公开(公告)号：US06329649B1

公开(公告)日：2001-12-11

申请号：US09414988

申请日：1999-10-07

申请人： Michael D. Jack ,  Jan Grinberg ,  Franklin A. Dolezal ,  Ray Balcerak

发明人： Michael D. Jack ,  Jan Grinberg ,  Franklin A. Dolezal ,  Ray Balcerak

IPC分类号： G01R2302

CPC分类号： H01Q3/2658 ,  F41G7/008 ,  F41G7/2286 ,  F41G7/2293 ,  G01J5/20 ,  G01J5/34 ,  G01R29/0878 ,  H01Q9/285 ,  H01Q21/0087 ,  H01Q21/24

摘要： An integrated infrared and millimeter-wave monolithic focal plane sensor array having a substrate upon which an integrated array of infrared sensors and mm-wave sensors are provided at a first planar level on the same side of the substrate, and a planar antenna for receiving incident millimeter-wave radiation located at a second planar level located between the integrated array of sensors and the surface of the substrates for coupling the mm-wave radiation field to the mm-wave sensor. The antenna receiver of electromagnetic radiation, in one embodiment, is an antenna having a crossed bowtie configuration which efficiently couples the radiation field to the mm-wave sensor. The invention also is directed to a method of fabricating such a radiation sensor.

摘要翻译： 一种具有基板的集成的红外和毫米波单片焦平面传感器阵列，在该基板上在基板的同一侧上的第一平面级设置有红外传感器和mm波传感器的集成阵列，以及用于接收事件的平面天线 毫米波辐射位于位于集成传感器阵列和基板表面之间的第二平面水平处，用于将毫米波辐射场耦合到毫米波传感器。 在一个实施例中，电磁辐射的天线接收器是具有交叉的弓形配置的天线，其有效地将辐射场耦合到毫米波传感器。 本发明还涉及一种制造这种辐射传感器的方法。

公开(公告)号：US06329655B1

公开(公告)日：2001-12-11

申请号：US09414989

申请日：1999-10-07

申请人： Michael D. Jack ,  Michael Ray ,  John Varesi ,  Jan Grinberg ,  Harold Fetterman ,  Franklin A. Dolezal

发明人： Michael D. Jack ,  Michael Ray ,  John Varesi ,  Jan Grinberg ,  Harold Fetterman ,  Franklin A. Dolezal

IPC分类号： G01J500

CPC分类号： G01J5/02 ,  G01J5/023 ,  G01J5/08 ,  G01J5/0837 ,  G01J5/20 ,  H01Q1/22 ,  H01Q9/28 ,  H01Q21/24

摘要： A radiation sensor. The inventive sensor has a two-level detector structure formed on a substrate in which a thermal detector element is suspended over the substrate as a microbridge structure. A receiver of electromagnetic radiation is provided on the same side of the substrate in a manner that efficiently couples the radiation field to the thermal detector element. The thermal detector element has a sandwich structure including a heater metal layer, a dielectric layer, and a thin film thermo-resistive material. The thermal detector element is suspended out of physical contact with the receiver. In one embodiment, the receiver is an antenna having a crossed bowtie configuration that efficiently couples the radiation field to the detector element. The inventive radiation sensors are especially useful for mm-wave and microwave sensing applications. The sensor can be used individually or in linear or two-dimensional arrays thereof. The invention also is directed to a method of fabricating such a radiation sensor.

摘要翻译： 辐射传感器。 本发明的传感器具有形成在基板上的两级检测器结构，其中热探测器元件作为微桥结构悬挂在基板上。 将电磁辐射的接收器以有效地将辐射场耦合到热检测器元件的方式设置在基板的相同侧上。 热检测器元件具有包括加热器金属层，电介质层和薄膜耐热材料的夹层结构。 热探测器元件与接收器物理接触被暂停。 在一个实施例中，接收机是具有交叉的弓形结构的天线，其将辐射场有效地耦合到检测器元件。 本发明的辐射传感器对于毫米波和微波感测应用特别有用。 传感器可以单独使用或以其线性或二维阵列使用。 本发明还涉及一种制造这种辐射传感器的方法。

