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1.发明授权Spectroscopic analysis apparatus and method with excitation system and focus monitoring system 失效光谱分析装置及方法与激励系统和焦点监测系统公开(公告)号：US07583380B2
公开(公告)日：2009-09-01
申请号：US10547971
申请日：2004-03-01
IPC分类号： G01J3/30
CPC分类号： A61B5/0059 , A61B5/0068 , G01J3/44 , G01N21/65 , G02B21/241
摘要： The present invention relates to an analysis apparatus, in particular a spectroscopic analysis apparatus, for analyzing an object, such as blood of a patient, and a corresponding analysis method. To aim the confocal detection volume inside a blood vessel orthogonal polarized spectral imaging (OPSI) is used to locate blood capillaries in the skin. An imaging system (img) with slightly shifted imaging planes (i1, i2) for OPS imaging of blood vessels is proposed to provide auto-focusing. The confocal Raman detection plane (dp) is located in between these two imaging planes (i1, i2). Based on measured amount of defocus for the imaging planes (i1, i2), the focusing of the imaging system (img), the excitation system (exs) for exciting the target region and the detection plane (dp) is located inside the blood vessel (V). Thus, continuous auto-focusing with high accuracy can be achieved. The invention relates also to an optical tracking system for continuously tracking a point of a moving object (obj).
摘要翻译： 本发明涉及用于分析患者血液等物体的分析装置，特别是光谱分析装置以及相应的分析方法。 为了瞄准血管内的共焦检测体积，使用正交偏振光谱成像（OPSI）来定位皮肤中的毛细血管。 提出了一种具有稍微偏移的成像平面（i1，i2）用于血管的OPS成像的成像系统（img），以提供自动聚焦。 共焦拉曼检测平面（dp）位于这两个成像平面（i1，i2）之间。 基于测量的成像平面（i1，i2）的散焦量，成像系统（img）的聚焦，用于激发目标区域的激发系统（exs）和检测平面（dp）位于血管内 （V）。 因此，可以实现高精度的连续自动聚焦。 本发明还涉及用于连续跟踪移动物体（obj）的点的光学跟踪系统。
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2.发明申请Particle detection system, and lithographic apparatus provided with such particle detection system 有权粒子检测系统和具有这种粒子检测系统的光刻设备公开(公告)号：US20080043228A1
公开(公告)日：2008-02-21
申请号：US11505498
申请日：2006-08-17
IPC分类号： G01N21/00
CPC分类号： G01N21/94 , G01N21/47 , G01N21/9501
摘要： A lithographic apparatus has an illumination system that conditions a beam of radiation. A patterning support supports a patterning device, which serves to impart the beam of radiation with a pattern in its cross-section. A substrate support holds a substrate. A projection system projects the patterned beam of radiation onto a target portion of the substrate. A particle detection system detects a particle on a surface of an object. The particle detection system has a radiation source, which generates an illumination beam of radiation. The illumination beam of radiation is directed along a first optical path to a detection area at the surface of the object. A radiation detector receives a detection beam of radiation from the detection area along a second optical path. The length of the first optical path is made substantially equal to the length of the second optical path.
