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公开(公告)号：US20120067507A1
公开(公告)日：2012-03-22
申请号：US13307042
申请日：2011-11-30
申请人： Masahiko OGINO , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
发明人： Masahiko OGINO , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
CPC分类号： B29C33/3878 , B29C33/424 , C25D1/02 , C25D1/10 , Y10S425/81 , Y10T29/49549 , Y10T29/49552
摘要： The fine pattern mold that includes a roll, a buffer tube with inner peripheral surface is in contact with an outer peripheral surface of the roll, and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
摘要翻译： 包括辊，具有内周面的缓冲管的精细图案模具与辊的外周面接触，并且压模管的内周面与缓冲管的外周面接触 并且在其外周面上形成微细的凹凸图案，其中缓冲管具有比压模管更大的线膨胀系数和更小的弹性模量。
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公开(公告)号：US08083515B2
公开(公告)日：2011-12-27
申请号：US12129881
申请日：2008-05-30
申请人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
发明人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
CPC分类号： B29C33/3878 , B29C33/424 , C25D1/02 , C25D1/10 , Y10S425/81 , Y10T29/49549 , Y10T29/49552
摘要： The fine pattern mold comprises: that includes a roll, a buffer tube with inner peripheral surface is in contact with an outer peripheral surface of the roll, and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
摘要翻译： 精细图案模具包括：包括辊，具有内周表面的缓冲管与辊的外周表面接触;以及压模管，其内周表面与所述辊的外周表面接触 在其外周面形成有缓冲管和细凹凸图案，其中缓冲管具有比压模管更大的线膨胀系数和更小的弹性模量。
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公开(公告)号：US20120256353A1
公开(公告)日：2012-10-11
申请号：US13414959
申请日：2012-03-08
CPC分类号： G03F7/0002 , B29C37/0067 , B29C59/04 , B82Y10/00 , B82Y40/00
摘要： A pattern transfer apparatus for pressing a mold having a fine concave/convex pattern onto a transferred material, peeling off the mold from the transferred material, and transferring the concave/convex pattern onto a surface of the transferred material includes: a pretreatment mechanism configured to perform a predetermined surface treatment to at least one of the mold and the transferred material before the concave/convex pattern is transferred; an information recording mechanism configured to record information of the surface treatment performed by the pretreatment mechanism at a position associated with an area of the transferred material where the concave/convex pattern is transferred onto the area; an interpretation mechanism configured to read the recorded information; and an after-treatment mechanism configured to perform a predetermined after-treatment to the area where the concave/convex pattern is transferred, based on the information interpreted by the interpretation mechanism.
摘要翻译： 一种图案转印装置，用于将具有精细凹凸图案的模具压印到转印材料上，从转印材料上剥离模具，并将凹凸图案转印到转印材料的表面上，包括：预处理机构，被配置为 在传递凹凸图案之前，对模具和转印材料中的至少一个进行预定的表面处理; 信息记录机构，被配置为将所述预处理机构执行的表面处理的信息记录在与将所述凹凸图案转印到所述区域上的被转印材料的区域相关联的位置处; 解释机构，被配置为读取所记录的信息; 以及后处理机构，其被配置为基于由所述解释机构解释的信息对所述凹凸图案被传送的区域进行预定的后处理。
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公开(公告)号：US20090166914A1
公开(公告)日：2009-07-02
申请号：US12343550
申请日：2008-12-24
IPC分类号： B29C59/04
CPC分类号： B29C59/04 , B29C35/16 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： An imprint apparatus for forming fine structure lithography comprises: a belt-like mold having a fine structure for imprint lithography formed on a surface of the belt-like mold; a cylindrical pressurizing mechanism including a pair of opposed rolls for pressurizing the belt-like mold against the surface of the imprinting object; and a supporting member for supporting the imprinting object at a position between the rolls of the cylindrical pressurizing mechanism. The belt-like mold, the imprinting object and the supporting member are configured to move to the cylindrical pressurizing mechanism in a mutually non-contact state, and then at the position between the rolls, be pressurized by the cylindrical pressurizing mechanism in a state where the imprinting object is positioned between the belt-like mold and the supporting member.
