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    Sensor chip and storage method thereof
    1.
    发明授权
    Sensor chip and storage method thereof 有权
    传感器芯片及其存储方法

    公开(公告)号：US08702930B2

    公开(公告)日：2014-04-22

    申请号：US13636976

    申请日：2012-01-11

    申请人： Kiyoshi Hashimotodani ,  Yusuke Nakano ,  Masaya Nakatani ,  Takeki Yamamoto ,  Yoshiki Yamada ,  Takuya Oka ,  Hiroshi Ushio

    发明人： Kiyoshi Hashimotodani ,  Yusuke Nakano ,  Masaya Nakatani ,  Takeki Yamamoto ,  Yoshiki Yamada ,  Takuya Oka ,  Hiroshi Ushio

    IPC分类号： G01N33/487 ,  G01N27/28

    CPC分类号： G01N33/48728 ,  Y10T428/31663

    摘要： A sensor chip is a sensor device for measuring a property of a substance by adsorbing the substance on a surface of the sensor chip. The sensor chip includes a diaphragm having a first surface, a second surface, and at least one through hole penetrating from the first surface to the second surface. At least a part of the first surface, the second surface, and an inner wall surface of the through hole is covered with a noncrystalline solid layer including SiOX as a main component, in which substance X is an element having higher electronegativity than that of silicon.

    摘要翻译： 传感器芯片是用于通过将物质吸附在传感器芯片的表面上来测量物质的性质的传感器装置。 传感器芯片包括具有第一表面，第二表面和从第一表面穿透到第二表面的至少一个通孔的隔膜。 第一表面，第二表面和通孔的内壁表面的至少一部分被包括SiO x作为主要成分的非结晶固体层覆盖，其中物质X是比硅的电负性高的元素 。

    SENSOR DEVICE
    3.
    发明申请
    SENSOR DEVICE 审中-公开
    传感器设备

    公开(公告)号：US20120325657A1

    公开(公告)日：2012-12-27

    申请号：US13603145

    申请日：2012-09-04

    申请人： Takeki Yamamoto ,  Masaya Nakatani ,  Hiroshi Ushio ,  Yoshiki Yamada ,  Yusuke Nakano

    发明人： Takeki Yamamoto ,  Masaya Nakatani ,  Hiroshi Ushio ,  Yoshiki Yamada ,  Yusuke Nakano

    IPC分类号： G01N27/28

    CPC分类号： G01N33/48728 ,  G01N27/08

    摘要： A sensor device includes a substrate and a sensor chip held on the substrate. The substrate includes a flow channel. The sensor chip includes a plate. The plate includes a first surface and a second surface opposite to the first surface. A plurality of through holes each penetrates through the first surface and the second surface. A direction of a line segment connecting centers of any two adjacent through holes among the plurality of through holes is neither parallel nor perpendicular to the center line of the flow channel.

    摘要翻译： 传感器装置包括基板和保持在基板上的传感器芯片。 衬底包括流动通道。 传感器芯片包括一个板。 板包括与第一表面相对的第一表面和第二表面。 多个通孔各自穿过第一表面和第二表面。 连接多个通孔中任意两个相邻通孔的中心的线段的方向既不平行也不垂直于流动通道的中心线。

    CELLULAR ELECTROPHYSIOLOGY SENSOR CHIP AND CELLULAR ELECTROPHYSIOLOGY SENSOR USING THE CHIP, AND METHOD OF MANUFACTURING CELLULAR ELECTROPHYSIOLOGY SENSOR CHIP
    5.
    发明申请
    CELLULAR ELECTROPHYSIOLOGY SENSOR CHIP AND CELLULAR ELECTROPHYSIOLOGY SENSOR USING THE CHIP, AND METHOD OF MANUFACTURING CELLULAR ELECTROPHYSIOLOGY SENSOR CHIP 审中-公开
    使用芯片的细胞电生理学传感器芯片和细胞电生理学传感器以及制造细胞电生理学传感器芯片的方法

    公开(公告)号：US20110120864A1

    公开(公告)日：2011-05-26

    申请号：US12677977

    申请日：2009-07-22

    申请人： Makoto Takahashi ,  Masaya Nakatani ,  Hiroshi Ushio ,  Takeki Yamamoto

    发明人： Makoto Takahashi ,  Masaya Nakatani ,  Hiroshi Ushio ,  Takeki Yamamoto

    IPC分类号： G01N33/487 ,  B32B37/00

    CPC分类号： H01L21/02356 ,  G01N33/48728

    摘要： A cellular electrophysiology sensor is adapted to measure an electrical change of a test cell. A chip for the sensor includes a diaphragm, and a thermally-oxidized film mainly containing silicon dioxide on the diaphragm. The diaphragm includes a silicon layer and a silicon dioxide layer on an upper surface of the silicon layer. A through-hole passing through the silicon layer and the silicon dioxide layer is formed. The through-hole has an opening which opens at the silicon dioxide layer and is adapted to capture the test cell. The thermally-oxidized film is provided on an inner wall surface of the through-hole, and unified with the silicon dioxide layer at the opening of the through-hole. This cellular electrophysiology sensor chip can stably capture the test cell and provides a gigaseal stably even if test cells have different properties,

