公开(公告)号：US20060279744A1

公开(公告)日：2006-12-14

申请号：US11407905

申请日：2006-04-21

申请人： Kazuo Takeda ,  Jun Gotoh ,  Daisuke Mutou

发明人： Kazuo Takeda ,  Jun Gotoh ,  Daisuke Mutou

IPC分类号： G01B11/02

CPC分类号： G01B11/0683 ,  G01B11/0633

摘要： A laser light is projected to a thin film deposited on a transparent substrate, and measurement is performed on the entire measurement area of the substrate, and transmission intensity is measured by a transmission light intensity monitor and reflection light intensity is measured by a reflection light intensity monitor at the same points and at the same number of points on the substrate. From the value of “A=1−(R+T)” where R represents reflectivity and T is transmissivity, film thickness is measured and evaluated from the relation of the value A with film thickness. By this procedure, film thickness can be determined on 10,000 substrates or more per minute and film thickness of thin film can be measured over the entire substrate surface.

公开(公告)号：US07542152B2

公开(公告)日：2009-06-02

申请号：US11407905

申请日：2006-04-21

申请人： Kazuo Takeda ,  Jun Gotoh ,  Daisuke Mutou

发明人： Kazuo Takeda ,  Jun Gotoh ,  Daisuke Mutou

IPC分类号： G01B11/06

CPC分类号： G01B11/0683 ,  G01B11/0633

摘要： A laser light is projected to a thin film deposited on a transparent substrate, and measurement is performed on the entire measurement area of the substrate, and transmission intensity is measured by a transmission light intensity monitor and reflection light intensity is measured by a reflection light intensity monitor at the same points and at the same number of points on the substrate. From the value of “A=1−(R+T)” where R represents reflectivity and T is transmissivity, film thickness is measured and evaluated from the relation of the value A with film thickness. By this procedure, film thickness can be determined on 10,000 substrates or more per minute and film thickness of thin film can be measured over the entire substrate surface.

摘要翻译： 将激光投射到沉积在透明基板上的薄膜上，并且对基板的整个测量区域进行测量，并且透射光强度监测器测量透射强度，并且通过反射光强度 在基板上的相同点和相同数量的点处进行监视。 从“A = 1-（R + T）”的值，其中R表示反射率，T表示透射率，根据值A与膜厚度的关系来测量和评价膜厚度。 通过该程序，可以在10,000个基板以上每分钟测定膜厚度，并且可以在整个基板表面上测量薄膜的膜厚度。

公开(公告)号：US20050215077A1

公开(公告)日：2005-09-29

申请号：US11028864

申请日：2005-01-05

申请人： Kazuo Takeda ,  Takeshi Sato ,  Jun Gotoh ,  Masakazu Saitou ,  Daisuke Mutou

发明人： Kazuo Takeda ,  Takeshi Sato ,  Jun Gotoh ,  Masakazu Saitou ,  Daisuke Mutou

IPC分类号： G02F1/1368 ,  G02F1/133 ,  G09F9/30 ,  G09G3/36 ,  G09G3/38 ,  H01L21/00 ,  H01L21/20 ,  H01L21/26 ,  H01L21/263 ,  H01L21/268 ,  H01L21/336 ,  H01L21/42 ,  H01L21/77 ,  H01L27/32 ,  H01L29/786

CPC分类号： H01L27/1285 ,  H01L27/1296 ,  H01L27/3244 ,  H01L29/66757 ,  H01L29/78675

摘要： The generation of a projecting intensity distribution in an irradiation laser beam used for forming a polycrystalline semiconductor film is prevented by irradiating the laser beam onto an amorphous semiconductor film to crystallize it while it is being scanned. A dog-ear removing filter for eliminating diffracted light that occurs at boundaries of lenses and acts as a cause of development of dog-ears in the light intensity distribution is disposed in an optical system to cause the light intensity distribution in the irradiation laser beam to be uniform. As a result, by removing the dog ear distributions, the necessity for making the light intensity distribution of the laser beam blur is eliminated, and, consequently, a distribution of high energy efficiency can be maintained and the throughput is improved.

