摘要:
Members to be used in CVD devices, plasma treatment devices, etc. are exhausted by reaction with a corrosive gas or etching with plasma, and therefore, there were encountered problems such as staining of products due to the generation of particles and a reduction of the yield productivity. Also, glasses resistant to corrosive gases or plasma are weak in the heat resistance, and therefore, applications to be employed were limited. Members containing a heat-resisting base material having coated thereon a corrosion resistant glass containing at least one element selected from the group consisting of elements of the group 2a, group 3a and group 4a, especially an aluminosilicate or zirconia silicate based glass sprayed coating have high corrosion resistance to corrosive gases and plasma and high heat resistance and are less in the generation of particles.
摘要:
A corrosion-resistant member comprising a base material having formed thereon a spayed coating having high corrosion resistance to corrosive gases or plasma, and a process of producing the same are disclosed. The corrosion-resistant member comprises a base material having formed thereon a sprayed coating, the sprayed coating being formed on the site of the base material to be exposed to corrosive gases or plasma and comprising Si, O, N, Group 2a element, and at least one element selected from the group consisting of Al, B, Zr and Ti, or comprises a base material having formed thereon a sprayed coating, the sprayed coating being formed on the site of the base material to be exposed to corrosive gases or plasma and comprising Si, O, N, Group 3a element, and at least one element selected from the group consisting of B, Zr and Ti.
摘要:
In quartz glass parts and ceramic parts that are used in film-deposition devices and pre-cleaning devices in the production of semiconductors, etc., there are problems such as peeling off of the parts themselves during the use, peeling off of film-like substances adhered to the part surfaces, contamination of the products and short life time of the parts caused by corrosion of the part surfaces by plasma, and reduction in the productivity by frequent exchange of the parts. In quartz glass parts and ceramic parts that are used in film-deposition devices and pre-cleaning devices in the production of semiconductors, etc., with respect to parts, the surface of which is constituted of a ceramic thermal sprayed coating, ones having the ceramic thermal sprayed coating having a surface roughness Ra of from 5 to 20 μm are high in adherence of a film-like adherence, ones having the ceramic thermal sprayed coating having a surface roughness Ra of from 1 to 5 μm are high in plasma resistance, and ones in which grooves having a large anchor effect to the thermal sprayed coating is formed on a substrate on which the ceramic thermal sprayed coating is formed are free from peeling off of the ceramic thermal sprayed coating from the substrate and are high in durability.
摘要:
A corrosion-resistant member comprising a base material having formed thereon a spayed coating having high corrosion resistance to corrosive gases or plasma, and a process of producing the same are disclosed. The corrosion-resistant member comprises a base material having formed thereon a sprayed coating, the sprayed coating being formed on the site of the base material to be exposed to corrosive gases or plasma and comprising Si, O, N, Group 2a element, and at least one element selected from the group consisting of Al, B, Zr and Ti, or comprises a base material having formed thereon a sprayed coating, the sprayed coating being formed on the site of the base material to be exposed to corrosive gases or plasma and comprising Si, O, N, Group 3a element, and at least one element selected from the group consisting of B, Zr and Ti.
摘要:
A corrosion-resistant member comprising a base material having formed thereon a spayed coating having high corrosion resistance to corrosive gases or plasma, and a process of producing the same are disclosed. The corrosion-resistant member comprises a base material having formed thereon a sprayed coating, the sprayed coating being formed on the site of the base material to be exposed to corrosive gases or plasma and comprising Si, O, N, Group 2a element, and at least one element selected from the group consisting of Al, B, Zr and Ti, or comprises a base material having formed thereon a sprayed coating, the sprayed coating being formed on the site of the base material to be exposed to corrosive gases or plasma and comprising Si, O, N, Group 3a element, and at least one element selected from the group consisting of B, Zr and Ti.
摘要:
There is provided an image processing apparatus including: a plurality of signal processing circuits that compose video signals; and a communication path that connects the plurality of signal processing circuits, wherein any one of the plurality of signal processing circuits composes a video signal obtained by composition by the signal processing circuit, and a video signal obtained by composition by another signal processing circuit supplied from the another signal processing circuit via the communication path.
摘要:
The present invention provides a magnetic composite capable of enhancing the effect of shielding against electromagnetic noise and the like (magnetic shielding effect) while inhibiting a possible eddy current, and a method for producing the magnetic composite, and a shielding structure comprising the magnetic composite. A shielding member 10 as a magnetic composite contains a resin 12 which is an insulator and serves as a matrix material and into which fine powders of an amorphous metal magnetic substance 10a containing Fe, Si, and B are mixed. In the shielding member 10, a plurality of the amorphous metal magnetic substances 10a are contained in the resin 12 at a volume fraction less than a percolation threshold. The type of the amorphous metal magnetic substance 10a is not particularly limited provided that the amorphous metal contains Fe, Si, and B.
摘要:
There is provided a novel polyamide particles having an approximately spherical outer shape, which are spongy particles having through holes in an outer surface part and closed voids in an inside part. The polyamide particles can be produced by dissolving a polyamide in a cyclic amide with heating to obtain a homogeneous solution and then cooling the solution.
摘要:
An object of the present invention is to provide a novel biosensing method as the novel application development of the magnetic particles in the biosensing. In an affinity reaction of biosensing, ligands are immobilized to magnetic fine particles and the magnetic fine particles are forced to reaction fields of the affinity reaction by magnetic guiding so as to bring the affinity reaction, which is the velocity controlling factor in the sensing, to high rates. According to the present invention, coated magnetic fine particles with having both of the high dispersion performance and high magnetic responsibility as the above described magnetic fine particles and the affinity reaction occurs quickly and in high density such that the present invention makes it possible to obtain relatively large signals within significantly short time duration when compared to the conventional art.
摘要:
An inexpensive, safe method for sterilizing an apparatus for the preparation of a recording material, which obviates troubles affecting a coated surface of the recording material caused by bacteria and fungi, does not cause changes in photographic performance (sensitivity, fog, graininess and sharpness), can prevent the appearance of "resistant cells", and can comply with environmental problems, said method comprising sterilizing a surface of the apparatus being in contact with a coating composition for the recording material by use of a strongly acidic solution having a redox potential of 1,000 mV or more which is obtained by electrolysis of water.