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公开(公告)号:US20160086812A1
公开(公告)日:2016-03-24
申请号:US14961028
申请日:2015-12-07
Applicant: KURITA WATER INDUSTRIES LTD.
Inventor: Hideyuki KOMORI , Nobuhiro ORITA
IPC: H01L21/306
CPC classification number: H01L21/30604 , B01D61/027 , B01D61/12 , B01D61/145 , B01D61/22 , B01D61/58 , B01D2311/06 , C02F1/52 , C02F1/66 , C02F11/12 , C02F2001/5218 , C02F2103/346 , Y02W10/37 , B01D2311/12 , B01D2311/24 , B01D2311/18 , B01D2311/243 , B01D2311/10
Abstract: A method for treating an etching solution in order to circulate and reuse an etching solution used in etching treatment of silicon includes (1) selectively removing multivalent ions having a valence of two or more, or (2) removing multivalent ions having a valence of two or more, 20-50% of alkali metal ions having a valence of one relative to a total amount of the alkali metal ions, and hydroxide ions, through a membrane separation unit comprising a nanofiltration membrane. A permeated solution of the membrane separation unit is circulated to the etching bath.
Abstract translation: 用于处理蚀刻溶液以便循环和再利用用于硅的蚀刻处理的蚀刻溶液的方法包括(1)选择性地除去两价或更多价的多价离子,或(2)除去二价离子的二价离子 以上,通过包含纳滤膜的膜分离单元,相对于碱金属离子的总量和氢氧离子,具有1价的碱金属离子的20-50%以上。 膜分离单元的渗透溶液循环到蚀刻浴。
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公开(公告)号:US20170313602A1
公开(公告)日:2017-11-02
申请号:US15139895
申请日:2016-04-27
Applicant: KURITA WATER INDUSTRIES LTD.
Inventor: Yukitaka MATSUMOTO , Hideki KOBAYASHI , Nobuhiro ORITA
IPC: C02F1/461 , C02F1/42 , C02F1/46 , B01D61/42 , B01D61/58 , C02F1/469 , C02F101/30 , C02F101/10 , C02F103/00
CPC classification number: C02F1/46104 , B01D61/422 , B01D61/445 , B01D2317/02 , C02F1/025 , C02F1/20 , C02F1/42 , C02F1/4672 , C02F1/4693 , C02F9/00 , C02F2001/425 , C02F2001/46147 , C02F2101/16 , C02F2101/30 , C02F2103/002 , C02F2103/005 , C02F2209/02 , C02F2209/03 , C02F2301/066 , C02F2301/08 , C02F2303/04 , C02F2303/22
Abstract: Wastewater containing scale components, organic substances, inorganic ions, and the like, such as human effluent, generated in a closed system space, such as a nuclear shelter, a hazardous shelter, a space station or a moon-Mars mission manned spacecraft, or a lunar base is efficiently treated by a simple structural apparatus, so that water is recovered. After a hardness component is removed from water to be treated, such as human effluent, by a softening device, and heat exchange is performed between softening treated water and electrolysis treated water by a heat exchanger, by a high-temperature and high-pressure electrolysis device, organic substances, urea, ammonia, and the like are removed by electrolysis performed under high-temperature and high-pressure conditions. After the electrolysis treated water is processed by a deaeration treatment using a deaeration membrane device, a desalting treatment is performed by acid/alkali manufacturing electrodialysis devices and provided in series at two stages.
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公开(公告)号:US20160264443A1
公开(公告)日:2016-09-15
申请号:US15031568
申请日:2013-11-22
Applicant: KURITA WATER INDUSTRIES LTD.