    摘要翻译： 细胞电生理学传感器适于测量测试电池的电气变化。 用于传感器的芯片包括隔膜以及在隔膜上主要含有二氧化硅的热氧化膜。 隔膜在硅层的上表面上包括硅层和二氧化硅层。 形成穿过硅层和二氧化硅层的通孔。 通孔具有在二氧化硅层处开口并且适于捕获测试电池的开口。 热氧化膜设置在通孔的内壁表面上，并且在通孔的开口处与二氧化硅层一体化。 这种细胞电生理学传感器芯片可以稳定地捕获测试细胞，并且即使测试细胞具有不同的性质也能稳定地提供gigaseal，

    Surface plasmon resonance sensor, localized plasmon resonance sensor, and method for manufacturing same
    8.
    发明授权
    Surface plasmon resonance sensor, localized plasmon resonance sensor, and method for manufacturing same 有权
    表面等离子体共振传感器，局部等离子体共振传感器及其制造方法

    公开(公告)号：US08699032B2

    公开(公告)日：2014-04-15

    申请号：US13142491

    申请日：2010-01-25

    申请人： Masaya Nakatani ,  Takeki Yamamoto

    发明人： Masaya Nakatani ,  Takeki Yamamoto

    IPC分类号： G01N21/55

    CPC分类号： G01N21/554 ,  G01N33/54373

    摘要： A surface plasmon resonance sensor includes a substrate, a dielectric film having a nonlinear optical effect on a first surface of the substrate, and a probe fixed to the dielectric film. A plasmon resonance is produced by resonating a surface plasmon generated on the first surface of the substrate with an evanescent wave generated on a second surface of the substrate by incident light radiated to the second surface. The plasmon resonance is detected by measuring a change of a component of light reflected on the second surface of the substrate. The component of the reflected light is caused by the nonlinear optical effect. This surface plasmon resonance sensor has a high measuring sensitivity.

    摘要翻译： 表面等离子体共振传感器包括衬底，在衬底的第一表面上具有非线性光学效应的电介质膜和固定到电介质膜的探针。 通过在辐射到第二表面的入射光使在衬底的第二表面上产生的ev逝波谐振产生在衬底的第一表面上的表面等离子体激元来产生等离子体共振。 通过测量在基板的第二表面上反射的光的分量的变化来检测等离子体共振。 反射光的分量是由非线性光学效应引起的。 该表面等离子体共振传感器具有高的测量灵敏度。

    SURFACE PLASMON RESONANCE SENSOR, LOCALIZED PLASMON RESONANCE SENSOR, AND METHOD FOR MANUFACTURING SAME
    9.
    发明申请
    SURFACE PLASMON RESONANCE SENSOR, LOCALIZED PLASMON RESONANCE SENSOR, AND METHOD FOR MANUFACTURING SAME 有权
    表面等离子体共振传感器，本地化的PLASMON谐振传感器及其制造方法

    公开(公告)号：US20110267621A1

    公开(公告)日：2011-11-03

    申请号：US13142491

    申请日：2010-01-25

    申请人： Masaya Nakatani ,  Takeki Yamamoto

    发明人： Masaya Nakatani ,  Takeki Yamamoto

    IPC分类号： G01N21/55 ,  H01L21/66

    CPC分类号： G01N21/554 ,  G01N33/54373

    摘要： A surface plasmon resonance sensor includes a substrate, a dielectric film having a nonlinear optical effect on a first surface of the substrate, and a probe fixed to the dielectric film. A plasmon resonance is produced by resonating a surface plasmon generated on the first surface of the substrate with an evanescent wave generated on a second surface of the substrate by incident light radiated to the second surface. The plasmon resonance is detected by measuring a change of a component of light reflected on the second surface of the substrate. The component of the reflected light is caused by the nonlinear optical effect. This surface plasmon resonance sensor has a high measuring sensitivity.

    摘要翻译： 表面等离子体共振传感器包括衬底，在衬底的第一表面上具有非线性光学效应的电介质膜和固定到电介质膜的探针。 通过在辐射到第二表面的入射光使在衬底的第二表面上产生的ev逝波谐振产生在衬底的第一表面上的表面等离子体激元来产生等离子体共振。 通过测量在基板的第二表面上反射的光的分量的变化来检测等离子体共振。 反射光的分量是由非线性光学效应引起的。 该表面等离子体共振传感器具有高测量灵敏度。