公开(公告)号：US4769750A

公开(公告)日：1988-09-06

申请号：US918131

申请日：1986-10-14

申请人： Koichi Matsumoto ,  Makoto Uehara ,  Tetsuo Kikuchi

发明人： Koichi Matsumoto ,  Makoto Uehara ,  Tetsuo Kikuchi

IPC分类号： G02B3/00 ,  G02B19/00 ,  G02B27/09 ,  G03F7/20 ,  F21V7/04 ,  G03B21/14

CPC分类号： G02B27/0961 ,  G02B19/0014 ,  G02B19/0047 ,  G02B27/09 ,  G02B3/0043 ,  G02B3/0056 ,  G02B3/0062 ,  G03F7/70058

摘要： An illumination optical system comprises a multi-beam generator which includes a plurality of each of two kinds of lens elements different in optical characteristics and which is interposed between a source for generating a collimated light beam and a light condenser. The multi-beam generator generates a large number of secondary light sources from the collimated light beam. The illumination optical system is capable of supplying illuminating light rays having an extremely uniform illumination distribution.

摘要翻译： 照明光学系统包括多光束发生器，其包括光学特性不同的两种透镜元件中的每一种，并且被插入在用于产生准直光束的光源和光聚光器之间。 多光束发生器从准直光束产生大量次级光源。 照明光学系统能够提供具有非常均匀的照明分布的照明光线。

公开(公告)号：US4795244A

公开(公告)日：1989-01-03

申请号：US906986

申请日：1986-09-15

申请人： Makoto Uehara ,  Koichi Matsumoto ,  Yutaka Suenaga ,  Kiyoyuki Muramatsu

发明人： Makoto Uehara ,  Koichi Matsumoto ,  Yutaka Suenaga ,  Kiyoyuki Muramatsu

IPC分类号： G03F7/20 ,  G03F9/00 ,  G01B11/00

CPC分类号： G03F7/70058 ,  G03F9/70

摘要： A projection type exposure apparatus for projecting an image of a pattern formed on a reticle onto a wafer in which the exposure is carried out with first light and the alignment between reticle and wafer is carried out with a second light having a wavelength different from that of the first light. The apparatus includes an optical member disposed between alignment optical system and projection optical system for reflecting the first light and transmitting the second light.

摘要翻译： 一种投影型曝光装置，用于将在掩模版上形成的图案的图像投影到用第一光进行曝光的晶片上，并且用掩模版和晶片之间的对准将第二光与 第一盏灯。 该装置包括设置在对准光学系统和投影光学系统之间的光学构件，用于反射第一光并透射第二光。

公开(公告)号：US4798962A

公开(公告)日：1989-01-17

申请号：US16120

申请日：1987-02-18

申请人： Koichi Matsumoto ,  Yutaka Suenaga ,  Makoto Uehara ,  Kiyoyuki Muramatsu

发明人： Koichi Matsumoto ,  Yutaka Suenaga ,  Makoto Uehara ,  Kiyoyuki Muramatsu

IPC分类号： G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  H01L21/67 ,  H01L21/68 ,  G01B11/00

CPC分类号： G03F9/70

摘要： A projection exposure apparatus has a pattern lighting optical system including an exposure light source for lighting a pattern on a photomask, a projection optical system for forming an image of the pattern lighted by the exposure light source on the surface of a wafer, an alignment lighting optical system including an alignment light source for lighting alignment marks on the photomask and the wafer, and an alignment optical system for detecting relative positional relationship between the mask pattern and the wafer through the projection optical system, and further the projection optical system includes an image-forming system which exhibits two extremums of axial aberration as a function of wavelength.

摘要翻译： 投影曝光装置具有图案照明光学系统，其包括用于点亮光掩模上的图案的曝光光源，用于在晶片表面上形成由曝光光源照射的图案的图像的投影光学系统，对准照明 光学系统，包括用于照明光掩模和晶片上的对准标记的对准光源，以及用于通过投影光学系统检测掩模图案和晶片之间的相对位置关系的对准光学系统，此外，投影光学系统包括图像 表现出作为波长的函数的两个轴向像差极值的系统。

公开(公告)号：US4789242A

公开(公告)日：1988-12-06

申请号：US894840

申请日：1986-08-08

申请人： Shuhei Takagi ,  Makoto Uehara ,  Koichi Matsumoto

发明人： Shuhei Takagi ,  Makoto Uehara ,  Koichi Matsumoto

IPC分类号： G02B27/46 ,  G01B11/00 ,  G01S17/02 ,  G03F9/00 ,  H01L21/027

CPC分类号： G03F9/70 ,  G01S17/02

摘要： An optical apparatus comprising a laser light source, an optical system for focusing a beam of light from the laser light source onto an object surface through an objective lens and a spatial filter disposed at the entrance pupil of the objective lens or at a position conjugated with the entrance pupil, wherein the origin of the divergence of the laser beam having an angle of divergence emitted from the laser light source is projected on the entrance pupil of the objective lens by the optical system.

