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1.发明授权High-power surface-emitting semiconductor injection laser with etched internal 45 degree and 90 degree micromirrors 失效具有蚀刻内部45度和90度微镜的大功率表面发射半导体注入激光器
公开(公告)号：US5253263A
公开(公告)日：1993-10-12
申请号：US850083
申请日：1992-03-12
申请人： Michael Jansen , Jane J. Yang , Szutsun S. Ou , Thomas J. Roth
发明人： Michael Jansen , Jane J. Yang , Szutsun S. Ou , Thomas J. Roth
CPC分类号： H01S5/18 , H01S5/005 , H01S5/0203 , H01S5/0207 , H01S5/026 , H01S5/0267 , H01S5/1085 , H01S5/2027
摘要： A surface-emitting semiconductor injection laser for use in fabricating high-power two-dimensional monolithic laser arrays. The surface-emitting semiconductor laser includes a substrate and an active layer and a pair of cladding layers formed on the substrate. A folded resonator cavity is formed by highly-reflective 45.degree. and 90.degree. micromirrors that are etched at either end of the active layer and by a partially-reflective reflector that is positioned between the 45.degree. micromirror and the substrate for outcoupling the laser light from the resonator cavity. The semiconductor laser is mounted junction down on a heat sink to position the active layer close to the heat sink for good heat dissipation at high power levels. In one preferred embodiment of the present invention, the substrate is optically opaque and an opening is etched in the substrate for outcoupling the laser light. In another preferred embodiment of the invention, the substrate is optically transparent and a microlens is formed on the substrate to collimate the laser light.
摘要翻译： 一种用于制造大功率二维单片激光器阵列的表面发射半导体注入激光器。 表面发射半导体激光器包括衬底和形成在衬底上的有源层和一对覆层。 折叠的谐振腔由高反射的45°和90°的微反射镜形成，这些反射镜在有源层的两端蚀刻，部分反射的反射镜位于45°微镜和衬底之间，用于将激光 谐振腔。 将半导体激光器安装在散热片上，将活性层定位在靠近散热片的位置，以便在高功率水平下实现良好的散热。 在本发明的一个优选实施例中，衬底是光学不透明的，并且在衬底中蚀刻开口用于输出激光。 在本发明的另一个优选实施例中，衬底是光学透明的，并且在衬底上形成微透镜以准直激光。
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公开(公告)号：US5276700A
公开(公告)日：1994-01-04
申请号：US849911
申请日：1992-03-12
申请人： Michael Jansen , Dan Botez , Luke J. Mawst , Thomas J. Roth , Jane J. Yang
发明人： Michael Jansen , Dan Botez , Luke J. Mawst , Thomas J. Roth , Jane J. Yang
CPC分类号： H01S5/4031 , H01S5/4006 , H01S5/4025 , H01S5/4068 , H01S5/42
摘要： This invention discloses a semiconductor laser incorporating a plurality of resonant optical waveguide array cells. In each of the resonant optical waveguide array cells, leaky waveguide elements are coupled together such that radiation leaked from one antiguide element is coupled with radiation propagating along another antiguide element across an interelement region. As the radiation propagates through the array it is reflected at each end of the array until it builds up enough optical gain to reach lasing threshold. Then, radiation is leaked from the sides of each array such that this radiation can impinge other resonant optical waveguide arrays and be coupled with these arrays in phase to develop a laser beam having a higher intensity than can be achieved with a single array semiconductor laser.
摘要翻译： 本发明公开了一种结合了多个谐振光波导阵列单元的半导体激光器。 在每个谐振光波导阵列单元中，泄漏的波导元件耦合在一起，使得从一个反射元件泄漏的辐射与沿着另一个反射元件穿过元件区域传播的辐射耦合。 当辐射通过阵列传播时，其在阵列的每个端部被反射，直到它建立足够的光学增益以达到激光阈值。 然后，辐射从每个阵列的侧面泄漏，使得该辐射可以撞击其他谐振光波导阵列并且与这些阵列同相耦合以形成具有比可以用单阵列半导体激光器实现的强度更高的强度的激光束。
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公开(公告)号：US06365442B1
公开(公告)日：2002-04-02
申请号：US09679582
申请日：2000-10-04
IPC分类号： H01L2182
CPC分类号： B81C1/00396 , B81B2203/0315 , B81B2203/0338 , B81C2201/0107 , H01H1/0036 , H01H35/14 , H01H59/0009
摘要： A method of making a micro-miniature switch device (10), which has at least one member (68) movable relative to a substrate (12) upon which the device is provided, includes providing a layer of sacrificial non-photolithography material upon a stratum connected to the substrate. A template is provided via photolithographing step that uses a photoresist material upon a stratum connected to the substrate. A layer is provided to include at least a portion of the movable member. The photoresist material and the sacrificial non-photolithography material are removed using photoresist developer. Preferably, at least two photolithography process steps utilize a single photolithographic mask. Also preferably, substrate material is removed to create a recess and at least one channel into the substrate, wherein the channel intersects the recess. At least a portion of the movable member is provided at a location within the recess and at least a portion of the movable member is provided at a location within the channel.