摘要翻译： 用于形成多晶半导体膜的照射激光束中的突出强度分布的产生通过将激光束照射到非晶半导体膜上而在被扫描时使其结晶化而被防止。 用于消除在透镜边界处发生的衍射光并且作为光强度分布中的狗耳发展的原因的狗耳去除滤光器被设置在光学系统中，以使照射激光束中的光强度分布 统一 结果，通过去除狗耳分布，消除了激光束模糊的光强度分布的必要性，从而可以保持高能量效率的分布并提高吞吐量。

公开(公告)号：US20100073616A1

公开(公告)日：2010-03-25

申请号：US12563257

申请日：2009-09-21

申请人： Hiroyuki ABE ,  Daisuke Mutou ,  Takamitsu Kamada

发明人： Hiroyuki ABE ,  Daisuke Mutou ,  Takamitsu Kamada

IPC分类号： G02F1/1333

CPC分类号： G02F1/133345 ,  G02F1/136227 ,  G02F2001/133357

摘要： A liquid crystal display device capable of preventing the occurrence of crack in a capacitor insulating film due to laser marking is provided. The liquid crystal display device includes pixels arranged in a matrix in a display region above a substrate, a thin film layer formed in a non-display region excluding the display region, and a transparent insulating film extending from the display region to the non-display region and formed on the thin film layer, in which the transparent insulating film includes at least an organic insulating film formed of an organic compound for planarizing a surface of the substrate, an inorganic insulating film which is a thin film formed on the organic insulating film and formed of an inorganic compound and formed with an opening extending to the organic insulating film in a region above the thin film layer, and a transparent electrode layer which is formed in the opening of the inorganic insulating film to cover the organic insulating film exposed from the opening of the inorganic insulating film.

摘要翻译： 提供一种能够防止由于激光打标引起的电容器绝缘膜发生裂纹的液晶显示装置。 液晶显示装置包括在基板上方的显示区域中排列成矩阵的像素，形成在除了显示区域之外的非显示区域中形成的薄膜层，以及从显示区域向非显示区域延伸的透明绝缘膜 区域形成在薄膜层上，其中透明绝缘膜至少包括由有机化合物形成的有机绝缘膜，用于使基板的表面平坦化，无机绝缘膜是形成在有机绝缘膜上的薄膜 并且由无机化合物形成，并且在薄膜层上方的区域中形成有延伸到有机绝缘膜的开口，以及形成在无机绝缘膜的开口中的透明电极层，以覆盖暴露于有机绝缘膜的有机绝缘膜 无机绝缘膜的开口。

公开(公告)号：US08675163B2

公开(公告)日：2014-03-18

申请号：US13709163

申请日：2012-12-10

申请人： Hiroyuki Abe ,  Daisuke Mutou ,  Takamitsu Kamada

发明人： Hiroyuki Abe ,  Daisuke Mutou ,  Takamitsu Kamada

IPC分类号： G02F1/1333

CPC分类号： G02F1/133345 ,  G02F1/136227 ,  G02F2001/133357

摘要： A liquid crystal display device capable of preventing the occurrence of crack in a capacitor insulating film due to laser marking is provided. The liquid crystal display device includes pixels arranged in a matrix in a display region above a substrate, a thin film layer formed in a non-display region excluding the display region, and a transparent insulating film extending from the display region to the non-display region and formed on the thin film layer, in which the transparent insulating film includes at least an organic insulating film formed of an organic compound for planarizing a surface of the substrate, an inorganic insulating film which is a thin film formed on the organic insulating film and formed of an inorganic compound and formed with an opening extending to the organic insulating film in a region above the thin film layer, and a transparent electrode layer which is formed in the opening of the inorganic insulating film to cover the organic insulating film exposed from the opening of the inorganic insulating film.

