公开(公告)号：US20210274644A1

公开(公告)日：2021-09-02

申请号：US17322549

申请日：2021-05-17

Applicant: MKS Instruments, Inc.

Inventor： Ky LUU ,  Aaron T. RADOMSKI ,  Dave COFFTA

IPC: H05K1/02 ,  H01R4/02 ,  H01J37/32 ,  H01L23/40

Abstract: A clamp configured to be coupled to a printed circuit board to cool and compress one or more electrical connections subject to repeated power and thermal cycling. A first conductive column of the clamp is configured to compress a first electrical connection between a first power device lead and a first printed circuit board trace of the printed circuit board, and draw thermal energy away from the first power device lead. The first conductive column extends from a load spreading plate. The load spreading plate is an insulator that electrically isolates a fastener extending therefrom from the first conductive column. The fastener is configured to cooperate with the circuit board to connect the clamp to the circuit board, compress the load spreading plate against the first conductive column to compress the first electrical connection, and connect the clamp to ground.

公开(公告)号：US20240258071A1

公开(公告)日：2024-08-01

申请号：US18390694

申请日：2023-12-20

Applicant: MKS Instruments, Inc.

Inventor： Ky LUU ,  Jonathan SMYKA ,  Aaron RADOMSKI

IPC: H01J37/32

CPC classification number: H01J37/32146 ,  H01J37/32183 ,  H01J2237/3343

Abstract: A RF power generator having a fixed power generation section. The fixed power generation section includes a first plurality of power amplifiers each configured to receive a supply voltage and to output a respective first voltage. The RF power generator also includes a weighted power generation section including a plurality of weighted power amplifier modules. Each weighted power amplifier module includes a weighted power amplifier and an associated transformer. Each weighted power amplifier of the weighted power amplifier module receives a respective weighted supply voltage. The voltage across the transformer of each weighted power amplifier module is a fraction of the first voltage.

公开(公告)号：US20190334385A1

公开(公告)日：2019-10-31

申请号：US16506555

申请日：2019-07-09

Applicant: MKS Instruments, Inc.

Inventor： Ky LUU ,  Aaron T. RADOMSKI

IPC: H02J50/20 ,  H02J50/80 ,  H04B5/00

Abstract: A radio frequency power system is provided that includes bias modules, a switch, a matching network, and a control module. The bias modules are configured to generate respectively DC bias voltages. The switch is configured to (i) receive current from the bias modules, and (ii) control flow of the current from the bias modules to generate a radio frequency bias voltage signal. The matching network is configured to (i) receive the radio frequency bias voltage signal, and (ii) based on the radio frequency bias voltage signal, supply at least a portion of a radio frequency output voltage signal to an electrode of a substrate support in a processing chamber. The control module is connected to the switch and configured to control a state of the switch based on the radio frequency output voltage signal to shape a waveform of the radio frequency bias voltage signal.

公开(公告)号：US20240404788A1

公开(公告)日：2024-12-05

申请号：US18661049

申请日：2024-05-10

Applicant: MKS Instruments, Inc.

Inventor： Ky LUU ,  Aaron RADOMSKI

IPC: H01J37/32

Abstract: A power generator has a first plurality of power amplifiers each configured to receive a first, common supply voltage and to output a plurality of discrete DC voltages. At least one of the plurality of discrete DC voltages may be varied by varying the first, common supply voltage. The RF power generator may also include a second plurality of power amplifiers receiving a second either common or distinct supply voltage that differs from the first supply voltage. At least one of the plurality of discrete DC voltages may be varied by varying the second common or distinct supply voltage. The output of each power amplifier is added in series to generate an output voltage for the power generator. One of the plurality of power amplifiers is actuated or deactuated at a first time and an other of the plurality of power amplifiers is actuated or deactuated at a second time.

公开(公告)号：US20150381057A1

公开(公告)日：2015-12-31

申请号：US14751586

申请日：2015-06-26

Applicant: MKS INSTRUMENTS, INC.

