公开(公告)号：US5379600A

公开(公告)日：1995-01-10

申请号：US37455

申请日：1993-03-26

申请人： Kazuki Moritsu ,  Takahiro Matsumoto ,  Mitsuo Horikawa ,  Shuichi Nakagawa ,  Hideto Yoshimura ,  Masashi Nagao ,  Takashi Inaguchi

发明人： Kazuki Moritsu ,  Takahiro Matsumoto ,  Mitsuo Horikawa ,  Shuichi Nakagawa ,  Hideto Yoshimura ,  Masashi Nagao ,  Takashi Inaguchi

IPC分类号： F25D3/10 ,  F17C3/08 ,  F17C13/00 ,  F25B9/00 ,  F25B9/14 ,  F25D19/00 ,  H01F6/00 ,  H01F6/04 ,  H01F41/02 ,  H01L39/04 ,  F17C5/02

CPC分类号： F17C3/085 ,  F25B9/14 ,  F25D19/006 ,  H01F6/04 ,  F17C2203/0687 ,  F17C2221/014 ,  F17C2221/017 ,  F17C2270/0509 ,  Y10S505/892

摘要： A superconducting magnet which is capable of improving the refrigerating and the assembling characteristics and of composing in small size. A helium vessel 2 contains a cylindrical superconducting coil for cryogenically refrigerating it by liquid helium. A second and a first heat-shields 5 and 6 and a vacuum vessel 4 are coaxially provided so as to surround the helium vessel 2. Over the helium vessel 2, a L-letter shaped duct 50 is provided to be exposed to helium gas atmosphere being evaporated in the helium vessel 2. A refrigerator-mounting cylinder 51 has an end coupled to the L-letter shaped duct 50 through the bellows 52 and is mounted on an end surface of the vacuum vessel 4 substantially in parallel to the axial direction of the superconducting coil. A three-stage cold heat accumulation refrigerator 30 is inserted into and fixed to the refrigerator-mounting cylinder 51 for reliquefying the helium gas having been drawn into the L-letter shaped duct 50 by a third heat state 43.

摘要翻译： 一种能够改善制冷和组装特性并组装成小尺寸的超导磁体。 氦容器2包含用于通过液氦低温冷冻的圆柱形超导线圈。 第二和第一热屏蔽5和6以及真空容器4同轴地设置成围绕氦容器2.在氦容器2上方设置有L字形的管道50以暴露于氦气气氛 在氦容器2中蒸发。冰箱安装缸51具有通过波纹管52连接到L字形管道50的端部，并且基本上平行于真空容器4的端面安装在真空容器4的端面上 超导线圈。 将三级冷热蓄积式冷冻机30插入并固定于冰箱安装缸51，将第三加热状态43中已被拉入L字形管50的氦气重新融化。

公开(公告)号：US5583472A

公开(公告)日：1996-12-10

申请号：US387366

申请日：1995-02-13

申请人： Kazuki Moritsu ,  Takahiro Matsumoto ,  Shuichi Nakagawa ,  Shuji Ando ,  Mitsuhiro Kishida ,  Hideto Yoshimura ,  Masashi Nagao ,  Takashi Inaguchi

发明人： Kazuki Moritsu ,  Takahiro Matsumoto ,  Shuichi Nakagawa ,  Shuji Ando ,  Mitsuhiro Kishida ,  Hideto Yoshimura ,  Masashi Nagao ,  Takashi Inaguchi

IPC分类号： H01F6/00 ,  F17C13/00 ,  F25B9/14 ,  F25D19/00 ,  H01F1/00 ,  F25B19/00

CPC分类号： F25D19/006 ,  F25B9/14 ,  H01F6/04 ,  F25B2500/11

摘要： An object of the present invention is to obtain a superconductive magnet, the size of which can be reduced by shortening the radial length of a magnetic device thereof and the refrigerating performance of which can be improved. A cylinder for fastening a refrigerator has an end facing an ambience of helium gas evaporating in a helium chamber and another end which is substantially horizontally fastened to a vacuum chamber. Further, the three-stage regenerative refrigerator is inserted and fastened to the cylinder for fastening the refrigerator. A heat insulator, such as a convection prevention tube, made of a hollow Teflon tube is wound around the outer surface of each stage of the cylinder of the three-stage regenerative refrigerator. The convection prevention tube is enclosed into a gap between the cylinder for fastening the refrigerator and the three-stage regenerative refrigerator without no undesirable gap so that heat convection of the helium gas is prevented.

