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公开(公告)号：US06855637B2
公开(公告)日：2005-02-15
申请号：US10478479
申请日：2002-07-01
IPC分类号： H03H3/08 , H03H9/145 , H01L21/302 , H01L21/461
CPC分类号： H03H9/14538 , H03H3/08
摘要： Provided is a method of manufacturing surface acoustic wave (SAW) devices having a first conductive pattern and a second conductive pattern of different thicknesses on one piezoelectric substrate. Combination of a plurality of steps of forming metal films and etching steps allows accurate production of SAW devices having a plurality of electrodes of different thicknesses on one piezoelectric substrate.
摘要翻译： 提供一种在一个压电基板上制造具有不同厚度的第一导电图案和第二导电图案的表面声波（SAW）器件的方法。 组合形成金属膜的多个步骤和蚀刻步骤允许在一个压电基板上精确生产具有多个不同厚度的电极的SAW器件。
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公开(公告)号：US07030539B2
公开(公告)日：2006-04-18
申请号：US10432499
申请日：2002-09-26
CPC分类号： H03H9/02921 , H03H3/08 , H03H9/14538
摘要： In a surface acoustic wave device, a common portion and a strip portion of a reflector electrode are partially cut off to increase a space between the electrodes. The increase of the space between the electrodes reduces the influence of the amount of charges and the influence of an unbalance between the amounts of charges in etching of a metallic film, thereby preventing the electrodes from having a curved shape in section. Consequently, the surface acoustic wave device has a reduced propagation loss.
摘要翻译： 在声表面波装置中，反射器电极的公共部分和带状部分被部分切断以增加电极之间的空间。 电极之间的空间的增加减少了金属膜的蚀刻中的电荷量的影响和电荷量之间的不平衡的影响，从而防止电极具有弯曲形状的截面。 因此，表面声波装置的传播损失减小。
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3.发明申请公开(公告)号：US20050035830A1
公开(公告)日：2005-02-17
申请号：US10629633
申请日：2003-07-30
CPC分类号： H03H9/02992 , H03H3/08 , H03H9/02921 , Y10T29/42 , Y10T29/49005 , Y10T29/49007 , Y10T29/49128 , Y10T29/49144 , Y10T29/49156 , Y10T29/49794 , Y10T29/49798
摘要： A SAW element of the present invention includes a plurality of inter-digital transducer (IDT) electrodes on a piezoelectric substrate, grating reflector electrodes disposed on the sides of the IDT electrodes, and a plurality of pad electrodes led from the IDT electrodes and the grating reflector electrodes. A plurality of the pad electrodes includes isolated pad electrodes not directly opposed to the outer periphery of the SAW element, and adjacent pad electrodes directly opposed to the outer periphery thereof A connecting electrode between the isolated pad electrode and the adjacent pad electrode is removed by etching at least before dicing in order to prevent discharge from occurring due to pyroelectricity, and to prevent the electrodes from being damaged.
摘要翻译： 本发明的SAW元件包括在压电基板上的多个数字间换能器（IDT）电极，设置在IDT电极的侧面的光栅反射器电极和从IDT电极和光栅引出的多个焊盘电极 反射器电极。 多个焊盘电极包括不直接与SAW元件的外周直接相对的隔离焊盘电极和与其外周直接相对的相邻焊盘电极。隔离焊盘电极和相邻焊盘电极之间的连接电极通过蚀刻去除 至少在切割之前为了防止由于热电从而发生放电，并且防止电极被损坏。
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4.发明授权Surface acoustic wave device, electronic component using the device, and composite module 有权表面声波装置，使用该装置的电子部件和复合模块公开(公告)号：US06937114B2
公开(公告)日：2005-08-30
申请号：US10469482
申请日：2002-12-25
CPC分类号： H03H9/14541 , H03H9/02661
摘要： A surface acoustic wave device includes a piezoelectric substrate and an electrode provided on the substrate. The electrode includes a first metal layer provided on the piezoelectric substrate and having a trapezoid shape in the cross section and a second metal layer provided over the piezoelectric substrate at the same position as the first metal layer over the piezoelectric substrate. By controlling the shape of side surfaces of the electrode, the surface acoustic wave device hardly vary in a propagation frequency.