摘要翻译： 光刻设备具有调节辐射束的照明系统。 图形化支撑件支撑图案形成装置，其用于使辐射束在其横截面上具有图案。 衬底支撑件保持衬底。 投影系统将图案化的光束投射到基板的目标部分上。 粒子检测系统检测物体表面上的粒子。 粒子检测系统具有产生照射射束的辐射源。 辐射的照明光束沿着第一光路被引导到物体表面处的检测区域。 辐射检测器沿着第二光路接收来自检测区域的检测光束。 使第一光路的长度基本上等于第二光路的长度。
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3.发明授权Particle detection system, and lithographic apparatus provided with such particle detection system 有权粒子检测系统和具有这种粒子检测系统的光刻设备公开(公告)号：US07715000B2
公开(公告)日：2010-05-11
申请号：US11505498
申请日：2006-08-17
IPC分类号： G01N21/47
CPC分类号： G01N21/94 , G01N21/47 , G01N21/9501
摘要： A lithographic apparatus has an illumination system that conditions a beam of radiation. A patterning support supports a patterning device, which serves to impart the beam of radiation with a pattern in its cross-section. A substrate support holds a substrate. A projection system projects the patterned beam of radiation onto a target portion of the substrate. A particle detection system detects a particle on a surface of an object. The particle detection system has a radiation source, which generates an illumination beam of radiation. The illumination beam of radiation is directed along a first optical path to a detection area at the surface of the object. A radiation detector receives a detection beam of radiation from the detection area along a second optical path. The length of the first optical path is made substantially equal to the length of the second optical path.
摘要翻译： 光刻设备具有调节辐射束的照明系统。 图形化支撑件支撑图案形成装置，其用于使辐射束在其横截面上具有图案。 衬底支撑件保持衬底。 投影系统将图案化的光束投射到基板的目标部分上。 粒子检测系统检测物体表面上的粒子。 粒子检测系统具有产生照射射束的辐射源。 辐射的照明光束沿着第一光路被引导到物体表面处的检测区域。 辐射检测器沿着第二光路接收来自检测区域的检测光束。 使第一光路的长度基本上等于第二光路的长度。
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公开(公告)号：US07066606B2
公开(公告)日：2006-06-27
申请号：US10477873
申请日：2002-05-16
IPC分类号： G03B21/00
CPC分类号： H04N9/3182 , H04N5/74 , H04N9/3129 , H04N9/3194
摘要： A projection device comprises a matrix (1) of semiconductor lasers, an optical system (2) for projecting the matrix (1) on an element (3) illuminated by the projection device, and a control device (9) for controlling the semiconductor lasers through a feedback device. The feedback device comprises a first detector (13, 14) that generates a first signal representing the detected intensity. The semiconductor lasers are controlled and the intensity of the light spot is adjusted to a desired value by the feedback device. Light from a semiconductor laser is detected by a second detector (18), and a value of the detected signal is stored in an addressable memory cell. The amount of emitted light is stabilized for each semiconductor laser by detection through the second detector (18) and comparison with the value stored in the memory (29) for the relevant controlled semiconductor laser.
摘要翻译： 投影装置包括半导体激光器的矩阵（1），用于将矩阵（1）投影在由投影装置照射的元件（3）上的光学系统（2），以及用于控制半导体激光器 通过反馈设备。 反馈装置包括产生表示检测到的强度的第一信号的第一检测器（13,14）。 控制半导体激光器，并通过反馈装置将光点的强度调整到期望值。 来自半导体激光器的光由第二检测器（18）检测，检测信号的值存储在可寻址存储单元中。 对于每个半导体激光器，通过第二检测器（18）的检测和与用于相关的受控半导体激光器存储在存储器（29）中的值进行比较，发射光的量被稳定。
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5.发明授权Electrically controlled radial mass shifting elements for turntable speed regulation in an apparatus for reading disc-shaped information carriers 失效用于读取盘形信息载体的装置中用于转盘速度调节的电子控制径向质量移动元件
公开(公告)号：US3947625A
公开(公告)日：1976-03-30
申请号：US523714
申请日：1974-11-14
CPC分类号： H04N5/7605
摘要： An apparatus for reading disc-shaped information carriers which are provided with substantially circular tracks, in which information is stored in coded form, in particular picture information, which information carriers are disposed on a turntable, a read unit supplying a control signal to a control device for maintaining the reading speed constant.The control device comprises at least two mass elements which are connected to the turntable symmetrically relative to the axis of rotation of the turntable, resiliently in the radial direction and rigidly in the tangential direction, which elements are radially movable in response to the control signal.In one control device each element consists of an axially magnetized rod-shaped permanent magnet, which is attached to the turntable by at least one radially flexible leaf spring, a coil being disposed around each magnet, which coil is connected to the control signal.In another control device each element is identically attached to the edge of a metal disc via a connecting rod, which disc is disposed centrally and loosely around the drive shaft of the turntable, at least one electro-magnet being disposed underneath the disc, which electro-magnet magnetically cooperates with the disc and is connected to the control signal.The control signal is to be derived from a pilot signal in the information signal.