Inventor: Yukitaka MATSUMOTO , Hideki KOBAYASHI , Nobuhiro ORITA
CPC classification number: C02F9/00 , B01D15/362 , B01D61/422 , B01D2311/04 , B01D2311/25 , B01D2311/268 , C02F1/42 , C02F1/461 , C02F1/4618 , C02F1/4672 , C02F1/4693 , C02F2001/425 , C02F2103/002 , C02F2103/005 , C02F2201/001 , C02F2201/4611 , C02F2201/4617 , C02F2303/16 , Y02A20/134
Abstract: Wastewater such as water discharged by the human body and domestic wastewater which is produced in a confined space, can be treated and recovered with efficiency by using a simple apparatus. Specifically, hardness components of water-to-be-treated are removed with a softening apparatus. Subsequently, electrolysis is performed with a high-temperature high-pressure electrolysis apparatus in order to decompose and remove organic substances, urea, ammonia, and the like. The electrolyzed water is desalinated with a desalination electrodialysis apparatus in order to produce product water and a salt-concentrated liquid. The salt-concentrated liquid is further treated with an acid-alkali production electrodialysis apparatus in order to produce desalinated water, an acid solution, and an alkali solution. The acid solution is used as an agent for regenerating the softening apparatus. The alkali solution is used as an agent for converting the softening apparatus into Na-type. The desalinated water is treated with the desalination electrodialysis apparatus.
Abstract translation: 废水如人体排出的水和在密闭空间中生产的生活废水可以通过使用简单的设备有效地进行处理和回收。 具体地说,用软化装置除去待处理的水硬度成分。 随后,用高温高压电解装置进行电解,以分解和除去有机物质,尿素,氨等。 电解水用脱盐电渗析装置脱盐,以产生产物水和盐浓缩液体。 盐酸浓缩液用酸碱生产电渗析装置进一步处理,以生产脱盐水,酸溶液和碱溶液。 酸溶液用作再生软化装置的试剂。 碱溶液用作将软化装置转化为Na型的试剂。 脱盐水用脱盐电渗析装置处理。
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公开(公告)号:US20150353401A1
公开(公告)日:2015-12-10
申请号:US14760635
申请日:2013-10-18
Applicant: KURITA WATER INDUSTRIES LTD.
Inventor: Yukitaka MATSUMOTO , Nobuhiro ORITA , Hideki KOBAYASHI
CPC classification number: C02F9/00 , B01D61/44 , B01D61/58 , C02F1/20 , C02F1/42 , C02F1/46109 , C02F1/4618 , C02F1/4672 , C02F1/4674 , C02F1/4693 , C02F1/66 , C02F1/68 , C02F1/725 , C02F2001/425 , C02F2001/46133 , C02F2001/46147 , C02F2101/16 , C02F2101/38 , C02F2201/001 , C02F2201/46115 , C02F2303/16 , C02F2303/22 , C25B1/26
Abstract: A water recovery system can treat water in a confined space. The wastewater treatment system includes a cation-exchange device in which water to be treated, such as wastewater originating in a space station, water discharged by the human body, water produced by condensing water vapor contained in the air, is directly introduced to a cation-exchange resin and thereby treated by cation exchange; a diamond-electrode electrolysis device in which organic substances, urea, and other nitrogen compounds contained in water discharged from the cation-exchange device are decomposed; a catalytic decomposition device in which the residual organic component is brought into contact with a catalyst to be decomposed; an electrodialysis device in which water discharged from the catalytic decomposition device is treated by electrodialysis to produce desalted water as well as an acid and an alkali; and a mineral adding device in which a mineral is added to the desalted water.
Abstract translation: 水回收系统可以在狭窄的空间处理水。 废水处理系统包括阳离子交换装置,其中待处理的水,例如源自空间站的废水,人体排出的水,通过冷凝空气中所含的水蒸汽产生的水直接引入阳离子 - 交换树脂,由此通过阳离子交换处理; 金属电极电解装置,其中从阳离子交换装置排出的水中含有的有机物质,尿素等氮化合物分解; 催化分解装置,其中残留的有机组分与待分解的催化剂接触; 电催化装置,其中从催化分解装置排出的水通过电渗析处理以产生脱盐水以及酸和碱; 以及将矿物加入脱盐水中的矿物添加装置。
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