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188 条记录 (耗时 0.032 秒)

    Method and system for improving coupling between a surface wave plasma source and a plasma space
    1.
    发明授权
    Method and system for improving coupling between a surface wave plasma source and a plasma space 有权
    改善表面波等离子体源和等离子体空间之间耦合的方法和系统

    公开(公告)号：US07584714B2

    公开(公告)日：2009-09-08

    申请号：US10953791

    申请日：2004-09-30

    申请人： Lee Chen ,  Caiz Hong Tian ,  Naoki Matsumoto

    发明人： Lee Chen ,  Caiz Hong Tian ,  Naoki Matsumoto

    IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306

    CPC分类号： H01J37/32522 ,  H01J37/32192 ,  H01J37/3222

    摘要： A surface wave plasma (SWP) source having an electromagnetic (EM) wave launcher configured to couple EM energy in a desired EM wave mode to a plasma by generating a surface wave on a plasma surface of the EM wave launcher adjacent the plasma. A power coupling system is coupled to the EM wave launcher, and configured to provide the EM energy to the EM wave launcher for forming the plasma. A mode scrambler coupled to the plasma surface of the EM wave launcher, and configured to reduce mode jumping between the desired EM wave mode and another EM wave mode.

    摘要翻译： 一种具有电磁（EM）波发射器的表面波等离子体（SWP）源，其被配置为通过在等离子体附近的EM波发射器的等离子体表面上产生表面波来将期望的EM波模式中的EM能量耦合到等离子体。 功率耦合系统耦合到EM波发射器，并且被配置为向用于形成等离子体的EM波发射器提供EM能量。 耦合到所述EM波发射器的等离子体表面并且被配置为减少所期望的EM波模式和另一EM波模式之间的模式跳跃的模式扰频器。

    Method for treating a substrate
    3.
    发明授权
    Method for treating a substrate 有权
    处理基材的方法

    公开(公告)号：US07268084B2

    公开(公告)日：2007-09-11

    申请号：US10954086

    申请日：2004-09-30

    申请人： Lee Chen ,  Hitomitsu Kambara ,  Caiz Hong Tian ,  Tetsuya Nishizuka ,  Toshihisa Nozawa

    发明人： Lee Chen ,  Hitomitsu Kambara ,  Caiz Hong Tian ,  Tetsuya Nishizuka ,  Toshihisa Nozawa

    IPC分类号： H01L21/302

    CPC分类号： H01J37/32706 ,  H01J37/32211 ,  H01J37/3244 ,  H01L21/31116

    摘要： A method of treating a substrate includes disposing the substrate in a processing chamber having a first chamber portion configured to define a plasma space and a second chamber portion configured to define a process space, introducing a first gas to the plasma space and introducing a second gas to the process space. A plasma is formed in the plasma space from the first gas using a plasma source coupled to the upper chamber portion, and a process chemistry for treating the substrate is formed in the process space by providing a grid positioned between the first chamber portion and the second chamber portion such that the plasma can diffuse from the plasma space to the process space.

    摘要翻译： 处理衬底的方法包括将衬底设置在具有被配置为限定等离子体空间的第一室部分的处理室中，以及构造成限定处理空间的第二室部分，将第一气体引入等离子体空间并引入第二气体 到过程空间。 在等离子体空间中，使用与上室部分相连的等离子体源，在等离子体空间中形成等离子体，通过提供位于第一室部分和第二部分之间的格栅，在处理空间中形成用于处理基板的工艺化学品 室部分，使得等离子体可以从等离子体空间扩散到处理空间。

    Surface wave plasma processing system and method of using
    5.
    发明申请
    Surface wave plasma processing system and method of using 失效
    表面波等离子体处理系统及其使用方法

    公开(公告)号：US20060071607A1

    公开(公告)日：2006-04-06

    申请号：US10953802

    申请日：2004-09-30

    申请人： Lee Chen ,  Caiz Tian ,  Naoki Matsumoto

    发明人： Lee Chen ,  Caiz Tian ,  Naoki Matsumoto

    IPC分类号： H01J7/24

    CPC分类号： H01J37/3222 ,  H01J37/32192

    摘要： A SWP source includes an electromagnetic (EM) wave launcher configured to couple EM energy in a desired EM wave mode to a plasma by generating a surface wave on a plasma surface of the EM wave launcher adjacent the plasma. A power coupling system is coupled to the EM wave launcher and configured to provide the EM energy to the EM wave launcher for forming the plasma. A cover plate coupled to the plasma surface of the EM wave launcher protects the EM wave launcher from the plasma.

