公开(公告)号：US20110170564A1

公开(公告)日：2011-07-14

申请号：US12974509

申请日：2010-12-21

申请人： Louis DESBIENS ,  Vincent Roy ,  Pascal Deladurantaye ,  Marco Michele Sisto ,  Yves Taillon ,  Brian W. Baird

发明人： Louis DESBIENS ,  Vincent Roy ,  Pascal Deladurantaye ,  Marco Michele Sisto ,  Yves Taillon ,  Brian W. Baird

IPC分类号： H01S3/30

CPC分类号： H01S3/0085 ,  H01S3/0092 ,  H01S3/067 ,  H01S3/06754 ,  H01S3/1024 ,  H01S3/1305 ,  H01S3/2308

摘要： A pulsed fiber laser oscillator and laser systems incorporating such laser oscillators are presented. The laser oscillator first includes a light generating module which generates optical pulses having an initial spectral profile. A spectrum tailoring module tailors the initial spectral profile of the optical pulses by imposing a phase variation on each optical pulse according to an optimized phase varying function. The optimized phase varying function has one of a rectified sinusoidal shape, a parabolic shape and a rectified parabolic shape. Laser systems incorporating such oscillators may be of a MOPA configuration, and may further include a nonlinear crystal for frequency conversion or a bulk solid-state amplifier.

摘要翻译： 提出了一种脉冲光纤激光振荡器和包含这种激光振荡器的激光系统。 激光振荡器首先包括产生具有初始光谱分布的光脉冲的光产生模块。 频谱裁剪模块通过根据优化的相位变化函数对每个光脉冲施加相位变化来调整光脉冲的初始光谱分布。 优化的相变函数具有整流正弦形状，抛物线形状和整流抛物线形状之一。 结合这种振荡器的激光系统可以是MOPA配置，并且还可以包括用于频率转换的非线性晶体或大容量固态放大器。

公开(公告)号：US08263903B2

公开(公告)日：2012-09-11

申请号：US12782458

申请日：2010-05-18

申请人： Pascal Deladurantaye ,  Louis Desbiens ,  Yves Taillon ,  Dany Lemieux ,  Brian W. Baird

发明人： Pascal Deladurantaye ,  Louis Desbiens ,  Yves Taillon ,  Dany Lemieux ,  Brian W. Baird

IPC分类号： B23K26/42 ,  B23K26/06 ,  B23K26/073

CPC分类号： H01S5/06835 ,  H01S3/06758 ,  H01S3/094003 ,  H01S5/0057 ,  H01S5/0428

摘要： A method for stabilizing an output of a pulsed laser system includes a directly modulated laser diode by mitigating the effect of switching transients on the temporal shape of the outputted pulses. The method includes controlling a pulse shaping signal to define, over time, processing and conditioning periods. During the processing periods, the pulse shaping signal has an amplitude profile tailored to produce the desired temporal shape of the output. Each conditioning period either immediately precedes or follows a processing period. During a given processing period, the amplitude profile of the pulse shaping signal is tailored so that the drive current of the laser diode is lower than its maximum value during the corresponding processing period, and is of the same order of magnitude as the laser threshold current of the laser diode. In this manner, the stability of the output during the corresponding processing period is improved.

摘要翻译： 用于稳定脉冲激光系统的输出的方法包括通过减轻对输出脉冲的时间形状的切换瞬变的影响的直接调制的激光二极管。 该方法包括控制脉冲整形信号以定义时间上的处理和调节周期。 在处理周期期间，脉冲整形信号具有调整的幅度分布，以产生输出的期望时间形状。 每个调理期间紧接在处理期之前或之后。 在给定的处理周期期间，调整脉冲整形信号的幅度分布，使得激光二极管的驱动电流在相应的处理周期内低于其最大值，并且与激光阈值电流具有相同的数量级 的激光二极管。 以这种方式，提高了在相应处理期间输出的稳定性。

公开(公告)号：US20100316072A1

公开(公告)日：2010-12-16

申请号：US12782470

申请日：2010-05-18

申请人： Pascal Deladurantaye ,  Louis Desbiens ,  Yves Taillon ,  Dany Lemieux ,  Brian W. Baird

发明人： Pascal Deladurantaye ,  Louis Desbiens ,  Yves Taillon ,  Dany Lemieux ,  Brian W. Baird

IPC分类号： H01S3/13

CPC分类号： B23K26/0624 ,  B23K26/382 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/50 ,  G06F1/0321 ,  H01S3/2308 ,  H01S5/06216 ,  H01S5/06821 ,  H01S5/146

摘要： Methods stabilize the output of a pulsed laser system using pulse shaping capabilities. In some embodiments, transient effects following a transition between a QCW regime and a pulse shaping regime are mitigated by ensuring that the average QCW optical power substantially corresponds to the average pulsed optical power outputted in a steady-state operation of the pulsed laser system in the pulse shaping regime. The QCW signal or the pulse shaping signal may be adapted for this purpose. In other embodiments, transient effects associated with non-process pulses emitted between series of consecutive process pulses are mitigated through the proper use of sequential pulse shaping.

