公开(公告)号：US06557414B2

公开(公告)日：2003-05-06

申请号：US09970710

申请日：2001-10-05

申请人： Kohei Sakurai ,  Masahiro Komachiya ,  Masahiro Matsumoto ,  Seikou Suzuki

发明人： Kohei Sakurai ,  Masahiro Komachiya ,  Masahiro Matsumoto ,  Seikou Suzuki

IPC分类号： G01C1900

CPC分类号： G01P15/11 ,  G01C19/56 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/123 ,  G01P15/125 ,  G01P2015/0814

摘要： A sensor device has a sensing layer and an auxiliary layer for supporting the sensing layer, the two layers being superposed on each other in a laminar form. The sensing layer has a vibratory body displaceable in a direction parallel to a junction surface between the two layers. The auxiliary layer is affixed to the sensing layer and a recess or through-hole of a larger area than that of the vibratory body is formed in the auxiliary layer at a part thereof confronting the vibratory body.

公开(公告)号：US5877425A

公开(公告)日：1999-03-02

申请号：US771922

申请日：1996-12-23

申请人： Seiko Suzuki ,  Masayuki Miki ,  Satoshi Shimada ,  Masahiro Matsumoto ,  Masahiro Komachiya

发明人： Seiko Suzuki ,  Masayuki Miki ,  Satoshi Shimada ,  Masahiro Matsumoto ,  Masahiro Komachiya

IPC分类号： G01L9/04 ,  F02D35/00 ,  G01L9/00 ,  G01L23/18 ,  G01L9/06

CPC分类号： G01L9/006 ,  G01L19/147 ,  G01L23/18 ,  G01L9/0051

摘要： A combustion pressure sensor suitable for a highly precise combustion control system of an automobile engine and a sensing system using the sensor. The combustion pressure sensor includes a SOI substrate having a three-layered structure of a first silicon plate, a thermal oxide film, and a second silicon plate, wherein a combustion pressure is sensed on the basis of a pressure or a force applied to the first silicon plate.

摘要翻译： 适用于汽车发动机的高精度燃烧控制系统的燃烧压力传感器和使用该传感器的感测系统。 燃烧压力传感器包括具有第一硅板，热氧化膜和第二硅板的三层结构的SOI衬底，其中基于施加到第一硅板的压力或力来感测燃烧压力 硅板。

公开(公告)号：US06188340B1

公开(公告)日：2001-02-13

申请号：US09167984

申请日：1998-10-08

申请人： Masahiro Matsumoto ,  Satoshi Shimada ,  Seikou Suzuki ,  Akihiko Saito ,  Atsushi Miyazaki ,  Keiji Hanzawa

发明人： Masahiro Matsumoto ,  Satoshi Shimada ,  Seikou Suzuki ,  Akihiko Saito ,  Atsushi Miyazaki ,  Keiji Hanzawa

IPC分类号： H03M100

CPC分类号： G01D3/022 ,  G01D3/02

摘要： A sensor adjusting circuit for adjusting a digital sensor, whose circuit scale is small and which can maintain high accuracy in a wide adjustment range is provided. A sensor adjusting circuit for adjusting an analog input signal inputted from a sensor and outputting it as another analog output signal in accordance with a physical quantity to be sensed, comprises: a first analog-to-digital converter having an analog integrator (2) for integrating the analog input signal, a comparator (3) for comparing an output of the analog integrator with a predetermined value, and a D/A converter (7) for outputting an output of the comparator as the input signal; and a second digital-to-analog converter (5) for converting the output of the comparator and outputting it as the analog output signal.

