公开(公告)号：US09200896B2

公开(公告)日：2015-12-01

申请号：US13504129

申请日：2010-09-30

申请人： Keiichiro Hitomi ,  Yoshinori Nakayama ,  Junichi Tanaka

发明人： Keiichiro Hitomi ,  Yoshinori Nakayama ,  Junichi Tanaka

IPC分类号： H04N9/47 ,  H04N7/18 ,  G01B15/00 ,  H01J37/28

CPC分类号： G01B15/00 ,  H01J37/28 ,  H01J2237/2814 ,  H01J2237/2817

摘要： In order to provide a pattern dimension measurement method with a small measured error and excellent reproducibility even though defocus occurs and a charged particle beam microscope used in the same, in a method for applying a charged particle beam to a specimen formed with a pattern to measure a pattern dimension from a signal intensity distribution of signal charged particles from the specimen, edge index positions (X1) and (X2) on the right and left of the maximum point of signal intensity corresponding to a pattern edge are calculated by a threshold method, and a pattern edge position (Xe) is found from a mean value between the positions. Thus, it is possible to reduce the influence of defocus on the pattern edge position (Xe).

摘要翻译： 为了提供即使发生散焦而具有小的测量误差和优异的再现性的图案尺寸测量方法，并且在其中使用带电粒子束显微镜，在将带电粒子束施加到形成有待测量图案的样本的方法中 通过阈值法计算来自样本的信号带电粒子的信号强度分布的图案尺寸，对应于图案边缘的最大信号强度点右侧和左侧的边缘索引位置（X1）和（X2） 并且从位置之间的平均值找到图案边缘位置（Xe）。 因此，可以减小散焦对图案边缘位置（Xe）的影响。

公开(公告)号：US09110384B2

公开(公告)日：2015-08-18

申请号：US13522984

申请日：2011-01-21

申请人： Seiko Omori ,  Junichi Tanaka ,  Yoshinori Nakayama ,  Keiichiro Hitomi

发明人： Seiko Omori ,  Junichi Tanaka ,  Yoshinori Nakayama ,  Keiichiro Hitomi

IPC分类号： H01J37/28 ,  G03F7/26 ,  G03F7/20 ,  H01J37/22

CPC分类号： G03F7/70625 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/1536 ,  H01J2237/226 ,  H01J2237/24571 ,  H01J2237/2809 ,  H01J2237/2817

摘要： Disclosed is a scanning electron microscope provided with a calculation device (403) for measuring the dimension of a pattern on a sample (413), characterized in that the amount of change of a pattern shape, caused by electron beam irradiation, is calculated and stored, and a pattern shape contour (614; 815; 1512) before the sample is irradiated with an electron beam is restored from a pattern shape contour (613; 814; 1511) in a scanning electron microscope image (612; 813; 1510) after the sample is irradiated with an electron beam using the calculated amount and, then, the pattern shape contour (614; 815; 1512) is displayed. Thus, the shrinking of a resist and/or the effect of electrostatic charge caused when a sample is irradiated with an electron beam are eliminated, so that the shape contour of a two-dimensional pattern before irradiating an electron beam can be restored with a high degree of accuracy, and the dimension of a pattern can be measured with a high degree of accuracy, using the restored image.

摘要翻译： 公开了一种具有用于测量样品（413）上的图案的尺寸的计算装置（403）的扫描电子显微镜，其特征在于，计算并存储由电子束照射引起的图案形状的变化量 在扫描电子显微镜图像（612; 813; 1510）中从扫描电子显微镜图像（612; 813; 1510）中的图案形状轮廓（613; 814; 1511）恢复在用电子束照射样品之前的图案形状轮廓（614; 815; 1512） 使用计算量用电子束照射样品，然后显示图案形状轮廓（614; 815; 1512）。 因此，消除了当用电子束照射样品时引起的抗蚀剂收缩和/或静电电荷的影响，从而能够以高的电压恢复照射电子束之前的二维图案的形状轮廓 使用恢复的图像，可以高精度地测量图案的精度和尺寸。

