公开(公告)号：US20090165470A1

公开(公告)日：2009-07-02

申请号：US12339808

申请日：2008-12-19

申请人： Kazutoshi Aoki ,  Takahiro Okada

发明人： Kazutoshi Aoki ,  Takahiro Okada

IPC分类号： F04B37/08 ,  F04B37/00 ,  B01D1/30

CPC分类号： F04B37/085

摘要： A cryopump regeneration method includes a temperature raising step of raising the temperature of a cryopanel so as to vaporize gas molecules condensed on the exhaust surface of the cryopanel, an evacuation step of evacuating a pump vessel, a determination step of determining whether the internal pressure of the pump vessel has reached a set pressure higher than the water vapor pressure at 0° C., a pressure rise test step of stopping the evacuation and performing a pressure rise test, and an observation step of observing residual water based on the internal pressure of the pump vessel.

摘要翻译： 低温泵再生方法包括升温步骤，提高冷冻板的温度，蒸发冷凝在冷冻板的排气表面上的气体分子，抽真空泵的排气步骤，确定步骤， 泵容器达到高于0℃的水蒸气压的设定压力，停止抽气并进行升压试验的压力上升试验步骤，以及基于内部压力观察残留水的观察步骤 泵船。

公开(公告)号：US20100011783A1

公开(公告)日：2010-01-21

申请号：US12446675

申请日：2008-05-13

申请人： Kazutoshi Aoki ,  Takahiro Okada ,  Hisayoshi Komai ,  Isao Mochizuki ,  Tokumitsu Arai

发明人： Kazutoshi Aoki ,  Takahiro Okada ,  Hisayoshi Komai ,  Isao Mochizuki ,  Tokumitsu Arai

IPC分类号： F04B37/08 ,  B01D8/00 ,  F28F27/00 ,  F04B37/14

CPC分类号： F04B37/08

摘要： A cryotrap which is set in a vacuum vessel, and has an exhaust panel which condenses and exhausts a gas by cooling, and a cooling stage which is connected to a refrigerator and thereby cooled, includes a cooling storage body fixed on a cooling stage while maintaining thermal contact with it, and a mechanism which thermally connects/disconnects the cooling storage body 6 and the exhaust panel. The mechanism which performs thermal connection/disconnection has a movable unit which has a good heat conductivity and can come into contact with and separate from the exhaust panel and the cooling storage body.

摘要翻译： 设置在真空容器中的冷冻机，具有通过冷却而冷凝和排出气体的排气板，与冷藏库连接并冷却的冷却段，包括固定在冷却台上的冷却库，同时保持 与其热接触，以及将冷却储存体6和排气板热连接/断开的机构。 进行热连接/断开的机构具有导热性良好并且可以与排气板和冷却储存体接触并分离的可动单元。

公开(公告)号：US20110162959A1

公开(公告)日：2011-07-07

申请号：US13048385

申请日：2011-03-15

申请人： Takahiro Okada ,  Kazutoshi Aoki ,  Hisayoshi Komai

发明人： Takahiro Okada ,  Kazutoshi Aoki ,  Hisayoshi Komai

IPC分类号： B01D8/00 ,  C23C14/34

CPC分类号： F04B37/08 ,  F25B9/14 ,  F25B2400/06

摘要： A plurality of vacuum pumps each having a refrigerator are connected to a common compressor. At least one of the plurality of vacuum pumps performs repeating an operation including a process in which a gas in a low-pressure state is adiabatically compressed when the interior of a cylinder shifts from the low-pressure state to a high-pressure state as a result of a valve operation of the refrigerator, and a process in which a displacer passes through the adiabatically compressed gas. At least another one of the plurality of vacuum pumps performs repeating an operation including a process in which a gas in the high-pressure state is adiabatically expanded when the interior of the cylinder shifts from the high-pressure state to the low-pressure state as a result of the valve operation of the refrigerator, and a process in which the displacer passes through the adiabatically expanded gas.

