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    Optical integrated circuit substrate and optical module
    1.
    发明授权
    Optical integrated circuit substrate and optical module 失效
    光集成电路基板和光模块

    公开(公告)号：US06694069B2

    公开(公告)日：2004-02-17

    申请号：US10020357

    申请日：2001-10-30

    申请人： Katsuhiro Kaneko ,  Shigeo Tanahashi ,  Tokuichi Yamaji ,  Shinichi Abe ,  Yuriko Ueno

    发明人： Katsuhiro Kaneko ,  Shigeo Tanahashi ,  Tokuichi Yamaji ,  Shinichi Abe ,  Yuriko Ueno

    IPC分类号： G02B612

    CPC分类号： G02B6/4201 ,  G02B6/42 ,  G02B2006/12069

    摘要： An object of the invention is to provide an optical integrated circuit substrate capable of establishing optical connection between an optical waveguide and a semiconductor light-receiving element with high light-receiving efficiency and of achieving low-loss light transmission. In the optical integrated circuit substrate, on a substrate is formed an optical waveguide having a clad and a core layer. Embedded in the optical waveguide are a metal placement portion for an optical element and a thin-film optical element placed thereon. Distance between the thin-film optical element and the core layer is reduced. In a region free of the thin-film optical element, there is an adequate distance between the core layer and the substrate. This allows satisfactory optical connection between the thin-film optical element and the optical waveguide. In the thin-film optical element-free region, low-loss light transmission is achieved without interaction between transmitted light and the substrate.

    摘要翻译： 本发明的目的是提供一种能够在光波导和具有高的光接收效率的半导体光接收元件之间建立光连接并实现低损耗光透射的光学集成电路基板。 在光集成电路基板中，在基板上形成有具有包层和芯层的光波导。 嵌入在光波导中的是用于光学元件的金属放置部分和放置在其上的薄膜光学元件。 薄膜光学元件与芯层之间的距离减小。 在没有薄膜光学元件的区域中，在芯层和衬底之间存在足够的距离。 这允许薄膜光学元件与光波导之间的令人满意的光学连接。 在无薄膜光学元件区域中，透射光与衬底之间没有相互作用而实现低损耗光透射。

    Electronic circuit component
    2.
    发明授权
    Electronic circuit component 失效
    电子电路元件

    公开(公告)号：US6060664A

    公开(公告)日：2000-05-09

    申请号：US106192

    申请日：1998-06-26

    申请人： Shigeo Tanahashi ,  Tokuichi Yamaji

    发明人： Shigeo Tanahashi ,  Tokuichi Yamaji

    IPC分类号： H05K1/09 ,  H01L21/312 ,  H01L21/3205 ,  H01L23/52 ,  H01L23/532 ,  H01L27/01 ,  H01L39/00 ,  H05K1/03 ,  B32B15/08 ,  B32B15/20 ,  H01B12/06

    CPC分类号： H01L23/53285 ,  H01L2924/0002 ,  Y10T428/263 ,  Y10T428/31678

    摘要： A prior-art electronic circuit component comprising an insulating film and a circuit conductive layer made of a superconducting metal suffers low reliability resulting from insufficient adhesion between these layers. An electronic circuit component of the invention comprises an insulating film made of a high polymer material having a dielectric constant of 2.5 or less, a base metal layer formed of copper on the insulating film, having a thickness of 0.01 to 0.3 .mu.m, and a circuit conductive layer formed of at least one of niobium and niobium nitride on the base metal layer. The electronic circuit component of the invention can accomplish an increased adhesion between the insulating film and the circuit conductive layer. Furthermore, by sequentially forming, on the circuit conductive layer, a conductive-layer coating metal layer made of at least one of aluminum and copper, the insulating film, the base metal layer and the circuit conductive layer, there can be obtained a multi-layered circuit substrate with a superconducting circuit of high density and high-level function.

