Process and apparatus for depositing a carbon-rich coating on a moving
substrate
    6.
    发明授权
    Process and apparatus for depositing a carbon-rich coating on a moving substrate 失效
    用于在移动的基底上沉积富碳涂层的方法和装置

    公开(公告)号:US5948166A

    公开(公告)日:1999-09-07

    申请号:US938890

    申请日:1997-09-26

    CPC分类号: C23C16/545 C23C16/26

    摘要: A process and apparatus for deposition of a carbon-rich coating onto a moving substrate is provided. The process and apparatus involve the creation of an electric field surrounding a rotatable electrode in a carbon-containing gaseous environment. This results in carbon-rich plasma formation, wherein the electrode is negatively biased with respect to the electrode which results in ion acceleration from the plasma toward the electrode. Ion bombardment continuously occurs on a substrate in contact with the electrode producing a continuous carbon-rich coating over the length of the substrate.

    摘要翻译: 提供了一种用于将富碳涂层沉积到移动的衬底上的工艺和设备。 该方法和装置涉及在含碳气体环境中产生围绕可旋转电极的电场。 这导致富含碳的等离子体形成,其中电极相对于电极被负偏压,这导致从等离子体向电极的离子加速。 离子轰击连续发生在与电极接触的基底上,在基底的长度上产生连续的富碳涂层。

    Process for depositing a carbon-rich coating on a moving substrate
    7.
    发明授权
    Process for depositing a carbon-rich coating on a moving substrate 失效
    在运动基板上沉积富碳涂层的方法

    公开(公告)号:US5888594A

    公开(公告)日:1999-03-30

    申请号:US744227

    申请日:1996-11-05

    CPC分类号: C23C16/26 C23C16/545

    摘要: A process and apparatus for deposition of a carbon-rich coating onto a moving substrate is provided. The process and apparatus involve the creation of an electric field surrounding a rotatable electrode in a carbon-containing gaseous environment. This results in carbon-rich plasma formation, wherein the electrode is negatively biased with respect to the electrode which results in ion acceleration from the plasma toward the electrode. Ion bombardment continuously occurs on a substrate in contact with the electrode producing a continuous carbon-rich coating over the length of the substrate.

    摘要翻译: 提供了一种用于将富碳涂层沉积到移动的衬底上的工艺和设备。 该方法和装置涉及在含碳气体环境中产生围绕可旋转电极的电场。 这导致富含碳的等离子体形成,其中电极相对于电极被负偏压,这导致从等离子体向电极的离子加速。 离子轰击连续发生在与电极接触的基底上,在基底的长度上产生连续的富碳涂层。

    GLASS-LIKE POLYMERIC ANTIREFLECTIVE FILMS COATED WITH SILICA NANOPARTICLES, METHODS OF MAKING AND LIGHT ABSORBING DEVICES USING SAME
    8.
    发明申请
    GLASS-LIKE POLYMERIC ANTIREFLECTIVE FILMS COATED WITH SILICA NANOPARTICLES, METHODS OF MAKING AND LIGHT ABSORBING DEVICES USING SAME 审中-公开
    用二氧化硅纳米粒子涂覆的玻璃状聚合物抗反射膜,使用相同的制造方法和光吸收装置

    公开(公告)号:US20130258483A1

    公开(公告)日:2013-10-03

    申请号:US13990172

    申请日:2011-12-13

    IPC分类号: G02B1/11

    摘要: A transparent anti-reflective structured film comprising a structured film substrate having a structured face, with anti-reflective structures defining a structured surface. The structured face is anti-reflective to light, with at least a substantial portion of the structured surface comprising a glass-like surface. At least the anti-reflective structures comprise a cross-linked silicone elastomeric material, and the glass-like surface comprises an SiO2 stoichiometry. The glass-like surface is coated with a coating of at least one layer of agglomerates of silica nanoparticles, with the agglomerates comprising a three-dimensional porous network of silica nanoparticles, and the silica nanoparticles being bonded to adjacent silica nanoparticles. A light energy absorbing device comprising the transparent anti-reflective structured film disposed so as to be between a source of light energy and a light energy receiving face of a light absorber, when light energy is being absorbed by the light absorber.

    摘要翻译: 一种透明的抗反射结构膜,其包括具有结构化面的结构化膜基底,其具有限定结构化表面的抗反射结构。 结构化面对光进行抗反射,至少大部分结构化表面包括玻璃状表面。 至少抗反射结构包含交联的有机硅弹性体材料,并且玻璃状表面包括SiO 2化学计量。 玻璃状表面涂覆有至少一层二氧化硅纳米颗粒附聚物的涂层,附聚物包含二氧化硅纳米颗粒的三维多孔网络,并且二氧化硅纳米颗粒结合到相邻的二氧化硅纳米颗粒。 一种光能吸收装置,其特征在于,在所述光吸收体吸收光能的同时,所述光能吸收装置具有设置在光能源与光吸收体的光能接收面之间的透明抗反射结构膜。

    APPARATUS AND METHODS FOR FABRICATION OF THIN FILM ELECTRONIC DEVICES AND CIRCUITS
    10.
    发明申请
    APPARATUS AND METHODS FOR FABRICATION OF THIN FILM ELECTRONIC DEVICES AND CIRCUITS 审中-公开
    薄膜电子器件和电路的制造方法和装置

    公开(公告)号:US20080171422A1

    公开(公告)日:2008-07-17

    申请号:US11622209

    申请日:2007-01-11

    IPC分类号: H01L21/20 H01L21/36

    CPC分类号: H01L51/001 Y02E10/549

    摘要: Methods and systems for forming layered electronic devices on a flexible, elongated substrate are described. The layered electronic devices include at least one electronically or optically active layer. Deposition of one more layers of the electronic devices occurs as the flexible substrate is moved through one or more deposition stations. At each deposition station the substrate is aligned with an aperture mask having apertures arranged in a pattern. The aperture mask and the substrate are brought into proximity over a portion of a circumference of a rotating drum. A layer of the layered electronic devices is formed by deposition of material through the apertures of the aperture mask. At each deposition station, registration between at least two layers of the layered electronic devices is maintained.

    摘要翻译: 描述了在柔性细长衬底上形成分层电子器件的方法和系统。 分层电子器件包括至少一个电子或光学有源层。 当柔性基板移动通过一个或多个沉积站时,会发生一层电子设备的沉积。 在每个沉积站处,基板与具有以图案布置的孔的孔径掩模对准。 孔径掩模和基底在旋转鼓的圆周的一部分附近。 层状电子器件的层通过孔径掩模的孔隙沉积材料形成。 在每个沉积站处,保持至少两层分层电子器件之间的对准。