摘要翻译： 每个具有冰箱的多个真空泵连接到公共压缩机。 多个真空泵中的至少一个执行重复操作，包括当气缸的内部从低压状态转变为高压状态时将低压状态的气体绝热压缩的过程，作为 冰箱的阀门操作的结果，以及置换器通过绝热压缩气体的过程。 多个真空泵中的至少另一个执行重复操作，包括当气缸内部从高压状态转变为低压状态时将高压状态的气体绝热膨胀的过程，作为 冰箱的阀操作的结果，以及置换器通过绝热膨胀气体的过程。

公开(公告)号：US20110147198A1

公开(公告)日：2011-06-23

申请号：US13037819

申请日：2011-03-01

申请人： Takahiro Okada ,  Kazutoshi Aoki ,  Hisayoshi Komai

发明人： Takahiro Okada ,  Kazutoshi Aoki ,  Hisayoshi Komai

IPC分类号： B01D8/00 ,  C23C14/34

CPC分类号： F04B37/08 ,  F25B9/14 ,  F25B2400/06 ,  F25B2600/0253 ,  Y02B30/741

摘要： A plurality of vacuum pumps each having a refrigerator are connected to a common compressor. At least one of the plurality of vacuum pumps performs an operation for repeating an operation including a process in which a gas in a low-pressure state is adiabatically compressed when the interior of a cylinder shifts from the low-pressure state to a high-pressure state as a result of a valve operation of the refrigerator, and a process in which a displacer passes through the adiabatically compressed gas. At least another one of the plurality of vacuum pumps performs an operation for repeating an operation including a process in which a gas in the high-pressure state is adiabatically expanded when the interior of the cylinder shifts from the high-pressure state to the low-pressure state as a result of the valve operation of the refrigerator, and a process in which the displacer passes through the adiabatically expanded gas.

摘要翻译： 每个具有冰箱的多个真空泵连接到公共压缩机。 多个真空泵中的至少一个执行重复操作的操作，该操作包括当气缸内部从低压状态转变为高压时低压状态的气体被绝热压缩的过程 作为冰箱的阀操作的结果，以及置换器通过绝热压缩气体的过程。 多个真空泵中的至少另一个执行重复操作的操作，包括当气缸的内部从高压状态转换到低压状态时高压状态的气体被绝热膨胀的过程， 作为冰箱的阀操作的结果的压力状态，以及置换器通过绝热膨胀气体的过程。

公开(公告)号：US20100186427A1

公开(公告)日：2010-07-29

申请号：US12709813

申请日：2010-02-22

申请人： Takahiro Okada ,  Tokumitsu Arai ,  Kazutoshi Aoki

发明人： Takahiro Okada ,  Tokumitsu Arai ,  Kazutoshi Aoki

IPC分类号： B01D8/00 ,  F25B49/02

CPC分类号： F04B49/065 ,  F04B37/08 ,  F04D19/046 ,  F04D27/0261 ,  F25B9/14 ,  F25B2400/075

摘要： An exhaust system includes an entrapment vacuum pump equipped with a refrigerator, a master compressor which is driven in a driving frequency band to make constant a pressure difference between gas recovered from the refrigerator via a low-pressure gas recovery pipe and compressed gas supplied to the refrigerator via a high-pressure gas supply pipe, and a first sub-compressor which is driven at a predetermined driving frequency to supply compressed gas at a first gas volume to the refrigerator via a high-pressure gas supply pipe from gas recovered from the refrigerator via a low-pressure gas recovery pipe. In addition, a second sub-compressor is driven at a predetermined driving frequency to supply compressed gas at a second gas volume larger than the first gas volume to the refrigerator via a high-pressure gas supply pipe from gas recovered from the refrigerator via a low-pressure gas recovery pipe, and a controller monitors a driving frequency of the master compressor and controls driving or a stop of the first sub-compressor and driving or a stop of the second sub-compressor, based on the driving frequency.

