SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND A METHOD FOR MANUFACTURING A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
    2.
    发明申请
    SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND A METHOD FOR MANUFACTURING A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE 审中-公开
    半导体集成电路装置及制造半导体集成电路装置的方法

    公开(公告)号:US20120061769A1

    公开(公告)日:2012-03-15

    申请号:US13225548

    申请日:2011-09-05

    IPC分类号: H01L27/092

    摘要: For constituting a pre-metal interlayer insulating film, such a method is considered as forming a CVD silicon oxide-based insulating film having good filling properties by ozone TEOS, reflowing the film to planarize it, stacking a silicon oxide film having good CMP scratch resistance by plasma TEOS, and further planarizing by CMP. However, in forming a contact hole, crack in the pre-metal interlayer insulating film is exposed in the contact hole, into which barrier metal intrudes to cause short-circuit defects. In the present invention, in the pre-metal process, after forming the ozone TEOS film over an etch stop film, the ozone TEOS film is once etched back so as to expose the etch stop film over a gate structure, a plasma TEOS film is formed over the remaining ozone TEOS film, and the plasma TEOS film is planarized by CMP.

    摘要翻译: 为了构成前金属层间绝缘膜,将这种方法考虑为通过臭氧TEOS形成具有良好填充性能的CVD氧化硅系绝缘膜,回流膜使其平坦化,层叠具有良好CMP耐刮擦性的氧化硅膜 通过等离子体TEOS,并通过CMP进一步平坦化。 然而,在形成接触孔时,金属间绝缘膜中的裂纹暴露在阻挡金属侵入的接触孔中,导致短路缺陷。 在本发明中,在预金属工艺中,在蚀刻停止膜上形成臭氧TEOS膜之后,臭氧TEOS膜被一次回蚀刻,以便在栅极结构上暴露蚀刻停止膜,等离子体TEOS膜为 形成在剩余的臭氧TEOS膜上,并且等离子体TEOS膜通过CMP平坦化。

    Semiconductor integrated circuit device and a method for manufacturing a semiconductor integrated circuit device
    3.
    发明授权
    Semiconductor integrated circuit device and a method for manufacturing a semiconductor integrated circuit device 失效
    半导体集成电路装置及半导体集成电路装置的制造方法

    公开(公告)号:US08017464B2

    公开(公告)日:2011-09-13

    申请号:US12558498

    申请日:2009-09-12

    IPC分类号: H01L21/336 H01L21/8234

    摘要: As a method for constituting a pre-metal interlayer insulating film, such method is considered as forming a CVD silicon oxide-based insulating film having good filling properties of a silicon oxide film by ozone TEOS, reflowing the film at high temperatures to planarize it, then stacking a silicon oxide film having good CMP scratch resistance by plasma TEOS, and, further, planarizing it by CMP. However, it was made clear that, in a process for forming a contact hole, crack in the pre-metal interlayer insulating film is exposed in the contact hole, into which barrier metal intrudes to cause short-circuit defects.In the present invention, in the pre-metal process, after forming the ozone TEOS film over an etch stop film, the ozone TEOS film is once etched back so as to expose the etch stop film over a gate structure, and, after that, a plasma TEOS film is formed over the remaining ozone TEOS film, and then the plasma TEOS film is planarized by CMP.

    摘要翻译: 作为构成前金属层间绝缘膜的方法,认为通过臭氧TEOS形成氧化硅膜的填充性良好的CVD硅氧化物类绝缘膜,在高温下回流以使其平坦化, 然后通过等离子体TEOS层叠具有良好CMP耐刮擦性的氧化硅膜,并且进一步通过CMP对其进行平坦化。 但是,在形成接触孔的工序中,在金属间绝缘膜的裂纹暴露在接触孔内,阻挡金属侵入其中而引起短路缺陷。 在本发明中,在预金属工艺中,在蚀刻停止膜上形成臭氧TEOS膜之后,臭氧TEOS膜被一次回蚀刻,以便在栅极结构上暴露蚀刻停止膜,之后, 在剩余的臭氧TEOS膜上形成等离子体TEOS膜,然后通过CMP平坦化等离子体TEOS膜。

    Steering force detection device for steering handle of vehicle
    4.
    发明授权
    Steering force detection device for steering handle of vehicle 失效
    车辆转向手柄转向力检测装置

