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    Electrolytic Deposition Treatment Apparatus and Method
    1.
    发明申请
    Electrolytic Deposition Treatment Apparatus and Method 审中-公开
    电解沉积处理装置及方法

    公开(公告)号：US20070227905A1

    公开(公告)日：2007-10-04

    申请号：US11629791

    申请日：2005-06-16

    申请人： Masaji Akahori ,  Sota Nakagawa ,  Takuo Horie

    发明人： Masaji Akahori ,  Sota Nakagawa ,  Takuo Horie

    IPC分类号： C25C1/12 ,  C25B11/03 ,  C25C7/02 ,  C25C1/00

    CPC分类号： B01D61/44 ,  B01D61/46 ,  B01D63/16 ,  B01D2325/14 ,  C02F1/4678 ,  C02F2001/46123 ,  C02F2001/46133 ,  C02F2101/20 ,  C02F2103/346 ,  C02F2201/46115 ,  C02F2201/4619

    摘要： The present invention provides an electrolytic deposition treatment apparatus and method which can reduce metal ion concentration of waste water to be treated by electrolytic deposition to the degree to which treated water can be discharged to the outside, and which can treat waste water, even if the quantity of waste water produced in a semiconductor device fabrication apparatus is large. The electrolytic deposition treatment apparatus comprises a cathode(3) for depositing metal ions in water to be treated as metal, a cation exchange membrane(4) disposed so as to face the cathode(3), and an anode(6) disposed so as to face the cation exchange membrane(4) through a cation exchanger(5). The water to be treated is supplied to a space between the cathode(3) and the cation exchange membrane(4).

    摘要翻译： 本发明提供一种电解沉积处理装置和方法，其可以通过电解沉积将待处理的废水的金属离子浓度降低到处理水能够排出到外部的程度，并且其可以处理废水，即使 在半导体装置制造装置中产生的废水量大。 电解沉积处理装置包括：阴极（3），用于将金属离子沉积在待处理的水中作为金属;阳极交换膜（4），其设置为与阴极（3）相对;以及阳极（6） 通过阳离子交换器（5）面对阳离子交换膜（4）。 待处理的水被供给到阴极（3）和阳离子交换膜（4）之间的空间。

    Liquid Treatment Apparatus
    3.
    发明申请
    Liquid Treatment Apparatus 审中-公开
    液体处理装置

    公开(公告)号：US20080023334A1

    公开(公告)日：2008-01-31

    申请号：US11629792

    申请日：2005-06-16

    申请人： Sota Nakagawa ,  Masaji Akahori ,  Makoto Kashiwagi ,  Yuji Sasaki

    发明人： Sota Nakagawa ,  Masaji Akahori ,  Makoto Kashiwagi ,  Yuji Sasaki

    IPC分类号： B01D61/48 ,  C02F1/469

    CPC分类号： C02F1/469 ,  B01D61/44 ,  B01D61/48 ,  C02F1/4695 ,  C02F1/66 ,  C02F2101/14 ,  C02F2103/346 ,  C02F2201/46115

    摘要： A liquid treatment apparatus includes a cathode chamber (4) having a cathode (7), an anode chamber (1) having an anode (6), a deionization chamber (2) disposed between the cathode chamber (4) and the anode chamber (1), and a neutralization chamber (3) disposed between the cathode chamber (4) and the anode chamber (1). The deionization chamber is configured to selectively remove cations or anions from a water to be treated and receive ions having the same charge as the selectively removed ions from the cathode chamber (4) or the anode chamber (1). The neutralization chamber is configured to receive the removed ions and electrically neutralize the removed ions by ions supplied from the anode chamber (1) or the cathode chamber (4). An ion exchange membrane is provided to partition the deionization chamber and the neutralization chamber.

    摘要翻译： 液体处理装置包括具有阴极（7）的阴极室（4），具有阳极（6）的阳极室（1），设置在阴极室（4）和阳极室（4）之间的去离子室 1）和设置在阴极室（4）和阳极室（1）之间的中和室（3）。 去离子室被配置为从待处理的水中选择性地去除阳离子或阴离子，并接收与阴极室（4）或阳极室（1）中选择性去除的离子具有相同电荷的离子。 中和室被配置为接收去除的离子并且通过从阳极室（1）或阴极室（4）供应的离子电离中去除的离子。 提供离子交换膜以分离去离子室和中和室。

    Electrochemical liquid treatment equipments
    4.
    发明申请
    Electrochemical liquid treatment equipments 审中-公开
    电化学液体处理设备