摘要翻译： 提供了一种用于调整数字传感器的传感器调节电路，其电路规模小并且可以在宽的调节范围内保持高精度。 一种传感器调节电路，用于调节从传感器输入的模拟输入信号，并根据要感测的物理量将其输出为另一个模拟输出信号，包括：第一模数转换器，具有模拟积分器（2），用于 积分模拟输入信号，比较器（3），用于将模拟积分器的输出与预定值进行比较;以及D / A转换器（7），用于输出比较器的输出作为输入信号; 以及用于转换比较器的输出并将其作为模拟输出信号输出的第二数模转换器（5）。

公开(公告)号：US06167761A

公开(公告)日：2001-01-02

申请号：US09103612

申请日：1998-06-24

申请人： Keiji Hanzawa ,  Akio Yasukawa ,  Satoshi Shimada ,  Seikou Suzuki ,  Akihiko Saito ,  Masahiro Matsumoto ,  Atsushi Miyazaki ,  Norio Ichikawa ,  Junichi Horie ,  Seiji Kuryu

发明人： Keiji Hanzawa ,  Akio Yasukawa ,  Satoshi Shimada ,  Seikou Suzuki ,  Akihiko Saito ,  Masahiro Matsumoto ,  Atsushi Miyazaki ,  Norio Ichikawa ,  Junichi Horie ,  Seiji Kuryu

IPC分类号： G01L912

CPC分类号： G01L9/0073

摘要： In a capacitance type pressure sensor, a diaphragm is formed of a fragile material using an impurity-diffused monocrystal silicon and constitutes a stable pressure-responsive structure which does not undergo a plastic deformation. Between the diaphragm and a movable electrode is formed an oxide film to diminish stray capacitance between the movable electrode and a substrate and also between the movable electrode and a impurity-diffused layer. The oxide film and the movable electrode are each divided into plural regions so that the divided regions of the movable electrode are formed on the divided regions of the oxide film, thereby diminishing stress strain induced by a difference in therm expansion coefficient among the diaphragm, oxide film and movable electrode. The upper surface of a fixed electrode is covered with a structure for the fixed electrode which structure is formed by an insulating polycrystal silicon film not doped with impurity whereby the rigidity of the electrode is enhanced and it is possible to diminish a leak current.

摘要翻译： 在电容式压力传感器中，使用杂质扩散的单晶硅由脆性材料形成隔膜，构成不发生塑性变形的稳定的压力响应结构。 在隔膜和可动电极之间形成氧化膜，以减小可动电极和基板之间以及可移动电极和杂质扩散层之间的杂散电容。 氧化物膜和可动电极分别分成多个区域，使得可动电极的分割区域形成在氧化膜的分割区域上，从而减小由隔膜，氧化物中的热膨胀系数差引起的应力应变 薄膜和可动电极。 固定电极的上表面被固定电极的结构覆盖，该结构由不掺杂杂质的绝缘多晶硅膜形成，由此电极的刚性增强并且可以减小漏电流。

公开(公告)号：US20060239063A1

公开(公告)日：2006-10-26

申请号：US11430975

申请日：2006-05-10

申请人： Masahiro Matsumoto ,  Satoshi Shimada ,  Seikou Suzuki ,  Akihiko Saito ,  Atsushi Miyazaki ,  Keiji Hanzawa

发明人： Masahiro Matsumoto ,  Satoshi Shimada ,  Seikou Suzuki ,  Akihiko Saito ,  Atsushi Miyazaki ,  Keiji Hanzawa

IPC分类号： G11C11/00

CPC分类号： G01D3/022 ,  G01D3/02

摘要： A sensor adjusting circuit for adjusting a digital sensor, whose circuit scale is small and which can maintain high accuracy in a wide adjustment range is provided. A sensor adjusting circuit for adjusting an analog input signal inputted from a sensor and outputting it as another analog output signal in accordance with a physical quantity to be sensed, comprises: a first analog-to-digital converter having an analog integrator (2) for integrating the analog input signal, a comparator (3) for comparing an output of the analog integrator with a predetermined value, and a D/A converter (7) for outputting an output of the comparator as the input signal; and a second digital-to-analog converter (5) for converting the output of the comparator and outputting it as the analog output signal.

