公开(公告)号：US07084084B2

公开(公告)日：2006-08-01

申请号：US10383682

申请日：2003-03-10

申请人： Kazuyoshi Arai ,  Tsutomu Takahata ,  Shinkichi Hashimoto ,  Hideaki Kiriya ,  Yoshinori Harada

发明人： Kazuyoshi Arai ,  Tsutomu Takahata ,  Shinkichi Hashimoto ,  Hideaki Kiriya ,  Yoshinori Harada

IPC分类号： B01J19/02 ,  C03C3/95

CPC分类号： C03C3/085 ,  C03C3/095

摘要： Highly durable silica glass comprising silica having incorporated therein aluminum and at least one element (M) selected from group 2A elements, group 3A elements and group 4A elements of the periodic table. Preferably, the sum of aluminum and element (M) is at least 30 atomic % based on the amount of total metal elements in the silica glass, and the atomic ratio of aluminum to element (M) is in the range of 0.05 to 20.The silica glass has a high purity and exhibits enhanced durability while good processability and machinability, and reduced dusting property are kept, and the glass is suitable for members of a semiconductor production apparatus or liquid crystal display production apparatus using a halogenated gas and/or its plasma.

公开(公告)号：US20060019103A1

公开(公告)日：2006-01-26

申请号：US10540839

申请日：2004-01-26

申请人： Masanori Abe ,  Koyata Takahashi ,  Kazuyoshi Arai ,  Tsutomu Takahata ,  Shinkichi Hashimoto ,  Masanori Kohgo

发明人： Masanori Abe ,  Koyata Takahashi ,  Kazuyoshi Arai ,  Tsutomu Takahata ,  Shinkichi Hashimoto ,  Masanori Kohgo

IPC分类号： B32B17/06 ,  B32B15/00 ,  B32B19/00

CPC分类号： C03C17/04 ,  C03C3/062 ,  C03C3/083 ,  C03C3/085 ,  C03C3/095 ,  C03C8/02 ,  C03C15/00 ,  C03C17/002 ,  C03C17/007 ,  C03C17/3417 ,  C03C19/00 ,  C03C2217/78 ,  C23C4/10 ,  C23C4/11 ,  C23D5/04 ,  Y02T50/67 ,  Y02T50/6765

摘要： Members to be used in CVD devices, plasma treatment devices, etc. are exhausted by reaction with a corrosive gas or etching with plasma, and therefore, there were encountered problems such as staining of products due to the generation of particles and a reduction of the yield productivity. Also, glasses resistant to corrosive gases or plasma are weak in the heat resistance, and therefore, applications to be employed were limited. Members containing a heat-resisting base material having coated thereon a corrosion resistant glass containing at least one element selected from the group consisting of elements of the group 2a, group 3a and group 4a, especially an aluminosilicate or zirconia silicate based glass sprayed coating have high corrosion resistance to corrosive gases and plasma and high heat resistance and are less in the generation of particles.

摘要翻译： 用于CVD装置，等离子体处理装置等的部件通过与腐蚀性气体的反应或用等离子体蚀刻而耗尽，因此存在由于产生颗粒而导致的产品染色和减少的问题 产量生产力。 此外，耐腐蚀性气体或等离子体的玻璃的耐热性差，因此，使用的应用受到限制。 含有耐热基材的构件包含至少一种选自组2a，组3a和组4a的元素，特别是铝硅酸盐或氧化锆硅酸盐基玻璃喷涂的元素的耐蚀玻璃的耐腐蚀玻璃具有高的 对腐蚀性气体和等离子体的耐腐蚀性和高耐热性，并且在产生颗粒时较少。

公开(公告)号：US07064094B2

公开(公告)日：2006-06-20

申请号：US10718575

申请日：2003-11-24

申请人： Yoshinori Harada ,  Shuzo Mizutani ,  Shinkichi Hashimoto ,  Masakazu Kudoh ,  Naoki Miura ,  Katsufumi Takahashi ,  Hideki Kiyohara

发明人： Yoshinori Harada ,  Shuzo Mizutani ,  Shinkichi Hashimoto ,  Masakazu Kudoh ,  Naoki Miura ,  Katsufumi Takahashi ,  Hideki Kiyohara

IPC分类号： C03C3/06

CPC分类号： C03B19/01 ,  C03B19/095 ,  C03B19/1423 ,  C03B19/1453 ,  C03B2201/07 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/40 ,  C03B2201/54 ,  C03C3/06 ,  C03C2201/34 ,  C03C2201/3411 ,  C03C2201/40 ,  C03C2201/54 ,  Y02P40/57

摘要： Highly durable silica glass containing 0.01% to 2% by weight of at least one element selected from magnesium, calcium, strontium, barium, yttrium, hafnium and zirconium. The silica glass is produced by melting a powdery material comprising a finely divided silica powder and a finely divided zirconium-containing substance by oxyhydrogen flame or plasma are to form an accumulated molten material layer, and extending the molten material layer outwardly in radial directions.

