公开(公告)号：US09033468B2

公开(公告)日：2015-05-19

申请号：US14208004

申请日：2014-03-13

申请人： Kouji Ohnishi ,  Takahiko Kuroda ,  Manabu Nishimura ,  Kaichi Ueno

发明人： Kouji Ohnishi ,  Takahiko Kuroda ,  Manabu Nishimura ,  Kaichi Ueno

IPC分类号： B41J2/14 ,  B41J2/045 ,  H01L41/047

CPC分类号： B41J2/14201 ,  B41J2/14233 ,  B41J2202/11 ,  B41J2202/18 ,  H01L41/0475 ,  H01L41/0973

摘要： An actuator element includes an electrode film; and an insulation film layered on the electrode film including a through hole for connecting a wiring which is formed on the insulation film to the electrode film. A shape of a rim of the through hole is either a closed curve free of corners or a polygon with vertex angles which are larger than 90 degrees.

摘要翻译： 致动器元件包括电极膜; 以及层叠在电极膜上的绝缘膜，包括用于将形成在绝缘膜上的布线连接到电极膜的通孔。 通孔的边缘的形状是无角的闭合曲线或顶角大于90度的多边形。

公开(公告)号：US07416281B2

公开(公告)日：2008-08-26

申请号：US10521055

申请日：2003-08-05

申请人： Manabu Nishimura ,  Takahiko Kuroda ,  Shuya Abe ,  Makoto Tanaka ,  Mitsugu Irinoda ,  Kenichiroh Hashimoto

发明人： Manabu Nishimura ,  Takahiko Kuroda ,  Shuya Abe ,  Makoto Tanaka ,  Mitsugu Irinoda ,  Kenichiroh Hashimoto

IPC分类号： B41J2/04 ,  H02N1/00 ,  G02B26/00

CPC分类号： B41J2/1628 ,  B06B1/0292 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14411

摘要： An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality of partition parts (50a) are formed on the electrode. A vibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching.

摘要翻译： 静电致动器具有高可靠性和较小的特性变化。 在基板（1）上形成电极（12a），在电极上形成多个分隔部（50a）。 振动板（19）形成在分隔部分（50a）上，并且由施加到电极（12a）的电压产生的静电力变形，使得在隔板 通过蚀刻形成在电极（12a）和振动板（19）之间的牺牲层（14）的一部分，部分（50μm）。 在蚀刻之后，分隔部分（50a）由牺牲层（14）的剩余部分形成。

公开(公告)号：US08052249B2

公开(公告)日：2011-11-08

申请号：US12174342

申请日：2008-07-16

申请人： Manabu Nishimura ,  Takahiko Kuroda ,  Shuya Abe ,  Makoto Tanaka ,  Mitsugu Irinoda ,  Kenichiroh Hashimoto

发明人： Manabu Nishimura ,  Takahiko Kuroda ,  Shuya Abe ,  Makoto Tanaka ,  Mitsugu Irinoda ,  Kenichiroh Hashimoto

IPC分类号： B41J2/04 ,  H02N1/00

CPC分类号： B41J2/1628 ,  B06B1/0292 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14411

摘要： An approach applying a semiconductor manufacturing process in the manufacturing of an electrostatic actuator, such as for a droplet discharging head, liquid supply cartridge, inkjet recording apparatus and/or liquid jet apparatus, is provided. Such electrostatic actuator has high-reliability and less variation in characteristics.