摘要翻译： 方法使用脉冲整形功能来稳定脉冲激光系统的输出。 在一些实施例中，通过确保平均QCW光功率基本上对应于在脉冲激光系统的稳态操作中输出的平均脉冲光功率，可以减轻QCW状态和脉冲整形状态之间的转变之后的瞬态效应 脉冲整形方式。 QCW信号或脉冲整形信号可以适用于此目的。 在其他实施例中，通过适当地使用顺序脉冲整形来减轻与在连续过程脉冲串之间发射的非过程脉冲相关的瞬态效应。

公开(公告)号：US08238390B2

公开(公告)日：2012-08-07

申请号：US12782470

申请日：2010-05-18

申请人： Pascal Deladurantaye ,  Louis Desbiens ,  Yves Taillon ,  Dany Lemieux ,  Brian W. Baird

发明人： Pascal Deladurantaye ,  Louis Desbiens ,  Yves Taillon ,  Dany Lemieux ,  Brian W. Baird

IPC分类号： H01S3/10

CPC分类号： B23K26/0624 ,  B23K26/382 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/50 ,  G06F1/0321 ,  H01S3/2308 ,  H01S5/06216 ,  H01S5/06821 ,  H01S5/146

摘要： Methods stabilize the output of a pulsed laser system using pulse shaping capabilities. In some embodiments, transient effects following a transition between a QCW regime and a pulse shaping regime are mitigated by ensuring that the average QCW optical power substantially corresponds to the average pulsed optical power outputted in a steady-state operation of the pulsed laser system in the pulse shaping regime. The QCW signal or the pulse shaping signal may be adapted for this purpose. In other embodiments, transient effects associated with non-process pulses emitted between series of consecutive process pulses are mitigated through the proper use of sequential pulse shaping.

摘要翻译： 方法使用脉冲整形功能来稳定脉冲激光系统的输出。 在一些实施例中，通过确保平均QCW光功率基本上对应于在脉冲激光系统的稳态操作中输出的平均脉冲光功率，可以减轻QCW状态和脉冲整形状态之间的转变之后的瞬态效应 脉冲整形方式。 QCW信号或脉冲整形信号可以适用于此目的。 在其他实施例中，通过适当地使用顺序脉冲整形来减轻与在连续过程脉冲串之间发射的非过程脉冲相关的瞬态效应。

公开(公告)号：US20110284507A1

公开(公告)日：2011-11-24

申请号：US12782458

申请日：2010-05-18

申请人： Pascal Deladurantaye ,  Louis Desbiens ,  Yves Taillon ,  Dany Lemieux ,  Brian W. Baird

发明人： Pascal Deladurantaye ,  Louis Desbiens ,  Yves Taillon ,  Dany Lemieux ,  Brian W. Baird

IPC分类号： B23K26/06

CPC分类号： H01S5/06835 ,  H01S3/06758 ,  H01S3/094003 ,  H01S5/0057 ,  H01S5/0428

摘要： A method for stabilizing an output of a pulsed laser system includes a directly modulated laser diode by mitigating the effect of switching transients on the temporal shape of the outputted pulses. The method includes controlling a pulse shaping signal to define, over time, processing and conditioning periods. During the processing periods, the pulse shaping signal has an amplitude profile tailored to produce the desired temporal shape of the output. Each conditioning period either immediately precedes or follows a processing period. During a given processing period, the amplitude profile of the pulse shaping signal is tailored so that the drive current of the laser diode is lower than its maximum value during the corresponding processing period, and is of the same order of magnitude as the laser threshold current of the laser diode. In this manner, the stability of the output during the corresponding processing period is improved.

