公开(公告)号：US11961714B2

公开(公告)日：2024-04-16

申请号：US17334855

申请日：2021-05-31

Applicant: LINCO TECHNOLOGY CO., LTD.

Inventor： Yi-Yuan Huang ,  Yi-Cheng Liu

IPC: H01J37/32 ,  H01J1/00 ,  H01J3/00 ,  H01J5/00

CPC classification number: H01J37/32357 ,  H01J37/32449 ,  H01J37/32522 ,  H01J37/32743 ,  H01J37/32834 ,  H01J2237/3341

Abstract: A substrate processing apparatus comprises a chamber member that defines an interior volume that has an aspect ratio. The chamber member comprises a pair of laterally opposing inlet walls and a loading port. Each of the pair of laterally opposing inlet walls has an inlet port configured to receive output from a remote plasma source. The loading port is arranged between the pair of inlet walls, configured to allow passage of a substrate into the interior volume.

公开(公告)号：US09771649B2

公开(公告)日：2017-09-26

申请号：US14704422

申请日：2015-05-05

Applicant: Linco Technology Co., Ltd.

Inventor： Chung-Yu Yeh ,  Huei-Chia Su ,  Cheng-Peng Yeh ,  Tsung-Wei Chang ,  Yi-Yuan Huang ,  Wan-Yu Huang ,  Mu-Sen Lu

IPC: C23C14/34 ,  C23C14/50 ,  H01L21/673 ,  H01L21/677 ,  H01J37/32 ,  C23C14/54 ,  C23C14/56 ,  H01J37/34

CPC classification number: C23C14/50 ,  C23C14/541 ,  C23C14/568 ,  H01J37/32715 ,  H01J37/3411 ,  H01L21/67336 ,  H01L21/67346 ,  H01L21/6776

Abstract: A substrate carrier unit includes a substrate carrier and a phase transition material. The substrate carrier defines an isolated space therein. The phase transition material is filled into the isolated space of the substrate carrier and has a melting point ranging between 18° C. and 95° C. The phase transition material is capable of absorbing thermal energy from the substrate carrier as latent heat to change the phase from solid to liquid.

公开(公告)号：US09611542B2

公开(公告)日：2017-04-04

申请号：US14702100

申请日：2015-05-01

Applicant: Linco Technology Co., Ltd.

Inventor： Cheng-Peng Yeh ,  Huei-Chia Su ,  Chung-Yu Yeh ,  Tsung-Wei Chang ,  Yi-Yuan Huang ,  Wan-Yu Huang ,  Mu-Sen Lu

IPC: B05C9/12 ,  C23C14/54 ,  C23C16/458 ,  H01L23/427 ,  B05C9/14 ,  C23C14/35 ,  B05C11/10

CPC classification number: C23C14/541 ,  B05C9/14 ,  B05C11/1021 ,  C23C14/35 ,  C23C14/56 ,  C23C16/4586 ,  H01J37/32752 ,  H01L21/67109 ,  H01L21/6776 ,  H01L23/427

Abstract: A film deposition system includes a substrate carrier, a film deposition device, a transport device and a cooling device. The substrate carrier includes a carrier body that defines an isolated space therein, and a phase transition material that is filled into the isolated space and that has a melting point ranging between 18° C. and 95° C. The phase transition material is capable of absorbing thermal energy from the carrier body as latent heat to change the phase of the phase transition material from solid to liquid. The cooling device is configured to absorb thermal energy from the substrate carrier so as to change the phase of the phase transition material from liquid to solid.

公开(公告)号：US20170016110A1

公开(公告)日：2017-01-19

申请号：US14798555

申请日：2015-07-14

Applicant: Linco Technology Co., LTD.

