摘要:
A 3-dimensional comb structure using an electrical force, and an inertial detection sensor and an actuator both using the 3-dimensional comb structure are provided. In the 3-dimensional comb structure, a suspension structure, which is an inertia body, is separated a predetermined height from a substrate, maintaining the predetermined height from the substrate. A movable comb, which has at least one movable comb finger, protrudes perpendicularly from the suspension structure. A fixed comb, which has at least one fixed comb finger, protrudes perpendicularly from the substrate, in mesh with the movable comb. The 3-dimensional comb structure is driven by a voltage provided from a power supply unit which is connected to the movable comb and the fixed comb.
摘要:
A multilayered wafer with a thick sacrificial layer, which is obtained by forming a sacrificial layer of oxidized porous silicon or porous silicon and growing an epitaxial polysilicon layer on the sacrificial layer, and a fabrication method thereof are provided. The multilayered wafer with a thick sacrificial layer adopts a porous silicon layer or an oxidized porous silicon layer as a sacrificial layer such that a sufficient gap can be obtained between a substrate and a suspension structure upon the manufacture of the suspension structure of a semiconductor actuator or a semiconductor inertia sensor. Also, in a fabrication method of the wafer according to the present invention, a p+-type or n+-type wafer doped at a high concentration is prepared for, and then a thick porous silicon layer can be obtained simply by anodic-bonding the surface of the wafer. Also, when polysilicon is grown on a porous silicon layer by an epitaxial process, it is grown faster than when single crystal silicon is grown.
摘要:
A single-stage microactuator is provided. The single-stage microactuator includes: a substrate; a fixed plate electrode disposed at a central portion of the substrate; a rectangular stage having first and second side directions, which is located above the fixed plate electrode, the second direction being perpendicular to the first direction; a plurality of actuating frame parts provided corresponding to the two first direction of sides and the two second direction of sides for regions surrounding the stage, wherein each actuating frame includes a plurality of actuating frames arranged parallel to a corresponding side of the stage adjacent to each surrounding region; a plurality of comb normal directional deformable spring parts, each disposed between each side of the stage and the inner part of each actuating frame part, wherein each comb normal directional deformable spring part includes a plurality of spring members extending in a direction perpendicular to a corresponding side of the stage; a plurality of fixed frame parts, each including a plurality of fixed frames alternately arranged parallel to the plurality of actuating frames of a corresponding actuating frame part of each surrounding region; an actuating comb electrode provided in each actuating frame of the actuating frame part, the actuating comb electrode extending in a direction perpendicular to the side of the stage corresponding to each surrounding region; a fixed comb electrode arranged alternately in parallel to the actuating comb electrode in each fixed frame of the fixed frame part; and a plurality of comb directional deformable spring parts disposed on one side of each actuating frame part opposite the stage and the opposing side thereof for providing an elastic recovery force in a direction perpendicular to one side of the stage corresponding to each of the surrounding regions. The microactuator is capable of multi-dimensional actuation using a single electrode in an actuating part and of simplifying a fabrication process without an isolation process step.
摘要:
An electromagnetic x-y stage driver for a nano data storage system and a method for fabricating the coils of the same are provided. In the electromagnetic x-y stage driver, a cantilever tip array fixedly provided a medium for recording data to write data to or read data from each cell of the medium. Four coils are formed to be integrated with the medium in front of, behind, to the left of and to the right of the medium to move the medium. Four supporting beam are installed to an x-y stage body onto which a medium structure composed of the medium and the four coils is loaded such that the four supporting beam are connected to the four corners of the medium structure to support the medium structure. Four driving beams connect the upper portions of the supporting beam to the four corners of the medium structure to allow the medium structure to move in an x or y direction. Stiffeners are disposed at the four sides between the supporting beam to prevent the medium structure from rotating. Four pairs of permanent magnets are disposed above and below the four coils so that the four pairs of the permanent magnets correspond to the four coils, respectively. Four yokes are provided so that each of them joins the edges of the upper and lower permanent magnets of each of the four pairs of the permanent magnets to allow the magnetic flux of the permanent magnets to form a closed loop.
摘要:
An apparatus for recording and reading data by measuring contact resistance and a method for recording and reading data thereof are provided. The apparatus for recording and reading data includes a storage medium and a probe which is installed to face the storage medium and is used for recording data on the storage medium and reading the data from the storage medium. The storage medium includes a substrate, a conductive layer formed on the substrate and a dielectric layer formed on the conductive layer. With the apparatus for recording and reading data, it is possible to solve problems concerning data retention, data read speed and signal-to-noise ratio which have been at issue in developing data storage media with the use of conventional scanning probe microscopic techniques.
摘要:
A rotary microactuator having optimally curved electrodes is provided. The rotary microactuator is optimally designed so that the interval between two electrodes, which are a rotor and a stator, is constant regardless of a distance from the central axis of the rotor. Thus, a parallel-plate configuration can generate a maximum driving force, and also can widen a driving range. In particular, in a rotary microactuator using parallel-plate configuration electrodes, the electrodes are optimally designed so that the interval between the electrodes remains constant regardless the radius by tilting the electrodes or by zigzagging the electrodes. Therefore, a driving force per a given area can be maximized.
摘要:
In a method and an apparatus for managing an album, when a user inputs a desired album title, texts of the desired album title are recognized and arranged, and a folder corresponding to the album title is automatically generated. Thus, convenience of the user is improved.
摘要:
A digital image processing apparatus configured to display a guide image of a previously captured image in a portion of a screen and a live view image in another portion of the screen, and configured to notify a user when the guide image and the live view image match each other. A method of operating a digital image processing apparatus that includes displaying a guide image on a display and trimming a central portion of the guide image; displaying a live view image in a central area of the display where the guide image is not displayed; and capturing the live view image when the guide image and the live view image are matched with each other.
摘要:
A digital image processing apparatus configured to display a guide image of a previously captured image in a portion of a screen and a live view image in another portion of the screen, and configured to notify a user when the guide image and the live view image match each other. A method of operating a digital image processing apparatus that includes displaying a guide image on a display and trimming a central portion of the guide image; displaying a live view image in a central area of the display where the guide image is not displayed; and capturing the live view image when the guide image and the live view image are matched with each other.
摘要:
A method of controlling a digital photographing apparatus includes providing a touchscreen input view on a touchscreen and inputting a touchscreen composition input drawn by a user on the touchscreen. The touchscreen composition input may represent a picture of a desired composition. When the touchscreen composition input is completely drawn, the touchscreen composition input may be displayed in a live view along with a live view input. The touchscreen composition input may be displayed in such a manner that the touchscreen composition input overlaps with the live view input in the live view.