摘要翻译： 排气系统包括具有冰箱的收纳真空泵，主动压缩机，该主压缩机在驱动频带中被驱动，以使经由低压气体回收管从冰箱回收的气体和供给到 冰箱经由高压气体供给管和第一副压缩机，该第一副压缩机以预定的驱动频率被驱动，以通过高压气体供给管从冰箱回收的气体向第一气体容积供给压缩气体 通过低压气体回收管。 此外，以预定的驱动频率驱动第二副压缩机，以通过高压气体供给管从第二气体容量向第一气体容积供给压缩气体，该高压气体供给管是从冰箱从低温回收的气体 压力气体回收管，控制器监视主压缩机的驱动频率，并基于驱动频率控制第一副压缩机的驱动或停止，以及驱动或停止第二副压缩机。

公开(公告)号：US08384086B2

公开(公告)日：2013-02-26

申请号：US12888779

申请日：2010-09-23

申请人： Kazushi Yamayoshi ,  Toru Takeguchi ,  Kazutoshi Aoki

发明人： Kazushi Yamayoshi ,  Toru Takeguchi ,  Kazutoshi Aoki

IPC分类号： H01L27/108

CPC分类号： H01L21/02675 ,  H01L21/02532 ,  H01L29/04 ,  H01L29/66765

摘要： A method of crystallizing an amorphous semiconductor film, the method comprising the steps of: forming a gate electrode on a transparent insulating substrate; forming a gate insulating film on the transparent insulating substrate and on an upper part of the gate electrode; forming an amorphous semiconductor film on the gate insulating film; forming a light-transmissive insulating film on the amorphous semiconductor film; forming a metal film having an opening on the light-transmissive insulating film; irradiating laser light onto both a region of the light-transmissive insulating film exposed by the opening and the metal film, which is used as a mask for shielding the laser light; and performing laser annealing to make the laser light to be absorbed through the light-transmissive insulating film into a region of the amorphous semiconductor film exposed by the opening, so that the amorphous semiconductor film is heated and converted to a crystalline semiconductor film.

摘要翻译： 一种使非晶半导体膜结晶的方法，所述方法包括以下步骤：在透明绝缘基板上形成栅电极; 在透明绝缘基板上和栅电极的上部形成栅极绝缘膜; 在栅极绝缘膜上形成非晶半导体膜; 在所述非晶半导体膜上形成透光绝缘膜; 在所述透光绝缘膜上形成具有开口的金属膜; 将激光照射到由开口曝光的透光绝缘膜的区域和用作屏蔽激光的掩模的金属膜; 并且进行激光退火以使激光通过透光绝缘膜吸收到由开口暴露的非晶半导体膜的区域中，使得非晶半导体膜被加热并转换成结晶半导体膜。

公开(公告)号：US06655154B2

公开(公告)日：2003-12-02

申请号：US10210176

申请日：2002-08-02

申请人： Shin Funayama ,  Hidekazu Tanaka ,  Hisashi Yamamoto ,  Kazutoshi Aoki

发明人： Shin Funayama ,  Hidekazu Tanaka ,  Hisashi Yamamoto ,  Kazutoshi Aoki

IPC分类号： F25B900

CPC分类号： F25B9/14 ,  B01D8/00 ,  F25B2309/002 ,  F25B2309/006 ,  F25B2400/06 ,  F25B2600/2515

摘要： An operation method and an operation apparatus for multi-system refrigerators, and a refrigerating apparatus. When gas compressed by a single compressor is supplied to a plurality of refrigerators through valves provided for the individual refrigerators, the opening/closing frequencies of the individual valves are slightly shifted to one another. As a result, with a simple constitution, the performances of the individual refrigerators are balanced without observing valve timings.