    公开(公告)号:US07430466B2

    公开(公告)日:2008-09-30

    申请号:US11146728

    申请日:2005-06-07

    IPC分类号: B63H5/125

    CPC分类号: B63H25/02

    摘要: A watercraft has steering force detection sections. Each steering force detection section includes a pressure receiving section. The pressure receiving sections are spaced from each other and are in the vicinity of a steering shaft. A pressing member is coupled to the steering shaft. The pressing member can press on at least one of the pressure receiving sections when the steering handlebars are rotated to a maximum steering angle. A received pressure detection section detects the pressure applied to the pressure receiving section. The pressure receiving section and the received pressure detection section are coaxially mounted in a pressure receiving section casing and a detection section casing. A guide tube can engage the pressure receiving section and the received pressure detection section. The guide tube is formed with ribs and grooves. The pressure receiving section has a pressure receiving member, a bolt, a plain washer, and a spring member.

    摘要翻译: 船舶具有转向力检测部分。 每个转向力检测部分包括压力接收部分。 压力接收部彼此间隔开并且在转向轴附近。 按压构件联接到转向轴。 当转向手把旋转到最大转向角时,按压构件可以压靠至少一个压力接收部分。 接收压力检测部分检测施加到压力接收部分的压力。 受压部和接收压力检测部同轴地安装在受压部壳体和检测部壳体中。 引导管可以接合压力接收部分和接收的压力检测部分。 引导管形成有肋和槽。 受压部具有受压部件,螺栓,平垫圈和弹簧部件。

    Image display device
    5.
    发明授权
    Image display device 有权
    图像显示装置

    公开(公告)号:US07408298B2

    公开(公告)日:2008-08-05

    申请号:US11319167

    申请日:2005-12-28

    IPC分类号: H01J17/24 H01J19/70 H01J61/26

    摘要: On a back surface of a back substrate on which electron emission sources are formed, a getter room is formed by the back substrate and a cup-shaped room member. In the inside of the getter room, a getter assembly which includes a getter housing which holds a getter and a getter support which supports the getter housing is arranged. End portions of the getter support are fixed to and arranged between the back substrate and the room member by a sealing material. The present invention provides an image display device which prevents the occurrence of cracks in the getter room thus suppressing the degradation of a display characteristic of the image display device.

    摘要翻译: 在形成有电子发射源的背面基板的背面上,由背面基板和杯状的室内部件形成吸气室。 在吸气室的内部设置有吸气剂组件,该吸气器组件包括吸气剂和吸气剂支撑件,其支撑吸气剂容器。 吸气剂支撑件的端部通过密封材料固定并布置在后基板和室构件之间。 本发明提供了一种图像显示装置,其防止吸气室发生裂纹,从而抑制图像显示装置的显示特性的劣化。

    Organic light-emitting devices and displays including a polarization separator, a phase plate, and a polarizer
    6.
    发明授权
    Organic light-emitting devices and displays including a polarization separator, a phase plate, and a polarizer 有权
    有机发光装置和包括偏振分离器,相位板和偏振器的显示器

    公开(公告)号:US07339316B2

    公开(公告)日:2008-03-04

    申请号:US11311626

    申请日:2005-12-20

    IPC分类号: H05B33/00

    摘要: Light-emitting devices and light-emitting displays for realizing bright display by allowing light emitted from an emissive layer to efficiently contribute to a display. Polarization separators are arranged between the emissive layer and a phase plate. In the light of a wavelength range which includes a part or all of a light-emission wavelength range of the emissive layer and is narrower than a visible wavelength range and is directed from the emissive layer side to the polarization separators side, the polarization separators reflect circularly polarized light components which are converted into linearly polarized light that is absorbed by the polarizer due to the operation of the phase plate and transmit the other light.

