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13 条记录 (耗时 0.016 秒)

    Method for improved resolution of patterning using binary masks with pupil filters
    1.
    发明授权
    Method for improved resolution of patterning using binary masks with pupil filters 有权
    使用瞳孔滤光片的二进制掩膜提高图案分辨率的方法

    公开(公告)号：US06549272B1

    公开(公告)日：2003-04-15

    申请号：US09553199

    申请日：2000-04-20

    申请人： Manish Chandhok ,  Brandon C. Barnett

    发明人： Manish Chandhok ,  Brandon C. Barnett

    IPC分类号： G03B2754

    CPC分类号： G03B27/42 ,  G03F7/70216

    摘要： A photolithography lens system is disclosed. The system has several elements perpendicularly aligned to an optical axis. The elements include a light source that generates an exposing light, a first lens that has a front focal plane and a pupil plane, and a binary mask between the light source and the first lens. The binary mask is placed at the front focal plane of the first lens. A pupil filter is placed at the pupil plane. Finally, a second lens is provided that has a front focal plane at substantially the same position as the pupil plane. The second lens also has a back focal plane where a semiconductor wafer is placed.

    摘要翻译： 公开了一种光刻透镜系统。 该系统具有垂直于光轴的多个元件。 元件包括产生曝光光的光源，具有前焦平面和瞳平面的第一透镜以及光源和第一透镜之间的二进制掩模。 二进制掩模放置在第一透镜的前焦平面处。 瞳孔滤光片放置在瞳孔平面。 最后，提供第二透镜，其具有与光瞳平面基本相同位置的前焦面。 第二透镜还具有放置半导体晶片的后焦平面。

    Method for improved resolution of patterning using binary masks with pupil filters
    2.
    发明授权
    Method for improved resolution of patterning using binary masks with pupil filters 失效
    使用瞳孔滤光片的二进制掩膜提高图案分辨率的方法

    公开(公告)号：US06700649B2

    公开(公告)日：2004-03-02

    申请号：US10263964

    申请日：2002-10-02

    申请人： Manish Chandhok ,  Brandon C. Barnett

    发明人： Manish Chandhok ,  Brandon C. Barnett

    IPC分类号： G03B2732

    CPC分类号： G03F7/70216 ,  G03B27/42

    摘要： A photolithography lens system is disclosed. The system has several elements all perpendicularly aligned to an optical axis. The elements include a light source that generates an exposing light, a first lens that has a front focal plane and a pupil plane, and a binary mask between the light source and the first lens. The binary mask is placed at the front focal plane of the first lens. A pupil filter is placed at the pupil plane. Finally, a second lens is provided that has a front focal plane at substantially the same position as the pupil plane. The second lens also has a back focal plane where a semiconductor wafer is placed.

    摘要翻译： 公开了一种光刻透镜系统。 该系统具有与光轴垂直对准的多个元件。 元件包括产生曝光光的光源，具有前焦平面和瞳平面的第一透镜以及光源和第一透镜之间的二进制掩模。 二进制掩模放置在第一透镜的前焦平面处。 瞳孔滤光片放置在瞳孔平面。 最后，提供第二透镜，其具有与光瞳平面基本相同位置的前焦面。 第二透镜还具有放置半导体晶片的后焦平面。

    Method for improved resolution of patterning using binary masks with pupil filters
    3.
    发明授权
    Method for improved resolution of patterning using binary masks with pupil filters 有权
    使用瞳孔滤光片的二进制掩膜提高图案分辨率的方法

    公开(公告)号：US06567155B1

    公开(公告)日：2003-05-20

    申请号：US09527377

    申请日：2000-03-16

    申请人： Manish Chandhok ,  Brandon C. Barnett

    发明人： Manish Chandhok ,  Brandon C. Barnett

    IPC分类号： G03B2754

    CPC分类号： G03F7/70216 ,  G03B27/42

    摘要： A photolithography lens system is disclosed. The system has several elements all perpendicularly aligned to an optical axis. The elements include a light source that generates an exposing light, a first lens that has a front focal plane and a pupil plane, and a binary mask between the light source and the first lens. The binary mask is placed at the front focal plane of the first lens. A pupil filter is placed at the pupil plane. Finally, a second lens is provided that has a front focal plane at substantially the same position as the pupil plane. The second lens also has a back focal plane where a semiconductor wafer is placed.

    摘要翻译： 公开了一种光刻透镜系统。 该系统具有与光轴垂直对准的多个元件。 元件包括产生曝光光的光源，具有前焦平面和瞳平面的第一透镜以及光源和第一透镜之间的二进制掩模。 二进制掩模放置在第一透镜的前焦平面处。 瞳孔滤光片放置在瞳孔平面。 最后，提供第二透镜，其具有与光瞳平面基本相同位置的前焦面。 第二透镜还具有放置半导体晶片的后焦平面。

    On-chip optical signal routing
    4.
    发明授权
    On-chip optical signal routing 有权
    片内光信号路由

    公开(公告)号：US06888974B2

    公开(公告)日：2005-05-03

    申请号：US10422345

    申请日：2003-04-23

    申请人： Bruce A. Block ,  Brandon C. Barnett

    发明人： Bruce A. Block ,  Brandon C. Barnett

    IPC分类号： G02B6/12 ,  G02B6/122 ,  G02B6/43 ,  G02B6/26 ,  G02B6/42

    CPC分类号： B82Y20/00 ,  G02B6/122 ,  G02B6/1223 ,  G02B6/43 ,  G02B2006/12038 ,  G02B2006/12061 ,  G02B2006/1215

    摘要： A microchip may include an optical signal routing system. The optical routing system may include a distribution waveguide coupled to a light source and signaling waveguides interconnecting source and destination locations. A directional coupler may be used to couple and modulate light from the distribution waveguide to a signaling waveguide at a source location. A photodetector may be used to convert light signals from the source location into electrical signals at the destination.