摘要翻译： 提供一种能够防止由于激光打标引起的电容器绝缘膜发生裂纹的液晶显示装置。 液晶显示装置包括在基板上方的显示区域中排列成矩阵的像素，形成在除了显示区域之外的非显示区域中形成的薄膜层，以及从显示区域向非显示区域延伸的透明绝缘膜 区域形成在薄膜层上，其中透明绝缘膜至少包括由有机化合物形成的有机绝缘膜，用于使基板的表面平坦化，无机绝缘膜是形成在有机绝缘膜上的薄膜 并且由无机化合物形成，并且在薄膜层上方的区域中形成有延伸到有机绝缘膜的开口，以及形成在无机绝缘膜的开口中的透明电极层，以覆盖暴露于有机绝缘膜的有机绝缘膜 无机绝缘膜的开口。

公开(公告)号：US08563982B2

公开(公告)日：2013-10-22

申请号：US13311595

申请日：2011-12-06

申请人： Takao Nakamura ,  Kazuki Ishii ,  Daisuke Mutou ,  Hidenori Seki

发明人： Takao Nakamura ,  Kazuki Ishii ,  Daisuke Mutou ,  Hidenori Seki

IPC分类号： H01L27/14

CPC分类号： G02F1/136286 ,  G02F1/133345 ,  G02F1/134363 ,  G02F1/136227 ,  G02F1/1368 ,  G02F2001/133354

摘要： In a liquid crystal display device that uses a top gate TFT, a contact hole is formed to connect to an image signal line. An inorganic passivation film and an organic passivation film are formed in this order so as to cover the TFT, on which a common electrode is formed. Then, an interlayer insulating film is formed on the common electrode. A through hole for gas release is formed in the interlayer insulating film. The diameter of the through hole is greater than the diameter of the contact hole, so as to be able to easily release gas from the organic passivation film, and to prevent the interlayer insulating film from peeling off.

摘要翻译： 在使用顶栅TFT的液晶显示装置中，形成与图像信号线连接的接触孔。 依次形成无机钝化膜和有机钝化膜，以覆盖其上形成有公共电极的TFT。 然后，在公共电极上形成层间绝缘膜。 在层间绝缘膜中形成用于气体释放的通孔。 通孔的直径大于接触孔的直径，从而能够容易地从有机钝化膜释放气体，并且防止层间绝缘膜剥离。

公开(公告)号：US08330915B2

公开(公告)日：2012-12-11

申请号：US12563257

申请日：2009-09-21

申请人： Hiroyuki Abe ,  Daisuke Mutou ,  Takamitsu Kamada

发明人： Hiroyuki Abe ,  Daisuke Mutou ,  Takamitsu Kamada

IPC分类号： G02F1/1333

CPC分类号： G02F1/133345 ,  G02F1/136227 ,  G02F2001/133357

摘要： A liquid crystal display device capable of preventing the occurrence of crack in a capacitor insulating film due to laser marking is provided. The liquid crystal display device includes pixels arranged in a matrix in a display region above a substrate, a thin film layer formed in a non-display region excluding the display region, and a transparent insulating film extending from the display region to the non-display region and formed on the thin film layer, in which the transparent insulating film includes at least an organic insulating film formed of an organic compound for planarizing a surface of the substrate, an inorganic insulating film which is a thin film formed on the organic insulating film and formed of an inorganic compound and formed with an opening extending to the organic insulating film in a region above the thin film layer, and a transparent electrode layer which is formed in the opening of the inorganic insulating film to cover the organic insulating film exposed from the opening of the inorganic insulating film.

摘要翻译： 提供一种能够防止由于激光打标引起的电容器绝缘膜发生裂纹的液晶显示装置。 液晶显示装置包括在基板上方的显示区域中排列成矩阵的像素，形成在除了显示区域之外的非显示区域中形成的薄膜层，以及从显示区域向非显示区域延伸的透明绝缘膜 区域形成在薄膜层上，其中透明绝缘膜至少包括由有机化合物形成的有机绝缘膜，用于使基板的表面平坦化，无机绝缘膜是形成在有机绝缘膜上的薄膜 并且由无机化合物形成，并且在薄膜层上方的区域中形成有延伸到有机绝缘膜的开口，以及形成在无机绝缘膜的开口中的透明电极层，以覆盖暴露于有机绝缘膜的有机绝缘膜 无机绝缘膜的开口。