    摘要翻译： 包括绝缘膜和由超导金属制成的电路导电层的现有技术的电子电路部件由于这些层之间的粘附不足而具有低的可靠性。 本发明的电子电路部件包括由介电常数为2.5以下的高分子材料构成的绝缘膜，绝缘膜上由铜形成的基体金属层，厚度为0.01〜0.3μm， 电路导电层，其由贱金属层上的铌和氮化铌中的至少一种形成。 本发明的电子电路部件可以实现绝缘膜和电路导电层之间的增加的粘合。 此外，通过在电路导电层上依次形成由铝和铜中的至少一种制成的导电层涂覆金属层，绝缘膜，基底金属层和电路导电层， 具有高密度和高级功能的超导电路的分层电路基板。

    Method for manufacturing optical waveguide using siloxane polymer, and optoelectronic hybrid substrate using the optical waveguide
    3.
    发明授权
    Method for manufacturing optical waveguide using siloxane polymer, and optoelectronic hybrid substrate using the optical waveguide 失效
    使用硅氧烷聚合物制造光波导的方法，以及使用光波导的光电混合基片

    公开(公告)号：US6088492A

    公开(公告)日：2000-07-11

    申请号：US346002

    申请日：1999-07-01

    申请人： Katsuhiro Kaneko ,  Shigeo Tanahashi

    发明人： Katsuhiro Kaneko ,  Shigeo Tanahashi

    IPC分类号： C09D183/14 ,  G02B1/04 ,  G02B6/122 ,  G02B6/138 ,  G02B6/42 ,  G02B6/12

    CPC分类号： G02B1/046 ,  C09D183/14 ,  G02B6/1221 ,  G02B6/138 ,  G02B6/42 ,  G02B6/424 ,  G02B6/4257 ,  G02B6/4245 ,  Y10T428/31504 ,  Y10T428/31612

    摘要： An object of the invention is to provide a method of producing an optical waveguide comprising a siloxane-containing polymer film, capable of controlling a refractive index easily and finely, and an optoelectronic hybrid substrate using the optical waveguide, capable of controlling a refractive index easily and finely, and reducing the effect of the surface roughness of the substrate. In particular, it relates to a method of producing an optical waveguide comprising a siloxane-containing polymer film containing a metal obtained by the thermal polymerization of a siloxane-containing polymer film formation solution added with a metal alkoxide on a substrate, and an optoelectronic hybrid substrate comprising a combination of an optical waveguide produced as mentioned above, a photoelectric element and an electric circuit on a ceramic substrate.

    摘要翻译： 本发明的目的是提供一种制造光波导的方法，该光波导包括能够容易且精细地控制折射率的含硅氧烷的聚合物膜和能够容易地控制折射率的光波导的光电混合基板 并且精细地减少衬底的表面粗糙度的影响。 特别涉及一种制造光波导的方法，该光波导包括含有含硅氧烷的聚合物膜，该膜含有通过在基材上加入金属醇盐的含硅氧烷的聚合物成膜溶液的热聚合得到的金属和光电子混合物 包括如上所述制造的光波导，陶瓷基板上的光电元件和电路的组合的基板。

    Optical module and method for manufacturing same
    4.
    发明授权
    Optical module and method for manufacturing same 有权

    公开(公告)号：US06661939B2

    公开(公告)日：2003-12-09

    申请号：US09962171

    申请日：2001-09-24

    申请人： Katsuhiro Kaneko ,  Shigeo Tanahashi

    发明人： Katsuhiro Kaneko ,  Shigeo Tanahashi

    IPC分类号： G02B612

    CPC分类号： G02B6/4214 ,  G02B6/4212 ,  G02B6/4232 ,  G02B2006/12061 ,  H01L2224/16225 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2924/00014 ,  H01L2924/00 ,  H01L2224/0401

    摘要： An optical module comprising: an optical element flip-chip mounted on a substrate; an optical waveguide formed on the substrate and optically connected to the optical element; and underfill resin filled in between the substrate and the optical element and covering an optical junction between the optical element and the optical waveguide, wherein the underfill resin is of an electrically insulating material and has a refractive index equal to or smaller than a refractive index of a clad portion of the optical waveguide. The optical element can be flip-chip mounted with improved mechanical and electrical mounting reliability and thus satisfactory optical connection can be maintained. Further, it never occurs that light passing through the optical waveguide leaks to the underfill resin in the optical junction between the optical waveguide and the optical element.

