3-Dimensional comb structure and actuator and inertia detection sensor both using the comb structure
    1.
    发明授权
    3-Dimensional comb structure and actuator and inertia detection sensor both using the comb structure 有权
    三维梳结构和致动器和惯性检测传感器均采用梳状结构

    公开(公告)号:US06308573B1

    公开(公告)日:2001-10-30

    申请号:US09479892

    申请日:2000-01-10

    IPC分类号: G01P344

    摘要: A 3-dimensional comb structure using an electrical force, and an inertial detection sensor and an actuator both using the 3-dimensional comb structure are provided. In the 3-dimensional comb structure, a suspension structure, which is an inertia body, is separated a predetermined height from a substrate, maintaining the predetermined height from the substrate. A movable comb, which has at least one movable comb finger, protrudes perpendicularly from the suspension structure. A fixed comb, which has at least one fixed comb finger, protrudes perpendicularly from the substrate, in mesh with the movable comb. The 3-dimensional comb structure is driven by a voltage provided from a power supply unit which is connected to the movable comb and the fixed comb.

    摘要翻译: 提供了使用电力的三维梳结构,以及使用三维梳结构的惯性检测传感器和致动器。 在三维梳结构中,作为惯性体的悬架结构与衬底分离预定的高度,保持与衬底的预定高度。 具有至少一个活动梳指的可动梳子从悬挂结构垂直地突出。 具有至少一个固定梳指的固定梳与基底垂直地突出地与可动梳子啮合。 三维梳结构由连接到可动梳和固定梳的电源单元提供的电压驱动。

    Multilayered wafer with thick sacrificial layer using porous silicon or porous silicon oxide and fabrication method thereof
    2.
    发明授权
    Multilayered wafer with thick sacrificial layer using porous silicon or porous silicon oxide and fabrication method thereof 有权
    使用多孔硅或多孔氧化硅的具有厚牺牲层的多层晶片及其制造方法

    公开(公告)号:US06277712B1

    公开(公告)日:2001-08-21

    申请号:US09540552

    申请日:2000-03-31

    IPC分类号: H01L21322

    摘要: A multilayered wafer with a thick sacrificial layer, which is obtained by forming a sacrificial layer of oxidized porous silicon or porous silicon and growing an epitaxial polysilicon layer on the sacrificial layer, and a fabrication method thereof are provided. The multilayered wafer with a thick sacrificial layer adopts a porous silicon layer or an oxidized porous silicon layer as a sacrificial layer such that a sufficient gap can be obtained between a substrate and a suspension structure upon the manufacture of the suspension structure of a semiconductor actuator or a semiconductor inertia sensor. Also, in a fabrication method of the wafer according to the present invention, a p+-type or n+-type wafer doped at a high concentration is prepared for, and then a thick porous silicon layer can be obtained simply by anodic-bonding the surface of the wafer. Also, when polysilicon is grown on a porous silicon layer by an epitaxial process, it is grown faster than when single crystal silicon is grown.

    摘要翻译: 提供了通过在牺牲层上形成氧化的多孔硅或多孔硅的牺牲层并生长外延多晶硅层而获得的具有厚牺牲层的多层晶片及其制造方法。 具有厚牺牲层的多层晶片采用多孔硅层或氧化多孔硅层作为牺牲层,使得在制造半导体致动器的悬架结构时可在衬底和悬架结构之间获得足够的间隙,或者 半导体惯性传感器。 此外,在根据本发明的晶片的制造方法中,制备以高浓度掺杂的p +型或n +型晶片,然后可以简单地通过阳极结合表面获得厚的多孔硅层 的晶片。 而且,当通过外延工艺在多孔硅层上生长多晶硅时,其生长比单晶硅生长时更快。

