摘要:
A laser beam processing machine comprising a chuck table for holding a workpiece and a laser beam application means for applying a laser beam to the workpiece held on the chuck table, wherein the machine further comprises a protective film forming means for forming a protective film on the to-be-processed surface of the workpiece before laser beam processing.
摘要:
A protective film agent for laser dicing according to the present invention comprises a solution having, dissolved therein, a water-soluble resin and at least one laser light absorber selected from the group consisting of a water-soluble dye, a water-soluble coloring matter, and a water-soluble ultraviolet absorber. The protective film agent is coated on a surface of a wafer, which is to be processed, and is then dried to form a protective film. Laser dicing through the protective film produces chips from the wafer. As a result, deposition of debris can be effectively prevented on the entire face of the chips, including their peripheral edge portions.
摘要:
A method of detecting a condensing spot position in a laser beam processing apparatus, including: a detection position setting step of setting a plurality of Z-axis directional positions in a range from a starting point to an ending point of detection positions into which the condenser is positioned; a laser beam processed groove forming step of sequentially positioning the condenser into the detection positions in the range from the starting point to the ending point, performing a predetermined interval indexing feeding by operating indexing feeding means each time the detection position for the condenser is changed, and forming a laser beam processed groove of a predetermined length in the plate-shaped body at each of the detection positions for the condenser; and a laser beam processed groove imaging step of imaging the laser beam processed grooves formed in the plate-shaped body by imaging means.
摘要:
The present invention relates to a film base material for an adhesive skin patch, which includes an elastomer film unevenly having unevenness on at least one surface thereof, in which, in one unevenness in which the distance perpendicular to the surface of the elastomer film between the top of the unevenness and the bottom thereof is the longest among the plurality of unevenness, the distance is within the range of from 1 to 5 μm; in another unevenness in which the distance perpendicular to the surface of the elastomer film between the top of the unevenness and the bottom thereof is the shortest among the plurality of unevenness, the distance is within the range of from 0.1 to 0.9 μm; and the 10-point average roughness of the surface is within the range of from 0.5 μm to 3 μm, and which is decreased in glossy texture on the surface thereof and inconspicuous when it is applied to the skin or the like; and the adhesive skin patch including the film base material.
摘要:
A laser processing method for melt-dividing an adhesive film for die bonding affixed to the back surface of a semiconductor wafer which has been separated into a plurality of semiconductor chips and which is put on an extensible dicing tape mounted on an annular frame along dividing grooves for separating the plurality of semiconductor chips from one another, comprising the steps of a tape expanding step for expanding the dicing tape affixed to the semiconductor wafer to increase the width of the dividing grooves for separating the plurality of semiconductor chips from one another; and an adhesive film melt-dividing step for melt-dividing the adhesive film along the dividing grooves by applying a laser beam to the adhesive film along the dividing grooves in a state where the width of the dividing grooves for separating the plurality of semiconductor chips from one another has been increased.
摘要:
A transparent lightguide (3) which guide light at least from one side end plane is characterized in that a large number of speckled, solid-line shaped or broken-line shaped protruding patterns whose cross-sectional width W (&mgr;m) at a cross section perpendicular to the axis of a linear light source is 10≦W≦200 are arranged on a light emitting surface at a low density in a region close to the linear light source and at a high density in a region far from the linear light source so as to make the luminance distribution of the light emitted from the light emitting surface approximately uniform. Here, the cross section of the protruding pattern is preferable to be approximately trapezoidal while having a straight part partially and the ratio H/W to be 0.2≦H/W≦1.0, where W and H denote cross-sectional width and height of the protruding pattern, respectively, or the cross section of the protruding pattern is preferable to be approximately circular-arc and the ratio H/W to be 0.2≦H/W≦0.5, where W and H denote cross-sectional width and height of the protruding pattern, respectively.
摘要翻译:至少从一个侧端引导光的透明光导(3)的特征在于,在横截面处的横截面宽度W(mum)的大量斑点状,实线形或虚线形的突出图案 垂直于线性光源的轴的10 <= W <= 200在靠近线性光源的区域以低密度布置在发光表面上,并且在远离线性光的区域中以高密度布置 源,使得从发光表面发射的光的亮度分布近似均匀。 这里,突出图案的截面优选为大致梯形,同时具有部分直线部分,并且比率H / W为0.2 <= H / W <= 1.0,其中W和H表示横截面宽度和高度 或突出图案的横截面优选为大致圆弧,比率H / W为0.2 <= H / W <= 0.5,其中W和H表示横截面宽度 和突出图案的高度。
摘要:
A wafer laser processing method for forming a groove in a wafer having a protective film on the processing surface of a substrate along a predetermined processing line, comprising a first step for forming a first groove in the protective film along the dividing lines by applying a first pulse laser beam set to an output at which the protective film can be processed but the substrate can not be processed, to the protective film along the processing lines; and a second step for forming a second groove in the substrate along the first grooves by applying a second pulse laser beam set to an output at which the substrate can be processed, along the first grooves.