摘要翻译： 含有0.01重量％至2重量％的选自镁，钙，锶，钡，钇，铪和锆中的至少一种元素的高耐用二氧化硅玻璃。 二氧化硅玻璃是通过熔化包含细碎的二氧化硅粉末和细分的含锆物质的粉末状材料通过氢氧焰或等离子体而形成的，以形成聚集的熔融材料层，并使熔融材料层沿径向向外延伸。

公开(公告)号：US6133178A

公开(公告)日：2000-10-17

申请号：US204160

申请日：1998-12-03

申请人： Nobusuke Yamada ,  Shinkichi Hashimoto ,  Koji Tsukuma ,  Tomoyuki Akiyama ,  Yoshikazu Kikuchi ,  Hideaki Segawa

发明人： Nobusuke Yamada ,  Shinkichi Hashimoto ,  Koji Tsukuma ,  Tomoyuki Akiyama ,  Yoshikazu Kikuchi ,  Hideaki Segawa

IPC分类号： C03B19/06 ,  C03C3/06

CPC分类号： C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B20/00 ,  C03C2201/23 ,  C03C2201/30 ,  C03C2201/50 ,  C03C2203/10

摘要： A high-purity transparent silica glass containing Fe, Na and K impurities each in an amount of 0.01-0.3 ppm, and an OH group in an amount of 0-3 ppm; among the Fe impurities, the content of metallic Fe having a valency of +0 being not larger than 0.1 ppm. This transparent silica glass exhibits, even when it is maintained at 900-1,400.degree. C. for at least 20 hours, an extinction coefficient of not larger than 0.009 at a wavelength of 400 nm, and does not become colored as visually examined. The silica glass is made by a process wherein powdery silica filled in a mold cavity is melted at 1,700.degree. C. or higher, characterized in that the melting is conducted in a graphite mold having a porous high-purity graphite layer provided on the mold inner surface so that the filled silica is not contacted with the mold; said porous layer having a bulk density of 0.1-1.5 g/cm.sup.3, and the content of each of Fe, Na and K impurities in the porous layer being not larger than 1 ppm.

摘要翻译： 含有0.01-0.3ppm的Fe，Na和K杂质的高纯度透明石英玻璃，0-3ppm的OH基; 在Fe杂质中，化合价为+0的金属Fe的含量不大于0.1ppm。 该透明石英玻璃即使在900-1400℃保持至少20小时，在波长400nm下的消光系数不大于0.009，并且在目视检查中不会着色。 二氧化硅玻璃是通过将填充在模腔中的粉状二氧化硅在1700℃以上熔融的方法制造的，其特征在于，熔融在具有设置在模具内部的多孔高纯度石墨层的石墨模具中进行 使填充的二氧化硅不与模具接触; 所述多孔层的堆积密度为0.1〜1.5g / cm 3，多孔层中的Fe，Na，K杂质的含量不大于1ppm。

公开(公告)号：US20060168005A1

公开(公告)日：2006-07-27

申请号：US10559665

申请日：2004-06-03

申请人： Kohji Kanbara ,  Shinkichi Hashimoto ,  Toshiyasu Takahashi ,  Tetsufumi Haraguchi ,  Yoshio Tominaga ,  Naoki Sasahara

发明人： Kohji Kanbara ,  Shinkichi Hashimoto ,  Toshiyasu Takahashi ,  Tetsufumi Haraguchi ,  Yoshio Tominaga ,  Naoki Sasahara

IPC分类号： G06F15/16

CPC分类号： G06Q30/06 ,  G06Q10/087

摘要： An image forming apparatus using system including at least one image forming apparatus having a touch panel and an office supply information server that is connected to the image forming apparatuses via a network is provided. The image forming apparatus includes: a part for sending order information to the office supply information server; and a part for receiving information from the office supply information server, the office supply information server includes: a server information sending part for sending information to the image forming apparatus; and a client information receiving part for receiving information input from the touch panel of the image forming apparatus, and the image forming apparatus orders an office supply from the office supply information server.

摘要翻译： 提供一种使用系统的图像形成装置，其包括具有触摸面板的至少一个图像形成装置和经由网络连接到图像形成装置的办公室供应信息服务器。 图像形成装置包括：向办公室供应信息服务器发送订单信息的部分; 以及用于从办公室供应信息服务器接收信息的部分，办公室供应信息服务器包括：服务器信息发送部分，用于向图像形成装置发送信息; 以及客户信息接收部分，用于接收从图像形成装置的触摸面板输入的信息，并且图像形成装置从办公室供应信息服务器订购办公室供应。