    Single stage microactuator for multi-dimensional actuation

    公开(公告)号:US06445107B1

    公开(公告)日:2002-09-03

    申请号:US09682085

    申请日:2001-07-18

    IPC分类号: H02N100

    摘要: A single-stage microactuator is provided. The single-stage microactuator includes: a substrate; a fixed plate electrode disposed at a central portion of the substrate; a rectangular stage having first and second side directions, which is located above the fixed plate electrode, the second direction being perpendicular to the first direction; a plurality of actuating frame parts provided corresponding to the two first direction of sides and the two second direction of sides for regions surrounding the stage, wherein each actuating frame includes a plurality of actuating frames arranged parallel to a corresponding side of the stage adjacent to each surrounding region; a plurality of comb normal directional deformable spring parts, each disposed between each side of the stage and the inner part of each actuating frame part, wherein each comb normal directional deformable spring part includes a plurality of spring members extending in a direction perpendicular to a corresponding side of the stage; a plurality of fixed frame parts, each including a plurality of fixed frames alternately arranged parallel to the plurality of actuating frames of a corresponding actuating frame part of each surrounding region; an actuating comb electrode provided in each actuating frame of the actuating frame part, the actuating comb electrode extending in a direction perpendicular to the side of the stage corresponding to each surrounding region; a fixed comb electrode arranged alternately in parallel to the actuating comb electrode in each fixed frame of the fixed frame part; and a plurality of comb directional deformable spring parts disposed on one side of each actuating frame part opposite the stage and the opposing side thereof for providing an elastic recovery force in a direction perpendicular to one side of the stage corresponding to each of the surrounding regions. The microactuator is capable of multi-dimensional actuation using a single electrode in an actuating part and of simplifying a fabrication process without an isolation process step.

    Electromagnetic X-Y stage driver for nano data storage system and method for fabricating coils of the same

    公开(公告)号:US06512313B2

    公开(公告)日:2003-01-28

    申请号:US09877021

    申请日:2001-06-11

    IPC分类号: H02K3318

    摘要: An electromagnetic x-y stage driver for a nano data storage system and a method for fabricating the coils of the same are provided. In the electromagnetic x-y stage driver, a cantilever tip array fixedly provided a medium for recording data to write data to or read data from each cell of the medium. Four coils are formed to be integrated with the medium in front of, behind, to the left of and to the right of the medium to move the medium. Four supporting beam are installed to an x-y stage body onto which a medium structure composed of the medium and the four coils is loaded such that the four supporting beam are connected to the four corners of the medium structure to support the medium structure. Four driving beams connect the upper portions of the supporting beam to the four corners of the medium structure to allow the medium structure to move in an x or y direction. Stiffeners are disposed at the four sides between the supporting beam to prevent the medium structure from rotating. Four pairs of permanent magnets are disposed above and below the four coils so that the four pairs of the permanent magnets correspond to the four coils, respectively. Four yokes are provided so that each of them joins the edges of the upper and lower permanent magnets of each of the four pairs of the permanent magnets to allow the magnetic flux of the permanent magnets to form a closed loop.

    Apparatus for recording and reading data and method of recording and reading data using contact resistance measurement thereof
    5.
    发明授权
    Apparatus for recording and reading data and method of recording and reading data using contact resistance measurement thereof 失效
    用于记录和读取数据的装置以及使用其接触电阻测量记录和读取数据的方法

    公开(公告)号:US06762402B2

    公开(公告)日:2004-07-13

    申请号:US09973869

    申请日:2001-10-11

    IPC分类号: H01J314

    摘要: An apparatus for recording and reading data by measuring contact resistance and a method for recording and reading data thereof are provided. The apparatus for recording and reading data includes a storage medium and a probe which is installed to face the storage medium and is used for recording data on the storage medium and reading the data from the storage medium. The storage medium includes a substrate, a conductive layer formed on the substrate and a dielectric layer formed on the conductive layer. With the apparatus for recording and reading data, it is possible to solve problems concerning data retention, data read speed and signal-to-noise ratio which have been at issue in developing data storage media with the use of conventional scanning probe microscopic techniques.

    摘要翻译: 提供了一种通过测量接触电阻​​来记录和读取数据的装置及其记录和读取数据的方法。 用于记录和读取数据的装置包括存储介质和探针,该存储介质和探针安装成面向存储介质,并用于在存储介质上记录数据并从存储介质读取数据。 存储介质包括基板,形成在基板上的导电层和形成在导电层上的电介质层。 利用用于记录和读取数据的装置,可以利用常规的扫描探针显微技术来解决在开发数据存储介质中已经存在的关于数据保持,数据读取速度和信噪比的问题。

    Rotary microactuator having optimally curved electrodes
    6.
    发明授权
    Rotary microactuator having optimally curved electrodes 失效
    具有最佳弯曲电极的旋转微致动器

    公开(公告)号:US06563249B1

    公开(公告)日:2003-05-13

    申请号:US09633288

    申请日:2000-08-04

    IPC分类号: H02N100

    CPC分类号: H02N1/008

    摘要: A rotary microactuator having optimally curved electrodes is provided. The rotary microactuator is optimally designed so that the interval between two electrodes, which are a rotor and a stator, is constant regardless of a distance from the central axis of the rotor. Thus, a parallel-plate configuration can generate a maximum driving force, and also can widen a driving range. In particular, in a rotary microactuator using parallel-plate configuration electrodes, the electrodes are optimally designed so that the interval between the electrodes remains constant regardless the radius by tilting the electrodes or by zigzagging the electrodes. Therefore, a driving force per a given area can be maximized.