摘要翻译： 一种制造微型开关装置（10）的方法，该微型开关装置（10）具有至少一个可相对于其上提供该装置的基板（12）移动的构件（68），包括在一个 层与基板连接。 通过光刻步骤提供模板，其在连接到衬底的层上使用光致抗蚀剂材料。 提供层以包括可移动构件的至少一部分。 使用光致抗蚀剂显影剂除去光致抗蚀剂材料和牺牲非光刻材料。 优选地，至少两个光刻工艺步骤使用单个光刻掩模。 还优选地，去除衬底材料以产生凹陷和至少一个通道进入衬底，其中沟道与凹部相交。 可移动部件的至少一部分设置在凹部内的位置处，并且可移动部件的至少一部分设置在通道内的位置处。
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公开(公告)号：US5038356A
公开(公告)日：1991-08-06
申请号：US445223
申请日：1989-12-04
IPC分类号： H01S5/183
CPC分类号： H01S5/18369 , H01S5/0207 , H01S5/02461 , H01S5/18305 , H01S5/18341 , H01S5/18361
摘要： A semiconductor diode laser device, and a related method for its fabrication, the laser being of the type from which light is emitted in a direction perpendicular to planar layers forming the device. The laser includes an active layer and cladding layers formed on a supporting substrate, and a highly reflective semiconductor stack reflector formed on one of the cladding layers. The semiconductor stack reflector may be placed in contact with a heat sink and performs the multiple functions of electrical current conduction, heat removal and light reflection. A current confinement layer is formed laterally surrounding the semiconductor stack reflector, to provide one element of a back-biased junction that confines the current to the reflector region. A dielectric stack reflector is formed in a well in the substrate, and provides for light emission from the device. Operation of the device at high powers and efficiencies, even in continous-wave (CW) mode, is made possible by positioning the active layer in close proximity to the heat sink, and by the effectiveness of the current confinement layer surrounding the semiconductor stack reflector.
摘要翻译： 半导体二极管激光器件及其制造的相关方法，激光器是在垂直于形成器件的平面层的方向上发射光的类型。 激光器包括形成在支撑衬底上的有源层和覆层，以及形成在一个包覆层上的高反射半导体堆叠反射器。 半导体堆叠反射器可以放置成与散热器接触，并且执行电流传导，散热和光反射的多个功能。 横向围绕半导体堆叠反射器形成电流限制层，以提供将电流限制到反射器区域的背偏置结的一个元件。 电介质堆叠反射器形成在衬底中的阱中，并提供来自器件的发光。 即使在连续波（CW）模式下，高功率和高效率的器件的工作也可以通过将有源层定位在靠近散热片的方式以及围绕半导体叠层反射器的电流限制层的有效性 。
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公开(公告)号：US07396985B1
公开(公告)日：2008-07-08
申请号：US10906084
申请日：2005-02-02
申请人： Thomas J. Roth
发明人： Thomas J. Roth
摘要： The invention relates to a grip for a musical instrument, particularly a band instrument which may be used in a group performance. A component of every musical performance, especially a group performance by a group such as by a marching band or drum and bugle corps, is the visual component. In the case of a horn, a visually attractive visual component would be a selective spinning or rotating motion provided by the performer, using a grip attached to the horn for allowing support of said horn in a single hand. The grip further provides an ergonomic means for gripping the horn in either one or both hands.
摘要翻译： 本发明涉及一种用于乐器的手柄，特别是可以以组演奏使用的乐器。 每个音乐表演的一个组成部分，特别是由群体演奏，例如由行军乐队，鼓手和车手组成的组合，都是可视化的组成部分。 在喇叭的情况下，视觉吸引人的视觉部件将是表演者提供的选择性旋转或旋转运动，使用附接到喇叭的手柄来允许单手支撑所述喇叭。 手柄还提供了用于在一只手或两只手中夹紧喇叭的人机工程学手段。
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公开(公告)号：US06291908B1
公开(公告)日：2001-09-18
申请号：US09413402
申请日：1999-10-06
IPC分类号： H01H3514
CPC分类号： H01H1/0036 , H01H35/14 , Y10T307/74 , Y10T307/799
摘要： A micro-miniature switch apparatus (10) includes a substrate (12) having a surface (14) with first and second channels (16, 18) extending from the surface (14) into the substrate (12). The first and second channels (16, 18) are spaced apart from each other, with a channel axis (20) extending longitudinally through the first and second channels (16, 18). A body (68) that is movable relative to the substrate (12) includes two arms (70, 72). Each of the arms (70, 72) extends into one of the first and second channels (16, 18) to support the body (68) for movement relative to the substrate (12) between first and second electrical conditions of the switch apparatus (10).
摘要翻译： 微型开关装置（10）包括具有表面（14）的基板（12），其具有从表面（14）延伸到基板（12）中的第一和第二通道（16,18）。 第一和第二通道（16,18）彼此间隔开，通道轴线（20）纵向延伸穿过第一和第二通道（16,18）。 可相对于基板（12）移动的主体（68）包括两个臂（70,72）。 每个臂（70,72）延伸到第一和第二通道（16,18）中的一个中，以支撑主体（68）在开关装置的第一和第二电气条件之间相对于基板（12）移动 10）。
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