公开(公告)号：US06441368B1

公开(公告)日：2002-08-27

申请号：US10000591

申请日：2001-10-23

申请人： Jan Grinberg ,  Michael D. Jack

发明人： Jan Grinberg ,  Michael D. Jack

IPC分类号： H01J502

CPC分类号： H01Q1/42 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/0837 ,  G01J5/0884 ,  G01J2005/202

摘要： A method and apparatus for protecting a bolometer antenna imaging array from out of band electromagnetic energy is disclosed. Protective pads are disposed upon a window in an optical system forming a millimeter wave image on an array of bolometer antenna sensors. The protective pads are effectively opaque to infrared and visible emissions and are aligned to shade the bolometer portion of the bolometer antennas from infrared and visible emissions, while leaving the antenna portion of each sensor in the array exposed to intercept the millimeter wave energy incident upon them.

摘要翻译： 公开了一种用于保护测辐射热量计天线成像阵列免受带外电磁能的方法和装置。 保护垫设置在形成测辐射热计天线传感器阵列上的毫米波图像的光学系统中的窗口上。 保护垫对于红外线和可见光发射实际上是不透明的，并且对准以使辐射计天线的测辐射热计部分从红外和可见发射中遮蔽，同时使阵列中的每个传感器的天线部分暴露以拦截入射到其上的毫米波能量 。

公开(公告)号：US09091748B2

公开(公告)日：2015-07-28

申请号：US13449637

申请日：2012-04-18

申请人： Adam M. Kennedy ,  Michael D. Jack ,  James Asbrock ,  Frank B. Jaworski

发明人： Adam M. Kennedy ,  Michael D. Jack ,  James Asbrock ,  Frank B. Jaworski

IPC分类号： H04N13/02 ,  G01S7/486 ,  G01S17/89 ,  G01S7/48

CPC分类号： H04N13/20 ,  G01S7/4802 ,  G01S7/4861 ,  G01S17/89

摘要： A 3D ultraviolet (UV) imaging LADAR system includes a UV source configured to generate a UV interrogation beam, a sensor configured to receive a UV return beam reflected from a target and to produce an electrical signal, and an imaging module coupled to the sensor and configured to receive the electrical signal and to generate a corresponding 3D image of the target. In one example, the sensor includes a down-shifting device configured to down-shift the UV return beam to a down-shifted light beam of a different wavelength, for example, in the visible or SWIR wavelength ranges.

摘要翻译： 3D紫外（UV）成像LADAR系统包括被配置为产生UV询问光束的UV源，被配置为接收从目标物反射并产生电信号的UV返回光束的传感器，以及耦合到传感器的成像模块， 被配置为接收电信号并产生目标的相应3D图像。 在一个示例中，传感器包括下移装置，其被配置为将UV返回光束向下移位到例如在可见光或SWIR波长范围内的不同波长的向下移动的光束。

公开(公告)号：US5719396A

公开(公告)日：1998-02-17

申请号：US674075

申请日：1996-07-01

申请人： Michael D. Jack ,  Troy P. Bahan ,  Jeffrey L. Hanson ,  David R. Nelson ,  Allen J. Paneral ,  Jay Peterson

发明人： Michael D. Jack ,  Troy P. Bahan ,  Jeffrey L. Hanson ,  David R. Nelson ,  Allen J. Paneral ,  Jay Peterson

IPC分类号： G01N21/35 ,  G01N21/00

CPC分类号： G01N21/3504

摘要： An emission-concentration monitoring system (20)includes first and second monitor stations (22,32) which are separated by a sensing space (40) along a path (28) of a moving vehicle (26). Each station has a source of electromagnetic radiation (64) which is directed through the vehicle's exhaust plume. Each station also has a set of detectors (66) which are positioned to receive the radiation and configured to measure transmittances at wavelengths which are absorbed by molecular species of exhaust plume (e.g., hydrocarbons, nitric oxide, carbon monoxide and carbon dioxide). These sensed transmittances are converted to emission concentrations by a data processor (50) and compared to a set of emission-concentration standards. The vehicle is determined to be in violation only if its emission concentrations at both the first and second monitor stations exceeds the standards. To insure visual identification of the vehicle, images of it are formed at both stations with video cameras (42, 44) and a license plate reader (46). It has been found that the monitoring system improves testing accuracy because the first and second stations essentially form a check against each other to remove errors due, for example, to vehicular temporal variabilities.

