摘要:
A cylindrical piezoelectric element is arranged to share an axis with a cylindrical vibrator having different diameters at central and end portions to fix the vibrator forming a gap at the central portion. Vibration voltages are applied across first electrodes on the piezoelectric element and the vibrator, namely, a second electrode, to vibrate the vibrator and bring a wave front of a traveling wave into contact with a tubular member, i.e., a supporting member fitted to the vibrator. Friction at a contact portion of the vibrator moves a mover including the vibrator and the piezoelectric element in an axial direction of the tubular member. By amplifying the vibration amplitude using the vibrator provided separately from the piezoelectric element, a small actuator capable of performing high-speed driving is realized.
摘要:
A cylindrical piezoelectric element is arranged to share an axis with a cylindrical vibrator having different diameters at central and end portions to fix the vibrator forming a gap at the central portion. Vibration voltages are applied across first electrodes on the piezoelectric element and the vibrator, namely, a second electrode, to vibrate the vibrator and bring a wave front of a traveling wave into contact with a tubular member, i.e., a supporting member fitted to the vibrator. Friction at a contact portion of the vibrator moves a mover including the vibrator and the piezoelectric element in an axial direction of the tubular member. By amplifying the vibration amplitude using the vibrator provided separately from the piezoelectric element, a small actuator capable of performing high-speed driving is realized.
摘要:
A thin film made of an amorphous material having a supercooled liquid phase region is formed on a substrate. Then, the thin film is heated to a temperature within the supercooled liquid phase region and is deformed by its weight, mechanical external force, electrostatic external force or the like, thereby to form a thin film-structure. Thereafter, the thin film-structure is cooled down to room temperature, which results in the prevention of the thin film's deformation.
摘要:
It is found that alloys including amorphous phase comprising at least a first element selected from the group consisting of Pt and Ru, at least a second element selected from the group consisting of Zr, Hf, Si, Ir, Ru, Pd and Ni, and at least a third element selected from the group consisting of Si, Cu, Cr, Fe, Mo, Co, Al, Zr, Hf, Ni and Ru have excellent machining characteristics, heat-resistant characteristics, corrosion resistance and adhesion resistance. Using the alloys as the molding surface of a die, a heat resistant molding die for forming glass optical device having fine structure for performing high definite functions became possible to manufacture with excellent machining characteristics.
摘要:
It is found that alloys including amorphous phase comprising at least a first element selected from the group consisting of Pt and Ru, at least a second element selected from the group consisting of Zr, Hf, Si, Ir, Ru, Pd and Ni, and at least a third element selected from the group consisting of Si, Cu, Cr, Fe, Mo, Co, Al, Zr, Hf, Ni and Ru have excellent machining characteristics, heat-resistant characteristics, corrosion resistance and adhesion resistance. Using the alloys as the molding surface of a die, a heat resistant molding die for forming glass optical device having fine structure for performing high definite functions became possible to manufacture with excellent machining characteristics.
摘要:
This invention provides a novel material development apparatus capable of automatically and efficiently forming uniform novel materials with reduced impurities and different compositions individually on respective cells. The novel material development apparatus includes: a plurality of arc plasma guns; a magnetic circuit deflecting/focusing plasma of the arc plasma guns; a controller thereof; and a plurality of deposition cells. For film deposition, plasma containing ions of constituent elements and generated in a pulsed manner by the arc plasma guns are focused to the deposition cell by the magnetic circuit. We can switch the deposition cells by using the moving stage or by using the magnetic circuit changing a focus point, or we can change a focus point by using magnetic circuit so that collectively form uniform novel materials with reduced impurities and different compositions of alloys or compounds efficiently.
摘要:
A variable inductor includes an insulating substrate (1), a thermally softenable spiral coil (2) provided on the insulating substrate (1), and a pair of input/output terminals (3, 4) each connected electrically to a respective end of the coil (2). Preferably, the coil (2) is made from a non-crystalline thin film metallic glass which softens in a supercooled liquid phase.
摘要:
A thin film made of an amorphous material having a supercooled liquid phase region is formed on a substrate. Then, the thin film is heated to a temperature within the supercooled liquid phase region and is deformed by its weight, mechanical external force, electrostatic external force or the like, thereby to form a thin film-structure. Thereafter, the thin film-structure is cooled down to room temperature, which results in the prevention of the thin film's deformation.
摘要:
A probe card transmits high frequency signals between an integrated circuit under test and a semiconductor-testing device. The probe card includes a substrate, a signal transmission path formed on the substrate, a contactor formed on an end portion of the signal transmission path on one side of the substrate, a grounding conductor grounded, and a hole. The contactor is made of a metallic glass material, which shows a nature of viscous fluidity in the supercooled liquid region. The contactor is separated from the substrate over the hole. The contactor elastically contacts a pad of the circuit under test.
摘要:
A thin film made of an amorphous material having supercooled liquid phase region is formed on a substrate. Then, the thin film is heated to a temperature within the supercooled liquid phase region and is deformed by its weight, mechanical external force, electrostatic external force or the like, thereby to form a thin film-structure. Thereafter, the thin film-structure is cooled down to room temperature, which results in the prevention of the thin film's deformation.