摘要翻译： 提供了一种用于调整数字传感器的传感器调节电路，其电路规模小并且可以在宽的调节范围内保持高精度。 一种传感器调节电路，用于调节从传感器输入的模拟输入信号，并根据要感测的物理量将其输出为另一个模拟输出信号，包括：第一模数转换器，具有模拟积分器（2），用于 积分模拟输入信号，比较器（3），用于将模拟积分器的输出与预定值进行比较;以及D / A转换器（7），用于输出比较器的输出作为输入信号; 以及用于转换比较器的输出并将其作为模拟输出信号输出的第二数模转换器（5）。

公开(公告)号：US06566742B1

公开(公告)日：2003-05-20

申请号：US09722530

申请日：2000-11-28

申请人： Masahiro Matsumoto ,  Seikou Suzuki ,  Masayuki Miki

发明人： Masahiro Matsumoto ,  Seikou Suzuki ,  Masayuki Miki

IPC分类号： H01L2302

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/0828 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2924/00014 ,  H01L2924/00

摘要： An acceleration sensor is disclosed which includes a capacitance-type acceleration detection element mounted on a ceramic base plate. The element comprises a movable electrode mounted between a pair of fixed electrodes. Acceleration of the sensor in a measurement direction causes the movable electrode to move relative to the fixed electrodes and the element has opposite ends in a direction perpendicular to the measurement direction. The acceleration detection element is mounted on the base at a first one of the opposite ends. Accordingly, the mounting surface of the acceleration sensor is parallel to the direction of acceleration to be detected. Thus the acceleration sensor can be surface-mounted on a printed board, and more be easily mounted in an automobile air bag control system or the like.

摘要翻译： 公开了一种加速度传感器，其包括安装在陶瓷基板上的电容式加速度检测元件。 元件包括安装在一对固定电极之间的可动电极。 传感器在测量方向的加速使得可动电极相对于固定电极移动，并且元件在垂直于测量方向的方向上具有相对端。 加速度检测元件在相对端的第一个处安装在基座上。 因此，加速度传感器的安装面平行于要检测的加速度方向。 因此，加速度传感器可以表面安装在印刷电路板上，并且更容易地安装在汽车安全气囊控制系统等中。

公开(公告)号：US06561030B2

公开(公告)日：2003-05-13

申请号：US09867523

申请日：2001-05-31

申请人： Masahiro Matsumoto ,  Seikou Suzuki ,  Masayuki Miki

发明人： Masahiro Matsumoto ,  Seikou Suzuki ,  Masayuki Miki

IPC分类号： G01D15125

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/0828 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48137 ,  H01L2924/00014 ,  H01L2924/00

摘要： An acceleration sensor is disclosed which includes a capacitance-type acceleration detection element mounted on a ceramic base plate. The element comprises a movable electrode mounted between a pair of fixed electrodes. Acceleration of the sensor in a measurement direction causes the movable electrode to move relative to the fixed electrodes and the element has opposite ends in a direction perpendicular to the measurement direction. The acceleration detection element is mounted on the base at a first one of the opposite ends. Accordingly, the mounting surface of the acceleration sensor is parallel to the direction of acceleration to be detected. Thus the acceleration sensor can be surface-mounted on a printed board, and more be easily mounted in an automobile air bag control system or the like.

公开(公告)号：US5095750A

公开(公告)日：1992-03-17

申请号：US542823

申请日：1990-06-25

申请人： Seikou Suzuki ,  Shigeki Tsuchitani ,  Satoshi Shimada ,  Masayuki Miki ,  Shigeyuki Kobori ,  Masahiro Matsumoto

发明人： Seikou Suzuki ,  Shigeki Tsuchitani ,  Satoshi Shimada ,  Masayuki Miki ,  Shigeyuki Kobori ,  Masahiro Matsumoto

IPC分类号： G01P15/125 ,  G01P15/13

CPC分类号： G01P15/131 ,  G01P15/125 ,  G01P2015/0828

摘要： An accelerometer having a movable electrode which is moved according to acceleration with respect to a fixed electrode disposed in opposition to the movable electrode. An output device generates an output voltage which is proportional to the acceleration by measuring a gap between the movable electrode and the fixed electrode. A pulse width modulator generates pulses, wherein a pulse width of the pulses is modulated according to the output voltage, and a feedback device feeds back an electrostatic force which is proportional to the pulse width of the pulses from the pulse modulator between the movable electrode and the fixed electrode. As the acceleration in the acceleration sensor is linearly detected, the acceleration sensor is easily adjusted.