    Optical waveguide and process for producing same
    5.
    发明授权
    Optical waveguide and process for producing same 失效
    光波导及其制造方法

    公开(公告)号：US06438307B1

    公开(公告)日：2002-08-20

    申请号：US09536109

    申请日：2000-03-24

    申请人： Katsuhiro Kaneko ,  Shigeo Tanahashi

    发明人： Katsuhiro Kaneko ,  Shigeo Tanahashi

    IPC分类号： G02B610

    CPC分类号： G02B6/13

    摘要： An optical waveguide is provided, which comprises a core part formed of optical material whose refractive index is varied corresponding to the irradiation amount of light having energy higher than that of light to be transmitted, and a cladding part formed of the optical material, but having a smaller refractive index than that of the core part by irradiation with the light having higher energy, which covers at least part of an outer periphery of the core part in the direction of the transmission of light. The optical waveguide is produced by a production process comprising a step of forming a layer of the optical material whose refractive index is varied corresponding to the irradiation amount of light having higher energy on a substrate, and a step of irradiating region is to be a core part and a cladding part, with different irradiation amounts of light, to form the core part and the cladding part having a smaller refractive index than that of the core part, which covers at least part of the outer periphery of the core part in the direction of transmission of light. The optical waveguide can be produced by the easy process with high productivity and high processing accuracy.

    摘要翻译： 提供了一种光波导，其包括由光学材料形成的芯部，该光学材料的折射率相应于具有高于待透光的光的能量的光的照射量而变化，以及由光学材料形成的包层部分，但是具有 通过用具有较高能量的光照射而使核心部分的折射率小于芯部分的透射方向的至少一部分外周的折射率。 光波导通过包括以下步骤的制造方法制造，该方法包括：形成光学材料层，所述光学材料的层的折射率相应于在基板上具有较高能量的光的照射量而变化，并且照射区域的步骤将成为核心 部分和包层部分，具有不同的照射量的光，以形成芯部分，并且包层部分具有比芯部更小的折射率，其覆盖芯部的外周的至少一部分在方向 的光传播。 光波导可以通过简单的工艺生产，生产率高，加工精度高。

    Superconducting circuit sub-assembly having an oxygen shielding barrier layer
    7.
    发明授权
    Superconducting circuit sub-assembly having an oxygen shielding barrier layer 失效
    具有氧屏蔽阻挡层的超导电路子组件

    公开(公告)号：US5474834A

    公开(公告)日：1995-12-12

    申请号：US257486

    申请日：1994-06-09

    申请人： Shigeo Tanahashi ,  Takanori Kubo ,  Kazuhiro Kawabata

    发明人： Shigeo Tanahashi ,  Takanori Kubo ,  Kazuhiro Kawabata

    IPC分类号： H01L23/498 ,  B32B9/00

    CPC分类号： H01L23/49888 ,  H01L2924/0002 ,  Y10S428/901 ,  Y10S428/93 ,  Y10S505/812 ,  Y10S505/813 ,  Y10T428/24917 ,  Y10T428/24926

    摘要： A circuit sub-assembly as a mounting for an electronic component such as Josephson device, i.e., a superconducting element, comprises a ceramic insulating substrate, an oxygen-shielding barrier layer formed on the insulating substrate, and a circuit film of niobium, as a superconducting material formed on the barrier layer according to a desired pattern. The barrier layer prevents oxidation of the circuit layer by shielding it from oxygen present in the insulating substrate. Due to the barrier layer, the circuit film is scarcely subject to superconductivity-impairing oxidation. The circuit film is thus capable of high-speed electronic signal conduction.

    摘要翻译： 作为用于诸如约瑟夫逊装置的电子部件的安装的电路子组件，即超导元件，包括陶瓷绝缘基板，形成在绝缘基板上的氧屏蔽阻挡层和铌的电路膜，作为 超导材料根据期望的图案形成在阻挡层上。 阻挡层通过屏蔽绝缘基板中存在的氧来防止电路层的氧化。 由于阻挡层，电路膜几乎不受超导损害氧化的影响。 因此，电路膜能够进行高速电子信号传导。