公开(公告)号：US20120298865A1

公开(公告)日：2012-11-29

申请号：US13522984

申请日：2011-01-21

申请人： Seiko Omori ,  Junichi Tanaka ,  Yoshinori Nakayama ,  Keiichiro Hitomi

发明人： Seiko Omori ,  Junichi Tanaka ,  Yoshinori Nakayama ,  Keiichiro Hitomi

IPC分类号： H01J37/26

CPC分类号： G03F7/70625 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/1536 ,  H01J2237/226 ,  H01J2237/24571 ,  H01J2237/2809 ,  H01J2237/2817

摘要： Disclosed is a scanning electron microscope provided with a calculation device (403) for measuring the dimension of a pattern on a sample (413), characterized in that the amount of change of a pattern shape, caused by electron beam irradiation, is calculated and stored, and a pattern shape contour (614; 815; 1512) before the sample is irradiated with an electron beam is restored from a pattern shape contour (613; 814; 1511) in a scanning electron microscope image (612; 813; 1510) after the sample is irradiated with an electron beam using the calculated amount and, then, the pattern shape contour (614; 815; 1512) is displayed. Thus, the shrinking of a resist and/or the effect of electrostatic charge caused when a sample is irradiated with an electron beam are eliminated, so that the shape contour of a two-dimensional pattern before irradiating an electron beam can be restored with a high degree of accuracy, and the dimension of a pattern can be measured with a high degree of accuracy, using the restored image.

摘要翻译： 公开了一种具有用于测量样品（413）上的图案的尺寸的计算装置（403）的扫描电子显微镜，其特征在于，计算并存储由电子束照射引起的图案形状的变化量 在扫描电子显微镜图像（612; 813; 1510）中从扫描电子显微镜图像（612; 813; 1510）中的图案形状轮廓（613; 814; 1511）恢复在用电子束照射样品之前的图案形状轮廓（614; 815; 1512） 使用计算量用电子束照射样品，然后显示图案形状轮廓（614; 815; 1512）。 因此，消除了当用电子束照射样品时引起的抗蚀剂收缩和/或静电电荷的影响，从而能够以高的电压恢复照射电子束之前的二维图案的形状轮廓 使用恢复的图像，可以高精度地测量图案的精度和尺寸。

公开(公告)号：US20120212602A1

公开(公告)日：2012-08-23

申请号：US13504129

申请日：2010-09-30

申请人： Keiichiro Hitomi ,  Yoshinori Nakayama ,  Junichi Tanaka

发明人： Keiichiro Hitomi ,  Yoshinori Nakayama ,  Junichi Tanaka

IPC分类号： G06K9/48 ,  H04N7/18

CPC分类号： G01B15/00 ,  H01J37/28 ,  H01J2237/2814 ,  H01J2237/2817

摘要： In order to provide a pattern dimension measurement method with a small measured error and excellent reproducibility even though defocus occurs and a charged particle beam microscope used in the same, in a method for applying a charged particle beam to a specimen formed with a pattern to measure a pattern dimension from a signal intensity distribution of signal charged particles from the specimen, edge index positions (X1) and (X2) on the right and left of the maximum point of signal intensity corresponding to a pattern edge are calculated by a threshold method, and a pattern edge position (Xe) is found from a mean value between the positions. Thus, it is possible to reduce the influence of defocus on the pattern edge position (Xe).

摘要翻译： 为了提供即使发生散焦而具有小的测量误差和优异的再现性的图案尺寸测量方法，并且在其中使用带电粒子束显微镜，在将带电粒子束施加到形成有待测量图案的样本的方法中 通过阈值法计算来自样本的信号带电粒子的信号强度分布的图案尺寸，对应于图案边缘的最大信号强度点右侧和左侧的边缘索引位置（X1）和（X2） 并且从位置之间的平均值找到图案边缘位置（Xe）。 因此，可以减小散焦对图案边缘位置（Xe）的影响。

公开(公告)号：US09973763B2

公开(公告)日：2018-05-15

申请号：US13990893

申请日：2011-12-02

申请人： Masaru Ikeda ,  Junichi Tanaka ,  Yoshitaka Morigami

发明人： Masaru Ikeda ,  Junichi Tanaka ,  Yoshitaka Morigami

IPC分类号： H04N7/18 ,  H04N19/176 ,  H04N19/117 ,  H04N19/182 ,  H04N19/80 ,  H04N19/436 ,  H04N19/86 ,  H04N19/597 ,  H04N19/36