摘要翻译： 用于形成精细结构光刻的压印装置包括：在带状模具的表面上形成具有用于压印光刻的精细结构的带状模具; 圆柱形加压机构，包括一对相对的辊，用于将带状模具压靠在压印对象的表面上; 以及用于将压印对象支撑在圆筒形加压机构的辊之间的位置处的支撑构件。 带状模具，压印对象物和支撑构件被构造成在相互非接触状态下移动到圆柱形加压机构，然后在辊之间的位置被圆柱形加压机构加压， 压印对象位于带状模具和支撑构件之间。
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公开(公告)号：US20080299247A1
公开(公告)日：2008-12-04
申请号：US12129881
申请日：2008-05-30
申请人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
发明人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
CPC分类号： B29C33/3878 , B29C33/424 , C25D1/02 , C25D1/10 , Y10S425/81 , Y10T29/49549 , Y10T29/49552
摘要： There is provided a fine pattern mold capable of transferring a fine concave/convex pattern accurately without causing deformation of the fine concave/convex pattern itself.The fine patter mold comprises: a roll; a buffer tube whose inner peripheral surface is in contact with an outer peripheral surface of the roll; and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
摘要翻译： 提供了能够精确地转印精细凹凸图案的精细图案模具，而不会导致精细凹凸图案本身的变形。 精细模具包括：卷; 缓冲管，其内周面与所述辊的外周面接触; 以及其内周面与缓冲管的外周面接触的压模管，在其外周面上形成微细的凹凸图案，其中缓冲管具有较大的线膨胀系数和 比压模管的弹性模量小。
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公开(公告)号：US08387255B2
公开(公告)日：2013-03-05
申请号：US13307042
申请日：2011-11-30
申请人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
发明人： Masahiko Ogino , Mitsuru Hasegawa , Kenya Ohashi , Akihiro Miyauchi , Hitoshi Suzuki , Toshio Haba , Haruo Akahoshi
CPC分类号： B29C33/3878 , B29C33/424 , C25D1/02 , C25D1/10 , Y10S425/81 , Y10T29/49549 , Y10T29/49552
摘要： The fine pattern mold that includes a roll, a buffer tube with inner peripheral surface is in contact with an outer peripheral surface of the roll, and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
摘要翻译： 包括辊，具有内周面的缓冲管的精细图案模具与辊的外周面接触，并且压模管的内周面与缓冲管的外周面接触 并且在其外周面上形成微细的凹凸图案，其中缓冲管具有比压模管更大的线膨胀系数和更小的弹性模量。
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公开(公告)号：US08147234B2
公开(公告)日：2012-04-03
申请号：US12343550
申请日：2008-12-24
IPC分类号： B29C59/04
CPC分类号： B29C59/04 , B29C35/16 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： An imprint apparatus for forming fine structure lithography comprises: a belt-like mold having a fine structure for imprint lithography formed on a surface of the belt-like mold; a cylindrical pressurizing mechanism including a pair of opposed rolls for pressurizing the belt-like mold against the surface of the imprinting object; and a supporting member for supporting the imprinting object at a position between the rolls of the cylindrical pressurizing mechanism. The belt-like mold, the imprinting object and the supporting member are configured to move to the cylindrical pressurizing mechanism in a mutually non-contact state, and then at the position between the rolls, be pressurized by the cylindrical pressurizing mechanism in a state where the imprinting object is positioned between the belt-like mold and the supporting member.
摘要翻译： 用于形成精细结构光刻的压印装置包括：在带状模具的表面上形成具有用于压印光刻的精细结构的带状模具; 圆柱形加压机构，包括一对相对的辊，用于将带状模具压靠在压印对象的表面上; 以及用于将压印对象支撑在圆筒形加压机构的辊之间的位置处的支撑构件。 带状模具，压印对象物和支撑构件被构造成在相互非接触状态下移动到圆柱形加压机构，然后在辊之间的位置被圆柱形加压机构加压， 压印对象位于带状模具和支撑构件之间。
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公开(公告)号：US20120321738A1
公开(公告)日：2012-12-20
申请号：US13581169
申请日：2011-02-16
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0046 , G03F7/038 , G03F7/0757
摘要： A micro-pattern transferring stamper includes a supporting base material and a microstructure layer formed on the supporting base material, the microstructure layer is a polymer of a resin composition that mainly contains a silsesquioxane derivative containing a plurality of polymerizable functional groups, and one or plural kinds of monomer elements containing a plurality of polymerizable functional groups.
摘要翻译： 微图案转印模具包括支撑基材和形成在支撑基材上的微结构层，微结构层是主要包含含有多个可聚合官能团的倍半硅氧烷衍生物的树脂组合物的聚合物，以及一个或多个 含有多个聚合性官能团的单体元素种类。
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公开(公告)号：US20120205838A1
公开(公告)日：2012-08-16
申请号：US13370413
申请日：2012-02-10
IPC分类号： B29C59/16
CPC分类号： G03F7/0002 , B29C33/3878 , B82Y10/00 , B82Y40/00
摘要： A microstructure transferring device is characterized in that the device comprises a stamper made from a first photo-curable resin composition cured with light with a first wavelength, and a light source emitting light with a second wavelength longer than the first wavelength. The microstructure is transferred to an impression receptor supplied with a second photo-curable resin composition, which is curable with light with the second wavelength emitted by the light source.
摘要翻译： 微结构转印装置的特征在于，该装置包括由用第一波长的光固化的第一光固化树脂组合物制成的压模和发射长于第一波长的第二波长的光的光源。 将微结构转移到提供有第二光固化树脂组合物的印模受体中，该第二光固化树脂组合物可用由光源发出的第二波长的光固化。
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公开(公告)号：US08109752B2
公开(公告)日：2012-02-07
申请号：US12146489
申请日：2008-06-26
申请人： Kenya Ohashi , Masahiko Ogino , Akihiro Miyauchi
发明人： Kenya Ohashi , Masahiko Ogino , Akihiro Miyauchi
IPC分类号： B29C59/00
CPC分类号： B29C33/424 , B29C33/40 , B29C33/565 , B29C59/022 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T156/1041
摘要： An imprinting stamper which can transfer a microscopic pattern to a medium bearing a convex area or local projection, with high accuracy. A convexo-concave pattern is formed on a surface of the imprinting stamper. It includes a pattern layer having the convexo-concave pattern; and a stamper backside layer arranged on a backside of the pattern layer. Young's modulus of the pattern layer is 500 MPa to 10 GPa; and Young's modulus of the stamper backside layer is smaller than Young's modulus of the pattern layer.
摘要翻译： 一种能够以高精度将微观图案转印到具有凸区域或局部投影的介质的压印模。 在印模压模的表面上形成凹凸图案。 它包括具有凹凸图案的图案层; 以及设置在图案层的背面上的压模背面层。 图案层的杨氏模量为500MPa至10GPa; 并且压模背面层的杨氏模量小于图案层的杨氏模量。
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