摘要翻译： 本发明的目的是获得一种超导磁体，通过缩短其磁性装置的径向长度可以缩小其尺寸，并且可以提高其制冷性能。 用于紧固冰箱的气缸具有面向在氦室中蒸发的氦气的气氛的端部和基本上水平地紧固到真空室的另一端。 此外，将三级再生式冰箱插入并紧固到用于紧固冰箱的气缸。 在三级再生式冰箱的气缸的各级的外表面上缠绕由中空的特氟隆管制成的防热管等防热管。 对流防止管被封闭在用于紧固冰箱和三级再生式冰箱之间的气缸之间的间隙中，而没有不期望的间隙，从而防止了氦气的热对流。

公开(公告)号：US08653455B2

公开(公告)日：2014-02-18

申请号：US13375085

申请日：2010-06-03

申请人： Hiroyuki Kitsunai ,  Seiichiro Kanno ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Go Miya

发明人： Hiroyuki Kitsunai ,  Seiichiro Kanno ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Go Miya

IPC分类号： G01N23/00

CPC分类号： H01L21/6831 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/2817 ,  H01L22/12

摘要： The charged particle beam device has a problem that a symmetry of equipotential distribution is disturbed near the outer edge of a specimen, an object being evaluated, causing a charged particle beam to deflect there. An electrode plate installed inside the specimen holding mechanism of electrostatic attraction type is formed of an inner and outer electrode plates arranged concentrically. The outer electrode plate is formed to have an outer diameter larger than that of the specimen. The dimensions of the electrode plates are determined so that an overlapping area of the outer electrode plate and the specimen is substantially equal to an area of the inner electrode plate. The inner electrode plate is impressed with a voltage of a positive polarity with respect to a reference voltage and of an arbitrary magnitude, and the outer electrode is impressed with a voltage of a negative polarity and of an arbitrary magnitude.

摘要翻译： 带电粒子束装置具有在试样的外边缘附近等待电位分布的对称性被扰乱的问题，被评估的物体导致带电粒子束在那里偏转。 安装在静电吸引型的检体保持机构内的电极板由同心配置的内外电极板形成。 外电极板的外径大于样品的外径。 确定电极板的尺寸，使得外部电极板和试样的重叠面积基本上等于内部电极板的面积。 内部电极板相对于参考电压和任意大小施加正极性的电压，并且外部电极施加负极性和任意大小的电压。

公开(公告)号：US20120145920A1

公开(公告)日：2012-06-14

申请号：US13391962

申请日：2010-09-17

申请人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

发明人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

IPC分类号： G21K5/10 ,  H02K41/02

CPC分类号： H01J37/20 ,  H01J2237/20228 ,  H01J2237/20278

摘要： Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

摘要翻译： 公开了一种可以应用于诸如用于检查和/或评估半导体的长度测量SEM的装置的较小和较轻的平台装置，其中可以减小磁场对电子束的影响。 直线电动机110,111,112,113分别设置在基座104的四侧，与电子束突出位置（台装置的中心）分开。 基座104的尺寸基本上等于由顶台101和可移动冲程的尺寸确定的最小尺寸。 线性电动机定子110,112被构造为具有开口面分别位于舞台装置外侧的“C”形结构。 此外，可移动工作台通过由非磁性材料构成的线性引导件107,109或由非磁性材料构成的滚子机构联接到顶台。

公开(公告)号：US06943945B2

公开(公告)日：2005-09-13

申请号：US10825131

申请日：2004-04-16

申请人： Shuichi Nakagawa ,  Eiichi Seya

发明人： Shuichi Nakagawa ,  Eiichi Seya

IPC分类号： G01N23/225 ,  G02B21/26 ,  H01J37/20 ,  H01L21/68

CPC分类号： G02B21/26

摘要： A two axis stage for microscopes that is thin, has reduced vibration, and is adapted for increased stage transportation speeds is capable of being disposed inside a chamber without changing a floor-projected area. The XY stage comprises a base 1, an X table 2 that can be moved in an X direction on the base 1 by an X feed screw 7, and a Y table 3 that is supported on the X table 2 and movable in a Y direction. A third table 4 is disposed on the base 1, the third table being movable in the Y direction by a Y-feed screw 8 positioned on the base 1. Additionally, a slide unit 14 is disposed on the third table 4, the slide unit 14 being movable in the X direction and connected with the Y table 3.