CPC分类号： H04N19/176 ,  H04N19/117 ,  H04N19/182 ,  H04N19/36 ,  H04N19/436 ,  H04N19/597 ,  H04N19/80 ,  H04N19/86

摘要： An image processing device including a decoding section configured to decode an image from an encoded stream, a determination section configured to perform determination processes of determining whether to apply a deblocking filter to neighboring blocks neighboring across a block boundary within an image to be decoded by the decoding section, a filtering section configured to apply a deblocking filter to neighboring blocks to which the determination section has determined to apply a deblocking filter, and a control section configured to allow the determination section to perform the determination processes for a vertical block boundary and a horizontal block boundary using pixels of the neighboring blocks of a reconstruct image as reference pixels.

公开(公告)号：US09723304B2

公开(公告)日：2017-08-01

申请号：US14005980

申请日：2012-03-29

申请人： Junichi Tanaka ,  Yoichi Yagasaki

发明人： Junichi Tanaka ,  Yoichi Yagasaki

IPC分类号： H04N7/12 ,  H04N19/152 ,  H04N19/172 ,  H04N19/15 ,  H04N19/115 ,  H04N19/61

CPC分类号： H04N19/172 ,  H04N19/115 ,  H04N19/15 ,  H04N19/152 ,  H04N19/61

摘要： The present technique relates to an image processing device and a method therefor allowing rate control to be performed more easily. An image encoding device that encodes image data to generate an encoded stream includes: a setting unit configured to set binary parameters used for defining the size, the accumulated data amount, and the like of a hypothetical decoder defined in the encoded stream obtained by encoding the image data in binary data generated by arithmetic coding; an encoding unit configured to encode image data to generate an encoded stream; and a transmitting unit configured to transmit the binary parameter set by the setting unit and the encoded stream generated by the encoding unit to an image decoding device that decodes the encoded stream via a predetermined transmission path such as a recording medium or a network. The present disclosure can be applied to image processing devices, for example.

公开(公告)号：US09706205B2

公开(公告)日：2017-07-11

申请号：US13990489

申请日：2012-01-18

申请人： Junichi Tanaka

发明人： Junichi Tanaka

IPC分类号： H04N19/124 ,  H04N19/463 ,  H04N19/174 ,  H04N19/70 ,  H04N19/103 ,  H04N19/126 ,  H04N19/157 ,  H04N19/31 ,  H04N19/50 ,  H04N19/44

CPC分类号： H04N19/124 ,  H04N19/103 ,  H04N19/126 ,  H04N19/157 ,  H04N19/174 ,  H04N19/31 ,  H04N19/44 ,  H04N19/463 ,  H04N19/50 ,  H04N19/70

摘要： An image processing device including an acquiring section configured to acquire quantization matrix parameters from an encoded stream in which the quantization matrix parameters defining a quantization matrix are set within a parameter set which is different from a sequence parameter set and a picture parameter set, a setting section configured to set, based on the quantization matrix parameters acquired by the acquiring section, a quantization matrix which is used when inversely quantizing data decoded from the encoded stream, and an inverse quantization section configured to inversely quantize the data decoded from the encoded stream using the quantization matrix set by the setting section.