摘要翻译： 用于稳定脉冲激光系统的输出的方法包括通过减轻对输出脉冲的时间形状的切换瞬变的影响的直接调制的激光二极管。 该方法包括控制脉冲整形信号以定义时间上的处理和调节周期。 在处理周期期间，脉冲整形信号具有调整的幅度分布，以产生输出的期望时间形状。 每个调理期间紧接在处理期之前或之后。 在给定的处理周期期间，调整脉冲整形信号的幅度分布，使得激光二极管的驱动电流在相应的处理周期内低于其最大值，并且与激光阈值电流具有相同的数量级 的激光二极管。 以这种方式，提高了在相应处理期间输出的稳定性。

公开(公告)号：US20110170163A1

公开(公告)日：2011-07-14

申请号：US12978126

申请日：2010-12-23

申请人： Yves Taillon ,  Mathieu Drolet ,  David Gay ,  Louis Desbiens ,  Brian W. Baird

发明人： Yves Taillon ,  Mathieu Drolet ,  David Gay ,  Louis Desbiens ,  Brian W. Baird

IPC分类号： G02F1/01

CPC分类号： B23K26/066

摘要： Laser systems and methods for providing an output light beam having a target spatial pattern are provided. A light generating module generates an input light beam, whose spectral profile is then tailored by imposing thereon a controllable phase modulation. The obtained spectrally tailored light beam is dispersed, using at least one spatially-dispersive element to provide an output light beam having a spatial profile which is a function of the spectral profile of the spectrally tailored light beam, The phase modulation is selected in view of the spectral profile of the input light beam and of the dispersion characteristics of the at least one spatially-dispersive element so that the spatial pattern of the output light beam matches the target spatial pattern therefor.

摘要翻译： 提供了用于提供具有目标空间图案的输出光束的激光系统和方法。 光产生模块产生输入光束，其光谱轮廓然后通过在其上施加可控相位调制而被调整。 使用至少一个空间色散元件将获得的光谱定制的光束分散，以提供具有作为光谱定制的光束的光谱分布的函数的空间分布的输出光束。相位调制是根据 输入光束的光谱分布和至少一个空间色散元件的色散特性，使得输出光束的空间图案与目标空间图案匹配。

公开(公告)号：US08254015B2

公开(公告)日：2012-08-28

申请号：US12978126

申请日：2010-12-23

申请人： Yves Taillon ,  Mathieu Drolet ,  David Gay ,  Louis Desbiens ,  Brian W. Baird

发明人： Yves Taillon ,  Mathieu Drolet ,  David Gay ,  Louis Desbiens ,  Brian W. Baird

IPC分类号： G02F1/01

CPC分类号： B23K26/066

摘要： Laser systems and methods for providing an output light beam having a target spatial pattern are provided. A light generating module generates an input light beam, whose spectral profile is then tailored by imposing thereon a controllable phase modulation. The obtained spectrally tailored light beam is dispersed, using at least one spatially-dispersive element to provide an output light beam having a spatial profile which is a function of the spectral profile of the spectrally tailored light beam, The phase modulation is selected in view of the spectral profile of the input light beam and of the dispersion characteristics of the at least one spatially-dispersive element so that the spatial pattern of the output light beam matches the target spatial pattern therefor.

摘要翻译： 提供了用于提供具有目标空间图案的输出光束的激光系统和方法。 光产生模块产生输入光束，其光谱轮廓然后通过在其上施加可控相位调制而被调整。 使用至少一个空间色散元件将获得的光谱定制的光束分散，以提供具有作为光谱定制的光束的光谱分布的函数的空间分布的输出光束。相位调制是根据 输入光束的光谱分布和至少一个空间色散元件的色散特性，使得输出光束的空间图案与目标空间图案匹配。

公开(公告)号：USRE43605E1

公开(公告)日：2012-08-28

申请号：US12351562

申请日：2009-01-09

申请人： James N. O'Brien ,  Lian-Cheng Zou ,  Yunlong Sun ,  Kevin P. Fahey ,  Michael J. Wolfe ,  Brian W. Baird ,  Richard S. Harris

发明人： James N. O'Brien ,  Lian-Cheng Zou ,  Yunlong Sun ,  Kevin P. Fahey ,  Michael J. Wolfe ,  Brian W. Baird ,  Richard S. Harris

IPC分类号： B23K26/04 ,  C04B41/91

CPC分类号： B23K26/0622 ,  B23K26/032 ,  B23K26/066 ,  B23K26/073 ,  B23K26/083 ,  B23K26/0869 ,  B23K26/364 ,  B23K26/38 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/50

摘要： UV laser cutting throughput through silicon and like materials is improved by dividing a long cut path (112) into short segments (122), from about 10 μm to 1 mm. The laser output (32) is scanned within a first short segment (122) for a predetermined number of passes before being moved to and scanned within a second short segment (122) for a predetermined number of passes. The bite size, segment size (126), and segment overlap (136) can be manipulated to minimize the amount and type of trench backfill. Real-time monitoring is employed to reduce rescanning portions of the cut path 112 (112) where the cut is already completed. Polarization direction of the laser output (32) is also correlated with the cutting direction to further enhance throughput. This technique can be employed to cut a variety of materials with a variety of different lasers and wavelengths. A multi-step process can optimize the laser processes for each individual layer.

