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公开(公告)号：US08387255B2
公开(公告)日：2013-03-05
申请号：US13307042
申请日：2011-11-30
申请人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
发明人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
CPC分类号： B29C33/3878 , B29C33/424 , C25D1/02 , C25D1/10 , Y10S425/81 , Y10T29/49549 , Y10T29/49552
摘要： The fine pattern mold that includes a roll, a buffer tube with inner peripheral surface is in contact with an outer peripheral surface of the roll, and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
摘要翻译： 包括辊，具有内周面的缓冲管的精细图案模具与辊的外周面接触，并且压模管的内周面与缓冲管的外周面接触 并且在其外周面上形成微细的凹凸图案，其中缓冲管具有比压模管更大的线膨胀系数和更小的弹性模量。
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公开(公告)号：US20090004320A1
公开(公告)日：2009-01-01
申请号：US12146489
申请日：2008-06-26
申请人： Kenya OHASHI , Masahiko Ogino , Akihiro Miyauchi
发明人： Kenya OHASHI , Masahiko Ogino , Akihiro Miyauchi
CPC分类号： B29C33/424 , B29C33/40 , B29C33/565 , B29C59/022 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T156/1041
摘要： An imprinting stamper which can transfer a microscopic pattern to a medium bearing a convex area or local projection, with high accuracy. A convexo-concave pattern is formed on a surface of the imprinting stamper. It includes a pattern layer having the convexo-concave pattern; and a stamper backside layer arranged on a backside of the pattern layer. Young's modulus of the pattern layer is 500 MPa to 10 GPa; and Young's modulus of the stamper backside layer is smaller than Young's modulus of the pattern layer.
摘要翻译： 一种能够以高精度将微观图案转印到具有凸区域或局部投影的介质的压印模。 在印模压模的表面上形成凹凸图案。 它包括具有凹凸图案的图案层; 以及设置在图案层的背面上的压模背面层。 图案层的杨氏模量为500MPa至10GPa; 并且压模背面层的杨氏模量小于图案层的杨氏模量。
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3.发明申请Methods of fabricating nano-scale and micro-scale mold for nano-imprint, and mold usage on nano-imprinting equipment 审中-公开制造纳米压印纳米尺度和微尺度模具的方法以及纳米压印设备上的模具使用公开(公告)号：US20060258163A1
公开(公告)日：2006-11-16
申请号：US11354029
申请日：2006-02-15
申请人： Kenya Ohashi , Akihiro Miyauchi , Masahiko Ogino
发明人： Kenya Ohashi , Akihiro Miyauchi , Masahiko Ogino
IPC分类号： H01L21/302
CPC分类号： G03F7/0002 , B81C1/0046 , B81C99/009 , B82Y10/00 , B82Y40/00 , G11B5/855
摘要： To provide a metal mold excellent in the mold-release characteristic and the transfer accuracy in a nano-imprint method. By controlling the thickness of a metal oxide film formed in the face of a release agent and a mold, the adhesive amount of the release agent layer formed in the outer layer thereof is adjusted, thereby forming a mold excellent in the mold-release characteristic. The present invention also relates to methods of fabricating molds for nano-imprint, and mold usage on nano-imprinting equipment.
摘要翻译： 提供在纳米压印方法中脱模特性和转印精度优异的金属模具。 通过控制在脱模剂和模具的表面形成的金属氧化物膜的厚度，调节在其外层中形成的脱模剂层的粘合量，从而形成脱模特性优异的模具。 本发明还涉及在纳米压印设备上制造用于纳米压印的模具和模具使用的方法。
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公开(公告)号：US08109752B2
公开(公告)日：2012-02-07
申请号：US12146489
申请日：2008-06-26
申请人： Kenya Ohashi , Masahiko Ogino , Akihiro Miyauchi
发明人： Kenya Ohashi , Masahiko Ogino , Akihiro Miyauchi
IPC分类号： B29C59/00
CPC分类号： B29C33/424 , B29C33/40 , B29C33/565 , B29C59/022 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T156/1041
摘要： An imprinting stamper which can transfer a microscopic pattern to a medium bearing a convex area or local projection, with high accuracy. A convexo-concave pattern is formed on a surface of the imprinting stamper. It includes a pattern layer having the convexo-concave pattern; and a stamper backside layer arranged on a backside of the pattern layer. Young's modulus of the pattern layer is 500 MPa to 10 GPa; and Young's modulus of the stamper backside layer is smaller than Young's modulus of the pattern layer.