Inventor： Yi-Yuan Huang ,  Mu-Sen Lu ,  Wen-Lung Chen

IPC: C23C14/56 ,  C23C14/50

CPC classification number: H01L21/67126

Abstract: A double-valve device includes a base unit, two valve units and a transport unit. The base unit has a surrounding wall, an entrance wall connected to the surrounding wall and formed with an entrance opening, an exit wall connected to the surrounding wall oppositely of the entrance wall and formed with an exit opening, and a spacing wall disposed between the entrance and exit walls and formed with a pass-through opening. The surrounding wall, the entrance wall and the spacing wall cooperatively define a buffer chamber. The surrounding wall, the spacing wall and the exit wall cooperatively define a joint chamber. The valve units are respectively disposed in the buffer and joint chambers for respectively sealing and unsealing the entrance and pass-through openings.

Abstract translation: 双阀装置包括基座单元，两个阀单元和运输单元。 基座单元具有围壁，入口壁与周围壁连接并形成有入口，出口壁与入口壁相对的周壁连接并形成有出口， 入口和出口壁，并形成一个通过开口。 周围的壁，入口壁和间隔壁协同地限定了缓冲室。 周围的壁，间隔壁和出口壁协同地限定了联合室。 阀单元分别设置在缓冲器和接头室中，用于分别密封和开封入口和通孔。

公开(公告)号：US20160326637A1

公开(公告)日：2016-11-10

申请号：US14704422

申请日：2015-05-05

Applicant: Linco Technology Co., Ltd.

Inventor： Chung-Yu Yeh ,  Huei-Chia Su ,  Cheng-Peng Yeh ,  Tsung-Wei Chang ,  Yi-Yuan Huang ,  Wan-Yu Huang ,  Mu-Sen Lu

IPC: C23C14/50 ,  H01J37/34

CPC classification number: C23C14/50 ,  C23C14/541 ,  C23C14/568 ,  H01J37/32715 ,  H01J37/3411 ,  H01L21/67336 ,  H01L21/67346 ,  H01L21/6776

Abstract: A substrate carrier unit includes a substrate carrier and a phase transition material. The substrate carrier defines an isolated space therein. The phase transition material is filled into the isolated space of the substrate carrier and has a melting point ranging between 18° C. and 95° C. The phase transition material is capable of absorbing thermal energy from the substrate carrier as latent heat to change the phase from solid to liquid.

Abstract translation: 衬底载体单元包括衬底载体和相变材料。 衬底载体在其中限定了隔离空间。 相变材料被填充到衬底载体的隔离空间中，并且具有在18℃和95℃之间的熔点。相变材料能够从基底载体吸收热能作为潜热以改变 从固体到液体。

公开(公告)号：US20160318061A1

公开(公告)日：2016-11-03

申请号：US14702100

申请日：2015-05-01

Applicant: Linco Technology Co., Ltd.

Inventor： Cheng-Peng Yeh ,  Huei-Chia Su ,  Chung-Yu Yeh ,  Tsung-Wei Chang ,  Yi-Yuan Huang ,  Wan-Yu Huang ,  Mu-Sen Lu

IPC: B05C9/14 ,  B05C11/10

CPC classification number: C23C14/541 ,  B05C9/14 ,  B05C11/1021 ,  C23C14/35 ,  C23C14/56 ,  C23C16/4586 ,  H01J37/32752 ,  H01L21/67109 ,  H01L21/6776 ,  H01L23/427

Abstract: A film deposition system includes a substrate carrier, a film deposition device, a transport device and a cooling device. The substrate carrier includes a carrier body that defines an isolated space therein, and a phase transition material that is filled into the isolated space and that has a melting point ranging between 18° C. and 95° C. The phase transition material is capable of absorbing thermal energy from the carrier body as latent heat to change the phase of the phase transition material from solid to liquid. The cooling device is configured to absorb thermal energy from the substrate carrier so as to change the phase of the phase transition material from liquid to solid.

Abstract translation: 膜沉积系统包括基板载体，成膜装置，输送装置和冷却装置。 衬底载体包括在其中限定隔离空间的载体主体和填充到隔离空间中且熔点在18℃至95℃之间的相变材料。相变材料能够 从载体吸收热能作为潜热，以将相变材料的相从固体改变为液体。 冷却装置被配置为从衬底载体吸收热能，以便将相变材料的相位从液体改变为固体。