摘要翻译： 用于显微镜的双轴平台，具有减小的振动，并且适于增加平台传送速度能够设置在室内而不改变地面投影面积。 XY台包括基座1，可以通过X馈送螺钉7在基座1上沿X方向移动的X台2和支撑在X台2上并可沿Y方向移动的Y台3 。 第三台4设置在基座1上，第三台可以通过位于基座1上的Y形进给螺钉8沿Y方向移动。 此外，滑动单元14设置在第三工作台4上，滑动单元14可沿X方向移动并与Y工作台3连接。

公开(公告)号：US06266508B1

公开(公告)日：2001-07-24

申请号：US09504798

申请日：2000-02-15

申请人： Shuichi Nakagawa ,  Hiroshi Goto ,  Tateki Oka

发明人： Shuichi Nakagawa ,  Hiroshi Goto ,  Tateki Oka

IPC分类号： G03G1508

CPC分类号： G03G15/065 ,  G03G2215/00042 ,  G03G2215/0634

摘要： A developing apparatus according to the present invention comprises a developer carrying member for holding a developer and introducing the developer into a developing area opposite to the image carrying member at a required distance; a voltage applying device for applying an AC voltage to the developer carrying member; and a resistor inserted between the developer applying device and the developer carrying member, the AC voltage applied to the developer carrying member from the voltage applying device through the resistor being composed of a rectangular wave, and a time period during which a voltage, which is exerted in the direction in which the developer is fed to the image carrying member, in the AC voltage is less than 50% of a time period during which the AC voltage is exerted.

摘要翻译： 根据本发明的显影装置包括用于保持显影剂的显影剂承载构件并将显影剂以所需距离引入与图像承载构件相对的显影区域中; 用于向显影剂承载构件施加AC电压的电压施加装置; 以及插在显影剂施加装置和显影剂承载构件之间的电阻器，通过由矩形波构成的电阻器从电压施加装置施加到显影剂承载构件的AC电压，以及电压是 施加在显影剂被馈送到图像承载构件的方向上的交流电压小于施加交流电压的时间段的50％。

公开(公告)号：US5196773A

公开(公告)日：1993-03-23

申请号：US665217

申请日：1991-03-05

申请人： Seiichi Yoshikawa ,  Minoru Yamada ,  Shuichi Nakagawa ,  Kazuo Kobayashi

发明人： Seiichi Yoshikawa ,  Minoru Yamada ,  Shuichi Nakagawa ,  Kazuo Kobayashi

IPC分类号： B21J15/12 ,  B21J15/28 ,  G05B19/18 ,  G05B19/23

CPC分类号： B21J15/285 ,  B21J15/12 ,  B21J15/28 ,  G05B19/182 ,  G05B19/237 ,  G05B2219/37177 ,  G05B2219/41301 ,  G05B2219/45126

摘要： A rivetting machine has a hydraulic cylinder connected with a hydraulic power source, the cylinder including a piston shaft, a motor-driven spindle extending through and journaled to the piston shaft, and a rivet head forming tool secured to the bottom end of the spindle and carrying a forming shaft. A controller of the machine has a linear encoder for detecting the axial position of the piston shaft, an electric hydraulic servo valve provided in a hydraulic circuit between the hydraulic power source and the hydraulic cylinder, a machining data input unit for inputting machining data of the work rivet into a programmable control unit. The control unit receives the output of the linear encoder and the input machining data and controlling the hydraulic cylinder via the electric/hydraulic servo valve based on the machining data and the output of the encoder.

摘要翻译： 铆接机具有与液压动力源连接的液压缸，该气缸包括活塞轴，延伸穿过活塞轴的电动主轴，以及固定到主轴底端的铆钉头成形工具， 承载成形轴。 机器的控制器具有用于检测活塞轴的轴向位置的线性编码器，设置在液压动力源和液压缸之间的液压回路中的电动液压伺服阀，用于输入液压伺服阀的加工数据的加工数据输入单元 工作铆钉成可编程控制单元。 控制单元接收线性编码器的输出和输入的加工数据，并且基于加工数据和编码器的输出经由电动/液压伺服阀来控制液压缸。

公开(公告)号：US4364056A

公开(公告)日：1982-12-14

申请号：US273380

申请日：1981-06-15

申请人： Yoshihiro Suzuki ,  Shuichi Nakagawa ,  Yasuo Wako ,  Yoshihiro Ogawa ,  Mamoru Yamaguchi ,  Toshio Kimura

发明人： Yoshihiro Suzuki ,  Shuichi Nakagawa ,  Yasuo Wako ,  Yoshihiro Ogawa ,  Mamoru Yamaguchi ,  Toshio Kimura

IPC分类号： B43L13/02 ,  G01D9/40

CPC分类号： B43L13/022 ,  G01D9/40

摘要： An interactive graphic system is provided for automatically recording lines, symbols or marks by inputting plotting information in a step-by-step mode in an interactive system. The systems comprise a data setter for specifying, among various predetermined graphs, a graph to be plotted and for setting plotting data concerning the graph thus specified, a plotter for providing records in association with input signals, a display for requiring the plotting data inputs, and a controller for suitably controlling the various sections. The system is formed into one unit, so that the plotter can directly plot the necessary records with plotting data given by the data setter, and that the plotting operation is simplified and the system itself is small in size and low in manufacturing cost.