摘要翻译： 通过将长切割路径（112）分割成约10微米至1mm的短段（122）来提高通过硅等材料的UV激光切割吞吐量。 激光输出（32）在第一短段（122）内扫描预定数量的通过，然后移动到第二短段（122）内并在第二短段（122）内扫描预定次数的通过次数。 可以操纵咬合尺寸，段尺寸（126）和段重叠（136）以最小化沟槽回填的数量和类型。 采用实时监测来减少已经完成切割的切割路径112（112）的重新扫描部分。 激光输出（32）的极化方向也与切割方向相关，以进一步提高吞吐量。 该技术可用于切割具有各种不同激光和波长的各种材料。 多步骤过程可以优化每个单独层的激光工艺。

公开(公告)号：USRE43400E1

公开(公告)日：2012-05-22

申请号：US11332815

申请日：2006-01-13

申请人： James N. O'Brien ,  Lian-Cheng Zou ,  Yunlong Sun ,  Kevin P. Fahey ,  Michael J. Wolfe ,  Brian W. Baird ,  Richard S. Harris

发明人： James N. O'Brien ,  Lian-Cheng Zou ,  Yunlong Sun ,  Kevin P. Fahey ,  Michael J. Wolfe ,  Brian W. Baird ,  Richard S. Harris

IPC分类号： B23K26/04 ,  C04B41/91

CPC分类号： B23K26/0622 ,  B23K26/032 ,  B23K26/066 ,  B23K26/073 ,  B23K26/083 ,  B23K26/0869 ,  B23K26/364 ,  B23K26/38 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/50

摘要： UV laser cutting throughput through silicon and like materials is improved by dividing a long cut path (112) into short segments (122), from about 10 μm to 1 mm. The laser output (32) is scanned within a first short segment (122) for a predetermined number of passes before being moved to and scanned within a second short segment (122) for a predetermined number of passes. The bite size, segment size (126), and segment overlap (136) can be manipulated to minimize the amount and type of trench backfill. Real-time monitoring is employed to reduce rescanning portions of the cut path 112 (112) where the cut is already completed. Polarization direction of the laser output (32) is also correlated with the cutting direction to further enhance throughput. This technique can be employed to cut a variety of materials with a variety of different lasers and wavelengths. A multi-step process can optimize the laser processes for each individual layer.

公开(公告)号：US07687740B2

公开(公告)日：2010-03-30

申请号：US11051262

申请日：2005-02-04

申请人： Kelly J. Bruland ,  Brian W. Baird ,  Ho Wai Lo

发明人： Kelly J. Bruland ,  Brian W. Baird ,  Ho Wai Lo

IPC分类号： B23K26/00

CPC分类号： B23K26/067 ,  B23K26/0613 ,  H01L21/76894

摘要： Methods and systems process a semiconductor substrate having a plurality of structures to be selectively irradiated with multiple laser beams. The structures are arranged in a plurality of substantially parallel rows extending in a generally lengthwise direction. The method generates a first laser beam that propagates along a first laser beam axis that intersects a first target location on or within the semiconductor substrate. The method also generates a second laser beam that propagates along a second laser beam axis that intersects a second target location on or within the semiconductor substrate. The second target location is offset from the first target location in a direction perpendicular to the lengthwise direction of the rows by some amount such that, when the first target location is a structure on a first row of structures, the second target location is a structure or between two adjacent structures on a second row distinct from the first row. The method moves the semiconductor substrate relative to the first and second laser axes in a direction approximately parallel to the rows of structures, so as to pass the first target location along the first row to irradiate for a first time selected structures in the first row, and so as to simultaneously pass the second target location along the second row to irradiate for a second time structures previously irradiated by the first laser beam during a previous pass of the first target location along the second row.

摘要翻译： 方法和系统处理具有多个结构的半导体衬底以选择性地照射多个激光束。 这些结构被布置成沿大致长度方向延伸的多个基本上平行的行。 该方法产生沿着与半导体衬底上或半导体衬底内的第一目标位置相交的第一激光束轴传播的第一激光束。 该方法还产生沿着与半导体衬底上或第二靶标位置相交的第二激光束轴传播的第二激光束。 第二目标位置在垂直于行长度方向的方向上偏离第一目标位置一定量，使得当第一目标位置是第一行结构上的结构时，第二目标位置是结构 或在与第一行不同的第二行上的两个相邻结构之间。 所述方法使所述半导体衬底相对于所述第一和第二激光轴在大致平行于所述结构行的方向上移动，以使所述第一目标位置沿着所述第一行通过，以在所述第一行中首次照射所选择的结构， 并且沿着第二行同时通过第二目标位置以照射先前在第一目标位置沿着第二行的先前通过期间由第一激光束照射的第二时间结构。