    摘要翻译： SWP源包括电磁（EM）波发射器，其被配置为通过在等离子体附近的EM波发射器的等离子体表面上产生表面波来将期望的EM波模式中的EM能量耦合到等离子体。 功率耦合系统耦合到EM波发射器并且被配置为向用于形成等离子体的EM波发射器提供EM能量。 耦合到EM波发射器的等离子体表面的盖板保护EM波发射器免受等离子体的影响。

    ANISOTROPIC ETCH OF COPPER USING PASSIVATION
    6.
    发明申请
    ANISOTROPIC ETCH OF COPPER USING PASSIVATION 有权
    使用钝化的铜的各向异性蚀刻

    公开(公告)号：US20150376797A1

    公开(公告)日：2015-12-31

    申请号：US14320058

    申请日：2014-06-30

    申请人： Lee Chen ,  Ying Zhang

    发明人： Lee Chen ,  Ying Zhang

    IPC分类号： C23F1/02 ,  C23F1/08 ,  H01J37/32 ,  C23F4/00

    CPC分类号： C23F1/02 ,  C23F1/08 ,  C23F4/00 ,  C23G5/00 ,  H01J37/32862 ,  H01J2237/334

    摘要： A method for anisotropically etching a feature in a Cu-containing layer includes providing a substrate having a Cu-containing layer and a patterned etch mask formed on the Cu-containing layer such that on exposed Cu-containing layer is exposed to processing through the patterned etch mask, passivating a first surface of the exposed Cu-containing layer, and inhibiting passivation of a second surface of the Cu-containing layer. A Cu compound is formed on said second surface of the Cu-containing layer, and the Cu compound is removed from the second surface of the Cu-containing layer to anisotropically etch a feature in the Cu-containing layer.

    摘要翻译： 一种用于各向异性蚀刻含Cu层中的特征的方法包括提供具有含Cu层的基板和形成在含Cu层上的图案化蚀刻掩模，使得暴露的含Cu层暴露于通过图案化的处理 蚀刻掩模，钝化暴露的含Cu层的第一表面，并抑制含Cu层的第二表面的钝化。 在Cu含量层的第二表面上形成Cu化合物，并且从Cu含量层的第二表面除去Cu化合物以各向异性地蚀刻含Cu层中的特征。

    Method and system for intelligently forwarding multicast packets
    7.
    发明授权
    Method and system for intelligently forwarding multicast packets 有权
    智能转发组播报文的方法和系统

    公开(公告)号：US09112715B2

    公开(公告)日：2015-08-18

    申请号：US12765765

    申请日：2010-04-22

    申请人： Nitin Jain ,  Lee Chen ,  Earl Ferguson ,  Min Zhu

    发明人： Nitin Jain ,  Lee Chen ,  Earl Ferguson ,  Min Zhu

    IPC分类号： H04L12/18

    CPC分类号： H04L12/1886

    摘要： A routing system utilizes a layer 2 switch interconnecting several routers to intelligently forward multicast packets throughout an interne exchange carrying multicast content. The layer 2 switch performs protocol snooping to extract a lookup key that is based on network layer protocol information. The lookup key is uniquely formulated to support either shared or explicit source distribution trees. The lookup key is used to query a forwarding memory that returns an outgoing port index. The outgoing port index points to one or more outgoing ports that are eligible to receive the multicast packet. The outgoing ports are also connected to the neighboring device(s) that are designated to receive the multicast packet. The routing system also supports real time maintenance and updating of the forwarding memory based on the periodic exchange of control messages. The routing system is configured to support PIM routers operating in PIM SM or PIM SSM modes. However, the routing system can also support other multicast protocols and/or standards.