    公开(公告)号：US20070056847A1

    公开(公告)日：2007-03-15

    申请号：US10556057

    申请日：2004-05-25

    申请人： Masaji Akahori ,  Sota Nakagawa ,  Yohei Takahashi

    发明人： Masaji Akahori ,  Sota Nakagawa ,  Yohei Takahashi

    IPC分类号： C25B9/10

    CPC分类号： C02F1/4695 ,  B01D61/48 ,  B01D61/52 ,  B01J47/08 ,  C02F1/4693 ,  C02F2001/422 ,  C02F2001/425 ,  C02F2001/46166 ,  C02F2201/46115

    摘要： The present invention aims to provide electrode compartment structures in electrochemical liquid treatment equipments, which enable stable operation using pure water as an electrode compartment liquid requiring no concentration adjustment without adverse electrode reaction. The present invention relates an electrochemical liquid treatment equipment comprising ion exchange membranes between an anode and a cathode, which has an anode compartment defined by the anode and a cation exchange membrane and a cathode compartment defined by the cathode and an anion exchange membrane (12), each of the anode compartment and cathode compartment being packed with an ion exchanger (14) composed of a fibrous a material, each of the anode and cathode (11) being formed from a liquid- and gas-permeable and electrically conductive material, and the equipment also having an electrode compartment liquid flowing chamber (15) which is formed behind each of the anode and cathode.

    摘要翻译： 本发明旨在提供电化学液体处理设备中的电极室结构，其能够使用纯水作为不需要浓度调节而不产生不利电极反应的电极室液体的稳定操作。 本发明涉及一种包括阳极和阴极之间的离子交换膜的电化学液体处理设备，其具有由阳极限定的阳极室和由阴极和阴离子交换膜（12）限定的阳离子交换膜和阴极室， 阳极室和阴极室中的每一个都填充有由纤维材料构成的离子交换器（14），阳极和阴极（11）中的每一个由液体和气体可渗透的导电材料形成，并且 该设备还具有形成在每个阳极和阴极之后的电极室液体流动室（15）。

    Material supply system in semiconductor device manufacturing plant
    5.
    发明申请
    Material supply system in semiconductor device manufacturing plant 失效
    半导体器件制造厂的材料供应系统

    公开(公告)号：US20050177273A1

    公开(公告)日：2005-08-11

    申请号：US10507699

    申请日：2003-03-27

    申请人： Kunihiro Miyazaki ,  Soichi Nadahara ,  Kinya Usuda ,  Masaji Akahori ,  Sota Nakagawa ,  Ken Nakajima

    发明人： Kunihiro Miyazaki ,  Soichi Nadahara ,  Kinya Usuda ,  Masaji Akahori ,  Sota Nakagawa ,  Ken Nakajima

    IPC分类号： H01L21/02 ,  B24B57/02 ,  C11D11/00 ,  C23C16/52 ,  H01L21/00 ,  H01L21/306 ,  G06F19/00

    CPC分类号： H01L21/67276 ,  B24B37/04 ,  B24B57/02 ,  C11D11/0047 ,  C23C16/52 ,  G05B2219/32082 ,  H01L21/02052 ,  Y02P90/20 ,  Y10S210/90

    摘要： In a small scaled plant intended for flexible manufacturing, a pure water supply system is provided at a low cost without reducing a production efficiency. A pure water system produces a plurality of grades of pure water which are supplied through pipes connected to points of use for cleaning, CMP, lithography, and the like. Upon receipt of a request signal from each point of use for starting to use a certain grade of pure water, a controller determines whether or not a required amount exceeds the capacity of the grade of pure water which can be supplied by the pure water system. If not, the controller sends a use permission signal to the point of use for permitting the same to use the pure water. When a certain use point is using the requested grade of pure water, the controller may not permit the requesting point of use to use the pure water until a use end signal is sent from the use point which is using the pure water.