    摘要翻译： 微芯片可以包括光信号路由系统。 光路由系统可以包括耦合到光源的分布波导和互连源和目的地位置的信号波导。 定向耦合器可用于将来自分布波导的光耦合到光源位置处的信号波导。 光电检测器可用于将来自源位置的光信号转换为目的地的电信号。

    Optoelectrical package
    5.
    发明授权
    Optoelectrical package 失效
    光电封装

    公开(公告)号：US07418163B2

    公开(公告)日：2008-08-26

    申请号：US10109313

    申请日：2002-03-28

    申请人： Kishore K. Chakravorty ,  Joseph F. Ahadian ,  Johanna Swan ,  Thomas P. Thomas ,  Brandon C. Barnett ,  Ian Young

    发明人： Kishore K. Chakravorty ,  Joseph F. Ahadian ,  Johanna Swan ,  Thomas P. Thomas ,  Brandon C. Barnett ,  Ian Young

    IPC分类号： G02B6/12

    CPC分类号： G02B6/43 ,  G02B6/42 ,  G02B6/4214 ,  G02B6/4232 ,  G02B6/4249 ,  G02B6/4255 ,  G02B6/4257 ,  G02B6/426 ,  G02B6/428 ,  G02B6/4287

    摘要： An integrated optoelectrical package for optoelectrical integrated circuits (ICs) is disclosed. The package includes a package substrate having contact receiving members on an upper surface. The contact receiving members are electrically connected to contacts on the lower surface. An optoelectronic receiver package and an optoelectronic transmitter package are each electrically mounted to respective first and second subsets of the contact receiving members. Input and output waveguide arrays are formed atop the substrate package and are optically coupled to the optoelectronic receiver package and the optoelectronic transmitter package, respectively. The contacts on the lower surface of the package substrate are designed to contact and engage the contact receiving members of a standard printed circuit board (PCB).

    摘要翻译： 公开了一种用于光电集成电路（IC）的集成光电封装。 该封装包括在上表面上具有接触部件的封装基板。 触点接收构件电连接到下表面上的触点。 光电子接收器封装和光电发射器封装各自电连接到触点容纳部件的相应的第一和第二子集。 输入和输出波导阵列形成在衬底封装的顶部，并分别光耦合到光电接收器封装和光电发射器封装。 封装基板的下表面上的触点被设计成接触和接合标准印刷电路板（PCB）的触点接收构件。

    Optical add/drop interconnect bus for multiprocessor architecture
    7.
    发明授权
    Optical add/drop interconnect bus for multiprocessor architecture 有权
    用于多处理器架构的光分插互连总线

    公开(公告)号：US07366368B2

    公开(公告)日：2008-04-29

    申请号：US10868571

    申请日：2004-06-15

    申请人： Warren R. Morrow ,  Brandon C. Barnett

    发明人： Warren R. Morrow ,  Brandon C. Barnett

    IPC分类号： H04B10/20 ,  H04J14/00 ,  G02F1/01 ,  G02F1/035 ,  G02F1/295 ,  G02F1/03 ,  G02F1/07 ,  G02F1/29 ,  G02B6/12 ,  G02B6/26 ,  G02B6/42

    CPC分类号： H04J14/0227 ,  H04J14/0201 ,  H04J14/0241 ,  H04J14/028

    摘要： An optical bus interconnects two or more processors in a multiprocessor system. One or more electrical-to-optical (“E-O”) transmitters are optically coupled to the optical bus using optical couplers. The E-O transmitters receive electrical signals from the processors and convert the electrical signals to optical signals to be guided onto the optical bus. Optical-to-electrical (“O-E”) receivers are also coupled to the optical bus using the optical couplers. The O-E receivers receive optical signals from the optical bus and convert the optical signals to electrical signals for the processors.

    摘要翻译： 光总线在多处理器系统中互连两个或多个处理器。 一个或多个电对光（“E-O”）发射器使用光耦合器光耦合到光总线。 E-O发射机接收来自处理器的电信号，并将电信号转换为光信号以引导到光总线上。 光 - 电（“O-E”）接收器也使用光耦合器耦合到光总线。 O-E接收器从光总线接收光信号，并将光信号转换为处理器的电信号。

    Optical clocking with a ring resonator
    10.
    发明授权
    Optical clocking with a ring resonator 失效
    具有环形谐振器的光时钟

    公开(公告)号：US07031563B2

    公开(公告)日：2006-04-18

    申请号：US10431645

    申请日：2003-05-06

    申请人： Bruce A. Block ,  Brandon C. Barnett ,  Paul Davids

    发明人： Bruce A. Block ,  Brandon C. Barnett ,  Paul Davids

    IPC分类号： G02B6/26

    CPC分类号： G02B6/12007 ,  G02B6/43 ,  G02B2006/121

    摘要： A microchip may include an optical clocking system. The optical clocking system may include a ring resonator which multiplies the frequency of light pulses from a light source for use as optical clocking signals and distribution waveguides to distribute the optical clocking signals to different regions of the microchip.

    摘要翻译： 微芯片可以包括光时钟系统。 光时钟系统可以包括环形谐振器，其将来自光源的光脉冲的频率乘以用作光时钟信号和分布波导，以将光时钟信号分配到微芯片的不同区域。