摘要翻译： 一种用于读取盘形信息载体的装置，其具有基本圆形的轨道，其中以编码形式存储信息，特别是图像信息，哪些信息载体被布置在转台上，读取单元向控制器提供控制信号 用于保持读取速度恒定的装置。
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6.发明授权Particle detection device, lithographic apparatus and device manufacturing method 失效粒子检测装置，光刻设备及器件制造方法公开(公告)号：US07349082B2
公开(公告)日：2008-03-25
申请号：US10957752
申请日：2004-10-05
IPC分类号： G01N21/00
CPC分类号： G03F7/70916 , G01N21/94 , G01N21/956 , G03F7/7085
摘要： To enable differentiation between a particle and a ghost particle, a detector system is presented. The detector system is configured to output at least two detector signals corresponding to an intensity of radiation being incident on the detector system. If radiation is received from a ghost particle, not all of the at least two detector signals has a level above a predetermined threshold level, whereas radiation received from a contaminating particle results in all signals having a level above a threshold level. Thus, it may be determined with a high accuracy whether a particle or a ghost particle is redirecting radiation towards the detector system.
摘要翻译： 为了实现粒子和鬼粒子之间的区分，提出了一种检测器系统。 检测器系统被配置为输出对应于入射在检测器系统上的辐射强度的至少两个检测器信号。 如果从重影颗粒接收到辐射，则并非所有至少两个检测器信号都具有高于预定阈值水平的水平，而从污染颗粒接收的辐射导致所有信号具有高于阈值水平的水平。 因此，可以高精度地确定颗粒或重影颗粒是否朝向检测器系统重定向辐射。
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7.发明授权Apparatus for reading a flat record carrier with an optically readable information structure 失效用于读取具有光学可读信息结构的平面记录载体的装置
公开(公告)号：US4006293A
公开(公告)日：1977-02-01
申请号：US568727
申请日：1975-04-16
申请人： Gijsbertus Bouwhuis , Josephus Johannes Maria Braat , Peter Ferdinand Greve , Kornelis Antonie Immink
发明人： Gijsbertus Bouwhuis , Josephus Johannes Maria Braat , Peter Ferdinand Greve , Kornelis Antonie Immink
CPC分类号： G11B7/13 , G11B7/005 , G11B7/0917
摘要： An apparatus is described for reading a flat record carrier on which information is stored in an optically readable track-shaped information structure. By the arrangement in the far field of the information structure and at one side of a plane which is formed by the optical axis of an objective system which is used for reading and a line parallel to the center line of the track portion to be read, of a radiation-sensitive detection system which consists of at least two detectors in approximately the position .beta./2, .beta. being the angle at which a first-order beam is diffracted in the lateral direction of the tracks, centering and focussing errors can be detected without the use of auxiliary beams and additional optical elements.
摘要翻译： 描述了一种用于读取以光学可读的轨道形信息结构存储信息的平面记录载体的装置。 通过在信息结构的远场中和在由用于读取的物镜系统的光轴和平行于要读取的轨道部分的中心线的直线形成的平面的一侧， 由大约β/ 2位置的至少两个检测器组成的辐射敏感检测系统，β是在轨道的横向上衍射一阶光束的角度，可以检测定心和聚焦误差 而不使用辅助光束和附加的光学元件。
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公开(公告)号：US07453581B2
公开(公告)日：2008-11-18
申请号：US10578652
申请日：2004-11-02
IPC分类号： G01B11/24
CPC分类号： G01M11/0292 , G01M11/0221
摘要： The focus of an optical system (20) can be determined in a reliable and accurate way by arranging a first and second test object (62,64) having a periodic structure at different sides of the focal plane (66) of the optical system and determining the difference in modulation depth of the images formed on different areas (32,34) of a radiation-sensitive detection system (30).