摘要翻译： 提供了一种在诸如液滴喷射头，液体供应盒，喷墨记录装置和/或液体喷射装置的静电致动器的制造中应用半导体制造工艺的方法。 这种静电致动器具有高可靠性和较小的特性变化。

公开(公告)号：US09138998B2

公开(公告)日：2015-09-22

申请号：US13847650

申请日：2013-03-20

申请人： Kouji Ohnishi ,  Kohzoh Urasaki ,  Manabu Nishimura

发明人： Kouji Ohnishi ,  Kohzoh Urasaki ,  Manabu Nishimura

IPC分类号： B41J2/135 ,  B41J2/17 ,  B41J2/14 ,  B41J2/16

CPC分类号： B41J2/14233 ,  B41J2/1606 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1625 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14241

摘要： A liquid drop ejecting head includes a a nozzle plate to form nozzles, a liquid chamber substrate including one surface bonded to the nozzle plate and forming liquid chambers provided for the nozzles and communicating with the nozzles, a diaphragm bonded to the other surface of the liquid chamber substrate to form a part of each liquid chamber, and a pressure generating unit giving pressure oscillation to the diaphragm in accordance with a liquid drop eject signal to exert pressure on a liquid in each liquid chamber through the diaphragm. In the liquid drop ejecting head, a protection film is formed on an inner side wall of each liquid chamber by a chemical reaction of fluorocarbon and silicon fluoride oxide of a by-product formed on the inner side wall of the liquid chamber with the formation of the liquid chambers in the liquid chamber substrate.

摘要翻译： 液滴喷射头包括：喷嘴板，用于形成喷嘴;液体腔基板，其包括一个表面，其结合到所述喷嘴板，并且形成设置在所述喷嘴上并与所述喷嘴连通的液体腔;膜片，其结合到所述液体室的另一个表面 基板以形成每个液体室的一部分;以及压力产生单元，其根据液滴喷射信号向隔膜提供压力振荡，以通过隔膜对每个液体室中的液体施加压力。 在液滴喷射头中，通过在液体室的内侧壁上形成的副产物的碳氟化合物和氟化硅氧化物的化学反应在每个液体室的内侧壁上形成保护膜，形成 液体室基板中的液体室。

公开(公告)号：US20050264617A1

公开(公告)日：2005-12-01

申请号：US10521055

申请日：2003-08-05

申请人： Manabu Nishimura ,  Takahiko Kuroda ,  Shuya Abe ,  Makoto Tanaka ,  Mitsugu Irinoda ,  Kenichiroh Hashimoto

发明人： Manabu Nishimura ,  Takahiko Kuroda ,  Shuya Abe ,  Makoto Tanaka ,  Mitsugu Irinoda ,  Kenichiroh Hashimoto

IPC分类号： B41J2/14 ,  B41J2/16 ,  B41J2/045

CPC分类号： B41J2/1628 ,  B06B1/0292 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14411

摘要： An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality of partition parts (50a) are formed on the electrode. A vibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching.

摘要翻译： 静电致动器具有高可靠性和较小的特性变化。 在基板（1）上形成电极（12a），在电极上形成多个分隔部（50a）。 振动板（19）形成在分隔部分（50a）上，并且由施加到电极（12a）的电压产生的静电力变形，使得在隔板 通过蚀刻形成在电极（12a）和振动板（19）之间的牺牲层（14）的一部分，部分（50μm）。 在蚀刻之后，分隔部分（50a）由牺牲层（14）的剩余部分形成。

公开(公告)号：US07992969B2

公开(公告)日：2011-08-09

申请号：US12468965

申请日：2009-05-20

申请人： Shinji Tanaka ,  Manabu Nishimura

发明人： Shinji Tanaka ,  Manabu Nishimura

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2002/14491

摘要： A liquid drop ejecting head for ejecting liquid drops from nozzles communicating with liquid chambers includes a piezoelectric actuator including a diaphragm whose ends are fixed in a short-side direction of the diaphragm and an active element mounted on the diaphragm. The active element is contractible and extendable by a supply of a voltage to displace the diaphragm in an out-of-plane direction. The diaphragm is displaced with curvature so as to have a plurality of inflection points in the short-side direction. The active element is disposed in at least one area of an area from each of the ends of the diaphragm to a proximal inflection point of the inflection points and an area from one inflection point to another neighboring inflection point of the inflection points in a cross-section in the short-side direction of the diaphragm.