摘要翻译： 一种能够以高精度将微观图案转印到具有凸区域或局部投影的介质的压印模。 在印模压模的表面上形成凹凸图案。 它包括具有凹凸图案的图案层; 以及设置在图案层的背面上的压模背面层。 图案层的杨氏模量为500MPa至10GPa; 并且压模背面层的杨氏模量小于图案层的杨氏模量。
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公开(公告)号：US08083515B2
公开(公告)日：2011-12-27
申请号：US12129881
申请日：2008-05-30
申请人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
发明人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
CPC分类号： B29C33/3878 , B29C33/424 , C25D1/02 , C25D1/10 , Y10S425/81 , Y10T29/49549 , Y10T29/49552
摘要： The fine pattern mold comprises: that includes a roll, a buffer tube with inner peripheral surface is in contact with an outer peripheral surface of the roll, and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
摘要翻译： 精细图案模具包括：包括辊，具有内周表面的缓冲管与辊的外周表面接触;以及压模管，其内周表面与所述辊的外周表面接触 在其外周面形成有缓冲管和细凹凸图案，其中缓冲管具有比压模管更大的线膨胀系数和更小的弹性模量。
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6.发明申请Mold for Fine Pattern Transfer and Method for Forming Resin Pattern Using Same 有权用于精细图案转印的模具和使用其形成树脂图案的方法公开(公告)号：US20080237931A1
公开(公告)日：2008-10-02
申请号：US11847636
申请日：2007-08-30
申请人： Kenya Ohashi , Masahiko Ogino , Akihiro Miyauchi
发明人： Kenya Ohashi , Masahiko Ogino , Akihiro Miyauchi
CPC分类号： B29C33/10 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10S977/887
摘要： A mold for forming a resin pattern using nanoimprint lithography according to the present invention comprises a main mold including a fine pattern of a protrusion and a depression intended to be transferred, and a spacer for forming a space between the protrusion of the fine pattern of the main mold and a transferred object during a transfer of the fine pattern, in which the spacer has a vent passage capable of flowing gas therethrough and has an elasticity against a pressing force during the transfer.
摘要翻译： 根据本发明的使用纳米压印光刻形成树脂图案的模具包括：主模具，其包括突起的精细图案和待转印的凹陷;以及间隔件，用于在所述微型图案的突起之间形成空间 主模具和被转移物体在精细图案的转印期间，其中间隔件具有能够使气体流过的通气通道，并且具有抵抗转印期间的按压力的弹性。
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7.发明授权Mold for fine pattern transfer and method for forming resin pattern using same 有权用于精细图案转印的模具和使用其形成树脂图案的方法公开(公告)号：US08158048B2
公开(公告)日：2012-04-17
申请号：US11847636
申请日：2007-08-30
申请人： Kenya Ohashi , Masahiko Ogino , Akihiro Miyauchi
发明人： Kenya Ohashi , Masahiko Ogino , Akihiro Miyauchi
IPC分类号： B29C59/00
CPC分类号： B29C33/10 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10S977/887
摘要： A mold for forming a resin pattern using nanoimprint lithography according to the present invention comprises a main mold including a fine pattern of a protrusion and a depression intended to be transferred, and a spacer for forming a space between the protrusion of the fine pattern of the main mold and a transferred object during a transfer of the fine pattern, in which the spacer has a vent passage capable of flowing gas therethrough and has an elasticity against a pressing force during the transfer.