    摘要翻译： 路由系统利用互连多个路由器的层2交换机在携带多播内容的内部交换机中智能地转发多播分组。 第二层交换机执行协议侦听，提取基于网络层协议信息的查找密钥。 查找密钥是独一无二的，用于支持共享或明确的源分发树。 查询键用于查询返回出站端口索引的转发内存。 出站端口索引指向一个或多个有资格接收组播数据包的输出端口。 输出端口也连接到被指定为接收多播分组的相邻设备。 路由系统还支持基于控制消息的周期性交换的转发存储器的实时维护和更新。 路由系统配置为支持以PIM SM或PIM SSM模式运行的PIM路由器。 然而，路由系统还可以支持其他多播协议和/或标准。

    Plasma tuning rods in microwave resonator plasma sources
    8.
    发明授权
    Plasma tuning rods in microwave resonator plasma sources 有权
    微波谐振器等离子体源中的等离子体调谐棒

    公开(公告)号：US09111727B2

    公开(公告)日：2015-08-18

    申请号：US13249560

    申请日：2011-09-30

    申请人： Jianping Zhao ,  Lee Chen ,  Merritt Funk ,  Toshihiko Iwao ,  Peter L.G. Ventzek

    发明人： Jianping Zhao ,  Lee Chen ,  Merritt Funk ,  Toshihiko Iwao ,  Peter L.G. Ventzek

    IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  H01J37/32

    CPC分类号： H01J37/32256 ,  H01J37/32247 ,  H01J37/32935 ,  H01L22/00

    摘要： The invention provides a plurality of resonator subsystems. The resonator subsystems can comprise one or more resonant cavities configured to couple electromagnetic (EM) energy in a desired EM wave mode to plasma by generating resonant microwave energy in a resonant cavity adjacent the plasma. The resonator subsystem can be coupled to a process chamber using one or more interface subsystems and can comprise one or more resonant cavities, and each resonant cavity can have a plurality of plasma tuning rods coupled thereto. Some of the plasma tuning rods can be configured to couple the EM-energy from one or more of the resonant cavities to the process space within the process chamber.

    摘要翻译： 本发明提供了多个谐振器子系统。 谐振器子系统可以包括一个或多个谐振腔，其被配置为通过在与等离子体相邻的谐振腔中产生谐振微波能量将所期望的EM波模式中的电磁（EM）能量耦合到等离子体。 谐振器子系统可以使用一个或多个接口子系统耦合到处理室，并且可以包括一个或多个谐振腔，并且每个谐振腔可以具有耦合到其上的多个等离子体调谐棒。 一些等离子体调谐杆可被配置成将EM能量从一个或多个谐振腔耦合到处理室内的处理空间。

    NETWORK PROXY LAYER FOR POLICY-BASED APPLICATION PROXIES
    9.
    发明申请
    NETWORK PROXY LAYER FOR POLICY-BASED APPLICATION PROXIES 审中-公开
    网络代理层用于基于策略的应用程序

    公开(公告)号：US20150156223A1

    公开(公告)日：2015-06-04

    申请号：US14094529

    申请日：2013-12-02

    申请人： Feilong Xu ,  Chih-Wei Chao ,  Lee Chen

    发明人： Feilong Xu ,  Chih-Wei Chao ,  Lee Chen

    IPC分类号： H04L29/06

    CPC分类号： H04L65/105 ,  H04L65/1069 ,  H04L67/141

    摘要： A system and method for providing a network proxy layer are disclosed. The network proxy layer may receive a connection establishment event for a client connection of an application session and send the client connection event to an application proxy for the application session, the application proxy being associated with an application of a server. Upon establishment of the client connection, the network proxy layer may receive one or more data packets from the client connection. The network proxy layer may further receive a connection establishment event for a server connection of the application session of the server, and receive one or more data packets from the server connection.

    摘要翻译： 公开了一种用于提供网络代理层的系统和方法。 网络代理层可以接收用于应用会话的客户端连接的连接建立事件，并且将客户端连接事件发送到应用程序会话的应用代理，应用代理与服务器的应用相关联。 在建立客户端连接时，网络代理层可以从客户端连接接收一个或多个数据分组。 网络代理层还可以接收服务器应用会话的服务器连接的连接建立事件，并从服务器连接接收一个或多个数据包。