摘要:
A method is provided for manufacturing a flat panel display in which a baseplate has a conductive row electrode deposited on it followed by an insulator. A conductive gate electrode is deposited over the insulator and a soft mask material is deposited over the conductive gate electrode. Microspheres are deposited on the soft mask material and an isotropic etch uses the microspheres as a mask to etch the soft mask material to form soft mask portions under the microspheres. The microspheres are removed and a hard mask material is deposited over the soft mask portions. The hard mask material is processed and chemical mechanical polished down to the soft mask portions which are removed by etching to leave a hard mask which is used by anisotropic etch process to form gate holes in the gate electrode. The gate holes are used to form emitter cavities into which emitters are deposited.
摘要:
A process for the production of a cold cathode field emission device comprising the steps of; (A) forming a patterned electrode layer on a dielectric supporting substrate, (B) forming an insulating interlayer on the dielectric supporting substrate and the electrode layer, (C) forming a gate electrode constituted of a first conductive layer on the insulating interlayer, (D) forming an opening portion which penetrates through at least the insulating interlayer and has a bottom portion where the electrode layer is exposed, (E) forming a side-wall of an insulating material on the side wall of the opening portion, to decrease the opening portion in diameter, (F) forming a second conductive layer on the entire surface including the inside of the opening portion by a physical or chemical vapor deposition method, (G) etching back the second conductive layer to form an emitter electrode shaped in the form of a column and constituted of the second conductive layer in the opening portion, and (H) removing at least an upper portion of the side-wall.
摘要:
A cathode panel for a cold cathode field emission display, comprising; (a) a plurality of main wirings, (b) a plurality of branch wirings extending from each main wiring, and (c) cold cathode electron emitting portions connected to the branch wirings, wherein a branch wiring connecting a cold cathode electron emitting portion defective in operation and a main wiring is cut off.
摘要:
A cold cathode field emission device comprising; (A) a cathode electrode formed on a support, (B) an insulating layer formed on the support and the cathode electrode, (C) a gate electrode formed on the insulating layer, (D) an opening portion which penetrates through the gate electrode and the insulating layer, and (E) an electron emitting portion which is positioned at a bottom portion of the opening portion and has a tip portion having a conical form and being composed of a crystalline conductive material, the tip portion of the electron emitting portion having a crystal boundary nearly perpendicular to the cathode electrode.
摘要:
A cathode panel for a cold cathode field emission display, comprising; (a) a plurality of main wirings, (b) a plurality of branch wirings extending from each main wiring, and (c) cold cathode electron emitting portions connected to the branch wirings, wherein a branch wiring connecting a cold cathode electron emitting portion defective in operation and a main wiring is cut off.
摘要:
A cathode panel for a cold cathode field emission display, comprising; (a) a plurality of main wirings, (b) a plurality of branch wirings extending from each main wiring, and (c) cold cathode electron emitting portions connected to the branch wirings, wherein a branch wiring connecting a cold cathode electron emitting portion defective in operation and a main wiring is cut off.
摘要:
A cold cathode field emission device comprising; (A) a cathode electrode formed on a support, (B) an insulating layer formed on the support and the cathode electrode, (C) a gate electrode formed on the insulating layer, (D) an opening portion which penetrates through the gate electrode and the insulating layer, and (E) an electron emitting portion which is positioned at a bottom portion of the opening portion and has a tip portion having a conical form and being composed of a crystalline conductive material, the tip portion of the electron emitting portion having a crystal boundary nearly perpendicular to the cathode electrode.
摘要:
A fixing device in an image formation apparatus has a heating roller and a backup roller. These rollers are each coated with single silicone rubber layers around the respective peripheries of their core bars. This silicone rubber has a volume resistance value of 1013 &OHgr;·cm or more. The heating roller is charged with electricity of the same polarity as the polarity of toner particles due to frictional electrification caused at the time of feeding of a recording medium. The heating and the backup roller are polarized reverse to the polarity of the recording medium. A quantity of charged electricity on the backup roller is made larger than that on the heating roller. This permits the image formation apparatus to prevent offset from occurring at the time of fixing a toner image onto the recording medium to cope with various types of recording media.
摘要:
Two pairs of legs are fitted under two side plates of an electrophotography apparatus, respectively. The two legs in one pair fitted under one of the side plates are disposed on either side of and are spaced from a point which is a cross point of a line joining these two legs, and a line perpendicular to this line, which perpendicular line passes through a projected point obtained by projecting the center of gravity of the electrophotography apparatus onto a horizontal plane on which the apparatus is set up. The two legs in the pair fitted under the other one of the side plates are disposed on either side of and are spaced from a point which is a cross point of a line passing these two legs and a line perpendicular to this line, which perpendicular line passes through the projected point of the center of gravity. The ratio of a shorter distance to a longer distance, of two distances: one between the two legs in a pair and the other between the two legs in the other pair is set to a value of 1/5 to 1/3. With such a arrangement, a defect in an image caused by a distortion in said side plates, due to a position change in the center of gravity of the electrophotography apparatus can be prevented.
摘要:
The present invention is drawn to an apparatus for forming a thin film. The apparatus includes a vacuum chamber; a vacuum apparatus connected to the vacuum chamber; a holder placed in the vacuum chamber, which holder holds a substrate and is rotated by means of a rotating mechanism; a plasma CVD apparatus; and a sputtering apparatus, wherein the plasma CVD apparatus and the sputtering apparatus are placed in a single vacuum chamber and a thin film having an medium refractive index is formed on the substrate held by the holder, by means of the plasma CVD apparatus and the sputtering apparatus. The method making use of such an apparatus is also disclosed.