摘要翻译： 发射浓度监测系统（20）包括沿着移动车辆（26）的路径（28）由感测空间（40）分开的第一和第二监测站（22,32）。 每个站具有电磁辐射源（64），其被引导通过车辆的排气羽流。 每个站还具有一组检测器（66），其被定位成接收辐射并且被配置成测量在被排气羽流（例如烃，一氧化氮，一氧化碳和二氧化碳）的分子物种吸收的波长处的透射率。 这些感测的透射率由数据处理器（50）转换为发射浓度，并与一组发射浓度标准进行比较。 如果第一和第二监测站的排放浓度超过标准，车辆才被确定为违法。 为了确保车辆的视觉识别，在具有摄像机（42,44）和牌照读取器（46）的两个车站形成图像。 已经发现，监控系统提高了测试精度，因为第一站和第二站基本上形成对对方的检查，以消除由于例如车辆时间变化引起的错误。

公开(公告)号：US5808350A

公开(公告)日：1998-09-15

申请号：US778934

申请日：1997-01-03

申请人： Michael D. Jack ,  Michael Ray ,  Richard H. Wyles

发明人： Michael D. Jack ,  Michael Ray ,  Richard H. Wyles

IPC分类号： G01J5/10 ,  G01J5/34 ,  H01L27/146 ,  H01L37/02 ,  H01L31/0256 ,  H01L27/148 ,  H01L31/0232

CPC分类号： H01L37/02 ,  G01J5/10 ,  G01J5/34 ,  H01L27/14652

摘要： An imaging device (10) has a plurality of unit cells that contribute to forming an image of a scene. The imaging device includes a layer of semiconductor material (16), for example silicon, that has low noise photogate charge-mode readout circuitry (20, 21, 26, 28) (e.g., CCD or CMOS readout circuitry and structures) that is disposed upon a first surface (18) of the layer. A second, opposing surface of the layer is a radiation admitting surface of the layer. The layer has a bandgap selected for absorbing electromagnetic radiation having wavelengths shorter than about one micrometer and for generating charge carriers from the absorbed radiation. The generated charge carriers are collected by the photogate charge-mode readout circuitry. A thermal sensing element (22) is disposed above and is thermally isolated from the first surface of the layer. The thermal sensing element may be, by example, one of a bolometer element, a pyroelectric element, or a thermopile element. A layer (12) of narrower bandgap semiconductor material can also be employed with this invention, wherein the layer of narrower bandgap semiconductor material (such as InGaAs or HgCdTe) is atomically bonded to the second surface along a heterojunction interface that is continuous or apertured across the second surface. The bonded layer is used to absorb NIR and visible light.

摘要翻译： 成像装置（10）具有有助于形成场景图像的多个单位单元。 该成像装置包括半导体材料层（16），例如硅，其具有低噪声光栅充电模式读出电路（20,21,26,28）（例如，CCD或CMOS读出电路和结构），其被布置 在该层的第一表面（18）上。 层的第二相对表面是该层的辐射入射表面。 该层具有选择用于吸收波长短于约一微米的电磁辐射的带隙，并用于从吸收的辐射产生电荷载流子。 产生的电荷载流子由光栅充电模式读出电路收集。 热敏元件（22）设置在层的第一表面的上方并与之隔离。 热敏元件可以是例如测辐射热计元件，热电元件或热电堆元件之一。 窄带隙半导体材料的层（12）也可以用于本发明，其中较窄带隙半导体材料（例如InGaAs或HgCdTe）的层沿着连续或有孔跨越的异质结界面原子键合到第二表面 第二个表面。 接合层用于吸收近红外和可见光。