    摘要翻译: 发光装置和发光显示器,用于通过允许从发射层发射的光来有效地促成显示而实现明亮的显示。 极化分离器布置在发射层和相位板之间。 根据包括发光层的发光波长范围的一部分或全部的波长范围,并且比可见光波长范围窄,并且从发光层侧向偏振分光器侧,偏振分离器反射 圆偏振光分量被转换成线偏振光,由于相位板的操作而被偏振器吸收并透射另一种光。

    Display device having a connecting portion between cathode line and electron source
    7.
    发明授权
    Display device having a connecting portion between cathode line and electron source 失效
    显示装置具有阴极线和电子源之间的连接部分

    公开(公告)号:US07285901B2

    公开(公告)日:2007-10-23

    申请号:US10781695

    申请日:2004-02-20

    IPC分类号: H01J1/62

    CPC分类号: H01J29/04 H01J31/127

    摘要: A display device includes a face substrate which has anodes and phosphors on an inner surface thereof, a back substrate which has cathode lines and electron sources formed on the cathode lines, a support body which is interposed between both substrates such that the support body surrounds a display region and forms a given inner space, and a sealing material which hermetically seals the support body and both substrates. To enable the display device to produce a high quality display and have a long lifetime while ensuring the conduction in a wide range between the cathode lines and the electron sources, the cathode lines are made of a material having a conductor and an insulator, and the composition of a connecting portion between the cathode line and the electron source is formed such that the conductor occupancy rate becomes equal to or more than the insulator occupancy rate.

    摘要翻译: 显示装置包括在其内表面上具有阳极和荧光体的面基板,在阴极线上形成有阴极线和电子源的背基板,插入在两个基板之间的支撑体,使得支撑体围绕 显示区域并形成给定的内部空间,以及密封材料,其密封支撑体和两个基板。 为了使显示装置能够产生高质量的显示并且具有长寿命,同时确保阴极线和电子源之间的宽范围内的导通,阴极线由具有导体和绝缘体的材料制成,并且 形成阴极线和电子源之间的连接部分的组成,使得导体占有率变得等于或大于绝缘体占有率。

    Display device
    8.
    发明申请
    Display device 审中-公开

    公开(公告)号:US20070103087A1

    公开(公告)日:2007-05-10

    申请号:US11646316

    申请日:2006-12-28

    IPC分类号: G09G3/10

    摘要: To detect a dark current when an abnormal discharge occurs between an anode and respective electrodes, on an inner surface of a front substrate, a dark current detection electrode is formed in a state that the dark current detection electrode is positioned adjacent to the outside of a screen display region on which an anode is formed and on a plane substantially equal to a plane on which the anode is formed. Then, between an electrode terminal of the dark current detection electrode and a ground, an ammeter which detects the flow of a dark current and a DC power source having a preset voltage value which is more or less lower than a high voltage supplied to the anode are connected in series.

    Faucet controller
    10.
    发明授权
    Faucet controller 有权
    水龙头控制器

    公开(公告)号:US07075768B2

    公开(公告)日:2006-07-11

    申请号:US10399520

    申请日:2001-05-16

    申请人: Yoshiyuki Kaneko

    发明人: Yoshiyuki Kaneko

    IPC分类号: H01H47/00

    CPC分类号: E03C1/05

    摘要: A controller apparatus for a faucet, for controlling the faucet using energy created by electric power generation, wherein all components used therein keep necessary performance thereof for a long period of time and wherein no components require exchange thereof until the product service-life of the faucet apparatus is reached, thereby realizing true maintenance-free apparatus. The controller apparatus for a faucet comprises a capacitor; a voltage conversion means for converting the capacitor voltage to a predetermined voltage; a faucet controller circuit operated with electricity supplied from the voltage conversion means; and an electromagnetic valve for opening or closing a flow passage by said faucet controller circuit. The controller apparatus for a faucet further comprises an electric power generation means and a primary battery, and the capacitor is charged with either of an output of the electric power generation means and the primary battery.

    摘要翻译: 一种用于龙头的控制器装置,用于使用由发电产生的能量来控制水龙头,其中使用的所有部件长时间保持必要的性能,并且其中没有部件需要更换直到水龙头的产品使用寿命 达到设备,从而实现真正的免维护设备。 用于水龙头的控制器装置包括一个电容器; 用于将电容器电压转换为预定电压的电压转换装置; 一个由电压转换装置供电的水龙头控制器电路; 以及用于通过所述龙头控制器电路打开或关闭流路的电磁阀。 用于水龙头的控制装置还包括发电装置和一次电池,并且电容器对发电装置和一次电池的输出中的任一个进行充电。