公开(公告)号：US4921345A

公开(公告)日：1990-05-01

申请号：US240625

申请日：1988-09-06

申请人： Shigeki Tsuchitani ,  Seikou Suzuki ,  Masahiro Matsumoto

发明人： Shigeki Tsuchitani ,  Seikou Suzuki ,  Masahiro Matsumoto

IPC分类号： G01P3/36

CPC分类号： G01P3/36

摘要： Light equipment is provided for irradiating the measuring object and forming light spot on it through the collimate lens. Reflected light from the measuring object is incident to the spatial filter through the objective lens for detecting the incidence position of the reflected light. A distance measuring circuit calculates contiuously the distance (d) between the objective lens and the measuring object by optical triangulation based on the output signal from the spatial filter. The frequency detecting circuit is connected to the spatial filter. When the sought running speed is V, the pitch between each equivalent light receiving element p, and the magnification of the optical image of the measuring object M, the frequency detecting circuit measures the frequency f which is given by the formula of F=MV/p. The calculator calculates the velocity V based on the output signal from the distance measuring circuit and on the output signal from the frequency detecting circuit.

摘要翻译： 光设备用于照射测量对象并通过准直透镜在其上形成光点。 来自测量对象的反射光通过物镜入射到空间滤光器，用于检测反射光的入射位置。 距离测量电路基于空间滤波器的输出信号，通过光学三角测量来连续计算物镜与测量对象之间的距离（d）。 频率检测电路连接到空间滤波器。 当所寻求的运行速度为V时，每个等效光接收元件p之间的间距和测量对象M的光学图像的放大倍率，频率检测电路测量由F = MV / p。 计算器根据距离测量电路的输出信号和频率检测电路的输出信号计算速度V.

公开(公告)号：US07426154B2

公开(公告)日：2008-09-16

申请号：US11430975

申请日：2006-05-10

申请人： Masahiro Matsumoto ,  Satoshi Shimada ,  Seikou Suzuki ,  Akihiko Saito ,  Atsushi Miyazaki ,  Keiji Hanzawa

发明人： Masahiro Matsumoto ,  Satoshi Shimada ,  Seikou Suzuki ,  Akihiko Saito ,  Atsushi Miyazaki ,  Keiji Hanzawa

IPC分类号： G11C8/00 ,  G06F9/46

CPC分类号： G01D3/022 ,  G01D3/02

摘要： A sensor adjusting circuit for adjusting a digital sensor, whose circuit scale is small and which can maintain high accuracy in a wide adjustment range is provided. A sensor adjusting circuit for adjusting an analog input signal inputted from a sensor and outputting it as another analog output signal in accordance with a physical quantity to be sensed, comprises: a first analog-to-digital converter having an analog integrator (2) for integrating the analog input signal, a comparator (3) for comparing an output of the analog integrator with a predetermined value, and a D/A converter (7) for outputting an output of the comparator as the input signal; and a second digital-to-analog converter (5) for converting the output of the comparator and outputting it as the analog output signal.

摘要翻译： 提供了一种用于调整数字传感器的传感器调节电路，其电路规模小并且可以在宽的调节范围内保持高精度。 一种传感器调节电路，用于调节从传感器输入的模拟输入信号，并根据要感测的物理量将其输出为另一个模拟输出信号，包括：第一模数转换器，具有模拟积分器（2），用于 积分模拟输入信号，比较器（3），用于将模拟积分器的输出与预定值进行比较;以及D / A转换器（7），用于输出比较器的输出作为输入信号; 以及用于转换比较器的输出并将其作为模拟输出信号输出的第二数模转换器（5）。