摘要翻译： 表面声波装置包括压电基板和设置在基板上的电极。 电极包括设置在压电基板上的第一金属层，并且在压电基板上与第一金属层相同的位置处设置在压电基板上方的第二金属层。 通过控制电极侧面的形状，表面声波装置在传播频率上几乎不变化。
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公开(公告)号：US06951047B2
公开(公告)日：2005-10-04
申请号：US10629633
申请日：2003-07-30
IPC分类号： H03H3/08 , H03H9/02 , H03H9/145 , H03H9/25 , H04R17/00 , H01L41/04 , H01L41/08 , H01L41/18 , H02N2/00
CPC分类号： H03H9/02992 , H03H3/08 , H03H9/02921 , Y10T29/42 , Y10T29/49005 , Y10T29/49007 , Y10T29/49128 , Y10T29/49144 , Y10T29/49156 , Y10T29/49794 , Y10T29/49798
摘要： A SAW element of the present invention includes a plurality of inter-digital transducer (IDT) electrodes on a piezoelectric substrate, grating reflector electrodes disposed on the sides of the IDT electrodes, and a plurality of pad electrodes led from the IDT electrodes and the grating reflector electrodes. A plurality of the pad electrodes includes isolated pad electrodes not directly opposed to the outer periphery of the SAW element, and adjacent pad electrodes directly opposed to the outer periphery thereof A connecting electrode between the isolated pad electrode and the adjacent pad electrode is removed by etching at least before dicing in order to prevent discharge from occurring due to pyroelectricity, and to prevent the electrodes from being damaged.
摘要翻译： 本发明的SAW元件包括在压电基板上的多个数字间换能器（IDT）电极，设置在IDT电极的侧面的光栅反射器电极和从IDT电极和光栅引出的多个焊盘电极 反射器电极。 多个焊盘电极包括不直接与SAW元件的外周直接相对的隔离焊盘电极和与其外周直接相对的相邻焊盘电极。隔离焊盘电极和相邻焊盘电极之间的连接电极通过蚀刻去除 至少在切割之前为了防止由于热电从而发生放电，并且防止电极被损坏。
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公开(公告)号：US20120280768A1
公开(公告)日：2012-11-08
申请号：US13521239
申请日：2011-12-14
IPC分类号： H03H9/25
CPC分类号： H03H9/725 , H01F38/14 , H03H9/0057 , H03H9/0547 , H03H9/0576 , H03H9/059 , H03H9/1071 , H03H9/12 , H03H9/14588 , H03H9/64
摘要： An elastic wave device includes a piezoelectric substrate, an IDT electrode disposed on the piezoelectric substrate, a wiring electrode disposed on the piezoelectric substrate and connected to the IDT electrode, a first insulator disposed on the piezoelectric substrate to seal the IDT electrode and the wiring electrode, a resin layer provided on the first insulator, an inductor electrode disposed on the resin layer, a second insulator disposed on the resin layer to cover the inductor electrode, a terminal electrode disposed on the second insulator, and a connecting electrode passing through the first insulator, the second insulator, and the resin layer to electrically connect the wiring electrode, the terminal electrode, and the inductor electrode. The first insulator includes a resin and filler dispersed in the resin. A density of filler in the resin layer is smaller than an average density of the filler in the first insulator. This elastic wave device has excellent characteristics of the inductor while reducing variations of the characteristics.
摘要翻译： 弹性波装置包括压电基片，设置在压电基片上的IDT电极，布置在压电基片上并与IDT电极连接的布线电极，设置在压电基片上以密封IDT电极和布线电极的第一绝缘体 设置在第一绝缘体上的树脂层，设置在树脂层上的电感器电极，设置在树脂层上以覆盖电感器电极的第二绝缘体，设置在第二绝缘体上的端子电极和穿过第一绝缘体的连接电极 绝缘体，第二绝缘体和树脂层，以电连接布线电极，端子电极和电感器电极。 第一绝缘体包括分散在树脂中的树脂和填料。 树脂层中填料的密度小于第一绝缘体中填料的平均密度。 该弹性波器件具有优异的电感特性，同时降低了特性的变化。
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公开(公告)号：US07652214B2
公开(公告)日：2010-01-26
申请号：US11575809
申请日：2006-10-30
IPC分类号： H01L23/48
CPC分类号： H03H9/1092 , H03H9/0576 , H03H9/1085
摘要： In an electronic component package in which an electronic component mounted on a mounting substrate via external electrodes placed on the mounting substrate is covered by a mold resin, the electronic component has a component cover which covers elements placed on the lower face of a component substrate, and which forms cavities, and a protective member which is lower in elastic modulus than the mold resin is disposed in a portion which excludes portions joined with the external electrodes in a lower face of the component cover, and which is opposed to the cavities.
