Method for manufacturing piezo-resonator
    1.
    发明申请
    Method for manufacturing piezo-resonator 有权
    制造压电谐振器的方法

    公开(公告)号:US20050090033A1

    公开(公告)日:2005-04-28

    申请号:US10968976

    申请日:2004-10-21

    摘要: A method for manufacturing a piezo-resonator including: a first step of forming an upper electrode layer 20 on the piezoelectric film 14, a second step of coating the upper electrode layer 20 with a resist 21 and of performing patterning on the resist so as to have a shape of the upper electrode, a third step of masking the patterned resist 21 and removing the upper electrode layer 20 other than masked portions and forming two or more first upper electrodes 15a, a fourth step of removing the resist 21, a fifth step of coating the first upper electrodes 15a with a resist and performing patterning on the resist so that the first upper electrodes 15a are partially exposed, a sixth step of etching each of the exposed first upper electrodes 15a by a specified thickness to form a second upper electrode 15b, and a seventh step of removing the resist 22.

    摘要翻译: 一种制造压电谐振器的方法,包括:在压电膜14上形成上电极层20的第一步骤,用抗蚀剂21涂覆上电极层20并在抗蚀剂上进行图案化的第二步骤,以便 具有上电极的形状,除了掩模部分之外掩蔽图案化抗蚀剂21和除去上电极层20并形成两个或更多个第一上电极15A的第三步骤,去除抗蚀剂21的第四步骤,第五步 使用抗蚀剂涂覆第一上电极15a并在抗蚀剂上进行图案化以使第一上电极15a部分暴露的步骤;将暴露的第一上电极15a的每一个蚀刻一定厚度以形成第六步骤 第二上电极15b,以及除去抗蚀剂22的第七步骤。

    Method for manufacturing piezo-resonator
    2.
    发明授权
    Method for manufacturing piezo-resonator 有权
    制造压电谐振器的方法

    公开(公告)号:US07003875B2

    公开(公告)日:2006-02-28

    申请号:US10968976

    申请日:2004-10-21

    IPC分类号: H05K3/02 B44C1/22 H01L4/04

    摘要: A method for manufacturing a piezo-resonator including: a first step of forming an upper electrode layer 20 on the piezoelectric film 14, a second step of coating the upper electrode layer 20 with a resist 21 and of performing patterning on the resist so as to have a shape of the upper electrode, a third step of masking the patterned resist 21 and removing the upper electrode layer 20 other than masked portions and forming two or more first upper electrodes 15a, a fourth step of removing the resist 21, a fifth step of coating the first upper electrodes 15a with a resist and performing patterning on the resist so that the first upper electrodes 15a are partially exposed, a sixth step of etching each of the exposed first upper electrodes 15a by a specified thickness to form a second upper electrode 15b, and a seventh step of removing the resist 22.

    摘要翻译: 一种制造压电谐振器的方法,包括:在压电膜14上形成上电极层20的第一步骤,用抗蚀剂21涂覆上电极层20并在抗蚀剂上进行图案化的第二步骤,以便 具有上电极的形状,除了掩模部分之外掩蔽图案化抗蚀剂21和除去上电极层20并形成两个或更多个第一上电极15A的第三步骤,去除抗蚀剂21的第四步骤,第五步 使用抗蚀剂涂覆第一上电极15a并在抗蚀剂上进行图案化以使第一上电极15a部分暴露的步骤;将暴露的第一上电极15a的每一个蚀刻一定厚度以形成第六步骤 第二上电极15b,以及除去抗蚀剂22的第七步骤。

    Filter device utilizing stacked resonators and acoustic coupling and branching filter using same
    3.
    发明授权
    Filter device utilizing stacked resonators and acoustic coupling and branching filter using same 有权
    使用叠层谐振器的滤波器装置和使用其的声耦合和分支滤波器

    公开(公告)号:US07212083B2

    公开(公告)日:2007-05-01

    申请号:US10902525

    申请日:2004-07-30

    IPC分类号: H03H9/54 H03H9/70

    CPC分类号: H03H9/605 H03H9/583 H03H9/60

    摘要: A filter device is provided which is low in power loss, small in size and operates in wide bands. The filter device includes a first signal-side resonator having an input signal electrode, an output signal electrode, a first piezoelectric film, an input electrode film, and a common electrode film being commonly used by a second signal-side resonator and sandwiching the first piezoelectric film using the input electrode film, a second signal-side resonator having a second piezoelectric film formed in layers on the first piezoelectric film, an output electrode film, a common electrode film sandwiching the second piezoelectric film using the output electrode film and being acoustically coupled to the first signal resonator, and a ground-side resonator connected between the common electrode film and a ground electrode and operating in a specified resonant frequency and in an anti-resonant frequency almost conforming to resonant frequencies in which the first and second signal-side resonators operate.