摘要翻译： 一种光学装置，包括激光光源，用于通过物镜将来自激光光源的光束聚焦到物体表面上的光学系统，以及设置在物镜的入射光瞳上的空间滤光器或与物镜共轭的位置 入射光瞳，其中具有从激光源发射的发散角的激光束的发散的原点通过光学系统投影在物镜的入射光瞳上。

公开(公告)号：US4939630A

公开(公告)日：1990-07-03

申请号：US237847

申请日：1988-08-26

申请人： Tetsuo Kikuchi ,  Masahiro Nakagawa ,  Koichi Matsumoto ,  Haruo Ozawa ,  Hiroshi Shirasu ,  Yuji Kudoh

发明人： Tetsuo Kikuchi ,  Masahiro Nakagawa ,  Koichi Matsumoto ,  Haruo Ozawa ,  Hiroshi Shirasu ,  Yuji Kudoh

IPC分类号： G02B3/00 ,  G02B19/00 ,  G03F7/20

CPC分类号： G02B3/0056 ,  G02B19/0014 ,  G02B19/0047 ,  G03F7/70075

摘要： An illumination optical apparatus includes secondary light source forming means for forming a plurality of light source images from collimated light beams emitted from a light source, tertiary light source forming means arranged midway along an optical path from the secondary light source forming means, and a condenser lens arranged midway along an optical path from the tertiary light source forming means. The secondary light source forming means includes an optical integrator having entrance and exit surface. A plurality lens surface having a larger focal length than a distance between the entrance and exit surfaces are formed on the entrance sarfaces. Thus, a plurality of secondary light source images are formed by the secondary light source forming means in a space behind the exit surface of the optical integrator.

摘要翻译： 照明光学装置包括从光源发出的准直光束形成多个光源图像的二次光源形成装置，沿着从二次光源形成装置的光路中间设置的三次光源形成装置，以及冷凝器 透镜从第三光源形成装置沿光路布置。 二次光源形成装置包括具有入射和出射表面的光学积分器。 在入口面上形成具有比入射面和出射面之间的距离大的焦距的多个透镜表面。 因此，在光积分器的出射表面后面的空间中，二次光源形成装置形成多个次级光源图像。

公开(公告)号：US10387028B2

公开(公告)日：2019-08-20

申请号：US14127661

申请日：2012-06-26

申请人： Koichi Matsumoto ,  Noriyo Inagaki ,  Naoe Kanetsuki

发明人： Koichi Matsumoto ,  Noriyo Inagaki ,  Naoe Kanetsuki

IPC分类号： G06F3/0488 ,  B60K35/00 ,  G06F3/0482 ,  B60H1/00

摘要： A vehicle operation device includes a touch operation display (10); a presentation display (20) that is arranged farther from a driver's seat than the touch operation display and that displays a plurality of information items; and a processing device (30) that, in response to a predetermined selection operation on the touch operation display (10), erases a display of one information item, selected from the plurality of information items displayed on the presentation display (20), from a screen on the presentation display (20) and that displays an operation screen, corresponding to the erased information item, on the touch operation display (10).

公开(公告)号：US09442900B2

公开(公告)日：2016-09-13

申请号：US13264100

申请日：2010-06-29

申请人： Koichi Matsumoto

发明人： Koichi Matsumoto

IPC分类号： G06F17/21

CPC分类号： G06F17/217 ,  G06F17/211 ,  G06F17/212

摘要： An apparatus for arranging a plurality of elements includes a memory that stores a program and a processor that executes the program stored in the memory. The processor acquires a first element and a second element, each of which strides over a page partition position corresponding to a bottom of a first page in a vertical direction. The processor arranges the first element and the second element, so that the first element is divided, at a position of the first element corresponding to the page partition position over which the second element strides, into the first page and a second page, and a whole of the second element is arranged to the second page.

摘要翻译： 用于布置多个元件的装置包括存储程序的存储器和执行存储在存储器中的程序的处理器。 处理器获取第一元素和第二元素，每个元素和第二元素在垂直方向上跨过与第一页面的底部相对应的页面分隔位置。 所述处理器布置所述第一元件和所述第二元件，使得所述第一元件在与所述第二元件所跨越的页分隔位置相对应的所述第一元素的位置处被划分为所述第一页和第二页，并且 整个第二元素被布置到第二页。

公开(公告)号：US20140123064A1

公开(公告)日：2014-05-01

申请号：US14127661

申请日：2012-06-26

申请人： Koichi Matsumoto ,  Noriyo Inagaki ,  Naoe Kanetsuki

发明人： Koichi Matsumoto ,  Noriyo Inagaki ,  Naoe Kanetsuki

IPC分类号： G06F3/0482 ,  G06F3/0488

CPC分类号： G06F3/0488 ,  B60H1/00985 ,  B60K35/00 ,  B60K2370/1438 ,  B60K2370/184 ,  G06F3/0482 ,  G06F3/04886

摘要： A vehicle operation device includes a touch operation display (10); a presentation display (20) that is arranged farther from a driver's seat than the touch operation display and that displays a plurality of information items; and a processing device (30) that, in response to a predetermined selection operation on the touch operation display (10), erases a display of one information item, selected from the plurality of information items displayed on the presentation display (20), from a screen on the presentation display (20) and that displays an operation screen, corresponding to the erased information item, on the touch operation display (10).