摘要翻译： 根据本发明的使用纳米压印光刻形成树脂图案的模具包括：主模具，其包括突起的精细图案和待转印的凹陷;以及间隔件，用于在所述微型图案的突起之间形成空间 主模具和被转移物体在精细图案的转印期间，其中间隔件具有能够使气体流过的通气通道，并且具有抵抗转印期间的按压力的弹性。
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公开(公告)号：US20080299247A1
公开(公告)日：2008-12-04
申请号：US12129881
申请日：2008-05-30
申请人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
发明人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
CPC分类号： B29C33/3878 , B29C33/424 , C25D1/02 , C25D1/10 , Y10S425/81 , Y10T29/49549 , Y10T29/49552
摘要： There is provided a fine pattern mold capable of transferring a fine concave/convex pattern accurately without causing deformation of the fine concave/convex pattern itself.The fine patter mold comprises: a roll; a buffer tube whose inner peripheral surface is in contact with an outer peripheral surface of the roll; and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
摘要翻译： 提供了能够精确地转印精细凹凸图案的精细图案模具，而不会导致精细凹凸图案本身的变形。 精细模具包括：卷; 缓冲管，其内周面与所述辊的外周面接触; 以及其内周面与缓冲管的外周面接触的压模管，在其外周面上形成微细的凹凸图案，其中缓冲管具有较大的线膨胀系数和 比压模管的弹性模量小。
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9.发明授权Electrolyte membrane for fuel cells, its production and fuel cell using the same 有权用于燃料电池的电解质膜，其生产和燃料电池使用相同公开(公告)号：US08309265B2
公开(公告)日：2012-11-13
申请号：US10929370
申请日：2004-08-31
申请人： Akihiro Miyauchi , Kenichi Souma , Shuichi Suzuki , Yoshiyuki Takamori , Masahiko Ogino , Takashi Ando , Hidetoshi Honbo
发明人： Akihiro Miyauchi , Kenichi Souma , Shuichi Suzuki , Yoshiyuki Takamori , Masahiko Ogino , Takashi Ando , Hidetoshi Honbo
IPC分类号： H01M8/10
CPC分类号： H01M8/1004 , H01M8/1065 , H01M8/1067 , H01M8/1093 , Y02P70/56
摘要： The present invention provides an electrolyte membrane for a fuel cell that has a minute projection cluster on one side or both sides of a polymer electrolyte membrane. Further, the present invention provides a production method of an electrolyte membrane for a fuel cell, wherein a mold comprising convex portions having a fixed planar pattern is pressed on one side or both sides of a polymer electrolyte membrane, then while concave portions of the polymer electrolyte membrane formed in the concave portions are being stretched, the mold is removed from the polymer electrolyte membrane for forming a minute projection cluster.
摘要翻译： 本发明提供一种用于燃料电池的电解质膜，其在聚合物电解质膜的一侧或两侧具有微小的突起簇。 此外，本发明提供一种燃料电池用电解质膜的制造方法，其特征在于，在聚合物电解质膜的一侧或两侧压入具有固定平面图案的凸部的模具，然后在聚合物的凹部 在凹部中形成的电解质膜被拉伸，从用于形成微小突起簇的聚合物电解质膜中除去模具。
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公开(公告)号：US08147234B2
公开(公告)日：2012-04-03
申请号：US12343550
申请日：2008-12-24
IPC分类号： B29C59/04
CPC分类号： B29C59/04 , B29C35/16 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： An imprint apparatus for forming fine structure lithography comprises: a belt-like mold having a fine structure for imprint lithography formed on a surface of the belt-like mold; a cylindrical pressurizing mechanism including a pair of opposed rolls for pressurizing the belt-like mold against the surface of the imprinting object; and a supporting member for supporting the imprinting object at a position between the rolls of the cylindrical pressurizing mechanism. The belt-like mold, the imprinting object and the supporting member are configured to move to the cylindrical pressurizing mechanism in a mutually non-contact state, and then at the position between the rolls, be pressurized by the cylindrical pressurizing mechanism in a state where the imprinting object is positioned between the belt-like mold and the supporting member.
摘要翻译： 用于形成精细结构光刻的压印装置包括：在带状模具的表面上形成具有用于压印光刻的精细结构的带状模具; 圆柱形加压机构，包括一对相对的辊，用于将带状模具压靠在压印对象的表面上; 以及用于将压印对象支撑在圆筒形加压机构的辊之间的位置处的支撑构件。 带状模具，压印对象物和支撑构件被构造成在相互非接触状态下移动到圆柱形加压机构，然后在辊之间的位置被圆柱形加压机构加压， 压印对象位于带状模具和支撑构件之间。
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