摘要翻译： 可以通过在光学系统的焦平面（66）的不同侧布置具有周期性结构的第一和第二测试对象（62,64），以可靠和准确的方式来确定光学系统（20）的焦点， 确定在辐射敏感检测系统（30）的不同区域（32,34）上形成的图像的调制深度差异。
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9.发明授权Particle detection device, lithographic apparatus and device manufacturing method 失效粒子检测装置，光刻设备及器件制造方法公开(公告)号：US07283225B2
公开(公告)日：2007-10-16
申请号：US11242146
申请日：2005-10-04
申请人： Johannes Onvlee , Raimond Visser , Peter Ferdinand Greve , Johannes Hendrikus Gertrudis Franssen , Erwin Theodorus Jacoba Verhagen
发明人： Johannes Onvlee , Raimond Visser , Peter Ferdinand Greve , Johannes Hendrikus Gertrudis Franssen , Erwin Theodorus Jacoba Verhagen
IPC分类号： G01N21/00
CPC分类号： G03F7/70916 , G01N21/94 , G01N21/956 , G03F7/7085
摘要： To enable differentiation between a particle and a ghost particle, a detector system resolves radiation from a ghost particle from radiation from an actual particle. The detector system outputs at least two detector signals corresponding to intensities of radiation being incident on different parts of the detector system or the detector system outputs at least two detector signals corresponding to intensities of radiation with different wavelengths being incident on the detector system. If radiation is received from a ghost particle, not each of the at least two detector signals has a level above a predetermined threshold level, whereas radiation received from a particle results in the signals having substantially a same level above a threshold level. The detector system may include a radiation detector device configured to generate the first detector signal in response to radiation incident on at least one predetermined part of the radiation detector device and a radiation blocking assembly configured to prevent radiation not originating from a particle from being incident on the predetermined part of the detector device.
摘要翻译： 为了能够区分粒子和重影粒子，检测器系统从实际粒子的辐射中解析来自重影粒子的辐射。 检测器系统输出对应于入射在检测器系统的不同部分上的辐射强度的至少两个检测器信号，或者检测器系统输出对应于不同波长的辐射强度入射在检测器系统上的至少两个检测器信号。 如果从重影粒子接收到辐射，则并非所述至少两个检测器信号中的每一个具有高于预定阈值电平的电平，而从粒子接收的辐射导致信号具有高于阈值电平的基本上相同的电平。 检测器系统可以包括辐射检测器装置，其被配置为响应于入射到辐射检测器装置的至少一个预定部分上的辐射而产生第一检测器信号;以及辐射阻挡组件，其被配置为防止不是源自颗粒的辐射被入射 检测器装置的预定部分。
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10.发明授权Apparatus for optically reading a record carrier by means of an autofocus device 失效用于通过自动对焦装置光学读取记录载体的装置
公开(公告)号：US3992575A
公开(公告)日：1976-11-16
申请号：US527244
申请日：1974-11-26
CPC分类号： H04N5/7605 , G02B27/40 , G11B7/0912 , G11B7/0917 , H03G3/341 , G11B2007/0924
摘要： An apparatus is described for reading a record carrier on which information is stored in an optically readable reflecting structure. By projecting two radiation spots one before and one behind the plane of the information structure, it is possible to ascertain whether a read beam is properly focussed on the information structure.
摘要翻译： 描述了一种用于读取其中信息被存储在光学可读反射结构中的记录载体的装置。 通过在信息结构的平面之前和之后投射两个辐射点，可以确定读取光束是否适当地集中在信息结构上。
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