Inventor： Ky LUU

IPC: H02M3/335

CPC classification number: H02M7/5387 ,  H02M3/337 ,  H03F3/211 ,  H03F2200/537 ,  H03F2200/541 ,  H03F2203/21142 ,  H03F2203/21151

Abstract: A power supply circuit includes a power amplifier that receives a direct current (DC) voltage from a first power source. A control signal applied to the power amplifier causes the power amplifier to convert the DC voltage to an alternating current (AC) output signal. The AC output signal is applied to a transformer that includes a first winding, a second winding, and a third winding. The first winding receives the AC output signal and the second winding receives an output current that varies in accordance with the AC output signal to apply current to a load. A rectifier includes a plurality of diodes configured to rectify a voltage across the third winding and clamp the voltage at the load. Return power from the third winding may be returned to the first power source.

Abstract translation: 电源电路包括从第一电源接收直流（DC）电压的功率放大器。 施加到功率放大器的控制信号使得功率放大器将DC电压转换成交流（AC）输出信号。 交流输出信号被施加到包括第一绕组，第二绕组和第三绕组的变压器。 第一绕组接收AC输出信号，第二绕组接收根据AC输出信号变化的输出电流，以将电流施加到负载。 整流器包括多个二极管，其被配置为对第三绕组两端的电压进行整流，并钳位负载处的电压。 从第三绕组返回功率可以返回到第一电源。

公开(公告)号：US20190104609A1

公开(公告)日：2019-04-04

申请号：US16115692

申请日：2018-08-29

Applicant: MKS Instruments, Inc.

Inventor： Ky LUU ,  Aaron T. RADOMSKI ,  Dave COFFTA

IPC: H05K1/02 ,  H01J37/32 ,  H01R4/02

Abstract: A clamp configured to be coupled to a printed circuit board to cool and compress one or more electrical connections subject to repeated power and thermal cycling. A first conductive column of the clamp is configured to compress a first electrical connection between a first power device lead and a first printed circuit board trace of the printed circuit board, and draw thermal energy away from the first power device lead. The first conductive column extends from a load spreading plate. The load spreading plate is an insulator that electrically isolates a fastener extending therefrom from the first conductive column. The fastener is configured to cooperate with the circuit board to connect the clamp to the circuit board, compress the load spreading plate against the first conductive column to compress the first electrical connection, and connect the clamp to ground.

公开(公告)号：US20180342903A1

公开(公告)日：2018-11-29

申请号：US15605055

申请日：2017-05-25

Applicant: MKS Instruments, Inc.

Inventor： Ky LUU ,  Aaron T. RADOMSKI

IPC: H02J50/20 ,  H02J50/80 ,  H04B5/00

CPC classification number: H02J50/20 ,  H02J50/80 ,  H04B5/0037

Abstract: A radio frequency power system is provided that includes bias modules, a switch, a matching network, and a control module. The bias modules are configured to generate respectively DC bias voltages. The switch is configured to (i) receive current from the bias modules, and (ii) control flow of the current from the bias modules to generate a radio frequency bias voltage signal. The matching network is configured to (i) receive the radio frequency bias voltage signal, and (ii) based on the radio frequency bias voltage signal, supply at least a portion of a radio frequency output voltage signal to an electrode of a substrate support in a processing chamber. The control module is connected to the switch and configured to control a state of the switch based on the radio frequency output voltage signal to shape a waveform of the radio frequency bias voltage signal.

公开(公告)号：US20180330921A1

公开(公告)日：2018-11-15

申请号：US15974947

申请日：2018-05-09

Applicant: MKS Instruments, Inc.

Inventor： Aaron T. RADOMSKI ,  Ky LUU ,  Larry J. FISK, II ,  Ross REINHARDT ,  Matthew G. HARRINGTON ,  Amish RUGHOONUNDON ,  Jesse N. KLEIN ,  Aaron M. BURRY

IPC: H01J37/32 ,  H05H1/46 ,  H01L21/3065

Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.