摘要翻译： 用于从与液体室连通的喷嘴喷射液滴的液滴喷射头包括压电致动器，其包括其端部固定在隔膜的短边方向上的隔膜和安装在隔膜上的有源元件。 有源元件是可收缩的并且可以通过提供一个电压来延伸，以使得隔膜在平面外的方向上移动。 膜片以曲率位移，以便在短边方向上具有多个拐点。 有源元件设置在从隔膜的每个端部到拐点的近端拐点的区域的至少一个区域中，并且在交叉点的拐点的一个拐点到拐点的另一相邻拐点的区域中， 在隔膜的短边方向的截面。

公开(公告)号：US09196821B2

公开(公告)日：2015-11-24

申请号：US14322032

申请日：2014-07-02

申请人： Tsutoh Aoyama ,  Masaru Shinkai ,  Masahiro Ishimori ,  Keiji Ueda ,  Kanshi Abe ,  Manabu Nishimura ,  Toshiaki Masuda

发明人： Tsutoh Aoyama ,  Masaru Shinkai ,  Masahiro Ishimori ,  Keiji Ueda ,  Kanshi Abe ,  Manabu Nishimura ,  Toshiaki Masuda

IPC分类号： B41J2/045 ,  H01L41/31 ,  B41J2/14 ,  H01L41/09 ,  H01L41/316 ,  H01L41/318

CPC分类号： H01L41/31 ,  B41J2/14201 ,  B41J2/14233 ,  B41J2202/03 ,  H01L41/0973 ,  H01L41/316 ,  H01L41/318 ,  Y10T29/42

摘要： An electromechanical transducer includes a first electrode mounted on one of a substrate and a base film, an electromechanical transducer film mounted on the first electrode and made of a piezoelectric substance having a perovskite crystal structure, and a second electrode mounted on the electromechanical transducer film. The electromechanical transducer film includes a {100} plane preferentially oriented to be orthogonal to a thickness direction of the electromechanical transducer film and has a full width at half maximum corresponding to a {200} plane in an X-ray diffraction measurement curve in 2θ-ω scan that is measured by emitting an X-ray beam onto a surface of the electromechanical transducer film at an incident angle θ. The full width at half maximum is not greater than 10 degrees.

摘要翻译： 机电换能器包括安装在基板和基膜之一上的第一电极，安装在第一电极上并由具有钙钛矿晶体结构的压电材料制成的机电换能器薄膜和安装在机电换能器薄膜上的第二电极。 机电换能器膜包括优先定向为与机电换能器膜的厚度方向正交的{100}面，并且在2θ的X射线衍射测量曲线中具有对应于{200}面的半值全宽度; -ω扫描，其通过以入射角度θ将X射线束发射到机电换能器膜的表面上来测量。 半最大宽度不大于10度。

公开(公告)号：US20150022592A1

公开(公告)日：2015-01-22

申请号：US14322032

申请日：2014-07-02

申请人： Tsutoh Aoyama ,  Masaru Shinkai ,  Masahiro Ishimori ,  Keiji Ueda ,  Kanshi Abe ,  Manabu Nishimura ,  Toshiaki Masuda

发明人： Tsutoh Aoyama ,  Masaru Shinkai ,  Masahiro Ishimori ,  Keiji Ueda ,  Kanshi Abe ,  Manabu Nishimura ,  Toshiaki Masuda

IPC分类号： H01L41/09 ,  H01L41/31 ,  B41J2/045

CPC分类号： H01L41/31 ,  B41J2/14201 ,  B41J2/14233 ,  B41J2202/03 ,  H01L41/0973 ,  H01L41/316 ,  H01L41/318 ,  Y10T29/42

摘要： An electromechanical transducer includes a first electrode mounted on one of a substrate and a base film, an electromechanical transducer film mounted on the first electrode and made of a piezoelectric substance having a perovskite crystal structure, and a second electrode mounted on the electromechanical transducer film. The electromechanical transducer film includes a {100} plane preferentially oriented to be orthogonal to a thickness direction of the electromechanical transducer film and has a full width at half maximum corresponding to a {200} plane in an X-ray diffraction measurement curve in 2θ-ω scan that is measured by emitting an X-ray beam onto a surface of the electromechanical transducer film at an incident angle θ. The full width at half maximum is not greater than 10 degrees.

