Substrate treating apparatus
    1.
    发明申请
    Substrate treating apparatus 有权
    底物处理装置

    公开(公告)号:US20050061441A1

    公开(公告)日:2005-03-24

    申请号:US10942180

    申请日:2004-09-16

    摘要: A substrate treating apparatus is capable of promptly heating substrates after exposure, and avoiding an adverse thermal influence on an exposing apparatus. A developing block includes heating modules for heating exposed substrates. An interface block is interposed between the heating modules and the exposing apparatus to isolate the exposing apparatus from the thermal influence of the heating modules. The interface block has a transport mechanism for transporting the substrates to the heating modules, whereby the exposed substrates are promptly transferred to the heating modules.

    摘要翻译: 基板处理装置能够在曝光后迅速地加热基板,并且避免对曝光装置的不利的热影响。 显影块包括用于加热曝光的基底的加热模块。 在加热模块和曝光装置之间插入界面块,以使曝光装置与加热模块的热影响隔离。 接口块具有用于将基板输送到加热模块的输送机构,由此将暴露的基板迅速地转移到加热模块。

    Substrate treating apparatus
    2.
    发明授权
    Substrate treating apparatus 有权
    底物处理装置

    公开(公告)号:US07563323B2

    公开(公告)日:2009-07-21

    申请号:US10942180

    申请日:2004-09-16

    摘要: A substrate treating apparatus is capable of promptly heating substrates after exposure, and avoiding an adverse thermal influence on an exposing apparatus. A developing block includes heating modules for heating exposed substrates. An interface block is interposed between the heating modules and the exposing apparatus to isolate the exposing apparatus from the thermal influence of the heating modules. The interface block has a transport mechanism for transporting the substrates to the heating modules, whereby the exposed substrates are promptly transferred to the heating modules.

    摘要翻译: 基板处理装置能够在曝光后迅速地加热基板,并且避免对曝光装置的不利的热影响。 显影块包括用于加热曝光的基底的加热模块。 在加热模块和曝光装置之间插入界面块,以使曝光装置与加热模块的热影响隔离。 接口块具有用于将基板输送到加热模块的输送机构,由此将暴露的基板迅速地转移到加热模块。

    Fuel filler structure for fuel tank

    公开(公告)号:US11167637B2

    公开(公告)日:2021-11-09

    申请号:US14390693

    申请日:2012-04-12

    IPC分类号: B60K15/04

    摘要: To obtain a fuel filler structure for a fuel tank wherein when causing an opening and closing valve to close, it can be ensured that the opening and closing valve does not rapidly rotate to a closed position in which it closes a fuel fill inlet, and when causing the opening and closing valve to open, the opening and closing valve can be opened with a small force. A fuel filler structure is equipped with a damper on the near side of a flapper valve in the insertion direction of a fuel nozzle. When the flapper valve rotates to an open position, the damper does not act on the flapper valve, and when the flapper valve rotates to a closed position, the damper acts on the flapper valve.

    Resist composition and method for producing resist pattern
    8.
    发明授权
    Resist composition and method for producing resist pattern 有权
    抗蚀剂组合物和抗蚀剂图案的制造方法

    公开(公告)号:US09291893B2

    公开(公告)日:2016-03-22

    申请号:US13281145

    申请日:2011-10-25

    IPC分类号: G03F7/004 G03F7/039 G03F7/20

    摘要: A resist composition contains; a resin having a structural unit represented by the formula (aa) and a structural unit represented by the formula (ab); and an acid generator, wherein Raa1 represents a hydrogen atom and a methyl group; Aaa1 represents an optionally substituted C1 to C6 alkanediyl group etc.; Raa2 represents an optionally substituted C1 to C18 aliphatic hydrocarbon group; Rab1 represents a hydrogen atom and a methyl group; Aab1 represents a single bond, an optionally substituted C1 to C6 alkanediyl group etc.; W1 represents an optionally substituted C4 to C24 alicyclic hydrocarbon group; n represents 1 or 2; Aab2 in each occurrence independently represents an optionally substituted C1 to C6 aliphatic hydrocarbon group; Rab2 in each occurrence independently represents a C1 to C12 fluorinated alkyl group.

    摘要翻译: 抗蚀剂组合物含有 具有由式(aa)表示的结构单元的树脂和由式(ab)表示的结构单元; 和酸产生剂,其中Raa1表示氢原子和甲基; Aaa1表示可以具有取代基的C1〜C6烷二基等。 Raa2表示任选取代的C1至C18脂族烃基; Rab1表示氢原子和甲基; Aab1表示单键,任选取代的C 1至C 6烷二基等; W1表示任选取代的C4至C24脂环族烃基; n表示1或2; Aab2各自独立地表示任选取代的C 1至C 6脂族烃基; Rab2各自独立地表示C1〜C12氟化烷基。

    Resist composition and method for producing resist pattern
    9.
    发明授权
    Resist composition and method for producing resist pattern 有权
    抗蚀剂组合物和抗蚀剂图案的制造方法

    公开(公告)号:US09229320B2

    公开(公告)日:2016-01-05

    申请号:US13196446

    申请日:2011-08-02

    IPC分类号: G03F7/004 G03F7/039 G03F7/20

    摘要: A resist composition contains; a resin having a structural unit derived from a compound represented by the formula (a); and an acid generator represented by the formula (B1). wherein R1 represents a hydrogen atom or a methyl group; A10 represents a single bond, an optionally substituted C1 to C6 alkanediyl group or a group represented by formula (a-1) defined in the specification; W1 represents an optionally substituted C4 to C36 alicyclic hydrocarbon group; A20 in each occurrence independently represents an optionally substituted C1 to C6 aliphatic hydrocarbon group; R2 in each occurrence independently represents a C1 to C12 perfluoroalkyl group; n represents 1 or 2; Q1 and Q2 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group; Lb1 represents an optionally substituted C1 to C17 divalent aliphatic hydrocarbon group; Y represents an optionally substituted C1 to C18 aliphatic hydrocarbon group; and Z+ represents an organic cation.

    摘要翻译: 抗蚀剂组合物含有 具有衍生自由式(a)表示的化合物的结构单元的树脂; 和由式(B1)表示的酸发生剂。 其中R1表示氢原子或甲基; A10表示单键,可以具有取代基的C1〜C6烷二基或由说明书中定义的式(a-1)表示的基团; W1表示任选取代的C4至C36脂环族烃基; A20每次独立地表示任选取代的C 1至C 6脂族烃基; R2各自独立地表示C1〜C12全氟烷基; n表示1或2; Q1和Q2独立地表示氟原子或C1〜C6全氟烷基; Lb1表示任选取代的C 1至C 17二价脂族烃基; Y表示任选取代的C 1至C 18脂族烃基; Z +表示有机阳离子。