公开(公告)号：US5689087A

公开(公告)日：1997-11-18

申请号：US322442

申请日：1994-10-04

申请人： Michael D. Jack

发明人： Michael D. Jack

IPC分类号： G01J5/12 ,  G01K7/02 ,  H01L35/02

CPC分类号： G01J5/12 ,  G01K7/02

摘要： A highly integrated thermal sensor (10) is responsive to radiation having wavelengths within a predetermined band of wavelengths. The sensor, which may be a thermopile, is comprised of a substrate (16) comprised of at least one semiconductor material. The substrate includes at least one active region disposed within a first surface of the substrate. The sensor further includes a plurality of thermally-responsive junctions (HJ, CJ) between dissimilar materials (22, 24) that are disposed within the at least one active region, wherein at least one of the thermally-responsive junctions is a hot junction. The hot junction is thermally isolated from the substrate by being suspended from the substrate on dielectric bridges or, in another embodiment, by a thermally insulating and patterned polymer. In a backside illuminated embodiment of this invention the sensor further includes an optical cavity (26) formed within a second surface of the substrate in registration with the active region. The optical cavity includes a radiation absorbing region (28) that is thermally coupled to the at least one hot junction. The sensor further includes an optical filter (30) that is disposed over the optical cavity for admitting radiation within the predetermined band of wavelengths into the optical cavity for absorption by the radiation absorbing region.

摘要翻译： 高度集成的热传感器（10）响应于具有预定波段范围内的波长的辐射。 可以是热电堆的传感器包括由至少一种半导体材料构成的衬底（16）。 衬底包括设置在衬底的第一表面内的至少一个有源区。 所述传感器还包括设置在所述至少一个活性区域内的不同材料（22,24）之间的多个热响应结（HJ，CJ），其中所述热响应结中的至少一个是热连接。 热接点通过从电介质桥上的衬底悬挂或者在另一个实施例中通过隔热和图案化的聚合物而与衬底热隔离。 在本发明的背面照明实施例中，传感器还包括形成在衬底的与有源区域对准的第二表面内的光学腔（26）。 光腔包括热耦合到至少一个热接头的辐射吸收区域（28）。 传感器还包括光学滤光器（30），其设置在光学腔上方，用于将预定波长带内的辐射进入光学腔以供辐射吸收区吸收。

公开(公告)号：US4982080A

公开(公告)日：1991-01-01

申请号：US266743

申请日：1988-11-03

申请人： Jerry A. Wilson ,  Michael D. Jack

发明人： Jerry A. Wilson ,  Michael D. Jack

IPC分类号： G01J1/44 ,  G01J5/20 ,  G01J5/28 ,  G01J5/30 ,  H04N5/335

CPC分类号： G01J5/30 ,  G01J2001/4426 ,  G01J2005/208 ,  G01J2005/283

摘要： A radiation detecting array 10 has a frequency domain architecture wherein incident radiation is imaged in parallel by an array of radiation detectors 12-16. Each radiation detector has an associated amplitude to frequency conversion device 18-22 for providing output signals wherein the output of each photodetector is represented as a frequency within a uniquely identified band of frequencies, the specific frequency being a function of the output signal amplitude of the photodetector. The readout of one or more selected detectors is accomplished by providing a swept frequency band or bands associated with the desired detector or detectors and mixing the detector frequencies with the swept band. The frequency representing the photodetector output may be input directly to a low dispersion transmission line 30. The unit cells may include radiation detectors comprised of superconducting material and also superconducting components that inherently manifest current or voltage to frequency conversion characteristics in accordance with the Josepson effect. An array having high temperature superconducting components includes photodetectors 60, associated voltage to frequency convertors 64 and a transmission line 70 integrated upon a common substrate.