    摘要翻译: 提供了一种功率损耗低,尺寸小,宽带工作的过滤装置。 滤波器装置包括:第一信号侧谐振器,具有由第二信号侧谐振器共同使用的输入信号电极,输出信号电极,第一压电膜,输入电极膜和公共电极膜,并夹持第一信号侧谐振器 使用所述输入电极膜的压电膜,具有在所述第一压电膜上形成的第二压电膜的第二信号侧谐振器,输出电极膜,使用所述输出电极膜夹住所述第二压电膜并在声学上的公共电极膜 连接到第一信号谐振器,以及接地侧谐振器,其连接在公共电极膜和接地电极之间,并以规定的谐振频率和反谐振频率工作,几乎符合共振频率,其中第一和第二信号 - 侧谐振器工作。

    Filter device and branching filter using same
    4.
    发明申请
    Filter device and branching filter using same 有权
    过滤器和分支过滤器使用相同的

    公开(公告)号:US20050030126A1

    公开(公告)日:2005-02-10

    申请号:US10902525

    申请日:2004-07-30

    CPC分类号: H03H9/605 H03H9/583 H03H9/60

    摘要: A filter device is provided which is low in power loss, small in size and operates in wide bands. The filter device includes a first signal-side resonator having an input signal electrode, an output signal electrode, a first piezoelectric film, an input electrode film, and a common electrode film being commonly used by a second signal-side resonator and sandwiching the first piezoelectric film using the input electrode film, a second signal-side resonator having a second piezoelectric film formed in layers on the first piezoelectric film, an output electrode film, a common electrode film sandwiching the second piezoelectric film using the output electrode film and being acoustically coupled to the first signal resonator, and a ground-side resonator connected between the common electrode film and a ground electrode and operating in a specified resonant frequency and in an anti-resonant frequency almost conforming to resonant frequencies in which the first and second signal-side resonators operate.

    摘要翻译: 提供了一种功率损耗低,尺寸小,宽带工作的过滤装置。 滤波器装置包括:第一信号侧谐振器,具有由第二信号侧谐振器共同使用的输入信号电极,输出信号电极,第一压电膜,输入电极膜和公共电极膜,并夹持第一信号侧谐振器 使用所述输入电极膜的压电膜,具有在所述第一压电膜上形成的第二压电膜的第二信号侧谐振器,输出电极膜,使用所述输出电极膜夹住所述第二压电膜并在声学上的公共电极膜 连接到第一信号谐振器,以及接地侧谐振器,其连接在公共电极膜和接地电极之间,并以规定的谐振频率和反谐振频率工作,几乎符合共振频率,其中第一和第二信号 - 侧谐振器工作。

    Piezoelectric resonator, filter and electronic component using the same
    5.
    发明授权
    Piezoelectric resonator, filter and electronic component using the same 有权
    压电谐振器,滤波器和使用其的电子元件

    公开(公告)号:US07348714B2

    公开(公告)日:2008-03-25

    申请号:US10901382

    申请日:2004-07-29

    IPC分类号: H01L41/04 H01L41/08

    摘要: A piezoelectric resonator includes; a lower electrode 24 formed on a substrate 11; a piezoelectric film 23 formed on the lower electrode 24; an upper electrode 25 formed on the piezoelectric film 23 and obtaining, in collaboration with the lower electrode 24, a signal having a predetermined resonance frequency by a propagation of a bulk acoustic wave inside the piezoelectric film 23; and an acoustic multilayer reflective film 28 including an SiO2 film 28a having a predetermined acoustic impedance and an AIN film 28b having an acoustic impedance higher than the SiO2 film 28a, and reflecting the bulk acoustic wave, the SiO2 film 28a and the AIN film 28b being alternately stacked on the upper electrode 25, and the SiO2 film 28a being in contact with the upper electrode 25.

    摘要翻译: 压电谐振器包括: 形成在基板11上的下电极24; 形成在下电极24上的压电膜23; 形成在压电膜23上的上电极25,通过压电膜23内的体声波的传播,与下电极24协作获得具有预定谐振频率的信号; 以及包括具有预定声阻抗的SiO 2膜28a和具有高于SiO 2膜28的声阻抗的AIN膜28b的声学多层反射膜28 并且反射体声波,SiO 2膜28a和AIN膜28b交替堆叠在上电极25上,并且SiO 2膜28 a与上电极25接触。

    Filter device capable of obtaining attenuation characteristic of sharpness in narrow band width and branching filter using the same
    6.
    发明授权
    Filter device capable of obtaining attenuation characteristic of sharpness in narrow band width and branching filter using the same 有权
    能够获得窄带宽度的锐度衰减特性的滤波器装置及使用其的分支滤波器

    公开(公告)号:US07170370B2

    公开(公告)日:2007-01-30

    申请号:US10843568

    申请日:2004-05-12

    IPC分类号: H03H9/54 H03H9/64

    CPC分类号: H03H9/6426 H03H9/605

    摘要: In a filter device 10 constituted by circuit elements formed on a single substrate 11, the circuit elements includes a first wing section 14 formed between an input signal electrode 12 and an output signal electrode 13, first resonators 15a, 15b, 15c located in the first wiring section 14 and having a predetermined resonance frequency, second wiring sections 17a, 17b, 17c, 17d formed between the first wiring section 14 and a ground electrode 16, second resonators 18a, 18b, 18c, 18d located in the second wiring sections 17a, 17b, 17c, 17d and having an anti-resonance frequency forming a pass-band with the predetermined resonance frequency of the first resonators 15a, 15b, 15c. An effective electric and mechanical coupling factor of the second resonator 18a is different from those of the other resonators 15a, 15b, 15c, 18b, 18c, 18d.