摘要翻译： 提供交互式图形系统，用于通过在交互式系统中以逐步模式输入绘图信息来自动记录线条，符号或标记。 该系统包括数据设定器，用于在各种预定图形中指定要绘制的图形，以及用于设置与所指定的曲线图相关的绘制数据，用于提供与输入信号相关联的记录的绘图仪，用于需要绘制数据输入的显示器， 以及用于适当地控制各个部分的控制器。 该系统形成一个单元，使得绘图仪可以通过数据设定器给出的绘图数据直接绘制必要的记录，简化绘图操作，系统本身尺寸小，制造成本低。

公开(公告)号：US20090041512A1

公开(公告)日：2009-02-12

申请号：US12179038

申请日：2008-07-24

申请人： Shin MURAYAMA ,  Shuichi Nakagawa ,  Ryuji Inoue ,  Shintaro Yamada

发明人： Shin MURAYAMA ,  Shuichi Nakagawa ,  Ryuji Inoue ,  Shintaro Yamada

IPC分类号： G03G15/08

CPC分类号： G03G15/0815 ,  G03G2215/0129

摘要： A developing device for developing an electrostatic latent image on an image carrier by supplying a one-component developer to the image carrier. Good images can be obtained over long periods of time, without printing history becoming apparent on account of residual developer. The developing device has a developer carrier that is rotatable and disposed facing an image carrier; and a conductive developer supply and recovery member rotatably arranged so as to abut the developer carrier. The rotation direction of the conductive developer supply and recovery member is opposite to the rotation direction of the developer carrier at a position where the developer carrier and the conductive developer supply and recovery member abut each other. A contact pressure P between the developer carrier and the conductive developer supply and recovery member is set so as to satisfy the relationship 0 (kPa)

摘要翻译： 一种用于通过将单组分显影剂供应给图像载体来在图像载体上显影静电潜像的显影装置。 可以长时间获得良好的图像，而不会因为残留的显影剂而使印刷历史变得明显。 显影装置具有可旋转并且面向图像载体设置的显影剂载体; 以及可旋转地布置成邻接显影剂载体的导电显影剂供应和恢复构件。 导电显影剂供应和恢复构件的旋转方向与显影剂载体和导电显影剂供应和恢复构件彼此抵接的位置处的显影剂载体的旋转方向相反。 将显影剂载体和导电显影剂供给恢复部件之间的接触压力P设定为满足0（kPa）

公开(公告)号：US20050018284A1

公开(公告)日：2005-01-27

申请号：US10825131

申请日：2004-04-16

申请人： Shuichi Nakagawa ,  Eiichi Seya

发明人： Shuichi Nakagawa ,  Eiichi Seya

IPC分类号： G01N23/225 ,  G02B21/26 ,  H01J37/20 ,  H01L21/68

CPC分类号： G02B21/26

摘要： A two axis stage for microscopes that is thin, has reduced vibration, and is adapted for increased stage transportation speeds is capable of being disposed inside a chamber without changing a floor-projected area. The XY stage comprises a base 1, an X table 2 that can be moved in an X direction on the base 1 by an X feed screw 7, and a Y table 3 that is supported on the X table 2 and movable in a Y direction. A third table 4 is disposed on the base 1, the third table being movable in the Y direction by a Y-feed screw 8 positioned on the base 1. Additionally, a slide unit 14 is disposed on the third table 4, the slide unit 14 being movable in the X direction and connected with the Y table 3.

摘要翻译： 用于显微镜的双轴平台，具有减小的振动，并且适于增加平台传送速度能够设置在室内而不改变地面投影面积。 XY台包括基座1，可以通过X馈送螺钉7在基座1上沿X方向移动的X台2和支撑在X台2上并可沿Y方向移动的Y台3 。 第三台4设置在基座1上，第三工作台可以通过位于基座1上的Y形进给螺钉8在Y方向上移动。此外，滑动单元14设置在第三工作台4上，滑动单元 14可沿X方向移动并与Y台3连接。