公开(公告)号：US20110079780A1

公开(公告)日：2011-04-07

申请号：US12888779

申请日：2010-09-23

申请人： Kazushi YAMAYOSHI ,  Toru Takeguchi ,  Kazutoshi Aoki

发明人： Kazushi YAMAYOSHI ,  Toru Takeguchi ,  Kazutoshi Aoki

IPC分类号： H01L21/268 ,  H01L21/20 ,  H01L29/04

CPC分类号： H01L21/02675 ,  H01L21/02532 ,  H01L29/04 ,  H01L29/66765

摘要： A method of crystallizing an amorphous semiconductor film, the method comprising the steps of: forming a gate electrode on a transparent insulating substrate; forming a gate insulating film on the transparent insulating substrate and on an upper part of the gate electrode; forming an amorphous semiconductor film on the gate insulating film; forming a light-transmissive insulating film on the amorphous semiconductor film; forming a metal film having an opening on the light-transmissive insulating film; irradiating laser light onto both a region of the light-transmissive insulating film exposed by the opening and the metal film, which is used as a mask for shielding the laser light; and performing laser annealing to make the laser light to be absorbed through the light-transmissive insulating film into a region of the amorphous semiconductor film exposed by the opening, so that the amorphous semiconductor film is heated and converted to a crystalline semiconductor film.

摘要翻译： 一种使非晶半导体膜结晶的方法，所述方法包括以下步骤：在透明绝缘基板上形成栅电极; 在透明绝缘基板上和栅电极的上部形成栅极绝缘膜; 在栅极绝缘膜上形成非晶半导体膜; 在所述非晶半导体膜上形成透光绝缘膜; 在所述透光绝缘膜上形成具有开口的金属膜; 将激光照射到由开口曝光的透光绝缘膜的区域和用作屏蔽激光的掩模的金属膜; 并且进行激光退火以使激光通过透光绝缘膜吸收到由开口暴露的非晶半导体膜的区域中，使得非晶半导体膜被加热并转换成结晶半导体膜。

公开(公告)号：US20090126374A1

公开(公告)日：2009-05-21

申请号：US12260439

申请日：2008-10-29

申请人： Tokumitsu Arai ,  Kazutoshi Aoki ,  Isao Mochizuki

发明人： Tokumitsu Arai ,  Kazutoshi Aoki ,  Isao Mochizuki

IPC分类号： F04B37/08 ,  F25B49/04

CPC分类号： F04B37/08 ,  F04B37/14

摘要： A cryopump apparatus includes a sensor which detects at least one of the temperature and pressure in a cryopump, a controller which detects a change in at least one of the temperature and pressure in the cryopump on the basis of the detection result obtained by the sensor, thereby determining the connection state between the controller and the cryopump, and a display device which displays an abnormal point for the cryopump estimated from the determination result obtained by the controller.

摘要翻译： 低温泵装置包括检测低温泵中的温度和压力中的至少一个的传感器，控制器，其基于由传感器获得的检测结果来检测低温泵中的至少一个温度和压力的变化， 从而确定控制器和低温泵之间的连接状态，以及根据由控制器获得的确定结果估计出的针对低温泵的异常点的显示装置。

公开(公告)号：US20110186845A1

公开(公告)日：2011-08-04

申请号：US12967683

申请日：2010-12-14

申请人： Kazushi YAMAYOSHI ,  Kazutoshi Aoki

发明人： Kazushi YAMAYOSHI ,  Kazutoshi Aoki

IPC分类号： H01L29/24 ,  H01L21/84 ,  H01L21/20

CPC分类号： H01L21/20 ,  H01L21/84 ,  H01L29/24

摘要： Provided is a thin film transistor that includes a gate electrode formed in one major plane of a substrate, a gate insulating film covering the gate electrode, a semiconductor film formed opposite to the gate electrode with the gate insulating film interposed and including a first amorphous region to serve as a source region, a second amorphous region to serve as a drain region, and a crystalline region to serve as a channel region disposed between the first amorphous region and the second amorphous region, and a source electrode and a drain electrode formed above the semiconductor film without direct contact with the crystalline region and electrically connected to the source region and the drain region, respectively.

摘要翻译： 提供了一种薄膜晶体管，其包括形成在基板的一个主平面中的栅极电极，覆盖栅电极的栅极绝缘膜，与栅电极相对形成的半导体膜，栅极绝缘膜插入并且包括第一非晶区域 用作源极区域，用作漏极区域的第二非晶区域和用作设置在第一非晶区域和第二非晶区域之间的沟道区域的晶体区域，以及形成在上部的源极电极和漏极电极 所述半导体膜分别与所述晶体区域直接接触并且电连接到所述源极区域和所述漏极区域。