摘要翻译： 辐射检测阵列10具有频域结构，其中入射辐射由辐射探测器12-16的阵列平行成像。 每个辐射检测器具有相关联的幅度到频率转换装置18-22，用于提供输出信号，其中每个光电检测器的输出被表示为在唯一标识的频带内的频率，该特定频率是信号幅度的函数 光电探测器 通过提供与期望的检测器或检测器相关联的扫描频带或频带并将检测器频率与扫频带混合来实现一个或多个选择的检测器的读出。 表示光电检测器输出的频率可以直接输入到低色散传输线30.单元电池可以包括由超导材料组成的辐射检测器以及根据Josepson效应固有地表现电流或电压与频率转换特性的超导部件。 具有高温超导元件的阵列包括光电探测器60，与变频器64相关联的电压以及集成在公共衬底上的传输线70。

公开(公告)号：USRE44214E1

公开(公告)日：2013-05-14

申请号：US12489349

申请日：2009-06-22

申请人： Jay Peterson ,  David R Nelson ,  Troy P. Bahan ,  George C. Polchin ,  Michael D. Jack

发明人： Jay Peterson ,  David R Nelson ,  Troy P. Bahan ,  George C. Polchin ,  Michael D. Jack

IPC分类号： G01N21/00 ,  G01N21/35 ,  G01N21/25

CPC分类号： G01N21/3504

摘要： An unmanned integrated RES 12 integrates all of its components except the reflector 22 into a single console 30 that is positioned at the side of a road and has a CPU 36 that controls calibration, verification and data gathering. The RES's source 32 and receiver 34 are preferably stacked one on top of the other such that the IR beam 24 traverses a low and high path as it crosses the road 14. This allows the RES to detect both low and high ground clearance vehicles. To maintain the vehicle processing and identification throughput, the speed sensor 54 and ALPR 48,50 detect the passing vehicles at steep angles, approximately 20 to 35 degrees. In a preferred system, a manned control center 16 communicates with a large number of the unmanned integrated RES to download emissions data, perform remote diagnostics, and, if necessary, dispatch a technician to perform maintenance on a particular RES.

公开(公告)号：US20090109582A1

公开(公告)日：2009-04-30

申请号：US11980150

申请日：2007-10-30

申请人： Michael D. Jack ,  Michael Ray ,  Robert E. Kvaas ,  Gina M. Crawford

发明人： Michael D. Jack ,  Michael Ray ,  Robert E. Kvaas ,  Gina M. Crawford

IPC分类号： H02H9/00 ,  G01T1/24 ,  H01L27/00 ,  H01L21/44

CPC分类号： H01L23/62 ,  H01H85/0047 ,  H01H85/046 ,  H01H85/06 ,  H01L23/5256 ,  H01L2924/0002 ,  H01L2924/00

摘要： In one exemplary embodiment, a detector of electromagnetic radiation includes: a substrate; at least one layer of semiconductor material formed on the substrate, said at least one layer of semiconductor material defining a radiation absorbing and detecting region; an electrical contact configured to couple said region to a readout circuit; and a fuse coupled between the region and the electrical contact. In another exemplary embodiment, a fusible link between a first component and a second component is provided and includes: a fuse with an undercut located underneath at least a portion of the fuse; a first contact coupling the first component to the fuse; and a second contact coupling the second component to the fuse, wherein the undercut is disposed between the first contact and the second contact. In another exemplary embodiment, a fusible link includes a fuse having a layer of material having a negative temperature coefficient of resistance.

摘要翻译： 在一个示例性实施例中，电磁辐射检测器包括：基底; 形成在所述衬底上的至少一层半导体材料，所述至少一层半导体材料限定辐射吸收和检测区域; 电触点，被配置为将所述区域耦合到读出电路; 以及耦合在所述区域和所述电触点之间的熔丝。 在另一个示例性实施例中，提供了第一部件和第二部件之间的可熔连接件，并且包括：具有位于熔断器的至少一部分下方的底切的熔断器; 将所述第一部件耦合到所述保险丝的第一接触件; 以及将所述第二部件耦合到所述保险丝的第二触点，其中所述底切设置在所述第一触点和所述第二触点之间。 在另一示例性实施例中，可熔连接件包括具有负温度系数电阻的材料层的保险丝。