    摘要翻译: 在由形成在单个基板11上的电路元件构成的滤波器装置10中,电路元件包括形成在输入信号电极12和输出信号电极13之间的第一翼部分14,第一谐振器15a,15b,15c, 在第一配线部14中具有规定的共振频率,在第一配线部14和接地电极16之间形成的第二配线部17a,17b,17c,17d,第二谐振器18a,18b,18c ,18d,位于第二配线部分17a,17b,17c,17d中,并且具有形成具有第一谐振器15a,15b,15c的预定谐振频率的通带的反共振频率。 第二谐振器18a的有效的电耦合和机械耦合系数与其它谐振器15a,15b,15c,18b,18c,18d的有效电耦合系数和机械耦合系数不同。

    Piezoelectric resonator, filter and electronic component using the same
    7.
    发明申请
    Piezoelectric resonator, filter and electronic component using the same 有权
    压电谐振器,滤波器和使用其的电子元件

    公开(公告)号:US20050023932A1

    公开(公告)日:2005-02-03

    申请号:US10901382

    申请日:2004-07-29

    摘要: A piezoelectric resonator includes; a lower electrode 24 formed on a substrate 11; a piezoelectric film 23 formed on the lower electrode 24; an upper electrode 25 formed on the piezoelectric film 23 and obtaining, in collaboration with the lower electrode 24, a signal having a predetermined resonance frequency by a propagation of a bulk acoustic wave inside the piezoelectric film 23; and an acoustic multilayer reflective film 28 including an SiO2 film 28a having a predetermined acoustic impedance and an AIN film 28b having an acoustic impedance higher than the SiO2 film 28a, and reflecting the bulk acoustic wave, the SiO2 film 28a and the AIN film 28b being alternately stacked on the upper electrode 25, and the SiO2 film 28a being in contact with the upper electrode 25.

    摘要翻译: 压电谐振器包括: 形成在基板11上的下电极24; 形成在下电极24上的压电膜23; 形成在压电膜23上的上电极25,通过压电膜23内的体声波的传播,与下电极24协作获得具有预定谐振频率的信号; 以及包括具有预定声阻抗的SiO 2膜28a和具有高于SiO 2膜28a的声阻抗的AIN膜28b并且反映体声波,SiO 2膜28a和AIN膜28b的声学多层反射膜28为 交替层叠在上电极25上,并且SiO 2膜28a与上电极25接触。

    PROCESS BELT FOR PAPERMAKING AND METHOD FOR MAKING THE SAME
    8.
    发明申请
    PROCESS BELT FOR PAPERMAKING AND METHOD FOR MAKING THE SAME 有权
    造纸用工艺皮带及其制造方法

    公开(公告)号:US20110127000A1

    公开(公告)日:2011-06-02

    申请号:US12954792

    申请日:2010-11-26

    IPC分类号: D21G9/00 B05D3/02

    CPC分类号: D21F3/0227 Y10S162/901

    摘要: A process belt for papermaking with a long operational life comprises an integrated structure of a reinforcing fibrous base material 6 and a polyurethane layer, the reinforcing fibrous base material being embedded in the polyurethane, wherein an inorganic filler selected from calcined kaolin clay, fused silica and zeolite is homogeneously dispersed in the polyurethane.

    摘要翻译: 用于造纸的工艺带具有长的使用寿命,包括加强纤维基材6和聚氨酯层的整体结构,该增强纤维基材嵌入聚氨酯中,其中选自煅烧高岭土,熔融二氧化硅和 沸石均匀分散在聚氨酯中。

    Wet paper web transfer belt
    10.
    发明授权
    Wet paper web transfer belt 有权
    湿纸幅转印带

    公开(公告)号:US07285185B2

    公开(公告)日:2007-10-23

    申请号:US10966891

    申请日:2004-10-15

    摘要: A wet paper web transfer belt comprises a base body, a wet paper web side layer, and a machine side layer. The wet paper web side layer is formed of a high molecular weight elastic section, and fibers and filler particles are exposed at its surface. The fibers and filler particles are exposed in the form of an island-sea structure comprising islands section where the fibers are exposed, and a sea section where the filler particles are exposed. The fibers and the filler particles, both exposed at the wet paper web side layer, hold water at different times in the papermaking process as the wet paper web moves out of the press part of the papermaking machine.

    摘要翻译: 湿纸幅转印带包括基体,湿纸幅侧层和机器侧层。 湿纸幅侧层由高分子量弹性部分形成,纤维和填料颗粒在其表面露出。 纤维和填料颗粒以海绵结构的形式暴露,其中包括岛部分,其中纤维被暴露,以及填充颗粒暴露的海洋部分。 在湿纸幅侧层露出的纤维和填料颗粒在造纸过程中随着湿纸幅移出造纸机的压榨部分而在不同时间保持水分。