    摘要翻译: 提供具有最佳弯曲电极的旋转微型致动器。 旋转微型致动器被最佳地设计成使得作为转子和定子的两个电极之间的间隔是恒定的,而与离转子中心轴的距离无关。 因此,平行板构造可以产生最大驱动力,并且也可以扩大驱动范围。 特别地,在使用平行板配置电极的旋转微型致动器中,电极被最佳设计,使得电极之间的间隔通过倾斜电极而保持恒定,或者通过锯齿形电极而保持恒定。 因此,给定区域的驱动力可以最大化。

    Apparatus and method for capturing an image utilizing a guide image and live view image corresponding to the guide image
    8.
    发明授权
    Apparatus and method for capturing an image utilizing a guide image and live view image corresponding to the guide image 有权
    使用与引导图像相对应的引导图像和实时取景图像拍摄图像的装置和方法

    公开(公告)号:US08436930B2

    公开(公告)日:2013-05-07

    申请号:US12635844

    申请日:2009-12-11

    IPC分类号: H04N5/222

    摘要: A digital image processing apparatus configured to display a guide image of a previously captured image in a portion of a screen and a live view image in another portion of the screen, and configured to notify a user when the guide image and the live view image match each other. A method of operating a digital image processing apparatus that includes displaying a guide image on a display and trimming a central portion of the guide image; displaying a live view image in a central area of the display where the guide image is not displayed; and capturing the live view image when the guide image and the live view image are matched with each other.

    摘要翻译: 一种数字图像处理装置,被配置为将屏幕的一部分中的先前拍摄图像的引导图像和实时取景图像显示在屏幕的另一部分中,并且被配置为当引导图像和实时取景图像匹配时通知用户 彼此。 一种操作数字图像处理装置的方法,包括在显示器上显示引导图像并修剪引导图像的中心部分; 在不显示引导图像的显示器的中心区域中显示实时取景图像; 并且当引导图像和实时取景图像彼此匹配时捕获实时取景图像。

    APPARATUS AND METHOD FOR CAPTURING IMAGE
    9.
    发明申请
    APPARATUS AND METHOD FOR CAPTURING IMAGE 有权
    用于捕获图像的装置和方法

    公开(公告)号:US20100157128A1

    公开(公告)日:2010-06-24

    申请号:US12635844

    申请日:2009-12-11

    IPC分类号: H04N5/222

    摘要: A digital image processing apparatus configured to display a guide image of a previously captured image in a portion of a screen and a live view image in another portion of the screen, and configured to notify a user when the guide image and the live view image match each other. A method of operating a digital image processing apparatus that includes displaying a guide image on a display and trimming a central portion of the guide image; displaying a live view image in a central area of the display where the guide image is not displayed; and capturing the live view image when the guide image and the live view image are matched with each other.

    摘要翻译: 一种数字图像处理装置,被配置为将屏幕的一部分中的先前拍摄图像的引导图像和实时取景图像显示在屏幕的另一部分中,并且被配置为当引导图像和实时取景图像匹配时通知用户 彼此。 一种操作数字图像处理装置的方法,包括在显示器上显示引导图像并修剪引导图像的中心部分; 在不显示引导图像的显示器的中心区域中显示实时取景图像; 以及当引导图像和实时取景图像彼此匹配时捕获实时取景图像。

    DIGITAL PHOTOGRAPHING APPARATUS INCLUDING A TOUCHSCREEN COMPOSITION INPUT
    10.
    发明申请
    DIGITAL PHOTOGRAPHING APPARATUS INCLUDING A TOUCHSCREEN COMPOSITION INPUT 审中-公开
    包含触摸屏组合输入的数码摄影装置

    公开(公告)号:US20100149123A1

    公开(公告)日:2010-06-17

    申请号:US12635962

    申请日:2009-12-11

    IPC分类号: G06F3/041 H04N5/222

    摘要: A method of controlling a digital photographing apparatus includes providing a touchscreen input view on a touchscreen and inputting a touchscreen composition input drawn by a user on the touchscreen. The touchscreen composition input may represent a picture of a desired composition. When the touchscreen composition input is completely drawn, the touchscreen composition input may be displayed in a live view along with a live view input. The touchscreen composition input may be displayed in such a manner that the touchscreen composition input overlaps with the live view input in the live view.

    摘要翻译: 控制数字拍摄装置的方法包括在触摸屏上提供触摸屏输入视图,并且在触摸屏上输入由用户画出的触摸屏构图输入。 触摸屏组合物输入可以表示所需组合物的图片。 当完全绘制触摸屏组合输入时,可以在实时取景中显示触摸屏组合输入以及实时取景输入。 可以以触摸屏构图输入与实时取景中的实时取景输入重叠的方式来显示触摸屏组合输入。