公开(公告)号：US09123504B2

公开(公告)日：2015-09-01

申请号：US13380526

申请日：2010-06-23

申请人： Atsuko Yamaguchi ,  Yoshinori Momonoi ,  Junichi Tanaka ,  Hiroki Kawada

发明人： Atsuko Yamaguchi ,  Yoshinori Momonoi ,  Junichi Tanaka ,  Hiroki Kawada

IPC分类号： H04N9/47 ,  H04N7/18 ,  H01J37/28 ,  H01J37/244 ,  H01L21/66 ,  G06T7/00 ,  G02B21/36 ,  G02B21/00 ,  G06T5/50

CPC分类号： H01J37/28 ,  G01B2210/56 ,  G02B21/002 ,  G02B21/361 ,  G02B21/365 ,  G02B21/367 ,  G06T5/50 ,  G06T7/0004 ,  G06T7/0006 ,  G06T7/0008 ,  G06T7/001 ,  G06T2207/10016 ,  G06T2207/10056 ,  G06T2207/10061 ,  G06T2207/20081 ,  G06T2207/30141 ,  G06T2207/30148 ,  H01J37/244 ,  H01J2237/24578 ,  H01J2237/24592 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： Provided are a semiconductor inspection device and a semiconductor inspection method such that in a specimen image in a single field of view obtained by an electron microscope, it is possible to suppress variations in the edge position measurement error attributable to the materials and structures of the lower layers of measured patterns by a first method, wherein the area in the field of view obtained by electron beam scanning is divided into a plurality of regions on the basis of information regarding the structures and materials of the object to be observed and the electron beam scanning conditions are changed for individual regions (805, 806), a second method, wherein, the image processing conditions are changed for individual regions resulting from division of the obtained images, or a third method, wherein the edge detection conditions are changed for individual regions resulting from the division within the edge inspection regions of the obtained images.

摘要翻译： 提供一种半导体检查装置和半导体检查方法，使得在通过电子显微镜获得的单个视场中的样本图像中，可以抑制归因于下部的材料和结构的边缘位置测量误差的变化 通过第一方法测量图案层，其中通过电子束扫描获得的视野中的区域基于关于待观察物体的结构和材料的信息以及电子束扫描被分成多个区域 对于各个区域（805,806）的条件改变，第二种方法，其中，针对由所获得的图像的划分产生的各个区域改变图像处理条件，或者第三种方法，其中针对各个区域改变边缘检测条件 由获得的图像的边缘检查区域内的划分产生。

公开(公告)号：US08831103B2

公开(公告)日：2014-09-09

申请号：US13120685

申请日：2009-10-02

申请人： Kenji Kondo ,  Junichi Tanaka

发明人： Kenji Kondo ,  Junichi Tanaka

IPC分类号： H04N7/32 ,  H04N19/61 ,  H04N19/82 ,  G06K9/36 ,  G06K9/40

CPC分类号： H04N19/00781 ,  G06K9/36 ,  H04N19/61 ,  H04N19/82

摘要： The present invention relates to an image processing apparatus and method in which a motion vector corresponding to the difference between the coordinates of an encoding target block and the coordinates of a reference block is calculated, a horizontal-direction fine adjustment filter Hh and a vertical-direction fine adjustment filter Hv are generated and applied to the reference block, which is further assigned to the encoding target block in order to generate a motion-compensated prediction image.

摘要翻译： 图像处理装置及方法技术领域本发明涉及一种图像处理装置和方法，其中，计算与编码目标块的坐标之间的差异与基准块的坐标之间的差分相对应的运动矢量，水平方向微调滤波器Hh， 方向微调滤波器Hv被生成并被施加到参考块，该参考块进一步分配给编码目标块，以便生成运动补偿预测图像。

公开(公告)号：US20140050262A1

公开(公告)日：2014-02-20

申请号：US14113469

申请日：2012-04-03

申请人： Hironari Sakurai ,  Junichi Tanaka

发明人： Hironari Sakurai ,  Junichi Tanaka

IPC分类号： H04N7/26

CPC分类号： H04N19/176 ,  H04N19/126 ,  H04N19/134 ,  H04N19/18 ,  H04N19/61 ,  H04N19/70

摘要： There is provided an image processing device including a setting section that sets, for respective transform units, a quantization matrix used when inversely quantizing transform coefficient data of an image to be decoded, according to an orthogonal transform method selected when inversely orthogonally transforming the transform coefficient data, an inverse quantization section that uses the quantization matrix set by the setting section to inversely quantize the transform coefficient data, and a transform section that uses the selected orthogonal transform method to inversely orthogonally transform the transform coefficient data inversely quantized by the inverse quantization section.

摘要翻译： 提供了一种图像处理装置，包括：设定部，其对于各变换部，根据在将变换系数进行逆正交变换时所选择的正交变换方法，对反向量化被解码图像的变换系数数据时使用的量化矩阵 数据，使用由设置部分设置的量化矩阵来对变换系数数据进行逆量化的逆量化部分;以及变换部分，其使用所选择的正交变换方法对由逆量化部分反量化的变换系数数据进行逆正交变换 。