摘要翻译： 在其中通过设置在安装基板上的外部电极安装在安装基板上的电子部件被模制树脂覆盖的电子部件封装中，电子部件具有覆盖部件基板的下表面上的元件的部件盖， 并且形成空腔，并且具有比模制树脂低的弹性模量的保护构件设置在不包括与组件盖的下表面中的外部电极接合的部分并且与空腔相对的部分中。
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8.发明授权Surface acoustic wave device and production method thereof and mobile communication equipment using it 有权声表面波装置及其制作方法及其使用的移动通信设备公开(公告)号：US06297580B1
公开(公告)日：2001-10-02
申请号：US09446247
申请日：2000-03-28
IPC分类号： H01L4104
CPC分类号： H03H9/02929 , H03H9/14541 , H03H9/6483
摘要： As the electrode material of a surface acoustic wave device, a laminated body laminating a second metal layer 5 on a first metal layer 4 is stacked up in two or more stages, and the first metal layer 4 is a metal of which coefficient of diffusion to Al is smaller than the coefficient of self diffusion of Al, and the second metal layer 5 is composed of an Al alloy of three elements or more containing at least one or more metals which forms solid solution with Al at ordinary temperature, and at least one or more metals forming segregation at the grain boundary of Al or an intermetallic compound with Al at ordinary temperature, and therefore the surface acoustic wave device excellent in electric power tolerance, compatible with the conventional pattern forming technology, stable thermally, and capable of preventing increase of insertion loss can be obtained.
摘要翻译： 作为表面声波装置的电极材料，在第一金属层4上层叠第二金属层5的层叠体以两级以上的层叠形成，第一金属层4为扩散系数为 Al小于Al的自扩散系数，第二金属层5由含有至少一种以上在常温下与Al形成固溶体的金属的三种以上的Al合金构成，至少一种 或更多的金属在常温下在Al的晶界处形成偏析或与Al的金属间化合物，因此具有优异的电力公差的表面声波装置，与常规图案形成技术相容，热稳定并且能够防止增加 的插入损失。
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公开(公告)号：US09124239B2
公开(公告)日：2015-09-01
申请号：US13521239
申请日：2011-12-14
CPC分类号： H03H9/725 , H01F38/14 , H03H9/0057 , H03H9/0547 , H03H9/0576 , H03H9/059 , H03H9/1071 , H03H9/12 , H03H9/14588 , H03H9/64
摘要： An elastic wave device includes a piezoelectric substrate, an IDT electrode disposed on the piezoelectric substrate, a wiring electrode disposed on the piezoelectric substrate and connected to the IDT electrode, a first insulator disposed on the piezoelectric substrate to seal the IDT electrode and the wiring electrode, a resin layer provided on the first insulator, an inductor electrode disposed on the resin layer, a second insulator disposed on the resin layer to cover the inductor electrode, a terminal electrode disposed on the second insulator, and a connecting electrode passing through the first insulator, the second insulator, and the resin layer to electrically connect the wiring electrode, the terminal electrode, and the inductor electrode. The first insulator includes a resin and filler dispersed in the resin. A density of filler in the resin layer is smaller than an average density of the filler in the first insulator. This elastic wave device has excellent characteristics of the inductor while reducing variations of the characteristics.
摘要翻译： 弹性波装置包括压电基片，设置在压电基片上的IDT电极，布置在压电基片上并与IDT电极连接的布线电极，设置在压电基片上以密封IDT电极和布线电极的第一绝缘体 设置在第一绝缘体上的树脂层，设置在树脂层上的电感器电极，设置在树脂层上以覆盖电感器电极的第二绝缘体，设置在第二绝缘体上的端子电极和穿过第一绝缘体的连接电极 绝缘体，第二绝缘体和树脂层，以电连接布线电极，端子电极和电感器电极。 第一绝缘体包括分散在树脂中的树脂和填料。 树脂层中填料的密度小于第一绝缘体中填料的平均密度。 该弹性波器件具有优异的电感特性，同时降低了特性的变化。
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10.发明授权公开(公告)号：US09099981B2
公开(公告)日：2015-08-04
申请号：US13511508
申请日：2011-01-20
CPC分类号： H03H9/02992 , H03H9/02937
摘要： An acoustic wave device includes a piezoelectric substrate, a first wiring disposed on an upper surface of the piezoelectric substrate, an organic insulator covering at least a portion of the first wiring, a second wiring disposed on a first portion of the upper surface of the organic insulator, and an inorganic insulator covering at least a second portion of an upper surface of the organic insulator. The second portion of the upper surface of the organic insulator faces an oscillation space across the inorganic insulator. The acoustic wave device has preferable high-frequency characteristics and high long-term reliability.
摘要翻译： 声波装置包括压电基板，设置在压电基板的上表面上的第一布线，覆盖第一布线的至少一部分的有机绝缘体，布置在有机层的上表面的第一部分上的第二布线 绝缘体和覆盖有机绝缘体的上表面的至少第二部分的无机绝缘体。 有机绝缘体的上表面的第二部分面向横跨无机绝缘体的振荡空间。 声波装置具有优选的高频特性和高的长期可靠性。
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