摘要翻译： 机电换能器包括安装在基板和基膜之一上的第一电极，安装在第一电极上并由具有钙钛矿晶体结构的压电材料制成的机电换能器薄膜和安装在机电换能器薄膜上的第二电极。 机电换能器膜包括优先定向为与机电换能器膜的厚度方向正交的{100}面，并且在2θ的X射线衍射测量曲线中具有对应于{200}面的半值全宽度; -ω扫描，其通过以入射角度θ将X射线束发射到机电换能器膜的表面上来测量。 半最大宽度不大于10度。

公开(公告)号：US20090289998A1

公开(公告)日：2009-11-26

申请号：US12468965

申请日：2009-05-20

申请人： Shinji Tanaka ,  Manabu Nishimura

发明人： Shinji Tanaka ,  Manabu Nishimura

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2002/14491

摘要： A liquid drop ejecting head for ejecting liquid drops from nozzles communicating with liquid chambers includes a piezoelectric actuator including a diaphragm whose ends are fixed in a short-side direction of the diaphragm and an active element mounted on the diaphragm. The active element is contractible and extendable by a supply of a voltage to displace the diaphragm in an out-of-plane direction. The diaphragm is displaced with curvature so as to have a plurality of inflection points in the short-side direction. The active element is disposed in at least one area of an area from each of the ends of the diaphragm to a proximal inflection point of the inflection points and an area from one inflection point to another neighboring inflection point of the inflection points in a cross-section in the short-side direction of the diaphragm.

摘要翻译： 用于从与液体室连通的喷嘴喷射液滴的液滴喷射头包括压电致动器，其包括其端部固定在隔膜的短边方向上的隔膜和安装在隔膜上的有源元件。 有源元件是可收缩的并且可以通过提供一个电压来延伸，以使得隔膜在平面外的方向上移动。 膜片以曲率位移，以便在短边方向上具有多个拐点。 有源元件设置在从隔膜的每个端部到拐点的近端拐点的区域的至少一个区域中，并且在交叉点的拐点的一个拐点到拐点的另一相邻拐点的区域中， 在隔膜的短边方向的截面。

公开(公告)号：US20150070444A1

公开(公告)日：2015-03-12

申请号：US14469700

申请日：2014-08-27

申请人： Masahiro Ishimori ,  Manabu Nishimura ,  Masaru Shinkai ,  Keiji UEDA ,  Tsutoh Aoyama ,  Toshiaki Masuda

发明人： Masahiro Ishimori ,  Manabu Nishimura ,  Masaru Shinkai ,  Keiji UEDA ,  Tsutoh Aoyama ,  Toshiaki Masuda

IPC分类号： H01L41/047 ,  H01L41/25 ,  B41J2/175 ,  H01L41/09 ,  B41J2/14

CPC分类号： H01L41/0477 ,  B41J2/14233 ,  B41J2/17503 ,  B41J2/17553 ,  B41J2202/03 ,  B82Y15/00 ,  H01L41/0815 ,  H01L41/1876 ,  H01L41/318 ,  Y10S977/837 ,  Y10T29/42

摘要： A piezoelectric actuator includes a vibrating plate, a lower electrode provided on the vibrating plate, including a platinum film and a titanium oxide film formed on the platinum film, a piezoelectric thin film provided on the lower electrode, and an upper electrode provided on the piezoelectric thin film, in which the titanium oxide film is provided between the platinum film and the piezoelectric thin film.

摘要翻译： 压电致动器包括振动板，设置在振动板上的下电极，包括铂膜和形成在铂膜上的氧化钛膜，设置在下电极上的压电薄膜和设置在压电元件上的上电极 薄膜，其中氧化钛膜设置在铂膜和压电薄膜之间。