摘要翻译： 车辆操作装置包括触摸操作显示器（10）; 演示显示器（20），其布置成比所述触摸操作显示器远离驾驶员座位并且显示多个信息项; 以及处理装置（30），其响应于所述触摸操作显示（10）上的预定选择操作，从显示在所述呈现显示（20）上的所述多个信息项中选择的一个信息项的显示从 在所述呈现显示器（20）上的屏幕，并且在所述触摸操作显示器（10）上显示与所擦除的信息项目相对应的操作屏幕。

公开(公告)号：US08669534B2

公开(公告)日：2014-03-11

申请号：US12934966

申请日：2009-03-23

申请人： Kenichi Obori ,  Koichi Matsumoto ,  Shogo Awata ,  Satoshi Ohashi ,  Kyoko Onoguchi

发明人： Akira Onoguchi ,  Kenichi Obori ,  Koichi Matsumoto ,  Shogo Awata ,  Satoshi Ohashi

IPC分类号： H01J37/12

CPC分类号： H01J37/12 ,  H01J2237/121 ,  H01J2237/28

摘要： Provided is an electrostatic lens for charged particle radiation with a lens performance relatively comparable to that of a magnetic type lens. A plurality of electrodes arranged on the incident side of charged particles form a first electric field area, wherein orbit radii of the charged particles are reduced without exceeding, on the way, the initial orbit radii that are orbit radii at the incident time, and a second electric field area, wherein force in the direction advancing in parallel with a central axis is applied to the charged particles that have passed through the first electric field area. A plurality of electrodes arranged on the projection side form a third electric field area, wherein the orbit radii of the charged particles do not exceed the initial orbit radii on the way and are curved to intersect with a central axis at angles larger than orbit angles defined with respect to the central axis of when the charged particles are projected from the second electric field area.

摘要翻译： 提供一种用于带电粒子辐射的静电透镜，其具有与磁性透镜相当的透镜性能。 布置在带电粒子的入射侧的多个电极形成第一电场区域，其中带电粒子的轨道半径减小而不超过在入射时为轨道半径的初始轨道半径， 第二电场区域，其中在与中心轴平行的方向上的力施加到已经通过第一电场区域的带电粒子。 布置在投影侧的多个电极形成第三电场区域，其中带电粒子的轨道半径在途中不超过初始轨道半径，并且弯曲成与中心轴相交，角度大于所定义的轨道角度 相对于带电粒子从第二电场区域突出时的中心轴线。

公开(公告)号：US20130009070A1

公开(公告)日：2013-01-10

申请号：US12934966

申请日：2009-03-23

申请人： Akira Onoguchi ,  Kyoko Onoguchi ,  Kenichi Obori ,  Koichi Matsumoto ,  Shogo Awata ,  Satoshi Ohashi

发明人： Akira Onoguchi ,  Kyoko Onoguchi ,  Kenichi Obori ,  Koichi Matsumoto ,  Shogo Awata ,  Satoshi Ohashi

IPC分类号： H01J3/18

CPC分类号： H01J37/12 ,  H01J2237/121 ,  H01J2237/28

摘要： Provided is an electrostatic lens for charged particle radiation with a lens performance relatively comparable to that of a magnetic type lens. A plurality of electrodes arranged on the incident side of charged particles form a first electric field area, wherein orbit radii of the charged particles are reduced without exceeding, on the way, the initial orbit radii that are orbit radii at the incident time, and a second electric field area, wherein force in the direction advancing in parallel with a central axis is applied to the charged particles that have passed through the first electric field area. A plurality of electrodes arranged on the projection side form a third electric field area, wherein the orbit radii of the charged particles do not exceed the initial orbit radii on the way and are curved to intersect with a central axis at angles larger than orbit angles defined with respect to the central axis of when the charged particles are projected from the second electric field area.

摘要翻译： 提供一种用于带电粒子辐射的静电透镜，其具有与磁性透镜相当的透镜性能。 布置在带电粒子的入射侧的多个电极形成第一电场区域，其中带电粒子的轨道半径减小而不超过在入射时为轨道半径的初始轨道半径， 第二电场区域，其中在与中心轴平行的方向上的力施加到已经通过第一电场区域的带电粒子。 布置在投影侧的多个电极形成第三电场区域，其中带电粒子的轨道半径在途中不超过初始轨道半径，并且弯曲成与中心轴相交，角度大于所定义的轨道角度 相对于带电粒子从第二电场区域突出时的中心轴线。