA-TENCOR CORPORATION

Inventor： Katerina Ioakeimidi ,  Gildardo R. Delgado ,  Michael E. Romero ,  Frances Hill ,  Rudy F. Garcia

IPC: H01J37/073 ,  H01J37/26 ,  G02B27/09 ,  H01J40/06 ,  H01J40/18 ,  H01J1/304 ,  H01J19/24 ,  H01J37/06 ,  H01J37/28

Abstract: A photocathode can include a body fabricated of a wide bandgap semiconductor material, a metal layer, and an alkali halide photocathode emitter. The body may have a thickness of less than 100 nm and the alkali halide photocathode may have a thickness less than 10 nm. The photocathode can be illuminated with a dual wavelength scheme.

公开(公告)号：US20200090895A1

公开(公告)日：2020-03-19

申请号：US16259317

申请日：2019-01-28

Applicant: KLA-TENCOR CORPORATION

Inventor： Gildardo R. Delgado ,  Katerina Ioakeimidi ,  Frances Hill ,  Gary V. Lopez Lopez ,  Rudy F. Garcia

IPC: H01J1/34 ,  H01J37/28

Abstract: A photocathode structure, which can include one or more of Cs2Te, CsKTe, CsI, CsBr, GaAs, GaN, InSb, CsKSb, or a metal, has a protective film on an exterior surface. The protective film includes one or more of ruthenium, nickel, platinum, chromium, copper, gold, silver, aluminum, or an alloy thereof. The protective film can have a thickness from 1 nm to 10 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.

公开(公告)号：US20190362927A1

公开(公告)日：2019-11-28

申请号：US16419184

申请日：2019-05-22

Applicant: KLA-TENCOR CORPORATION

Inventor： Frances Hill ,  Gildardo R. Delgado ,  Rudy F. Garcia ,  Gary V. Lopez Lopez ,  Michael E. Romero ,  Katerina Ioakeimidi ,  Zefram Marks

IPC: H01J1/304 ,  H01J37/073

Abstract: An emitter with a diameter of 100 nm or less is used with a protective cap layer and a diffusion barrier between the emitter and the protective cap layer. The protective cap layer is disposed on the exterior surface of the emitter. The protective cap layer includes molybdenum or iridium. The emitter can generate an electron beam. The emitter can be pulsed.

公开(公告)号：US20190108963A1

公开(公告)日：2019-04-11

申请号：US16153103

申请日：2018-10-05

Applicant: KLA-TENCOR CORPORATION

Inventor： Frances Hill ,  Gildardo R. Delgado ,  Rudy F. Garcia ,  Michael E. Romero ,  Katerina Ioakeimidi

IPC: H01J1/304 ,  H01J1/34

Abstract: Electron source designs are disclosed. The emitter structure, which may be silicon, has a layer on it. The layer may be graphene or a photoemissive material, such as an alkali halide. An additional layer between the emitter structure and the layer or a protective layer on the layer can be included. Methods of operation and methods of manufacturing also are disclosed.