    摘要翻译： 在用于灵活制造的小规模工厂中，以低成本提供纯净水供应系统，而不降低生产效率。 纯水系统产生多个等级的纯水，其通过连接到用于清洁，CMP，光刻等的使用点的管道供应。 一旦控制器收到来自每个使用点的请求信号以开始使用一定等级的纯水，则控制器确定所需量是否超过纯水系统能提供的纯水等级的容量。 如果没有，控制器将使用许可信号发送到使用点，以允许其使用纯净水。 当某个使用点正在使用所要求的纯水量时，控制器可能不允许请求使用点使用纯净水，直到从使用纯水的使用点发出使用结束信号。

    Electrodialysis apparatus, waste water treatment method and fluorine treatment system
    7.
    发明申请
    Electrodialysis apparatus, waste water treatment method and fluorine treatment system 审中-公开
    电渗析仪，废水处理方法及氟处理系统

    公开(公告)号：US20090152117A1

    公开(公告)日：2009-06-18

    申请号：US11921743

    申请日：2006-06-02

    申请人： Masaji Akahori ,  Sota Nakagawa ,  Yuji Sasaki

    发明人： Masaji Akahori ,  Sota Nakagawa ,  Yuji Sasaki

    IPC分类号： B01D61/46

    CPC分类号： C02F1/4693 ,  B01D61/48 ,  B01D61/485 ,  B01D61/50 ,  C02F1/4695 ,  C02F2101/14 ,  C02F2201/4618 ,  Y02A20/134

    摘要： An electrodialysis apparatus includes an anode chamber (10) having an anode (2), and a cathode chamber (50) having a cathode (3). The electrodialysis apparatus includes a desalting chamber (40) for removing fluoride ions from waste water supplied to produce treated water, a concentrating chamber (30) for concentrating the fluoride ions, which have moved from the desalting chamber (40), in the waste water to produce concentrated water, and a buffer chamber (20) for blocking the fluoride ions in the waste water from flowing from the concentrating chamber (30) directly into the anode chamber (10). The electrodialysis apparatus also include a path for supplying pure water to the anode chamber (10), and a path for supplying effluent water from the anode chamber (10) to the buffer chamber (20).

    摘要翻译： 电渗透装置包括具有阳极（2）的阳极室（10）和具有阴极（3）的阴极室（50）。 该电渗析装置包括用于从供给的废水中除去氟离子以产生处理水的脱盐室（40），用于浓缩已经从脱盐室（40）移动到废水中的氟离子的浓缩室（30） 以产生浓缩水，以及缓冲室（20），用于阻止废水中的氟离子直接从浓缩室（30）流入阳极室（10）。 电渗析装置还包括用于向阳极室（10）供应纯水的路径和用于将来自阳极室（10）的流出水供应到缓冲室（20）的路径。

    Material supply system in semiconductor device manufacturing plant
    8.
    发明授权
    Material supply system in semiconductor device manufacturing plant 失效
    半导体器件制造厂的材料供应系统

    公开(公告)号：US07305275B2

    公开(公告)日：2007-12-04

    申请号：US10507699

    申请日：2003-03-27

    申请人： Kunihiro Miyazaki ,  Soichi Nadahara ,  Kinya Usuda ,  Masaji Akahori ,  Sota Nakagawa ,  Ken Nakajima

    发明人： Kunihiro Miyazaki ,  Soichi Nadahara ,  Kinya Usuda ,  Masaji Akahori ,  Sota Nakagawa ,  Ken Nakajima

    IPC分类号： G06F19/00

    CPC分类号： H01L21/67276 ,  B24B37/04 ,  B24B57/02 ,  C11D11/0047 ,  C23C16/52 ,  G05B2219/32082 ,  H01L21/02052 ,  Y02P90/20 ,  Y10S210/90

    摘要： In a small scaled plant intended for flexible manufacturing, a pure water supply system is provided at a low cost without reducing a production efficiency. A pure water system produces a plurality of grades of pure water which are supplied through pipes connected to points of use for cleaning, CMP, lithography, and the like. Upon receipt of a request signal from each point of use for starting to use a certain grade of pure water, a controller determines whether or not a required amount exceeds the capacity of the grade of pure water which can be supplied by the pure water system. If not, the controller sends a use permission signal to the point of use for permitting the same to use the pure water. When a certain use point is using the requested grade of pure water, the controller may not permit the requesting point of use to use the pure water until a use end signal is sent from the use point which is using the pure water.

    摘要翻译： 在用于灵活制造的小规模工厂中，以低成本提供纯净水供应系统，而不降低生产效率。 纯水系统产生多个等级的纯水，其通过连接到用于清洁，CMP，光刻等的使用点的管道供应。 一旦控制器收到来自每个使用点的请求信号以开始使用一定等级的纯水，则控制器确定所需量是否超过纯水系统能提供的纯水等级的容量。 如果不是，控制器将使用许可信号发送到使用点，以允许其使用纯净水。 当某个使用点正在使用所要求的纯水量时，控制器可能不允许请求使用点使用纯净水，直到从使用纯水的使用点发出使用结束信号。